JPH02299124A - Forming method for electrode wiring and electron beam display device - Google Patents

Abstract

PURPOSE:To sharply reduce the number of manufacturing processes and improve the positional assembly accuracy of members by forming an electrode wiring shape with an electrode supporter surface shape on a self-line, and using it for members of an electron beam display device. CONSTITUTION:Surface conductive type electron emitting elements are arranged in parallel by spacers 1 serving as electrode supporters and pinched between a substrate 3 made of a glass material provided with an angular bar-shaped lower section and a fluorescent plate 8 having a fluorescent face 11 made of a glass material provided with phosphors 10 on an ITO transparent electrode 9. Electron emission sections 7, opening sections of spacers 1, and phosphors 10 are set on the same axis. The substrate 3 and the fluorescent plate 8 are connected at the outer periphery, electrodes are extracted, and the inside of a panel using the substrate 23 and the fluorescent plate 8 as outer plates is made vacuum. Spacers 1 are formed so that lower strip-shaped recesses are arranged in the Y direction and square opening sections are provided at a uniform interval in the upper recess, and a modulating electrode 2 is arranged in the upper recess.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application J] The present invention relates to a method for forming a self-line of electrode wiring in an electron beam display device, and a display device using the electrode wiring formed by this method.

[Prior Art] Conventionally, as a method for forming electrode wiring in an electron beam display device, a general method of forming a thin film or a thick film on a substrate and forming this by photolithography, or
There is a method of forming a metal foil by photolithography and then fixing it to a substrate or structure to be used.

7 to 10 are diagrams showing conventional examples of electron beam display devices in which modulation electrodes are formed by the latter method of forming electrode wiring.

FIG. 7 shows a spacer 16 used in this device, which has through holes at equal intervals.

FIG. 8 shows an electron-emitting device substrate 17 and an electron-emitting section 1.
8 are arranged in parallel in the X direction in the figure and connected by electrode wiring 19. FIG. 9 shows a rectangular modulation electrode 20 having openings at equal intervals, which is formed from metal foil by photolithography. These members are assembled as shown in FIG. In Fig. 10, 21 is an IT on the glass surface.
6th order, which is a fluorescent screen with O transparent electrode and fluorescent material laminated,
A vacuum is created between the electron-emitting device substrate 17 and the fluorescent screen 21. Further, 22 is a lower spacer, which is arranged at equal intervals in the shape of a rectangular bar whose longitudinal direction is in the X direction. Here, the electron-emitting devices arranged in parallel in the X direction sequentially emit electrons in a line in the Y direction, and the modulation electrodes 20 arranged in the Y direction sequentially send modulation signals to emit electrons to irradiate the fluorescent screen 21. By controlling electrons, it is possible to display any image in fluorescence.

In the other method, that is, in the method of forming a thin film or a thick film on a substrate by photolithography, openings for modulating electrons are formed by photolithography on an insulating substrate, and A thick film is formed by photolithography to form a modulation electrode on a substrate having an opening.

[Problems to be Solved by the Invention] However, in the above conventional example, in order to form the structural member called the spacer and the electrode wiring member called the modulation electrode separately, Separate patterning processes such as sotting are required, and the number of man-hours required for manufacturing the parts is large.

■ During assembly, each member must be aligned and glued or fixed, which requires a large number of assembly steps.

■ When improving the assembly position accuracy, the processing dimensional accuracy of each member becomes stricter.

■ When the electrode wiring member is formed with a thin metal foil, it becomes long and thin.
Each member is separated into thin strips, making it difficult to handle and easily bending or breaking during handling.

It had the following drawbacks.

[Means and effects for solving the problem] According to the present invention, the electrode wiring shape is formed by a self-line according to the surface shape of the electrode support, so that the electrode support and the electrode wiring are integrated.
By using this as at least the electrode wiring of an electron beam display device, the conventional drawbacks are solved.

That is, by forming an electrode on an electrode support having a concave or convex portion with a tapered stepped portion, the electrodes are separated at the tapered stepped portion. Therefore, this is a manufacturing method in which electrode wiring patterning can be formed in a self-aligned manner without going through a photolithography process.

In addition, in an electron beam display device, the electrode support as well as the electrode wiring can be used as a structural member such as a spacer or an interelectrode insulating layer of the device structure.

A first embodiment of the present invention will be described based on FIGS. 1, 2, and 3.

FIG. 1 is a perspective view showing a display section of an electron beam display device.

