JPH0230576U - - Google Patents
Info
- Publication number
- JPH0230576U JPH0230576U JP10761588U JP10761588U JPH0230576U JP H0230576 U JPH0230576 U JP H0230576U JP 10761588 U JP10761588 U JP 10761588U JP 10761588 U JP10761588 U JP 10761588U JP H0230576 U JPH0230576 U JP H0230576U
- Authority
- JP
- Japan
- Prior art keywords
- spring
- seal ring
- attached
- equipment housing
- runner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 claims 1
Landscapes
- Sealing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10761588U JPH0443642Y2 (cs) | 1988-08-17 | 1988-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10761588U JPH0443642Y2 (cs) | 1988-08-17 | 1988-08-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0230576U true JPH0230576U (cs) | 1990-02-27 |
| JPH0443642Y2 JPH0443642Y2 (cs) | 1992-10-15 |
Family
ID=31342188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10761588U Expired JPH0443642Y2 (cs) | 1988-08-17 | 1988-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0443642Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100483651C (zh) | 1992-08-27 | 2009-04-29 | 株式会社半导体能源研究所 | 半导体器件的制造方法 |
-
1988
- 1988-08-17 JP JP10761588U patent/JPH0443642Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0443642Y2 (cs) | 1992-10-15 |