JPH0229710A - Stereomicroscope - Google Patents

Abstract

PURPOSE:To obtain the illumination of high concentricity by making at least one guide column a hollow cylinder which penetrates through a microscope main body and allowing illuminating light to pass through the hollow cylinder. CONSTITUTION:When a zooming knob 19 is rotated, a columnar cam 12 is rotated to make followers 14 and 16 move up and down and a 1st group lens 8 and a 2nd group lens 11 are made to move up and down, so that zooming is performed in the title stereomicroscope. Meanwhile, after luminous flux emitted from a lamp 24 is condensed by a contact lens 26, it is reflected by a prism 27 to be guided to the upper edge of the guide column 13 and, successively, it passes through an illuminating lens 29 and is projected from an aperture for illumination 23 as the illuminating light 33. In such a case, the illumination of high concentricity can be obtained since the aperture for illumination 23 and apertures for observation 20 and 20 are arranged extremely closely to each other.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a stereoscopic 11Ji microscope, particularly a popular zoom stereomicroscope.

[Conventional technology]

Stereo microscopes are suitable for sample manipulation and inspection work, and are often incorporated into probers and bonders for semiconductor devices, for example. Since these devices operate on semiconductor wafers and chips, they have long operating times. It is desired that the shape of the tip of the objective lens is simple and compact, as well as having a long distance. Also, semiconductor wafers.

Since the chip is almost flat and has properties close to a mirror surface,
As appropriate lighting, coaxial lighting or lighting as close to coaxial lighting as possible is desired.

As a conventional physical ML W mirror that meets these requirements,
For example, one using a floodlight 101 as shown in FIG. 13, one using a fiber illuminator instead of the floodlight, the first
The mainstream was to use ring-shaped fluorescent lamps as shown in Figure 4. Also, as the one with the best lighting performance, JP-A-6
There is one equipped with a coaxial epi-illumination unit as seen in Japanese Patent No. 1-116310. This type of stereomicroscope is a high-grade stereoscopic microscope that has an afocal structure between the lens barrel and the objective lens, and an epi-illumination unit is inserted into this part. Also, JP-A-58-307
There is also one as shown in Publication No. 20, which is the 15th publication.
As shown in the figure, there is a half mirror 103 in front of the objective lens.
and a lamp house 104 installed on the side here.
It was designed to provide coaxial epi-illumination with a simple configuration by guiding light from the In addition, there are devices with a built-in illumination device, such as surgical microscopes, that have increased coaxiality of illumination.

[Problem to be solved by the invention]

However, with the floodlight type shown in FIG. 13, there is a limit to how close the illumination optical axis can be to the observation optical axis due to interference between the floodlight 101 and the cover of the objective lens, so the coaxiality of the illumination can only be increased to a certain extent. There was a drawback that there was no

However, since the light rays emitted from the projector must not be blocked, there was a drawback that the device could not be placed in a certain direction within the space above the four test i devices. These things were the same when using a fiber illuminator. Further, the ring-shaped fluorescent lamp system shown in FIG. 14 also has the drawback that the degree of coaxiality of illumination can only be increased to a certain extent, as described above.

Also, those equipped with coaxial epi-illumination units are expensive! The drawback was that the 1mff1 itself was also expensive. Furthermore, the lamp shown in FIG. 15 has the disadvantage that the protrusion of the lamp house 104 narrows the usable space of the combined apparatus, similar to the lamp house 104 shown in FIG. Also, what is the structure of a surgical microscope that has a built-in illumination device? ! This has the disadvantage that the microscope itself becomes expensive because it is complicated.

In view of the above problems, the present invention realizes highly coaxial illumination or coaxial illumination, and furthermore, the shape of the objective lens tip is simple and compact, and the usable space of the combined apparatus is wide. The objective is to provide a stereoscopic microscope whose microscope body is also inexpensive.