In FIG. 1, 1 is a spacer serving as an electrode support, 2
3 is a substrate, 4 is a rectangular bar-shaped lower spacer disposed on the substrate 3, and 5 is connected to an element electrode 6 by an element wiring. Reference numeral 7 denotes an electron emitting portion of a surface conduction type electron emitting device in which Pd fine particles are arranged at intervals between device electrodes 6. 8 is a fluorescent screen placed on the spacer l. 9 is an ITO electrode, which is a transparent conductive film deposited on the fluorescent screen 8;
0 is the phosphor deposited on the TTO electrode 9, II is the electron beam emitted from the electron emission part 7 and irradiates the fluorescent screen;
This is the light emitting surface where the phosphor emits light.

FIG. 2 is a perspective view showing only the spacer 1. In such a spacer 1, elongated rectangular columns (concave portions at the bottom) are arranged in the Y direction in the figure, and
The upper concave portion has rectangular openings spaced at equal intervals.

The modulation electrodes 2 are located on the upper concave surface of the spacer 1, and are arranged in parallel in the form of strips whose longitudinal direction is the Y direction in the figure (see FIG. 1). Inside, the electron emitting portions 7 on the substrate 3 are arranged with electrode wiring arranged in parallel in the X direction in the figure. Here, by causing the electron-emitting device (electron-emitting portion 7 and device electrode 6) arranged in the X direction to sequentially emit electrons in a line in the Y direction, and sequentially sending modulation signals with the modulation electrodes arranged in the Y direction. By controlling the emitted electrons irradiated to the fluorescent screen, it is possible to display an arbitrary image in fluorescence.Furthermore, the spacer 1 is also used as a spacer for forming the distance between the modulation electrode 2 and the fluorescent screen 8.

FIGS. 3(a), 3(b), and 3(c) are diagrams showing the process of forming the modulating electrode 2 on the spacer 1. FIG. For the sake of explanation, only the opening cross-section of the spacer 1 is illustrated. The manufacturing method will be explained below according to Figure 1.

First, as shown in FIG. 3(a), a spacer 1 made of an insulating material and having a stepped portion is formed. The formation method used was a method of forming photosensitive glass.

Pattern formation using photosensitive glass is as follows.

That is, when unexposed photosensitive glass is exposed to ultraviolet light through a photomask, the exposed area becomes easily etched after the glass is fired, so if this area is removed by etching, an arbitrary shape can be obtained. It will be done. Further, a tapered stepped surface can be obtained by changing the incident angle of the exposure light beam. Furthermore, the front and back sides of the non-photosensitive glass are exposed through photomasks with separate patterns,
By adjusting the etching conditions, it is also possible to pattern photosensitive glass with tapered step openings. In order to obtain a more complex shape or a shape with good dimensional accuracy, it is also possible to stack several layers of photosensitive glass after etching and fuse them by applying appropriate heat treatment. , this opening shape with a tapered step was used.

Here, in order to ensure the separation of the electrodes during electrode film formation, which will be described later, the electrode separation part has a one-step shape with a reverse taper with respect to the electrode material deposition direction, and the opening of the modulation electrode is In order to prevent the electrodes from being separated at the stepped portion, the electrodes are tapered with one step.

Next, as shown in FIG. 3(b), electrode metals were deposited on the upper and lower surfaces of the spacer 1 by vacuum deposition.

Here, since electrode metal is not deposited on the side walls of the reverse taper single step portion on the upper and lower surfaces of the spacer 1, the thin film serving as the electrode metal is separated by the self-alignment line into the reverse taper single step portion shape, and the modulating electrode 2a patterning is performed.

Moreover, electrode metal is deposited on the side wall of the forward taper one-step difference part of the modulation electrode opening, and the electrode metals deposited on the upper and lower surfaces of the spacer 1 in the figure are electrically connected. At this stage,
The modulation electrode is completed.

Furthermore, in FIG. 3(C), in order to reduce the wiring resistance of the modulation electrode 2a, only the modulation electrode pattern portion was energized and the electrode was plated with metal. Metal plating is formed only on the modulation electrode pattern portion as shown in 2b in the figure. Incidentally, if particularly low resistance wiring is not required, one step may be omitted.

As described above, in this embodiment, the spacer and the modulation electrode are integrated from the time of formation, and the self-alignment using the stepped portion allows for easy patterning with very good relative positional accuracy between the members. It will be done.

Moreover, the photosensitive glass used as the electrode support, ie, the spacer, can be formed into more complex shapes by stacking several layers and heat-treating, so that structural members and electrode wiring of various shapes can be constructed.

A second embodiment of the present invention will be described based on FIGS. 4 to 6.

