JPH02283453A - Liquid jet recorder - Google Patents

Abstract

PURPOSE:To achieve improvement of discharge efficiency by a method wherein a central line of a passage from an orifice to a liquid chamber is bent at a part. CONSTITUTION:A central lien of a passage from an orifice 13 to a liquid chamber is bent at least a part. That is, the passage is composed of a passage 11 from the orifice 13 to a rear part of a thermal resistor 10, and a L character bent passage 12 connected to a flow chamber. Since the rear part of the thermal resistor 10 becomes a passage wall 14 therefore, a pressure wave having run away in a direction to the liquid chamber is reflected by the wall to advance in a direction to the orifice. Further, by changing a distance d from the rear end of the thermal resistor 10 to the wall 14 of the passage, a time lag of the reflected pressure wave can be adjusted. Since relief of the pressure wave in the direction to the liquid chamber is decreased thereby, discharge efficiency is improved, and operation by low energy can be achieved.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a liquid jet recording device, and more particularly to a head section of a bubble jet printer.

The non-impact recording method has recently attracted attention because the noise generated during recording is so small that it can be ignored. Among them, high-speed recording is possible,
However, the so-called inkjet recording method, which allows recording on plain paper without the need for special fixing treatment, is an extremely powerful recording method, and various methods have been proposed, improved, and commercialized. Some have been developed, and efforts are still being made to put them into practical use.

In this type of inkjet recording method, recording is performed by causing droplets of a recording liquid called ink to fly and adhere to a recording member. There are several types of methods depending on the control method used to control the flight direction of the generated recording liquid droplets.

First, the first method is disclosed in, for example, US Pat. No. 3,060,429 (Teletype method).
The generation of small droplets of recording liquid is carried out by electrostatic attraction,
The generated recording liquid droplet is controlled by an electric field according to the recording signal,
Recording is performed by selectively depositing recording liquid droplets onto a recording member.

To explain this in more detail, an electric field is applied between the nozzle and the accelerating electrode to eject a negatively charged recording liquid droplet from the nozzle, and the ejected recording liquid droplet is converted into a recording signal. Accordingly, the droplet is caused to fly between x and y deflection electrodes configured to be electrically controllable, and the droplet is selectively deposited on the recording member by changing the intensity of the electric field to perform recording.

The second method is a method (Sweet method) disclosed in, for example, U.S. Pat. No. 3,596,275, U.S. Pat. Recording is performed on a recording member by generating droplets with a controlled amount of charge and flying the generated droplets between deflection electrodes to which a negative electric field is applied.

Specifically, the orifice (discharge port) of a nozzle, which is a part of the recording head to which the piezo vibrating element is attached.
A charged electrode configured to have a recording signal applied thereto is arranged at a predetermined distance in front of the piezo vibrating element, and an electric signal of a constant frequency is applied to the piezo vibrating element to mechanically vibrate the piezo vibrating element, A small droplet of recording liquid is ejected from the ejection port. At this time, charges are electrostatically induced in the recording liquid droplet discharged by the charging electrode, and the droplet is charged with an amount of charge corresponding to the recording signal. When a droplet of recording liquid with a controlled amount of charge flies between deflection electrodes to which a constant electric field is uniformly applied, it is deflected according to the amount of charge applied.
Only the droplets carrying the recording signal are allowed to deposit on the recording member.

The third method is, for example, the method disclosed in U.S. Pat. No. 3,416,153 (Hertz method),
In this method, an electric field is applied between a nozzle and a ring-shaped charged electrode, and small droplets of recording liquid are generated and atomized using a continuous vibration generation method to perform recording. That is, in this method, the atomization state of droplets is controlled by modulating the electric field intensity applied between the nozzle and the charging electrode in accordance with the recording signal, and the gradation of the recorded image is produced.

The fourth method is, for example, the method disclosed in US Pat. No. 3,747,120 (Stemme method), and this method is fundamentally different in principle from the above three methods.

That is, in all three methods, the droplets of recording liquid ejected from the nozzle are electrically controlled while they are in flight, and the droplets carrying the recording signal are selectively attached to the recording member. In contrast, this Stemme method
Recording is performed by ejecting small droplets of recording liquid from an ejection port in response to a recording signal.

In other words, the Stemme method applies an electrical recording signal to a piezo vibrating element attached to a recording head that has an ejection port for discharging recording liquid, and converts this electrical recording signal into mechanical vibration of the piezo vibrating element. In this method, recording is performed by ejecting small droplets of recording liquid from the ejection opening according to the mechanical vibrations and adhering them to the recording member.

These four conventional methods each have their own advantages, but there are also points that can be solved in the other method.

That is, in the first to third methods, the direct energy for generating droplets of the recording liquid is electrical energy, and the deflection control of the droplets is also electric field control.

