JPH0229717A - Production of solid display device and projection system utilizing said device - Google Patents
Production of solid display device and projection system utilizing said deviceInfo
- Publication number
- JPH0229717A JPH0229717A JP63180941A JP18094188A JPH0229717A JP H0229717 A JPH0229717 A JP H0229717A JP 63180941 A JP63180941 A JP 63180941A JP 18094188 A JP18094188 A JP 18094188A JP H0229717 A JPH0229717 A JP H0229717A
- Authority
- JP
- Japan
- Prior art keywords
- display device
- plzt
- electrode
- solid display
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000007787 solid Substances 0.000 title abstract description 10
- 238000000034 method Methods 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 13
- 238000000975 co-precipitation Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims 2
- 241001025261 Neoraja caerulea Species 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010298 pulverizing process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 4
- 238000009826 distribution Methods 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 abstract description 2
- 239000011159 matrix material Substances 0.000 abstract description 2
- 230000000873 masking effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- -1 titanium alkoxide Chemical class 0.000 description 2
- OERNJTNJEZOPIA-UHFFFAOYSA-N zirconium nitrate Chemical compound [Zr+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O OERNJTNJEZOPIA-UHFFFAOYSA-N 0.000 description 2
- 235000006887 Alpinia galanga Nutrition 0.000 description 1
- 240000002768 Alpinia galanga Species 0.000 description 1
- 101100136092 Drosophila melanogaster peng gene Proteins 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910010252 TiO3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- FYDKNKUEBJQCCN-UHFFFAOYSA-N lanthanum(3+);trinitrate Chemical compound [La+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O FYDKNKUEBJQCCN-UHFFFAOYSA-N 0.000 description 1
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は光変調器、プロジェクションTV等に用いられ
る固体表示装置の製造方法およびプロジェクションシス
テムに関するものである。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a method of manufacturing a solid-state display device used in an optical modulator, a projection TV, etc., and a projection system.
「従来の技術」
近年、P L ZT(例えば(Pbe−1tLae、e
*)(Zre−ssTlg−3s)。、、7□0.)を
用いた光シャッタやデイスプレィの研究開発が盛んにな
ってきた。このPLZTをライトバルブとして用いたイ
メージプロジェクタ−は高輝度、高精細化が期待されて
いるが、その電極構造が問題となっていた。“Prior art” In recent years, P L ZT (for example (Pbe-1tLae, e
*) (Zre-ssTlg-3s). ,,7□0. ) research and development of optical shutters and displays using these devices has become active. Image projectors using this PLZT as a light valve are expected to have high brightness and high definition, but the electrode structure has been a problem.
一般に、PLZTのプレートを形成するには、第6図に
示すように、PbO,La、0.、ZrO,、TiO3
の各粉末を出発原料として混合し、仮焼結した後、粉砕
してPLZT粉末を得、これに圧力をかけながら特殊な
炉で焼成してPLZTプレートまたはウェハーを形成す
る。このようなPLZTプレートまたはウェハーに電極
を形成する方法として、第7図に示すように、平板状の
PLZT(1)の表面に電極(2) (3)を形成する
表面電極法と、第8図に示すように、PLZTのウェハ
ー(1)を作成し、これを200μm程度にカットし、
両面に電極(2)(3)を形成し、これをガラス基板(
4)上に固着し、ワイヤリング板からなるリード線(5
)を銀接看剤(6)で取り付ける平行板電極法があった
。Generally, to form a plate of PLZT, as shown in FIG. , ZrO, , TiO3
Each powder is mixed as a starting material, pre-sintered, and then crushed to obtain PLZT powder, which is then fired in a special furnace while applying pressure to form a PLZT plate or wafer. As a method for forming electrodes on such a PLZT plate or wafer, as shown in FIG. As shown in the figure, a PLZT wafer (1) was created and cut to approximately 200 μm.
Electrodes (2) and (3) are formed on both sides, and this is attached to a glass substrate (
4) Lead wire (5) fixed on top and consisting of wiring plate
) was attached using a silver adhesive (6).
「発明が解決しようとする課題」
表面電極法は加工が比較的単純であるが、PLZT内部
の電界分布が不均一になってクロストークやコントラス
トの低下が生じるという問題があった・
平行板電極法は加工工程が複雑でしかも高い加工精度が
要求されるという問題があった。``Problem to be solved by the invention'' Although the surface electrode method is relatively simple to process, it has the problem that the electric field distribution inside the PLZT becomes non-uniform, causing crosstalk and a decrease in contrast. ・Parallel plate electrode The problem with this method is that the machining process is complicated and requires high machining accuracy.