[Means and effects for solving the problem] A stereoscopic WJ microscope according to the present invention is a stereoscopic microscope in which a zoom system is mounted on a guide column so that it can be tivJed, in which at least one of the guide columns is inserted through the microscope main body. By making the hollow cylinder a hollow cylinder and passing the M bright light through the hollow cylinder, the illumination light is emitted from a point very close to the objective lens, making it possible to perform illumination with extremely high degree of coaxiality. Also, is there a special space for lighting? 19! This eliminates the need for a formal structure.

Further, in the above-mentioned configuration, the stereomicroscope according to the present invention can also perform simple coaxial epi-illumination by providing an optical system on the bottom surface of the microscope body to bend the illumination optical axis to match the observation optical axis. .

〔Example〕

Hereinafter, the present invention will be described in detail based on an illustrated embodiment.

FIG. 1 is a schematic longitudinal cross-sectional view of the mirror body of an embodiment of the stereomicroscope of the present invention, and FIGS. 2 (A) and (B) are cross-sectional views taken along lines A-A and B-B in FIG. 1, respectively. 3 is a bottom view of the mirror body, FIG. 4 is a schematic vertical sectional view of an illumination optical system attached to the mirror body, and FIG. 5 is a side view of the entire embodiment.

In Figures 1 and 2, 1 is the main body frame, 2 is the main body frame l
A cover 3 covering the main body frame l and the cover 2 is an auxiliary cover detachably attached to the main body frame l and the cover 2, and an eyepiece tube 4 is attached to the cover 2. Reference numeral 5 indicates four guide columns mounted vertically on the main body frame 1, and reference numeral 6 indicates one end slidably fitted into the guide column 5 on the left side of the drawing, and the other end thereof on the guide column 5 on the right side of the drawing. A pair of first group lens frames which are slidably brought into contact with each other and maintained in the contact state by being pulled by a spring 7; One end of the pair of first group lenses 9 (FIG. 2 (A)) is slidably fitted to the guide column 5 on the right side of the drawing, and the other end is fitted to the guide column 5 on the left side of the drawing. A pair of second group lens frames which are movably brought into contact and maintained in the contact state by being pulled by a spring 10; 11 is a paint brush 2;
A pair of second group lenses (FIG. 2(B)) supported by a group lens frame 9, the first group lens 8.8 and the second group lenses 11, 11 form a pair of zoom objective lenses. It consists of Reference numeral 12 denotes a cylindrical cam which is pivotally attached to the main body frame l in parallel with the guide column 5 between the guide columns 5.5 on the left side of the drawing, and has cam grooves 12a and 12b formed at the lower and upper positions of the circumferential surface, respectively; Reference numeral 13 indicates another hollow cylindrical guide column that is attached to the main body frame l between the guide columns 5.5 on the right side of the drawing, and 14 indicates that the ring portion on the left side of the drawing can vertically slide on the cylindrical cam 12. Cambin 15 fitted in and screwed to it
A pair of arms 14a, 14a which are slidably fitted into the cam groove 12a and which extend upwardly and downwardly in the drawing are respectively connected to the m1 group lens frame 6.
．． Bin $a fixed at 6.

The first group follower (second
(Figure (person)), 16, the ring part on the left side of the drawing is the cylindrical cam 1.
Up and down to 2! The cam pin 17, which is movably fitted and screwed onto it, is slidably fitted into the cam groove 12b, and the fork portion on the right side of the drawing slidably sandwiches the guide column 5 and extends from it in the vertical direction of the drawing. A pair of @16a, 16a
are fixed to each second group lens frame 9.9, respectively.

The cylindrical cam 12 is a second group follower (FIG. 2(B)) that is engaged with the zoom knob 9a, which will be described later. 9 (FIG. 5), and these constitute a zoom lens drive mechanism.

