JPH0229260Y2 - - Google Patents

Info

Publication number
JPH0229260Y2
JPH0229260Y2 JP19839985U JP19839985U JPH0229260Y2 JP H0229260 Y2 JPH0229260 Y2 JP H0229260Y2 JP 19839985 U JP19839985 U JP 19839985U JP 19839985 U JP19839985 U JP 19839985U JP H0229260 Y2 JPH0229260 Y2 JP H0229260Y2
Authority
JP
Japan
Prior art keywords
pressure
vacuum pump
valve
exhaust valve
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19839985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62176488U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19839985U priority Critical patent/JPH0229260Y2/ja
Publication of JPS62176488U publication Critical patent/JPS62176488U/ja
Application granted granted Critical
Publication of JPH0229260Y2 publication Critical patent/JPH0229260Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP19839985U 1985-12-25 1985-12-25 Expired JPH0229260Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19839985U JPH0229260Y2 (cs) 1985-12-25 1985-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19839985U JPH0229260Y2 (cs) 1985-12-25 1985-12-25

Publications (2)

Publication Number Publication Date
JPS62176488U JPS62176488U (cs) 1987-11-09
JPH0229260Y2 true JPH0229260Y2 (cs) 1990-08-06

Family

ID=31159050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19839985U Expired JPH0229260Y2 (cs) 1985-12-25 1985-12-25

Country Status (1)

Country Link
JP (1) JPH0229260Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5216433B2 (ja) * 2007-06-26 2013-06-19 株式会社ミツトヨ 真空排気装置および真空排気方法

Also Published As

Publication number Publication date
JPS62176488U (cs) 1987-11-09

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