JPH02288382A - Laser device - Google Patents
Laser deviceInfo
- Publication number
- JPH02288382A JPH02288382A JP11007789A JP11007789A JPH02288382A JP H02288382 A JPH02288382 A JP H02288382A JP 11007789 A JP11007789 A JP 11007789A JP 11007789 A JP11007789 A JP 11007789A JP H02288382 A JPH02288382 A JP H02288382A
- Authority
- JP
- Japan
- Prior art keywords
- cavity resonator
- resonator
- microwave
- discharge
- cylindrical cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005684 electric field Effects 0.000 claims abstract description 17
- 230000005672 electromagnetic field Effects 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 4
- 229910052705 radium Inorganic materials 0.000 abstract 1
- HCWPIIXVSYCSAN-UHFFFAOYSA-N radium atom Chemical compound [Ra] HCWPIIXVSYCSAN-UHFFFAOYSA-N 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000004323 axial length Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、例えばレーザー加工機のガスレーザー発振器
、又は医療用レーザー装置のレーザー発振器等に適用さ
れるレーザー装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a laser device applied to, for example, a gas laser oscillator of a laser processing machine or a laser oscillator of a medical laser device.
［従来の技術］
従来のレーザー装置を第３図及び第４図を参照して説明
する。[Prior Art] A conventional laser device will be explained with reference to FIGS. 3 and 4.
第３図は従来のレーザー装置の構成を示す正面図である
。FIG. 3 is a front view showing the configuration of a conventional laser device.
放電管１は、マイクロ波発振器６から導波管７を経て接
続された空胴共振器５の中に挿入、設置されており、そ
の両端に全反射ミラー２と出力ミラー３が設置されてい
る。放電管ｌの中にはレーザーガスが満たされており、
マイクロ波発振器８から出力されたマイクロ波が導波管
７の中を伝わり、空胴共振器５へ伝送され、放電管１の
中でマイクロ波の電界により放電が発生する。これによ
りレーザーガス媒質を励起し、誘導放出光を得て、光共
振器を構成する全反射ミラー２と出力ミラー３の間の往
復反射によって増重し、出力ミラー３を透過したレーザ
ー光４を取り出す。放電管１の軸方向とマイクロ波の電
界方向を平行にするとき、電磁界モードは７Ｍモード（
ＴｒａｎｓｖｅｒｓｅＭａｇｎｅｔｉｃ Ｍｏｄｅ）と
なるが、マイクロ波発振器６と空胴共振器５の内寸法に
より多様のモードが発生する。第４図はその一例である
。しかして、この装置に於いて、電界電界ベクトル８は
放電管ｌの軸方向に均一とはなっていない。このため、
放電は放電管ｌの軸方向に均一に発生せず、放電管内空
間を全てレーザーガス媒質の励起に利用できないという
欠点がある。The discharge tube 1 is inserted and installed in a cavity resonator 5 connected to a microwave oscillator 6 via a waveguide 7, and a total reflection mirror 2 and an output mirror 3 are installed at both ends of the cavity resonator 5. . The discharge tube l is filled with laser gas,
Microwaves output from the microwave oscillator 8 propagate through the waveguide 7 and are transmitted to the cavity resonator 5, and a discharge is generated in the discharge tube 1 due to the electric field of the microwaves. This excites the laser gas medium to obtain stimulated emission light, which is amplified by round-trip reflection between the total reflection mirror 2 and the output mirror 3 that constitute the optical resonator, and the laser light 4 transmitted through the output mirror 3. Take it out. When the axial direction of the discharge tube 1 and the electric field direction of the microwave are made parallel, the electromagnetic field mode is the 7M mode (
However, various modes are generated depending on the internal dimensions of the microwave oscillator 6 and the cavity resonator 5. Figure 4 is an example. However, in this device, the electric field vector 8 is not uniform in the axial direction of the discharge tube l. For this reason,
Discharge does not occur uniformly in the axial direction of the discharge tube l, and the disadvantage is that the entire space inside the discharge tube cannot be used for excitation of the laser gas medium.
