JPH02301173A - Piezoelectric porcelain composition - Google Patents

Piezoelectric porcelain composition

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Publication number
JPH02301173A
JPH02301173A JP1120330A JP12033089A JPH02301173A JP H02301173 A JPH02301173 A JP H02301173A JP 1120330 A JP1120330 A JP 1120330A JP 12033089 A JP12033089 A JP 12033089A JP H02301173 A JPH02301173 A JP H02301173A
Authority
JP
Japan
Prior art keywords
displacement
piezoelectric
voltage
nio
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1120330A
Other languages
Japanese (ja)
Other versions
JPH0519505B2 (en
Inventor
Nobuo Hiroi
広居 信雄
Toshiyuki Sugawara
稔幸 菅原
Toshiyuki Tachikawa
立川 敏之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP1120330A priority Critical patent/JPH02301173A/en
Publication of JPH02301173A publication Critical patent/JPH02301173A/en
Publication of JPH0519505B2 publication Critical patent/JPH0519505B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE:To obtain a piezoelectric porcelain composition of a high electrostriction effect by application of voltage and low hysteresis by adding specific quantities of NiO and/or Bi2O3 as auxiliary constituents to a specific basic composition. CONSTITUTION:0.02-0.5wt.% of NiO and/or Bi2O3 are added as auxiliary constituents to a basic composition satisfying formula I. PbO, NiO, Nb2O5, MnCO3, Sb2O3, ZrO2, TiO2, and the specified auxiliary constituents selected as starting materials are mixed in a ball mill and baked temporarily. Powder which is obtained by re-pulverization and to which a proper quantity of organic binder is added is shaped by pressurization and baked.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は圧電磁器組成物に係り、特に電圧印加により、
大きい機械的変位と共に高精度位置制御を必要とする電
圧駆動型圧電変位素子に好適な圧電磁器組成物に関する
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a piezoelectric ceramic composition, and in particular, by applying a voltage,
The present invention relates to a piezoelectric ceramic composition suitable for voltage-driven piezoelectric displacement elements that require large mechanical displacement and high-precision position control.

[従来の技術] 近年、電磁方式に代わる新方式の駆動源として圧電磁器
の電気歪効果を利用し、電気エネルギーを機械エネルギ
ーに変換する。電圧駆動型圧電変位素子(以下変位素子
と称す)の実用化が、微小位置制御機器等、多方面にわ
たって進められてきている。この種の変位素子としては
5例えば第2図に示す如く、金属製弾性板1に両面から
挟む様に電極を付与した圧電磁器板2.2′を貼り合わ
せたバイモルフ構造を成すものが知られている。
[Prior Art] In recent years, a new type of drive source that replaces the electromagnetic type uses the electrostrictive effect of piezoelectric ceramics to convert electrical energy into mechanical energy. 2. Description of the Related Art Voltage-driven piezoelectric displacement elements (hereinafter referred to as displacement elements) have been put into practical use in a variety of fields, such as minute position control devices. As this type of displacement element, for example, as shown in FIG. 2, a bimorph structure is known in which piezoelectric ceramic plates 2 and 2' having electrodes sandwiched between them are bonded to a metal elastic plate 1. ing.

この変位素子に直流或は交流電圧を印加すると電気歪効
果(この場合、圧電横効果)に伴なう機械的変位d S
 r或はdS2が生ずる。この機械的変位は用途或は搭
載された際の機構にもよるが。
When a DC or AC voltage is applied to this displacement element, a mechanical displacement dS occurs due to an electrostrictive effect (in this case, a piezoelectric transverse effect).
r or dS2 occurs. This mechanical displacement depends on the application and the mechanism used when it is mounted.

一般に変位素子としての機能上、できるだけ大きい事が
望ましく、更に高精度な位置制御或は機器としての品質
面から電圧−変位ヒステリシスができるだけ小さい事が
望ましい。例えば1機械的変位に関しては、より大きな
電気歪効果を有する圧電磁器組成物が有利とされている
Generally, it is desirable that the displacement element be as large as possible in terms of its function, and it is further desirable that the voltage-displacement hysteresis be as small as possible in terms of highly accurate position control or quality as a device. For example, with respect to one mechanical displacement, piezoelectric ceramic compositions having a greater electrostrictive effect are considered advantageous.