本発明は電極をPLZTの内部に埋設した内部電極型と
し、かつ電界が均一になり5作製が容易なものを得るこ
とを目的とするものである「課題を解決するための手段
」
本発明はPbO,La、O,、Zr0ztTiOzの各
粉末を混合し、仮焼結した後、粉砕してPLZT粉末と
し、これに圧力をかけながら焼成して透明なPLZT焼
結体を得、これを短冊状に切断し、上下面を光学研摩し
た光透過面とし1両側面を電極面とし、この電極面の一
方の面に複数個に分割した垂直電極パターンを、他方の
面に一連の水平電極パターンを形成し、垂直電極パター
ン同士、水平電極パターン同士が互いに接合するように
重合し、前記光透過面に、前記垂直電極を各行毎に短絡
するできるだけ細い外部電極を形成してなる固体表示装
置の製造方法である。The present invention aims to obtain an internal electrode type electrode embedded inside PLZT, which has a uniform electric field and is easy to manufacture. PbO, La, O, and Zr0ztTiOz powders are mixed, pre-sintered, and then crushed to obtain PLZT powder. This is sintered while applying pressure to obtain a transparent PLZT sintered body, which is shaped into strips. The upper and lower surfaces are optically polished light transmitting surfaces, and both sides are electrode surfaces.One surface of this electrode surface has a vertical electrode pattern divided into a plurality of pieces, and the other surface has a series of horizontal electrode patterns. manufacturing a solid-state display device, in which the vertical electrode patterns are formed, and the vertical electrode patterns are polymerized so that they are joined to each other, and external electrodes as thin as possible are formed on the light-transmitting surface to short-circuit the vertical electrodes in each row. It's a method.
「実施例」 以下1本発明の一実施例を図面に基づき説明する。"Example" An embodiment of the present invention will be described below based on the drawings.
第1図は本発明の製造方法により作られた固体表示装置
で、この固体表示装置(10)は厚さが例えば1.5ま
たは2.0調の透明なPLZTセラミックプレート(以
下PLZTプレートという)(11)に、光軸(光線の
入射する方向)と平行な垂直走査内部電極群(12)・
・・と、水平走査内部電極群(13)・・・が一定間隔
で埋設されており、これらのうち垂直走査内部電極群(
12)・・・は外部電極(14)・・・を介して端子(
15)・・・に結合され、前記水平走査内部電極群(1
3)・・・は直接端子(16)・・・に結合されている
。そして、水平走査内部電極(13)とその両側の垂直
走査内部電極(12) (12)で囲まれた部分が1つ
の画素(17)・・・を構成している。FIG. 1 shows a solid-state display device manufactured by the manufacturing method of the present invention, and this solid-state display device (10) is made of a transparent PLZT ceramic plate (hereinafter referred to as PLZT plate) with a thickness of, for example, 1.5 or 2.0 tone. (11), a vertical scanning internal electrode group (12) parallel to the optical axis (direction in which the light beam enters);
..., horizontal scanning internal electrode group (13)... are buried at regular intervals, and among these, vertical scanning internal electrode group (13)...
12)... is connected to the terminal (
15)..., and the horizontal scanning internal electrode group (1
3)... are directly coupled to the terminals (16)... A portion surrounded by the horizontal scanning internal electrode (13) and the vertical scanning internal electrodes (12) on both sides thereof constitutes one pixel (17).
つぎに製造方法を第2図により説明する。Next, the manufacturing method will be explained with reference to FIG.
(1)従来公知の方法により第2図(a)に示すような
PLZTプレート焼結体(18)を作る。なお、このP
LZTプレート焼結体(18)は後述のように共沈法に
よる粉末を常圧で焼成したものであってもよい。(1) A PLZT plate sintered body (18) as shown in FIG. 2(a) is made by a conventionally known method. Furthermore, this P
The LZT plate sintered body (18) may be obtained by firing powder by coprecipitation method under normal pressure as described below.
(2)このPLZTプレート(18)の両面を光学研摩
して上下面を光透過面(19a) (19b)とする、
このときの厚さ(1)が例えば1.5〜2.0mとする
。(2) Optically polishing both sides of this PLZT plate (18) to make the upper and lower surfaces light transmitting surfaces (19a) (19b),
The thickness (1) at this time is, for example, 1.5 to 2.0 m.