［発明が解決しようとする課題］
本発明は上記実情に鑑みなされたもので、空胴共振器の
内寸法の選定によって、空胴共振器軸方向のマイクロ波
電界分布を表わす管内マイクロ波波長を無限大とし、放
電管軸方向に均一な電界分布を形成して、軸方向に均一
な放電を発生させることのできるレーザー装置を提供す
ることを目的とする。[Problems to be Solved by the Invention] The present invention has been made in view of the above-mentioned circumstances, and by selecting the internal dimensions of the cavity resonator, the in-tube microwave wavelength representing the microwave electric field distribution in the axial direction of the cavity resonator can be adjusted. It is an object of the present invention to provide a laser device that can generate a uniform electric field in the axial direction by forming an electric field distribution that is infinite and uniform in the axial direction of the discharge tube.
［課題を解決するための手段］
本発明は、マイクロ波発振器から出力されたマイクロ波
を空胴共振器の巾に導入し、その電界によって放電を発
生させる放電管と、全反射ミラー及び出力ミラーでなる
光共振器とにより構成されるレーザー発振器に於いて、
真空中マイクロ波周波数ｆＯ２真空中マイクロ波波長λ
ｏ．空胴共振器の遮断周波数ｆｃ、同じく波長λＣ１空
胴共振器の管内マイクロ波波長λｇ、光速Ｃとしたとき
、λｏ−Ｃ／ｆＯ，λＣ
−Ｃ／ｆｃ、 λｇ
−λｏ／１ｌ−（λｏ／λＣ）２）
の関係があることに注目し、λｏ−λＣとなるように空
胴共振器寸法を調整して、空胴共振器軸方向のマイクロ
波の電界分布を表わす管内マイクロ波波長λｇを無限大
とし、空胴共振器軸方向と平行な放電管軸方向に均一な
放電を発生させることを特徴とする。[Means for Solving the Problems] The present invention includes a discharge tube that introduces microwaves output from a microwave oscillator into the width of a cavity resonator and generates a discharge by the electric field, a total reflection mirror, and an output mirror. In a laser oscillator configured with an optical resonator,
Microwave frequency in vacuum fO2 Microwave wavelength in vacuum λ
o. When the cutoff frequency fc of the cavity resonator, the same wavelength λC1, the internal microwave wavelength λg of the cavity resonator, and the speed of light C, λo-C/fO, λC-C/fc, λg-λo/1l-(λo/ λC)2) Noting the relationship of It is characterized by being infinite in size and generating a uniform discharge in the axial direction of the discharge tube parallel to the axial direction of the cavity resonator.
［作用］
上記した構成により、放電管軸方向の不均一放電を防ぎ
、放電管内空間を全てレーザーガス媒質の励起に利用す
ることができる。[Function] With the above configuration, non-uniform discharge in the axial direction of the discharge tube can be prevented, and the entire space inside the discharge tube can be used for excitation of the laser gas medium.
［実施例］
本発明のレーザー装置の一実施例を第１図及び第２図を
参照して説明する。[Example] An example of the laser device of the present invention will be described with reference to FIGS. 1 and 2.
ここでは空胴共振器として円筒空胴共振器を用いる場合
を例示しており、第１図はその正面図、第２図は円筒空
胴共振器９の内部のマイクロ波電界ベクトル８の模式図
である。これらの図に於いて、前述した第３図及び第４
図と同一部分には同一符号を付している。Here, a case where a cylindrical cavity resonator is used as the cavity resonator is illustrated, and FIG. 1 is a front view thereof, and FIG. 2 is a schematic diagram of the microwave electric field vector 8 inside the cylindrical cavity resonator 9. It is. In these figures, the above-mentioned figures 3 and 4
The same parts as those in the figure are given the same reference numerals.
円筒空胴共振器９内の電磁界モードを前述の７Ｍモード
に設定したとき、次数を最低次のｎ＝０．ｍ−１とし、
λｃ−２πａ／Ｐｎ、ｍと、前述のλＣ＝λｏの条件か
ら、円筒空胴共振器内半径ａは
ａ−λｏ−ＰＯ１／２π
となる。When the electromagnetic field mode in the cylindrical cavity resonator 9 is set to the aforementioned 7M mode, the order is set to the lowest order, n=0. m-1,
From λc-2πa/Pn,m and the above-mentioned condition of λC=λo, the inner radius a of the cylindrical cavity resonator becomes a-λo-PO1/2π.
