JPH0231127U - - Google Patents
Info
- Publication number
- JPH0231127U JPH0231127U JP10938388U JP10938388U JPH0231127U JP H0231127 U JPH0231127 U JP H0231127U JP 10938388 U JP10938388 U JP 10938388U JP 10938388 U JP10938388 U JP 10938388U JP H0231127 U JPH0231127 U JP H0231127U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- heater block
- gas supply
- semiconductor
- supply head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000007789 gas Substances 0.000 claims 4
- 239000007795 chemical reaction product Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000007790 scraping Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10938388U JPH0231127U (OSRAM) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10938388U JPH0231127U (OSRAM) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231127U true JPH0231127U (OSRAM) | 1990-02-27 |
Family
ID=31345579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10938388U Pending JPH0231127U (OSRAM) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231127U (OSRAM) |
-
1988
- 1988-08-19 JP JP10938388U patent/JPH0231127U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0231127U (OSRAM) | ||
| JPH0444075Y2 (OSRAM) | ||
| JPH0344540U (OSRAM) | ||
| JPH0237776U (OSRAM) | ||
| JPS63134536U (OSRAM) | ||
| JPS6170929U (OSRAM) | ||
| JPS6253689U (OSRAM) | ||
| FR2345225A1 (fr) | Dispositif de dosage et de distribution de produits pulverulents | |
| JPS62146929U (OSRAM) | ||
| JPS6433743U (OSRAM) | ||
| JPS6352859U (OSRAM) | ||
| JPS6137282U (ja) | 物品表面の除水装置 | |
| JPH0418659U (OSRAM) | ||
| JPH01174920U (OSRAM) | ||
| JPS623593U (OSRAM) | ||
| JPS633143U (OSRAM) | ||
| JPS63176587U (OSRAM) | ||
| JPS632791U (OSRAM) | ||
| JPH0476309U (OSRAM) | ||
| JPS63128720U (OSRAM) | ||
| JPS62108329U (OSRAM) | ||
| JPS63157054U (OSRAM) | ||
| JPS61272377A (ja) | 常圧ｃｖｄ装置 | |
| JPS6252929U (OSRAM) | ||
| JPH0275420U (OSRAM) |