[発明が解決しようとする課題] 従来よりこの種の圧電磁器組成物としては1例えば比較
的圧電定数d11の大きいPb(NipsN b 2.
) 03  P b Z r O3P b T i O
3等の3成分系のものがある。しかしながら、従来の組
成物のものでは機械的変位がある程度前られるものの、
電圧−変位ヒステリシスが大きく変位素子としての利用
が極めて狭い範囲に限定されていた。従って、変位素子
として広範囲の用途に適応する上で、より大きな機械的
変位をもたらすと共に電圧−変位ヒステリシスの小さい
圧電磁器材料が望まれていた。
[Problems to be Solved by the Invention] Conventionally, piezoelectric ceramic compositions of this type include Pb (NipsN b 2.
) 03 P b Z r O3P b T i O
There are three-component systems such as 3rd grade. However, with conventional compositions, although mechanical displacement occurs to some extent,
Due to the large voltage-displacement hysteresis, its use as a displacement element was limited to an extremely narrow range. Therefore, a piezoelectric ceramic material that provides a larger mechanical displacement and has a smaller voltage-displacement hysteresis has been desired in order to be suitable for a wide range of uses as a displacement element.

そこで1本発明の技術的課題は、かかる要求に対し十分
応え得るものであり、電圧印加による電気歪効果が大き
いと共に、ヒステリシスが小さく。
Therefore, one technical object of the present invention is to sufficiently meet such demands, and the electrostriction effect due to voltage application is large and the hysteresis is small.

その結果変位素子として広範囲な用途に応用できる圧電
磁器組成物を提供することにある。
As a result, the object of the present invention is to provide a piezoelectric ceramic composition that can be used in a wide range of applications as a displacement element.

[課題を解決するための手段] 本発明の圧電磁器組成物は。[Means to solve the problem] The piezoelectric ceramic composition of the present invention is.

一般式 P b [(N i r、a Nb2.3 )
 A(Mn、n 5b23)a  (Sbl□Nbl□
)(Z r □ T i E ] 03で示され(但し
A+B+C+D+E−1) 0.300≦A≦0.550 。
General formula P b [(N i r, a Nb2.3 )
A(Mn, n 5b23)a (Sbl□Nbl□
) (Z r □ T i E ] 03 (However, A+B+C+D+E-1) 0.300≦A≦0.550.

0.001≦B≦0.020 。0.001≦B≦0.020.

0.002≦C≦0.050 。0.002≦C≦0.050.

0.090 ≦ D ≦0.290  。0.090≦D≦0.290.

0.290≦E≦0.407 。0.290≦E≦0.407.

を満足する基本組成に対し副成分としてN i O。N i O as a subcomponent for the basic composition that satisfies the following.

Bi2O3から選ばれた少くとも1種を0.02〜0.
5重量%添加含有せしめてなることを特徴とする。
At least one species selected from Bi2O3 is added in an amount of 0.02 to 0.
It is characterized by containing 5% by weight.

尚0本発明において、 0.300>A、 A>0.5
50 。
In the present invention, 0.300>A, A>0.5
50.

B >0.020 、  C>0.050 、0.09
0 > D、  D >0.290 、0.290 >
 E、  E >0.407から成る基本組成物及び副
成分NiO,Bi2O3から選ばれた少なくとも1種が
0.5重量%より多い組成物のものでは電気歪量1機械
的変位が低下し、従って、1」的とする変位素子用とし
ては好ましくなく、又。
B>0.020, C>0.050, 0.09
0>D, D>0.290, 0.290>
In the basic composition consisting of E, E > 0.407 and in the composition containing more than 0.5% by weight of at least one selected from the subcomponents NiO and Bi2O3, the electrostrain amount 1 mechanical displacement decreases, and therefore , 1'' is not preferable for use as a displacement element.

0.002>C及び副成分NiO,Bi2O,から選ば
れた少なくとも1種が0,02重量%未満の組成物では
電気歪量9機械的変位の大幅な改善効果が認められず、
更には基本組成に於いて0.00t>Bではヒステリシ
スに対する大幅な改善効果が認められないために1本発
明の範囲から除外した。
In compositions containing less than 0.02% by weight of at least one selected from 0.002>C and subcomponents NiO, Bi2O, no significant improvement effect on electrostrain amount 9 mechanical displacement was observed,
Furthermore, in the basic composition, when 0.00t>B, a significant improvement effect on hysteresis was not observed, so it was excluded from the scope of the present invention.