ここに、Ｐｎ、ＩＩは、ＴＭＯＩモードの次数に対応す
る係数であり、空胴共振器内の電磁界分布を与える第１
種ベッセル関数の解である（詳細は割愛するがＰＯＩζ
２．４０５となる）。この関係式から円筒空胴共振器９
の内径を定めることができ、内半径ａをこのように定め
ておけば、円筒空胴共振器内の管内波長λｇは無限大と
なって、円筒空胴共振器９の軸方向電磁界強度は一定と
なる。Here, Pn,II is a coefficient corresponding to the order of the TMOI mode, and is the first coefficient that gives the electromagnetic field distribution within the cavity resonator.
It is a solution of the seed Bessel function (details are omitted, but POIζ
2.405). From this relational expression, the cylindrical cavity resonator 9
If the inner radius a is determined in this way, the tube wavelength λg in the cylindrical cavity resonator becomes infinite, and the axial electromagnetic field strength of the cylindrical cavity 9 becomes It becomes constant.
円筒空胴共振器９の軸方向長さは、円筒空胴共振器９の
内部両端に挿入し、設置している短絡板ｌＯを軸方向に
移動できるようにしておき、任意可変とする。マイクロ
波電界強度は円筒空胴共振器９の内部両端に挿入し、設
置している短絡板ｌＯを円筒空胴共振器９の軸方向に動
かし、円筒空胴共振器９の軸方向長さを変えることによ
って調整する。The axial length of the cylindrical cavity resonator 9 can be arbitrarily varied by making it possible to move the shorting plates 10 inserted into both ends of the cylindrical cavity 9 in the axial direction. The microwave electric field strength is determined by inserting the short-circuit plate lO into both ends of the cylindrical cavity resonator 9 in the axial direction of the cylindrical cavity resonator 9, and changing the axial length of the cylindrical cavity resonator 9. Adjust by changing.
なお、円筒空胴共振器を用いる場合には遮断波長λＣは
ａ：矩形の長辺
ｂ：矩形の短辺
として与えられ、最低次のＴ Ｍモードｎ−１゜ｍ＝１
に対応するλＣは、ａｍ２ｂとして、λｃ−０，８９ａ
となる。従って、ａ−λＯ１０，８９，ｂ＝ａ／２とな
るように矩形空胴共振器の長辺−１−法を定めれば、矩
形空胴共振器内の管内波長λｇは無限大となって、円筒
空胴共振器内の軸方向電界強度は一定となる。In addition, when using a cylindrical cavity resonator, the cutoff wavelength λC is given as a: the long side of the rectangle b: the short side of the rectangle, and the lowest order TM mode n-1゜m=1
λC corresponding to am2b is λc-0,89a
becomes. Therefore, if the long side -1- method of the rectangular cavity cavity is determined so that a-λO10,89,b=a/2, the tube wavelength λg in the rectangular cavity cavity becomes infinite. , the axial electric field strength within the cylindrical cavity resonator is constant.
［発明の効果］
本発明によれば、レーザー装置に於いて、その放電管軸
方向に均一の放電を発生することができ、放電管内空間
を全てレーザーガス媒質の励起に有効に利用できる。[Effects of the Invention] According to the present invention, a uniform discharge can be generated in the axial direction of the discharge tube in a laser device, and the entire space inside the discharge tube can be effectively used for excitation of the laser gas medium.