(3)得られたPLZTプレート(1g)を例えば長さ
(12)が40m、巾(d)が1.0または0.8mの
短冊状に切断して各ピース(20)・・・の切断面を粗
研摩して、両側面を電極面(19c) (19d)とす
る。(3) Cut the obtained PLZT plate (1 g) into strips with a length (12) of 40 m and a width (d) of 1.0 or 0.8 m, and cut each piece (20)... The surfaces are roughly polished to form electrode surfaces (19c) and (19d) on both sides.
(4)電極面(19c) (19d)のうち、一方の面
(19c)が上になるようにして第2図(C)のように
並べ、ガラスなどの位置合せダミーピース(21a)
(21b) (21c)で押圧しながら固定する。(4) Arrange the electrode surfaces (19c) and (19d) as shown in Figure 2 (C) with one surface (19c) facing up, and place the alignment dummy piece (21a) such as glass.
(21b) Fix while pressing with (21c).
(5)第2図(f)のような複数の垂直電極(12)
(12)・・・を形成するため、第2図(d)のように
長さ方向と直交して一定間隔でマスキングテープ(22
a)でマスクする6例えばマスキングテープ(22a)
の巾を0.8m、電極面を2.2mとする。そしテAg
/<−ストを塗布し、充分乾燥(100”Cで1o分間
)すると垂直電極(12)(12)・・・どなる。(5) Multiple vertical electrodes (12) as shown in Figure 2(f)
(12)..., the masking tape (22
Mask with a) 6 For example, masking tape (22a)
The width of the electrode is 0.8 m, and the electrode surface is 2.2 m. Soshite Ag
When /<-st is applied and sufficiently dried (10 minutes at 100"C), the vertical electrodes (12) (12)... roar.
(6)第2図(g)のような1本づつの水平電極(13
)(13)・・・を形成するため第2図(a)のように
、長さ方向と平行で、かつ相隣る接合部が同じ巾(例え
ば0 、5 m )ずつ1行おきにマスキングされるよ
うに巾1.OWmのマスキングテープ(22b)でマス
クする。(6) Each horizontal electrode (13
) (13)... As shown in Figure 2 (a), masking is done every other line parallel to the length direction and with adjacent joints having the same width (for example, 0 and 5 m). Width 1. Mask with OWm masking tape (22b).
そしてA、ペーストを塗布し、充分乾燥すると水平電極
(13) (13)・・・どなる。Then, A. After applying the paste and drying it thoroughly, the horizontal electrode (13) (13)... makes a roar.
(7)以上のようにして一方の面(19c)に第2図(
f)に示すような垂直電極(12)・・・が形成され、
他方の面(19d)に第2図(g)に示すような水平電
極(13)・・・が形成される。(7) In the above manner, one side (19c) is attached to the image shown in Fig. 2 (
Vertical electrodes (12)... as shown in f) are formed,
Horizontal electrodes (13) as shown in FIG. 2(g) are formed on the other surface (19d).
(8)以上のような1個1個のピース(20) (20
)・・・を重ね合せる。このとき、第2図(h)に示す
ように。(8) Each piece as above (20) (20
)... are superimposed. At this time, as shown in FIG. 2(h).
垂直電極(12) (12)同士、水平電極(13)
(13)同士が互いに向き合うようにして炉内で400
℃で乾燥する。Vertical electrodes (12) (12) together, horizontal electrodes (13)
(13) 400 minutes in the furnace with the two facing each other.
Dry at °C.
(9) 400℃で約30分間の乾燥後、第2図(i)
のようにPLZTからなる2個の上下のダミーピース(
24a) (24b)で重合したピース群(20)・・
・をはさみ、ジルコニアプレー)−(25)上に前記ダ
ミーピース(24a)(24b)を接着し、さらに左右
のダミーピース(24c)(24d)で押圧してこのダ
ミーピース(24c) (24d)も接着する。そして
750℃の炉内で約30分間焼成する。(9) After drying at 400°C for about 30 minutes, Figure 2 (i)
Two upper and lower dummy pieces made of PLZT (
24a) Piece group (20) polymerized in (24b)...
・Glue the dummy pieces (24a) (24b) onto the zirconia plate (25) and press them with the left and right dummy pieces (24c) (24d) to form the dummy pieces (24c) (24d). Also glue. Then, it is baked in a furnace at 750°C for about 30 minutes.