[実施例] 以下本発明の実施例について参考例と比較しながら詳細
に説明する。
[Example] Hereinafter, examples of the present invention will be described in detail while comparing with reference examples.

出発原料として化学的に高純度のPbO,NiO,Nb
2O,、MnC0,,5b20.、Z r02 、 T
 i 02及び所定の副成分を選び、第1表〜第3表に
示す組成になる様に精秤した。次に。
Chemically high purity PbO, NiO, Nb as starting materials
2O,,MnC0,,5b20. , Z r02 , T
i02 and predetermined subcomponents were selected and accurately weighed to give the compositions shown in Tables 1 to 3. next.

これら原料をボールミルで混合した後、乾燥し。These raw materials are mixed in a ball mill and then dried.

850℃で仮焼成した。次いでボールミルによって粉砕
して得られた粉末に、何機バインダを適量加えて造粒じ
た後、  1 ton/cjの圧力で加圧成形し。
Temporary firing was performed at 850°C. Next, an appropriate amount of a binder was added to the powder obtained by pulverization using a ball mill, and the mixture was granulated, followed by pressure molding at a pressure of 1 ton/cj.

1200〜1250℃の温度で数時間焼成した。It was baked at a temperature of 1200-1250°C for several hours.

青られた焼結体を所定の形状に切断、研磨した後。After cutting and polishing the blued sintered body into the specified shape.

電極を付与゛シ、シリコーン浦中で温度60〜100℃
の条件下で直流電場35〜50 kV/ crnを、3
0分間印加し1分極処理を施して圧電的に活性化せしめ
た。次に、所定の測定方法により圧電的諸定数を求めた
後、実質的な効果を確認するために更に研磨、加工を施
して2種類の形状の矩形状圧電素子、即ち■長さ10m
m、幅2ms、厚さ1mm。
Electrodes are applied at a temperature of 60 to 100°C in a silicone well.
DC electric field 35-50 kV/crn under the conditions of 3
The voltage was applied for 0 minutes and a polarization process was performed to piezoelectrically activate the voltage. Next, after determining the various piezoelectric constants using a prescribed measurement method, further polishing and processing were performed to confirm the substantial effect, and two types of rectangular piezoelectric elements were created, namely: ■ length 10 m
m, width 2ms, thickness 1mm.

■長さ35mm、幅10mm、厚さ0.15+a−を得
た。この2種類の圧電素子のうち形状■のものに1分極
方向と同方向に500.Vの直流電圧を印加し、その時
に生ずる電気歪量(収縮歪)を測定しΔg/g値で評価
した(Δg・・・縮み量1g−素子長さ)。
(2) A length of 35 mm, a width of 10 mm, and a thickness of 0.15+a- was obtained. Of these two types of piezoelectric elements, the piezoelectric element with the shape ■ has a polarization direction of 500 mm in the same direction as the polarization direction. A DC voltage of V was applied, and the amount of electrical strain (shrinkage strain) generated at that time was measured and evaluated as a Δg/g value (Δg: shrinkage amount 1 g−element length).

一方形状■の圧電素子については、更に金属製弾性板に
両面からサンドイッチして第2図に示す様なバイモルフ
型変位素子を作製し1機械的変位及びヒステリシスを調
べた。尚1機械的変位は、第1図に示す様に30Vの直
流電圧を印加した時の一端固定、他端自由状態での先端
に発生する変位dsjuで求め、一方ヒステリシスは電
圧30Vでの変位ds3oと、電圧をOに戻した際に生
じている残留変位dSoから1次式より算出して求めた
On the other hand, regarding the piezoelectric element of shape 2, it was further sandwiched between two sides of a metal elastic plate to produce a bimorph type displacement element as shown in FIG. 2, and its mechanical displacement and hysteresis were investigated. 1. Mechanical displacement is determined by the displacement dsju generated at the tip with one end fixed and the other end free when a DC voltage of 30V is applied, as shown in Figure 1, while hysteresis is determined by the displacement dsju at a voltage of 30V. It was calculated from the residual displacement dSo generated when the voltage was returned to O using a linear equation.