Therefore, although the first method is simple in structure, it requires a high voltage to generate droplets, and it is difficult to use a multi-nozzle recording head, making it unsuitable for high-speed recording.

The second method allows the recording head to have multiple nozzles and is suitable for high-speed recording, but it has a complicated structure, and the electrical control of recording liquid droplets is sophisticated and difficult, and satellite dots are placed on the recording member. There are problems such as easy occurrence of.

The third method has the advantage of being able to record images with excellent gradation by atomizing recording liquid droplets, but on the other hand, it is difficult to control the atomization state and fog occurs in the recorded image. In addition, it is difficult to create a multi-nozzle recording head.
There are various problems such as being unsuitable for high-speed recording.

The fourth method has relatively many advantages compared to the first to third methods. In other words, the structure is simple, and since recording is performed by ejecting recording liquid from the ejection opening of the nozzle on-demand, it is possible to reduce the number of small droplets that fly as in the first to third methods. Second, there is no need to collect droplets that are not needed to record an image, and unlike the first and second methods, there is no need to use a conductive recording liquid, and the material of the recording liquid is It has great advantages such as a high degree of freedom. On the other hand, on the other hand, it is difficult to make a recording head with multiple nozzles due to problems in processing the recording head, and it is extremely difficult to miniaturize a piezoelectric vibrating element having a desired resonance number. This method has disadvantages such as that it is not suitable for high-speed recording because the recording liquid droplets are ejected into flight using the mechanical energy of the mechanical vibration of the piezoelectric vibrating element.

Furthermore, Japanese Patent Application Laid-Open No. 48-9622 (corresponding to the above-mentioned US Pat. No. 3,747,120) discloses, as a modification,
It is described that thermal energy is used instead of using mechanical vibration energy by means such as the piezo vibration element described above.

That is, the above-mentioned publication describes a so-called bubble jet liquid jet recording device that uses a heating coil that directly heats liquid as a pressure increasing means instead of a piezo vibrating element to generate steam that causes a pressure increase. There is.

However, in the above publication, the liquid ink in the bag-shaped ink chamber (liquid chamber), which has only one opening through which liquid ink can go in and out, is directly heated and vaporized by energizing the heating coil as a pressure increasing means. However, there is no suggestion as to how to heat the liquid when continuously and repeatedly discharging the liquid. In addition, the heating coil is located at the deepest part of the bag-shaped liquid chamber far from the liquid ink supply path, which makes the head structure complicated and requires continuous high-speed printing. It is not suitable for repeated use.

Moreover, with the technical content described in the above-mentioned publication, it is not possible to quickly prepare for the next liquid discharge after discharging the liquid using the generated heat, which is of paramount importance in practical use.

As described above, conventional methods have advantages and disadvantages in terms of structure, high-speed recording, multi-nozzle recording heads, generation of satellite dots, and fogging of recorded images. There was a restriction that it could only be applied.

Japanese Patent Publication No. 62-59672 describes an inkjet recording head in which an ink flow path is composed of an orifice section, an ink discharge section, an action section, and an ink supply path section, in which an ink formed of a cured layer of a photosensitive resin is used. Along the channel groove,
A method is disclosed in which an ink channel is formed by providing a cover member over the ink channel groove of a base body in which an active element for ejecting liquid is provided.

Furthermore, Japanese Patent Publication No. 63-6357 discloses an inkjet recording device that ejects liquid by the action of thermal energy, which has a heat acting part in which a recess is formed, and a vector on an axis parallel to the ejection direction and the vector or It is disclosed that the included angle ψ formed by a vector on a line perpendicular to the heat generating surface passing through a point where the extension line intersects with the heat generating surface of the heat generating element is 45° or less.

Furthermore, Japanese Patent Application Laid-open No. 58-8658 discloses that in an inkjet recording device that ejects liquid by the action of thermal energy, a wall surface of a liquid flow path has an ejection port at the end in the direction in which the liquid flows, and is bent in the middle. It is disclosed that the main part of the photosensitive resin is formed by curing a photosensitive resin.

Furthermore, Japanese Patent Application Laid-Open No. 59-138460 discloses that, regarding a liquid jet recording device that uses thermal energy, a separation wall that isolates adjacent heat-effecting surfaces and/or discharge ports is used to prevent liquid from flowing in the vicinity of the heat-effecting surface. It is disclosed that the flow path is installed in a shape that does not have a constant width.

The invention described in the above-mentioned Japanese Patent Publication No. 62-59672 uses a cured layer of photosensitive resin as a method for forming ink channels, which facilitates high-density microfabrication and forms channels with high yield. This is an extremely excellent technique. The present invention can also be manufactured more easily by using this technique, and even in mass production, the yield can be improved and costs can be reduced.