(10)このようにして一体化された積層PLZT(1
0)の上下面をダイモンドペーストで軽く研摩し。(10) Laminated PLZT (1
Lightly polish the top and bottom surfaces of 0) with diamond paste.
アルコールで超音波洗浄する。Ultrasonic cleaning with alcohol.
(11)第2図(j)のように、同一列の垂直電極(1
2)・・・を例えば0.4+m巾の外部電極(14)で
短絡する。(11) As shown in Figure 2 (j), the vertical electrodes (1
2)... are short-circuited, for example, with an external electrode (14) having a width of 0.4+m.
このとき、マスキングテープ(22e)でマスクする。At this time, mask with masking tape (22e).
また、この外部電極(14)を形成するのは水平電極(
13)・・・が表面に露出していない面とする。外部電
極(14)にはコンダクティブペーストが用いられ。Moreover, this external electrode (14) is formed by a horizontal electrode (
13) ... is a surface that is not exposed on the surface. Conductive paste is used for the external electrode (14).
50℃の24時間または400℃の5時間恒温槽にて形
成する。It is formed in a constant temperature bath at 50°C for 24 hours or at 400°C for 5 hours.
(12)第2図(k)に示すように、各垂直電極(12
)・・・に垂直端子(15)・・・を接続する。このと
き、スライドガラスをダミーピース(27a)としてホ
ルダー(26)に固定し、このダミーピース(27a)
上に、コンダクティブペーストと導電性ラッカーでラン
ド(28a)を形成し、垂直端子(15)を接続する。(12) As shown in Figure 2(k), each vertical electrode (12
)... connect the vertical terminal (15)... At this time, the slide glass is fixed to the holder (26) as a dummy piece (27a), and this dummy piece (27a)
On top, a land (28a) is formed with conductive paste and conductive lacquer to connect the vertical terminal (15).
(13)第2図(1m)に示すように、各水平電極(1
3)・・・についても第2図(k)と同様にランド(2
8b)に水平端子(16)・・・を接続する。(13) As shown in Figure 2 (1m), each horizontal electrode (1m)
3)... as well as land (2) as in Figure 2(k).
8b) to the horizontal terminal (16)...
(14)以上のようにして第2図(鵬)および姓1図(
a)(b)に示すような素子(10)が得られる。(14) As mentioned above, Figure 2 (Peng) and Surname 1 Figure (
A device (10) as shown in a) and (b) is obtained.
以上のようにして構成されたPLZTの固体表示装Mを
プロジェクションシステムに応用した例が第3図に示さ
れる。この第3図において、 (29)はキセノンラン
プの光源、 (30)(31)はブルー反射のダイクロ
イックミラー、 (32)はグリーン反射のダイクロイ
ックミラー、(33)はレッド反射のダイクロイックミ
ラー、(34) <35) (36)は全反射ミラー(
37)はプロジェクションレンズ、(38)はスクリー
ンである。このような構成において、ブルー、グリーン
、レッドの各径路中にそれぞれ前記積層型PLzTから
なる固体表示装置f(10) (10) (10)を配
置する。そして、各固体表示装置a (10) (10
) (10)の垂直走査内部電極(12)・・・と水平
走査内部f4極(13)・・・で構成される各@素(1
7)・・・毎に電圧を変化させることによりマトリック
スライトバルブとして作用する。FIG. 3 shows an example in which the PLZT solid-state display device M constructed as described above is applied to a projection system. In this Figure 3, (29) is the light source of a xenon lamp, (30) and (31) are dichroic mirrors with blue reflection, (32) are dichroic mirrors with green reflection, (33) are dichroic mirrors with red reflection, and (34) are the dichroic mirrors with green reflection. ) <35) (36) is a total reflection mirror (
37) is a projection lens, and (38) is a screen. In such a configuration, solid-state display devices f(10) (10) (10) made of the laminated PLzT are arranged in each of the blue, green, and red paths, respectively. And each solid state display device a (10) (10
) (10) Each @ element (1
7) It acts as a matrix light valve by changing the voltage every time.
前記実施例ではPLZTプレートは、予め得られた4種
類の粉末を用いて加圧焼成してなる公知の方法によるも
のを利用したが、これに限られるものではなく、以下に
説明するような共沈法により形成したものを利用するこ
ともできる。In the above example, the PLZT plate was made by a known method of pressure firing using four types of powder obtained in advance, but the plate is not limited to this, and the following common methods may be used. It is also possible to use one formed by a precipitation method.