ヒステリシス” (d So / d 530) X1
00  [%]第1表〜第3表に結果の一例を示す。尚
、第1表〜第3表に於いて*印の試料NO,は1本発明
の圧電磁器組成物に該当する。
Hysteresis” (d So / d 530) X1
00 [%] Examples of the results are shown in Tables 1 to 3. In Tables 1 to 3, sample numbers marked with * correspond to piezoelectric ceramic compositions of the present invention.

第1表〜第3表からも明らかな様に1本発明の圧電磁器
組成物から成る試料は、各々の組成群の参考例と比較し
て電気歪量及び機械的変位のいずれも大きく、且つ電圧
−変位ヒステリシスが極めて小さく変位素子として好適
な特性を有している事は明白である。
As is clear from Tables 1 to 3, the samples made of the piezoelectric ceramic composition of the present invention had both a larger electrostriction amount and a larger mechanical displacement than the reference examples of each composition group, and It is clear that the voltage-displacement hysteresis is extremely small, making it suitable as a displacement element.

尚2本発明に於いて、副成分であるN i O。2. In the present invention, N i O is a subcomponent.

Bi2O,を同時添加しても総添加含有量が0.02〜
0,5重量%の範囲であれば同様な効果が得られる。
Even if Bi2O is added at the same time, the total added content is 0.02 ~
A similar effect can be obtained within the range of 0.5% by weight.

臥下宗日 [発明の効果〕 この様に、゛本発明は、  Pb [(N i>3Nb
2.i )A  (Mn+ 、Sb2.−t )B  
(Sb+・2Nbl 2 )(ZrDTia] Osを
基本組成とし。
[Effect of the invention] In this way, ``the present invention provides Pb [(N i > 3Nb
2. i)A (Mn+, Sb2.-t)B
(Sb+・2Nbl 2 )(ZrDTia) Os is the basic composition.

A、B、C,D、Eを各々適度な範囲に設定し。Set each of A, B, C, D, and E to an appropriate range.

fl ツ副成分としてNiO,Bi2O3の1種を適度
な範囲で添加含有したものであり、特に基本組成に於け
るP b (Mn +3S b2.1) 03 、  
P b(S b +2N b +2) 03成分及び副
成分との相互作用により、従来組成物では成し得なかっ
たより大きな電気歪量9機械的変位と共に低ヒステリシ
スが実現できる。また2本発明の圧電磁器組成“物によ
れば、以下に挙げる用途への適用が期待できる。
It contains one of NiO and Bi2O3 as a subcomponent in an appropriate range, and in particular, P b (Mn +3S b2.1) 03 in the basic composition,
Due to the interaction with the P b (S b +2N b +2) 03 component and the subcomponents, it is possible to achieve a larger electrostriction amount 9 mechanical displacement and low hysteresis that could not be achieved with conventional compositions. Furthermore, the piezoelectric ceramic composition of the present invention can be expected to be applied to the following uses.

(1)大きな機械的変位の発生と共に圧電−変位ヒステ
リシスが小さいので高精度な位置制御等が要求される新
しい変位素子分野に広範囲に適用できる。
(1) Since large mechanical displacement is generated and piezoelectric displacement hysteresis is small, it can be widely applied to new fields of displacement elements that require highly accurate position control.

(2)大きな機械的変位を発生するので、小型・軽量化
及び低電圧駆動が可能であり、省エネルギ一時代にマツ
チした変位素子分野に適用できる。
(2) Since it generates a large mechanical displacement, it can be made smaller, lighter, and driven at a lower voltage, and can be applied to the field of displacement elements that meet the energy saving era.

(3)比較的低電圧で大きな機械的変位を必要とする変
位を必要とする変位素子への応用が可能である。
(3) Application to displacement elements requiring large mechanical displacement at relatively low voltage is possible.

(4)片側駆動方式(圧電素子の分極方向と同方向の直
流電圧のみ印加)の採用による大きな機械的変位を必要
とする変位素子に適用できる。尚この場合、印加電圧の
大きさは用途に応じて自由に選択できる。
(4) It can be applied to displacement elements that require large mechanical displacements by adopting a one-sided drive method (applying only a DC voltage in the same direction as the polarization direction of the piezoelectric element). In this case, the magnitude of the applied voltage can be freely selected depending on the application.