第１図は本発明の実施例に係るレーザー装置の正面図、
第２図は本発明の実施例に係る電界モードの模式図、第
３図は従来のレーザー装置を示す正面図。第４図は従来
の実施例を示す電界モードの模式図である。
１・・・放電管、２・・・全反射ミラー、３・・・出力
ミラ、４・・・レーザー光、５・・・空胴共振器、６・
・・マイクロ波発振器、７・・・導波管、８・・・電界
ベクトル、９・・・円筒空胴共振器、■０・・・短絡波
。
出願人代理人 弁理士 鈴江武彦FIG. 1 is a front view of a laser device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an electric field mode according to an embodiment of the present invention, and FIG. 3 is a front view of a conventional laser device. FIG. 4 is a schematic diagram of an electric field mode showing a conventional embodiment. DESCRIPTION OF SYMBOLS 1... Discharge tube, 2... Total reflection mirror, 3... Output mirror, 4... Laser light, 5... Cavity resonator, 6...
... Microwave oscillator, 7... Waveguide, 8... Electric field vector, 9... Cylindrical cavity resonator, ■0... Short circuit wave. Applicant's agent Patent attorney Takehiko Suzue
Claims (2)
円筒空胴共振器中に導入し、その電界によって放電を発
生させる放電管と、全反射ミラー及び出力ミラーからな
る光共振器とによって構成されるレーザー発振器に於い
て、円筒空胴共振器内半径ａを、当該円筒空胴共振器内
に存在する電磁界分布を与える第１種のベッセル関数ｐ
ｎ，ｍ（ｎ＝１，２，・・・，ｍ＝１，２，・・・）及
び使用するマイクロ波の真空波長λ＿ｏを用いて、ａ＝
λ＿ｏ・Ｐｎ，ｍ／２πとすることを特徴とするレーザ
ー装置。(1) Consists of a discharge tube that introduces microwaves output from a microwave oscillator into a cylindrical cavity resonator and generates a discharge using the electric field, and an optical resonator that consists of a total reflection mirror and an output mirror. In a laser oscillator, the inner radius a of a cylindrical cavity resonator is defined by a Bessel function of the first kind that gives the electromagnetic field distribution existing within the cylindrical cavity resonator.
Using n, m (n = 1, 2, ..., m = 1, 2, ...) and the vacuum wavelength λ_o of the microwave to be used, a =
A laser device characterized in that λ_o·Pn, m/2π.
矩形空胴共振器中に導入し、その電界によって放電を発
生させる放電管と、全反射ミラー及び出力ミラーからな
る光共振器とによつて構成されるレーザー発振器に於い
て、矩形空胴共振器長辺寸法ａ、同じく短辺寸法ｂを、
使用マイクロ波の真空波長λ＿ｏを用いて、ａ＝λ＿ｏ
・（ｍ＾２＋４ｎ＾２）＾１＾／＾２／２（ｍ＝１，２
，・・・，ｎ＝０，１，２，・・・），ｂ＝ａ／２とす
ることを特徴とするレーザー装置。(2) Consisting of a discharge tube that introduces microwaves output from a microwave oscillator into a rectangular cavity resonator and generates a discharge using the electric field, and an optical resonator consisting of a total reflection mirror and an output mirror. In the laser oscillator to be used, the long side dimension a of the rectangular cavity resonator and the short side dimension b are
Using the vacuum wavelength λ_o of the microwave used, a=λ_o
・(m^2+4n^2)^1^/^2/2 (m=1,2
,..., n=0, 1, 2,...), b=a/2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11007789A JP2659800B2 (en) | 1989-04-28 | 1989-04-28 | Laser equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11007789A JP2659800B2 (en) | 1989-04-28 | 1989-04-28 | Laser equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02288382A true JPH02288382A (en) | 1990-11-28 |
| JP2659800B2 JP2659800B2 (en) | 1997-09-30 |
Family
ID=14526449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11007789A Expired - Lifetime JP2659800B2 (en) | 1989-04-28 | 1989-04-28 | Laser equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2659800B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08264868A (en) * | 1995-03-20 | 1996-10-11 | Matsushita Electric Ind Co Ltd | Microwave stimulated gas laser |
-
1989
- 1989-04-28 JP JP11007789A patent/JP2659800B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08264868A (en) * | 1995-03-20 | 1996-10-11 | Matsushita Electric Ind Co Ltd | Microwave stimulated gas laser |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2659800B2 (en) | 1997-09-30 |
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