In addition, the main purpose of the invention described in the above-mentioned Japanese Patent Publication No. 63-6357 is to improve ejection efficiency, ejection response or ejection stability, and long-term continuous recording performance, and it is also compatible with high-density multi-orifice formation. can. However, it requires a supply channel plate, a discharge channel plate, and a discharge orifice plate, which increases the number of parts. Therefore, the number of steps increases, and in order to manufacture a multi-orifice with high density (for example, higher density than 16 orifices/mm), it is difficult to position each orifice. Furthermore, if the supply flow path plate and the discharge plate are made of the same material, techniques such as etching, electron beam processing, or laser processing are required, so distortion of the liquid flow path due to the difference in etching rate and the inner wall surface of the flow path may be avoided. It is not suitable for mass production because it has problems such as roughness, it is difficult to obtain a liquid flow path with constant flow path resistance, the ink ejection characteristics tend to vary, and the number of manufacturing steps is large.

Further, the invention described in JP-A-58-8658 is characterized in that, in order to solve the above-mentioned drawbacks, the main part of the wall surface of the channel is formed by curing a photosensitive resin. However, since both the ink channel groove and the ejection port are formed of photosensitive resin, the resins must be bonded together. Therefore, when bonding resins together, if the laminating pressure of the dry film photoresist is too high, sagging will occur, and if it is too low, the adhesion will be poor. This has an adverse effect on the ink ejection characteristics, and when mass-produced, variations are likely to occur.

Above, Japanese Patent Publication No. 63-6357 and Japanese Patent Publication No. 58-8
The head structure described in Publication No. 658 is a so-called side-shooter type head in which the flow path communicating with the discharge port is bent in the thickness direction of the substrate, and the heating surface of the heating resistor faces toward the discharge orifice. . On the other hand, since the flow path according to the present invention is in the same plane on the substrate, its head structure is fundamentally different from that of the side-shooter type, and its manufacturing efficiency is lower than that of the side-shooter type. is extremely simple.

Furthermore, the invention described in Japanese Patent Application Laid-Open No. 138460/1983 is for improving the fidelity, reliability, and durability of the response to a recording signal, and is similar in structure to the present invention. However, the aims are completely different.

The present invention has been made in view of the above-mentioned circumstances.
This was done for the purpose of improving ejection efficiency and ejection stability, and furthermore, providing a liquid jet recording device that is low-cost and can be mass-produced.

In order to achieve the above object, the present invention contains a recording liquid to be introduced, generates bubbles in the recording liquid by heat, and uses thermal energy to generate an acting force as the volume of the bubbles increases. a flow path provided with an acting portion; an orifice communicating with the flow path to cause the recording liquid to be ejected as droplets by the acting force; and an orifice communicating with the flow path to introduce the recording liquid into the flow path. A liquid jet recording device comprising a liquid chamber for recording and an introduction means for introducing recording liquid into the liquid chamber, characterized in that a center line of a flow path from the orifice to the liquid chamber is curved at least in part. This is what I did. Hereinafter, the present invention will be explained based on examples.

First, the principle of ink ejection by Bubble Jets 1 to 1 will be explained based on FIG. 2. (,) is a steady state, and the surface tension of the ink 30 and external pressure are in equilibrium on the orifice surface.

In (b), the heater 29 is heated until the surface temperature of the heater 29 rises rapidly and a boiling phenomenon occurs in the adjacent ink layer, and microbubbles 31 are scattered.

(Q) shows a state in which the adjacent ink layer that is rapidly heated on the entire surface of the heater 29 is instantaneously vaporized to form a boiling film, and the bubbles 31 grow. At this time, the pressure inside the nozzle increases by the amount of bubble growth, and the balance with the external pressure on the orifice surface is lost, causing an ink column to begin to grow from the orifice.

(d) shows a state in which the bubble has grown to its maximum, and ink 30 corresponding to the volume of the bubble is pushed out from the orifice surface. At this time, no current is flowing through the heater 29, and the surface temperature of the heater 29 is decreasing. The maximum value of the volume of the bubble 31 is slightly delayed from the timing of electric pulse application.

(e) shows a state in which the bubbles 31 are cooled by ink or the like and begin to contract. At the tip of the ink column, it moves forward while maintaining the extruded speed, and at the rear end, the ink flows backward from the orifice surface into the nozzle due to the decrease in nozzle internal pressure as the bubbles contract, creating a constriction in the ink column. .

In (f), the air bubbles 31 are further contracted, the ink comes into contact with the heater surface, and the heater surface is cooled even more rapidly. At the orifice surface, the external pressure is higher than the nozzle internal pressure, so the meniscus is largely moving into the nozzle. The tip of the ink column becomes a droplet and drops 5 to 1 droplets toward the recording paper.
It is flying at a speed of 0 m/see.