(5)比較的高い圧電定数(例えば圧電d定数)を有し
ているので、高圧電定数を必要とする各種圧電製品への
適用が可能である。
(5) Since it has a relatively high piezoelectric constant (for example, piezoelectric d constant), it can be applied to various piezoelectric products that require a high piezoelectric constant.

尚1本発明の実施例においては、圧電横効果に伴なう電
気歪量1機械的変位及び電圧−変位ヒステリシスについ
て特にバイモルフ型圧電変位素子に関連して説明したが
同組成物を用い圧電縦効果についても調べ、その改善効
果が確認されており。
1. In the embodiments of the present invention, the electrical strain amount 1 mechanical displacement and voltage-displacement hysteresis associated with the piezoelectric transverse effect were explained with particular reference to a bimorph type piezoelectric displacement element, but piezoelectric vertical displacement elements using the same composition were explained. The effectiveness has also been investigated and its improvement effect has been confirmed.

従って2例えば積層型圧電変位素子への適用も十分可能
である。
Therefore, it is fully possible to apply the present invention to, for example, a laminated piezoelectric displacement element.

以上詳述した様に1本発明の圧電磁器組成物は広範囲な
用途に利用できる変位素子に好適なものであり、産業上
極めて価値大なるものである。
As detailed above, the piezoelectric ceramic composition of the present invention is suitable for displacement elements that can be used in a wide range of applications, and is of great industrial value.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例に於いて測定基準を示すグラフ
、第2図は従来のバイモルフ型圧電変位素子の一例を示
す図である。 図中、1・・・金属製弾性板、2.2’・・・圧電磁器
板。 第1図 第2図
FIG. 1 is a graph showing a measurement standard in an embodiment of the present invention, and FIG. 2 is a diagram showing an example of a conventional bimorph type piezoelectric displacement element. In the figure, 1... metal elastic plate, 2.2'... piezoelectric ceramic plate. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 1.一般式Pb[(Ni_1_/_3Nb_2_/_3
)_A(Mn_1_/_3Sb_2_/_3)_B(S
b_1_/_2Nb_1_/_2)_CZr_DTi_
E]O_3で示され(但しA+B+C+D+E=1) 0.300≦A≦0.550, 0.001≦B≦0.020, 0.002≦C≦0.050, 0.090≦D≦0.290, 0.290≦E≦0.407, を満足する基本組成に対し副成分としてNiO,Bi_
2O_3から選ばれた少くとも1種を0.02〜0.5
重量%添加含有してなることを特徴とする圧電磁器組成
物。
1. General formula Pb[(Ni_1_/_3Nb_2_/_3
)_A(Mn_1_/_3Sb_2_/_3)_B(S
b_1_/_2Nb_1_/_2)_CZr_DTi_
E] O_3 (A+B+C+D+E=1) 0.300≦A≦0.550, 0.001≦B≦0.020, 0.002≦C≦0.050, 0.090≦D≦0. 290, 0.290≦E≦0.407, NiO, Bi_ as subcomponents for the basic composition satisfying
0.02 to 0.5 of at least one type selected from 2O_3
A piezoelectric ceramic composition characterized in that it contains an additive amount by weight%.
JP1120330A 1989-05-16 1989-05-16 Piezoelectric porcelain composition Granted JPH02301173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1120330A JPH02301173A (en) 1989-05-16 1989-05-16 Piezoelectric porcelain composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1120330A JPH02301173A (en) 1989-05-16 1989-05-16 Piezoelectric porcelain composition

Publications (2)

Publication Number Publication Date
JPH02301173A true JPH02301173A (en) 1990-12-13
JPH0519505B2 JPH0519505B2 (en) 1993-03-16

Family

ID=14783591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1120330A Granted JPH02301173A (en) 1989-05-16 1989-05-16 Piezoelectric porcelain composition

Country Status (1)

Country Link
JP (1) JPH02301173A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7037797B1 (en) 2000-03-17 2006-05-02 Mattson Technology, Inc. Localized heating and cooling of substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7037797B1 (en) 2000-03-17 2006-05-02 Mattson Technology, Inc. Localized heating and cooling of substrates

Also Published As

Publication number Publication date
JPH0519505B2 (en) 1993-03-16

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