FIG. 4 is a perspective view showing the display section of the electron beam display device. In this figure, the constituent members such as the electron-emitting device (electron-emitting part 7 and device electrode 6) on the substrate 3, the lower spacer 4, and the fluorescent screen 8 are the same as in FIG. 1, but they are different from the spacer 1 in FIG. Instead of the electrode 2, a modulation electrode 13 and a focus electrode 14 shown in the shaded area in the figure are formed on the electrode support 12, and an upper spacer 15 is placed on the electrode support 12.
It consists of Compared to the first embodiment, a focus electrode 14 for focusing emitted electrons is added, and an upper spacer 15 is added as a separate structure.

FIG. 5 is a perspective view showing only the electrode support 12. FIG.

The electrode support 12 has elongated strips with convex lower surfaces arranged in the Y direction in the figure, and has rectangular openings at equal intervals within the convex portions. Furthermore, a rectangular recess slightly larger than the opening is provided on the upper surface of the rectangular opening.

The modulation electrode 13 in FIG. 4 is an elongated strip-shaped portion with a convex lower surface in the Y direction of the electrode support 12 in the figure, and the electrodes are separated by a step in a recessed portion of the lower surface. Furthermore, the rectangular recess around the opening on the top surface is also an electrode portion connected to the strip-shaped modulation electrode 13 on the bottom surface.

The focus electrode 14 is formed on the entire surface of the convex portion of the upper surface of the electrode support 12, and is not particularly separated by the convex portion of the upper surface because the same potential on the entire surface is sufficient for focusing the emitted electrons.

Fluorescent display of images is as described in the first embodiment, but an appropriate voltage is applied to the focus electrode 14 in order to focus the irradiation of emitted electrons onto the fluorescent screen.

FIG. 6 shows only a cross-sectional view of the opening of the electrode support 12. As shown in FIG. The manufacturing method is to attach a modulation electrode 13a, which is a metal thin film electrode, to a photosensitive glass processed in the same manner as in the first embodiment.
, a focus electrode 14a is deposited and patterned with self-aligned steps. Thereafter, only the necessary parts were electrolytically plated to provide low resistance wiring, thereby forming a modulation electrode 13b and a focus electrode 14b.

As described above, in this embodiment, patterning is performed by self-aligning separate electrode wirings on the front and back sides of the electrode support with ease and with good relative positional accuracy between the wirings, and in the modulation electrode. , it was possible to have a configuration in which wiring was not only on the back side but also partially on the front side. This electrode support also serves as an insulating layer material for the modulation electrode and the focus electrode.

[Example] Specific examples will be shown below.

Husband 1''''2 This was specifically created based on the embodiment shown in FIGS. 1 to 3 above.

The spacer indicated by 1 in FIG. 2 was formed of photosensitive glass. The dimensions of the upper rectangular recess are 1.0 mm wide,
The depth is 3.0 mm, and the width of the upper convex portion is 0.5 m+n. This stepped portion has a reverse tapered shape. The dimensions of the opening are 0.6 mm square, and the thickness of the spacer at the opening is:
It is 0.2 mm. This opening has a forward tapered shape when viewed from the top surface of the spacer.

The width of the lower rectangular recessed portion is 0.1 mm, and the stepped portion has a reverse tapered shape.

As shown in the cross-sectional view of FIG. 3(b), a 1000-thick nickel thin film was formed on the spacer 1 by EB evaporation from the upper and lower surfaces of the spacer 1, and the modulation electrode 2a was patterned using self-alignment lines at the stepped portions. I did it.

Thereafter, as shown in the cross-sectional view of FIG. 3(c), the modulation electrode 2a
Electrolytic nickel plating was performed by energizing only that portion, forming a low-resistance modulation electrode 2b.

As shown in FIG. 1, the spacer 1 obtained in this manner is used as a substrate 3 made of a glass material, on which surface conduction electron-emitting devices are arranged in parallel, and a square bar-shaped lower spacer 4 is provided.
and a phosphor plate 8 made of a glass material in which a phosphor lO is provided on an ITO transparent electrode 9. On this occasion,
The electron emitting section 7, the opening of the spacer 1, and the phosphor 10 are set to be on the same axis. After that, the substrate 3. The fluorescent screen 8 is glued on the outer periphery, each electrode is taken out, and the substrate 3. The inside of the panel with the fluorescent screen 8 as an exterior plate is evacuated.