共沈法によるPLZTプレートの製造方法を説明すると
。The method for manufacturing PLZT plates using the coprecipitation method will be explained.
硝酸鉛(Pb(No、)、)溶液、硝酸ランタン釦(L
a (N Ox ) −) m液、硝酸ジルコニウム(
Zr(Now)i)溶液、チタンアルコキシド(T i
(n −o −C4Hs ) 4 )溶液を所定の割合
で混合する0例えばP L Z T (9/65/35
)すなわちP bllesL Laoses Zras
ss Tx、、、、 o3となるように各溶液の割合を
予め設定して混合する。このとき、pHTA整のためN
H40Ht&flli合して約1時間混合する。混合し
た後、静止すると微粒子が共沈するので、これを濾紙に
て濾過する。Lead nitrate (Pb(No, ),) solution, lanthanum nitrate button (L
a (NOx) −) m liquid, zirconium nitrate (
Zr(Now)i) solution, titanium alkoxide (T i
(n-o-C4Hs) 4) Mix the solutions in a predetermined ratio 0 For example, P L Z T (9/65/35
) i.e. P blesL Laoses Zras
The proportions of each solution are set in advance and mixed so that ss Tx, , o3. At this time, N
Combine H40Ht & flli and mix for about 1 hour. After mixing, if the mixture is allowed to stand still, fine particles will co-precipitate, and this will be filtered using filter paper.
このとき、沈澱物は水酸化物となるので脱イオン水で洗
浄しながら濾過する。微粒子を約120℃で約5時間乾
燥した後、ポリエチレンポットにジルコニアボールとア
セトンを入れてボールミルで約20時間撹拌し、これを
フィルターで濾過し、再度約120℃で約5時間乾燥す
る。乾燥した微粉末を高純度(99,5%以上)のアル
ミナのるつぼに入れて約800℃で約2時間仮焼成する
。再び前記アセトンを入れボールミルで撹拌濾過し乾燥
するという工程を繰返えす、すると、PLZTの粉末が
得られる。このときの粉末の特性は、比重7.8 g
/cd、1次粒子径(a小径)約0.1μ■、2次粒子
径(最大径)約0.92μ■、比表面積約8.4rd/
gであった。At this time, since the precipitate becomes hydroxide, it is filtered while washing with deionized water. After drying the fine particles at about 120°C for about 5 hours, zirconia balls and acetone are placed in a polyethylene pot, stirred in a ball mill for about 20 hours, filtered, and dried again at about 120°C for about 5 hours. The dried fine powder is placed in a high purity (99.5% or higher) alumina crucible and calcined at about 800°C for about 2 hours. The steps of adding acetone, stirring, filtering with a ball mill, and drying are repeated, and PLZT powder is obtained. The characteristics of the powder at this time are that the specific gravity is 7.8 g.
/cd, primary particle diameter (a small diameter) approximately 0.1μ■, secondary particle diameter (maximum diameter) approximately 0.92μ■, specific surface area approximately 8.4rd/
It was g.
PLZTの共沈粉末に、有機バインダ(ポリビニルブチ
ラール)、可塑剤(ジブチルフタレート)、有機溶剤(
メチルエチルケトンとトルエンの50%ずつの混合液)
を加え、ボールミルで撹拌し、スラリー状物を作る。こ
れを真空説泡器で溶剤を除去し、粘度10,000〜3
0,0OOc、p、とする、このスラリー状物を約80
℃の雰囲気中を30cm/win程度で移動するテープ
上にドクターブレードシート成型機を用いて所定厚さの
PLZTのグリーンシート(生シート)を形成する。こ
の生シートを加熱しバインダを除去しながら雰囲気焼成
してPLZT焼結体を得る。An organic binder (polyvinyl butyral), a plasticizer (dibutyl phthalate), and an organic solvent (
50% mixture of methyl ethyl ketone and toluene)
Add and stir with a ball mill to make a slurry. The solvent was removed using a vacuum bubbler, and the viscosity was 10,000 to 3.
0.0OOc,p, this slurry is about 80
A PLZT green sheet (raw sheet) of a predetermined thickness is formed using a doctor blade sheet forming machine on a tape moving at a rate of about 30 cm/win in an atmosphere at .degree. This raw sheet is heated and fired in an atmosphere while removing the binder to obtain a PLZT sintered body.