In FIG. 3, reference numeral 20 denotes a pair of observation openings 22 provided on the bottom wall 1a of the main body frame l coaxially with the pair of observation optical axes.
23 is a positioning bin formed coaxially with the cylindrical cam 12 on the bottom wall 1a and used for positioning an attachment described later, and 23 is an illumination opening provided coaxially with the guide column 13 on the bottom wall la. .

In Fig. 4, 24 is a lamp connected to a power source 25 (Fig. 5), 26 is a contact lens, and 27 is a prism, which are fixed to the illumination lens barrel 2B (Fig. 5), The lens barrel 2B is fixed to the main body frame 1 with the support cover 3 removed. The front and rear groups of 29 are determined by a cylindrical spacer 30, and the whole is removably fitted into the guide column 13, and the ring screw 3
1, which is an illumination lens fixed by lamp 24. Contact lenses26. Together with the prism 27, it constitutes an illumination optical system.

The above members are attached to the microscope stand 3 as shown in FIG.
It is supported by 2.

Since this embodiment is constructed as described above, when the zoom knob 19 is rotated, the cylindrical cam 12 rotates, causing the first group follower 14 and the second group follower 16 to move up and down. As a result, the first group lens 8 and the second group lens 11 are moved up and down, and zooming is performed.

Furthermore, the light flux emitted from the lamp 24 is collected by the contact lens 26, reflected by the prism 27, guided to the upper end of the guide column 13, and then passed through the illumination lens 29 from the illumination aperture 23 as illumination light 33. It is emitted. In this case, since the illumination opening 23 is very close to the observation aperture 20.20, highly coaxial illumination can be obtained. In addition, since the microscope main body only needs to have one of the originally necessary guide columns shaped into a hollow cylinder, the manufacturing cost does not increase much and remains inexpensive. In addition, since the tip of the objective lens does not require any special space for the illumination system, the shape of the tip is simple and compact, and the space available for the combined equipment is large, and the light beam is Bright lighting is possible because it can be used effectively.

FIG. 6 shows a first variant of the illumination optical system, which uses a light guide fiber, -34, in place of the prism 27 and illumination lens 30 of FIG. t (The base 34a of (1) is fixed integrally with the contact lens 26, and the base 34b on the exit side is fixed to the guide column 13.
It is fitted with

This has the advantage that the structure is simpler and cheaper than one using lenses. Further, it is easy to make the other guide column 5 into a hollow cylinder shape and insert the branched fibers therein, so that the illumination light will be emitted from a plurality of locations, and even illumination can be obtained.

FIG. 7 shows a second modification of the illumination optical system, in which a single fiber 35 is used in place of the illumination lens 30 of FIG. This allows the entire aperture to be used effectively, resulting in bright illumination.

Note that a gradient index lens may be used instead of the single fiber 35.

FIG. 8 shows a third modification of the illumination optical system, in which the inner surface 1 of the guide column 13 is used instead of the illumination lens 300 in FIG.
3a is made into a mirror surface to transmit light by utilizing its reflection effect, and since no glass material is used, the cost is reduced.

FIG. 9 shows a fourth modification of the illumination optical system, in which the output end face 35a of the single fiber 35 in FIG. intersects the observation optical axis, and has the advantage that the brightest center light of the illumination light coincides with the center of observation.

Figure 11 (A) and CB) are Figure 4, Figure 6 9, Figure 7, respectively.
Figure 2 8th U! FIG. 2 is a vertical cross-sectional view of a main part of an oblique illumination attachment applied to the illumination optical system of J and a view taken in the direction of arrow B,
36 is a directional hole 37 that fits into the positioning pin 22;
A pair of apertures 38.38 coinciding with the viewing aperture 20.20
and a wedge-shaped prism 39 that coincides with the illumination opening 23. A support plate 40 is a tightening ring that is screwed into the inner peripheral portion of the lower end of the main body frame 1 to fix the support plate 36 to the main body frame 1. The output optical axis of the illumination light is bent by the wedge prism 39 so that it intersects the observation optical axis as shown at 101, and the same effect as in the example of FIG. 9 can be obtained.