In the panel created through the above steps, an electron accelerating voltage of V, = I KV is applied to the ITO electrode 9 in the figure,
Each element wiring 115 has an electron-emitting element voltage of V=I,
V-2, Vts = 14V are sequentially applied as pulse voltages, and the modulation voltages Vg+, Vg□=± are applied to the modulation electrode 2.
Apply 15V sequentially. By appropriately adjusting the timing of the electron-emitting device voltage (2) and the modulation voltage (2), electrons emitted from the electron-emitting portion 7 at an arbitrary position can be transferred to the phosphor 10.
The light emitting surface 11 can emit light at any position to display an image.

Fig. 1 shows the display section, and in reality, the light emitting surface 1
It goes without saying that even a display device in which a large number of 1's are arranged can be produced by using the structure of this embodiment.

This was specifically created based on the embodiment shown in FIGS. 4 to 6 above.

Reference numeral 12 in FIG. 5 denotes an electrode support made of photosensitive glass as in Example 1. The dimensions of the upper surface side recess are 0.8 mm square, and the step has a reverse tapered shape with a depth of 0.5 mm.

Further, the dimensions of the opening in the upper surface side recess are 0.6 mm square, and the thickness of the electrode support at the opening is 0.5 mm.

This opening has a forward tapered shape when viewed from the surface of the electrode support. The width of the lower rectangular recess is 0.1 mm.
This step has a reverse tapered shape.

As shown in the cross-sectional view of FIG. 6, on this electrode support 12, a modulation electrode 13a and a focus electrode 14a made of a nickel thin film are patterned using the self-alignment at the stepped portion in the same manner as in Example 1, and then electrolyzed. The modulation electrode 13b is nickel plated and has low resistance.

A focus electrode 14b was formed.

An upper spacer 15 was placed on the electrode support 12 thus obtained as shown in FIG. Thereafter, the substrate 3 and the fluorescent screen 8 were assembled to form a panel in the same manner as in Example 1.

In the panel created through the above steps, the electron focusing voltage 1 is applied to the focus electrode 14, and the other voltages V, , V, and V are appropriately adjusted in the same manner as in Example 1.
Any image can be displayed (see Figure 4).

It goes without saying that by using the structure of this embodiment, it is possible to create a display device in which a large number of light emitting surfaces 11 are arranged.

[Effects of the Invention] As explained above, the number of manufacturing steps can be significantly reduced by forming the electrode wiring shape with self-line according to the surface shape of the electrode support and using this as a member of an electron beam display device. be able to.

Moreover, conventional problems such as the ability to improve the accuracy of the assembly positions of each member were able to be solved.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a first embodiment of the present invention;
Fig. 2 is a perspective view showing the spacer of the first embodiment of the present invention, Fig. 3 ('a), (b), (C)
4 is a cross-sectional view showing the manufacturing method of the electrode of the first embodiment of the present invention, FIG. 4 is a perspective view of the second embodiment of the present invention, and FIG. 5 is a cross-sectional view of the second embodiment of the present invention. FIG. 6 is a cross-sectional view showing an electrode of a second embodiment of the present invention, and FIGS. 7, 8, 9, and 10 are conventional electrode supports. It is a drawing showing an example. 1.16...Spacer 2, 2a, 13.13a, 13b, 20-Modulation electrode 2b...Metal plating 3...Substrate 4I22...Lower spacer 5...Element wiring 6...Element electrode 7.18...
Electron emission part 8.21... Fluorescent plate 9... rTO electrode (transparent electrode) lO... Fluorescent substance 11... Light emitting surface 12...
Electrode support, 14, 14a, 14b...Focus electrode 15...
- Upper spacer 17...electron-emitting device substrate 19...electrode wiring

Claims (5)

[Claims] (1) When forming the electrode wiring, after forming a stepped portion by providing at least a recess or a convex portion on the surface of the electrode wiring support,
A method for forming an electrode wiring, characterized by forming an electrode material on the surface and separating the electrode material by a stepped portion to form an independent electrode wiring. (2) The method for forming an electrode wiring according to claim 1, wherein the stepped portion is formed in a tapered shape. (3) The method of forming an electrode wiring according to claim 1, further comprising forming an electrode film on the surface of the film by plating after forming the electrode material film. (4) An electron beam display device that emits an electron beam and causes a phosphor to emit light, characterized by comprising an electrode wiring obtained by the method according to claim 1, claim 2, or claim 3. . (5) In a substrate in which a plurality of electron source lines in which electron emitting portions are arranged in parallel and in a line are arranged in parallel, electrode wiring is provided on an electrode wiring support whose longitudinal direction is orthogonal to the electron source line. 5. The electron beam display device according to claim 4, further comprising an opening in the electrode wiring.