JPH0231252U - - Google Patents
Info
- Publication number
- JPH0231252U JPH0231252U JP11107088U JP11107088U JPH0231252U JP H0231252 U JPH0231252 U JP H0231252U JP 11107088 U JP11107088 U JP 11107088U JP 11107088 U JP11107088 U JP 11107088U JP H0231252 U JPH0231252 U JP H0231252U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- slider
- support arm
- rotating
- substrate support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 3
Description
第１図は本考案に係る基板の反転装置の一実施
例を示す斜視図、第２図は従来例を示す平面図で
ある。
１……基板、２……基板保持具、３……基板支
持アーム、５……回転軸、７，８……回転輪、１
０……無端伝動体、１１……滑子クランク機構、
１２……滑子、Ａ……基板受取位置、Ｂ……基板
引渡位置、ａ……滑子の往動始点、ｂ……滑子の
往動終点、Ｚ……回転軸の軸心。
FIG. 1 is a perspective view showing an embodiment of a substrate reversing device according to the present invention, and FIG. 2 is a plan view showing a conventional example. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Substrate holder, 3...Substrate support arm, 5... Rotating shaft, 7, 8... Rotating ring, 1
0...Endless transmission body, 11...Slide crank mechanism,
12... Slider, A... Board receiving position, B... Board delivery position, a... Start point of forward movement of slider, b... End point of forward movement of slider, Z... Axis center of rotating shaft.
Claims (1)
水平な軸心を有し基板支持アームを基板受取位置
から基板引渡位置へ約１８０°揺動回転する回転
軸と、その回転軸を一方の回転輪の従動軸とする
一対の回転輪と、一対の回転輪に張設された無端
伝動体と、無端伝動体を滑子により往復駆動する
滑子クランク機構とを具備して成り、滑子の往動
始点及び終点を基板支持アームのそれぞれ基板受
取位置及び基板引渡位置に対応させて構成したこ
とを特徴とする基板の反転装置。 a substrate support arm having a substrate holder at one end;
a rotating shaft that has a horizontal axis and swings and rotates the substrate support arm approximately 180 degrees from a substrate receiving position to a substrate delivering position; a pair of rotating wheels with the rotating shaft serving as a driven axis of one of the rotating wheels; It is equipped with an endless transmission body stretched over a rotating ring, and a slider crank mechanism that reciprocates the endless transmission body by means of a slider, and the forward movement start and end points of the slider are connected to the respective substrate receiving points of the substrate support arm. A substrate reversing device characterized in that it is configured to correspond to a position and a substrate delivery position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11107088U JPH0231252U (en) | 1988-08-23 | 1988-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11107088U JPH0231252U (en) | 1988-08-23 | 1988-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231252U true JPH0231252U (en) | 1990-02-27 |
Family
ID=31348805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11107088U Pending JPH0231252U (en) | 1988-08-23 | 1988-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231252U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6259633B2 (en) * | 1981-10-14 | 1987-12-11 | Ikeuchi Kk |
-
1988
- 1988-08-23 JP JP11107088U patent/JPH0231252U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6259633B2 (en) * | 1981-10-14 | 1987-12-11 | Ikeuchi Kk |