「発明の効果」
(1)走査電極間の印加電圧の変化に対し、光強度が第
4図のように略直線的に変化する特性が得られ、光の制
御が容易かつ精密になる。"Effects of the Invention" (1) A characteristic in which the light intensity changes approximately linearly as shown in FIG. 4 with respect to changes in the voltage applied between the scanning electrodes is obtained, making light control easy and precise.
(2)走査’!極への駆動電圧の立上りと王立りに対し
て光強度の変化のレスポンスが第5図に示すように10
μsecと極めて早い。(2) Scan'! The response of the change in light intensity to the rise and rise of the driving voltage to the pole is 10 as shown in Figure 5.
Extremely fast at μsec.
(3)光軸に対し、走査電極の方向が一致しているので
走査電極によって透過光量がほとんど妨げられることが
ない。(3) Since the direction of the scanning electrode coincides with the optical axis, the amount of transmitted light is hardly obstructed by the scanning electrode.
(4)電界分布が均一になるので、クロストークやコン
トラストの低下がほとんどない。(4) Since the electric field distribution becomes uniform, there is almost no crosstalk or decrease in contrast.
(5)短冊状ピースの積層によって形成するので。(5) It is formed by laminating strip-shaped pieces.
同一品質のものが多数、しかも簡単に製造できる。There are many products of the same quality, and they are easy to manufacture.
第1図は本発明による固体表示装置の一実施例を示すも
ので、(a)は正面図、(b)は側面図、第2図(a)
〜(Q)は製造工程の説明図、第3図は本発明装置を用
いたプロジェクションシステムの説明図、第4図は印加
電圧−光強度特性図、第5図はレスポンスの特性図、第
6図は従来品の製造工程のフローチャート、第7図は従
来品の斜視図、第8図は他の従来品の製造工程の説明図
である。
(1)−“°従来のPLZTプレー ト、 (2)(3
)−電極。
(4)・・・ガラス基板、(5)・・・リード線、 (
6)・・・銀接着剤、(10)・・・固体表示装置!、
(11)・・・本発明によるPLZTプレート、(1
2)・・・垂直走査内部電極、(13)・・・水平走査
内部電極、 (14)・・・外部電極、(15) (1
6)・・・端子、 (17)・・・画素、 (Ill)
・・・PLZT焼結体、(19a) (19b)−光透
過面、 (19c)(19d)−電極面、 (20)・
・・ピース、 (21a)(21b)(21c)(21
d)−ダミーピース。
(22a) (22b) (22c)−マスキングテー
プ、 (24a)(24b)(24c) (24d)−
ダミーピース、(26)−・・ホルダー、(27a)
(27b)−ダミーピース、(28a) (28b)
(29) ・=光源。
(30) (31)・・・ブルー反射ダイクロイックミ
ラー、(32)・・・グリーン反射ダイクロイックミラ
ー、 (33)・・・レッド反射ダイクロイックミラー
、 (34)(35)(36)・・・全反射ミラー、
(37)・・・プロジェクションレンズ。
(38)・・・スクリーン。FIG. 1 shows an embodiment of a solid-state display device according to the present invention, in which (a) is a front view, (b) is a side view, and FIG. 2 (a) is a side view.
~(Q) is an explanatory diagram of the manufacturing process, FIG. 3 is an explanatory diagram of a projection system using the device of the present invention, FIG. 4 is an applied voltage-light intensity characteristic diagram, FIG. 5 is a response characteristic diagram, and FIG. 7 is a perspective view of the conventional product, and FIG. 8 is an explanatory diagram of the manufacturing process of another conventional product. (1) - “°Conventional PLZT plate, (2) (3
) - electrode. (4)...Glass substrate, (5)...Lead wire, (
6)...Silver adhesive, (10)...Solid display device! ,
(11)...PLZT plate according to the present invention, (1
2) Vertical scanning internal electrode, (13) Horizontal scanning internal electrode, (14) External electrode, (15) (1
6)...Terminal, (17)...Pixel, (Ill)
...PLZT sintered body, (19a) (19b) - light transmission surface, (19c) (19d) - electrode surface, (20)
... Peace, (21a) (21b) (21c) (21
d) - dummy piece. (22a) (22b) (22c) - Masking tape, (24a) (24b) (24c) (24d) -
Dummy piece, (26)--Holder, (27a)
(27b) - dummy piece, (28a) (28b)
(29) ・=Light source. (30) (31)... Blue reflective dichroic mirror, (32)... Green reflective dichroic mirror, (33)... Red reflective dichroic mirror, (34) (35) (36)... Total internal reflection. mirror,
(37)...Projection lens. (38)...Screen.