FIG. 12 is a vertical cross-sectional view of a main part of an attachment for coaxial epi-illumination used in the illumination optical systems shown in FIGS. a directional hole 42 and a frontage 43 which coincides with the illumination opening 23;
A support plate 47 has a pair of openings 45, 45 that coincide with the observation openings 20 and 20, and a pair of half mirrors 46, 46, and is supported by being screwed into the inner circumference of the lower end of the main body frame l. This is a tightening ring that fixes the plate 41 to the main body frame l. The output optical axis of the illumination light is bent horizontally by the mirror 44 and then vertically bent by the half mirrors 46, 46 to match the observation optical axis, thereby providing coaxial epi-illumination.

This is simpler in structure and cheaper than a built-in coaxial epi-illumination system, and does not require special space for the illumination system at the tip of the objective lens, so the space available for the combined apparatus is wide.

〔Effect of the invention〕

As described above, the stereomicroscope according to the present invention can realize highly coaxial illumination or coaxial illumination, and the shape of the U'tM lens tip is simple and compact, making it easy to use the combined device. Practical because it takes up a lot of space and the microscope itself is inexpensive! ! It has important advantages.

[Brief explanation of the drawing]

FIG. 1 is a schematic longitudinal cross-sectional view of a mirror body of an embodiment of a stereomicroscope according to the present invention, and FIGS. 2(A) and (B) are respectively FIG.
3 is a bottom view of the mirror body, FIG. 4 is a schematic longitudinal sectional view of the illumination optical system attached to the mirror body, and Figure 5 is a cross-sectional view along line A and B-B J. A side view of the entire embodiment, FIGS. 6 to 9 are schematic vertical cross-sectional views showing first to fourth modifications of the illumination optical system, and FIG. 10 is a side view of the main part showing an oblique illumination state. 11(A) and 11(B) are longitudinal cross-sectional views of main parts of an oblique illumination attachment applied to the illumination optical systems of FIGS. 4, 6, 7, and 8, respectively, and viewed from the direction of arrow B. Figures 12, 6, 9, and 7. FIG. 13 to 15 are longitudinal cross-sectional views of main parts of the coaxial epi-illumination attachment used in the illumination optical system shown in FIGS. 7 and 8.
The figures are side views of essential parts of conventional examples. 1...Body frame, 2...Cover 3...Auxiliary cover 4...Eyepiece@tube, 5.13...Guide column,
6...1st group lens frame, 7.10...Spring, 8
...First group lens, 9...Second group lens frame, 1
1... 2nd n lens, 12... Cylindrical cam, 13
...Follower for 1st group, 15.17...Cam pin, 16...Follower for second group, 18...Bevel gear, 19...Zoom knob, 20... observation aperture,
22... Positioning pin, 23... Lighting opening,
24... Lamp, 25... Power supply, 26...
Contact lens, 27... Prism, 28...
・Lighting lens barrel, 29...Lighting lens, 30...
Spacer, 31...Ring screw, 32...i!
l Microscope mount, 33... Illumination light, 34... Light guide fiber 35... Supporting fiber 36.
41...Support plate, 37.42...Direction hole,
38.43.45...Aperture, 39...Wedge prism, 40.47...Tightening ring, 4...Mirror 46...Half mirror Fig. 1-2 Fig. 1 zU b 8 1α Figure 12 Figure 13 Figure 11

Claims (2)

[Claims] (1) In a stereomicroscope in which a zoom system is slidably mounted on a guide column, at least one of the guide columns is a hollow cylinder that penetrates the microscope body, and illumination light is passed through the hollow cylinder. A stereo microscope characterized by: (2) Claim (2) characterized in that an optical system is disposed on the lower surface of the microscope body to bend the illumination optical axis and align it with the observation optical axis.
The stereomicroscope described in 1).