JPH0231124U - - Google Patents

Info

Publication number

JPH0231124U

JPH0231124U JP10872388U JP10872388U JPH0231124U JP H0231124 U JPH0231124 U JP H0231124U JP 10872388 U JP10872388 U JP 10872388U JP 10872388 U JP10872388 U JP 10872388U JP H0231124 U JPH0231124 U JP H0231124U

Authority

JP

Japan

Prior art keywords

process tube

jig

open end

semiconductor wafers

wafer boat

Prior art date

1988-08-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000034 method Methods 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000010438 heat treatment Methods 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 3
• 238000009792 diffusion process Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000002485 combustion reaction Methods 0.000 description 1