Claims (4)
2の各粉末を混合焼成して透明なPLZT焼結体を得、
これを短冊状に切断し、上下面を光学研摩した光透過面
とし、両側面を電極面とし、この電極面の一方の面に複
数個に分割した垂直電極パターンを、他方の面に一連の
水平電極パターンを形成し、垂直電極パターン同士、水
平電極パターン同士が互いに接合するように重合し、前
記光透過面に、前記垂直電極を各行毎に短絡するできる
だけ細い外部電極を形成してなることを特徴とする固体
表示装置の製造方法。(1) PbO, La_2O_3, ZrO_2, TiO_
A transparent PLZT sintered body was obtained by mixing and firing each powder of 2.
This is cut into strips, the upper and lower surfaces are made into optically polished light transmitting surfaces, both sides are made into electrode surfaces, one surface of this electrode surface is divided into a plurality of vertical electrode patterns, and the other surface is divided into a series of vertical electrode patterns. A horizontal electrode pattern is formed, the vertical electrode patterns and the horizontal electrode patterns are superimposed so as to be joined to each other, and an external electrode as thin as possible is formed on the light transmitting surface to short-circuit the vertical electrodes in each row. A method for manufacturing a solid-state display device characterized by:
O_2、TiO_2の各粉末を混合し、仮焼結した後、
粉砕してPLZT粉末を得、これに圧力をかけながら焼
成したものからなる請求項(1)記載の固体表示装置の
製造方法。(2) PLZT sintered body is PbO, La_2O_3, Zr
After mixing O_2 and TiO_2 powders and pre-sintering,
2. The method of manufacturing a solid-state display device according to claim 1, wherein the PLZT powder is obtained by pulverization and fired while applying pressure.
の共沈粉末を用いて加熱焼結したものからなる請求項(
1)記載の固体表示装置の製造方法。(3) PLZT sintered body is PLZT obtained by coprecipitation method.
A claim consisting of a product obtained by heating and sintering using coprecipitation powder of
1) The method for manufacturing the solid-state display device described above.
径路にそれぞれ積層PLZTを介在させた後プロジェク
ションレンズ系へ供給するようにしたプロジェクション
システム。(4) A projection system in which a blue ray path, a green ray path, and a red ray path are each provided with laminated PLZT and then supplied to a projection lens system.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63180941A JPH0229717A (en) | 1988-07-20 | 1988-07-20 | Production of solid display device and projection system utilizing said device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63180941A JPH0229717A (en) | 1988-07-20 | 1988-07-20 | Production of solid display device and projection system utilizing said device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0229717A true JPH0229717A (en) | 1990-01-31 |
JPH0448363B2 JPH0448363B2 (en) | 1992-08-06 |
Family
ID=16091955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63180941A Granted JPH0229717A (en) | 1988-07-20 | 1988-07-20 | Production of solid display device and projection system utilizing said device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0229717A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113196163A (en) * | 2018-12-18 | 2021-07-30 | Ipg光子公司 | Method for manufacturing patterned SrB4BO7 and PbB4O7 crystals |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325692A (en) * | 1986-07-18 | 1988-02-03 | 松下電器産業株式会社 | Cursor controller |
JPS63180941A (en) * | 1987-01-22 | 1988-07-26 | Konica Corp | Method and device for reading radiation image |
-
1988
- 1988-07-20 JP JP63180941A patent/JPH0229717A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325692A (en) * | 1986-07-18 | 1988-02-03 | 松下電器産業株式会社 | Cursor controller |
JPS63180941A (en) * | 1987-01-22 | 1988-07-26 | Konica Corp | Method and device for reading radiation image |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113196163A (en) * | 2018-12-18 | 2021-07-30 | Ipg光子公司 | Method for manufacturing patterned SrB4BO7 and PbB4O7 crystals |
CN113196163B (en) * | 2018-12-18 | 2023-08-08 | Ipg光子公司 | Method for manufacturing patterned SrB4BO7 and PbB4O7 crystals |
Also Published As
Publication number | Publication date |
---|---|
JPH0448363B2 (en) | 1992-08-06 |
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