In (g), the air bubbles have completely disappeared in the process of refilling the orifice with ink by capillary action and returning to the state of (a). 32 is a flying ink droplet.

Here, from (C) to (d) in Figure 2, that is, from the time when the bubbles begin to grow until they reach the maximum, the pressure waves that occur as the bubbles are generated and grow will advance in the direction of the orifice in the nozzle. In addition, the ink also advances in the direction of the ink supply side and further in the direction of the flow path.

The present invention focuses on this pressure wave and forms a flow path so that the pressure wave efficiently travels toward the orifice of the nozzle.

FIG. 3 is a perspective view of the bubble jet recording head, and FIG. 4 is an exploded configuration diagram of the recording head. (,) is a lid substrate, (b)
) is a diagram showing the heating element substrate, and FIG. 5 is a back view of the lid substrate shown in FIG. 4(a). In the figure, 21 is a lid substrate, 22
2 is a heating element substrate, 23 is a recording liquid inlet, 24 is an orifice, 25 is a channel, 26 is a region for forming a liquid chamber, 2
7 is an individual (independent) electrode, 28 is a common electrode, and 29 is a heating element (heater).

FIG. 1 is a configuration diagram for explaining an embodiment of the spacing part of the liquid jet recording apparatus according to the present invention, in which (a) shows an L-shaped flow path, and (b) shows a flow path. The width of the array is minimized.

In the figure, 10 is a heating resistor, 11 and 12 are flow channels, 13 is an orifice, and 14 is a flow channel wall (shaded portion in the figure).

Flow path 1 from the orifice 13 to the rear part of the heating resistor 10
1 and an L-shaped flow path 12 communicating with a flow chamber. Therefore, since the rear part of the heat generating resistor 10 is the flow path wall 14, pressure waves that conventionally escaped toward the ink supply side, that is, toward the liquid chamber, are reflected by the wall and proceed toward the orifice, reducing the pressure. Wave loss is reduced and ink can be ejected efficiently.

In addition, by changing the distance d between the rear end of the heating resistor and the flow path wall 14, the time delay of the reflected pressure wave can be adjusted, so that the bubble suction caused by the negative pressure generated when the bubble contracts can be adjusted. It is possible to prevent this and to adjust the way the ejected ink column is constricted, and by optimally selecting the distance d, it is possible to eject stable ink.

Furthermore, since the flow path 12 from the liquid chamber side is bent in an L-shape up to the heating resistor 10, mutual interference between adjacent flow paths can be prevented.

Furthermore, by adopting the structure shown in FIG. 1(b), it is possible to arrange the nozzles at a higher density (for example, higher density than 16 nozzles/mm).

Next, a method for manufacturing a head portion of a liquid jet recording apparatus using the present invention will be described based on FIG.

FIG. 6 is a partial view of the bubble jet liquid jet recording head, in which (a) is a front partial view seen from the orifice side;
b) is a partial view cut along the dashed-dotted line xx in (a).

The recording head 41 shown in these figures has a predetermined number of grooves of a predetermined width and depth at a predetermined linear density on a substrate 43 on which an electrothermal transducer 42 is provided. By bonding the grooved plate 44 so as to cover the substrate 43, a liquid discharge portion 46 including an orifice 45 for ejecting liquid is formed.

The liquid discharge part 46 has a heat acting part 47 where the thermal energy generated by the orifice 45 and the electrothermal converter 42 acts on the liquid to generate bubbles and cause a sudden change in state due to expansion and contraction of the volume. and has.

The heat acting part 47 is located above the heat generating part 48 of the electrothermal converter 42, and has a heat acting surface 49, which is a surface of the heat generating part 48 that comes into contact with the liquid, as its bottom surface. The heat generating section 48 is
It is composed of a lower layer 50 provided on the base 43, a heating resistance layer 51 provided on the lower layer 50, and an upper layer 52 provided on the heating resistance layer 51.

The heating resistance layer 51 is provided with electrodes 53 and 54 on its surface for supplying electricity to the heating resistance layer 51 in order to generate heat, and the heating resistance layer between these electrodes causes the heat generating portion 48 to It is formed.

The electrode 53 is an electrode common to the heat generating section of each liquid discharging section, and the electrode 54 is a selection electrode for selectively generating heat in the heat generating section of each liquid discharging section. It is provided along the flow path.

The upper layer 52 isolates the heat generating resistor layer 51 from the liquid in the liquid discharge part 46 in order to chemically and physically protect the heat generating resistor layer 51 from the liquid used, and also provides a connection between the electrodes 53 and 54 through the liquid. It has the protective function of the heating resistance layer 51 to prevent short circuits.

The upper layer 52 has the above-mentioned functions, but
If the heat generating resistor layer 51 is liquid resistant and there is no need for an electrical short circuit between the electrodes 53 and 54 through the liquid, it is not necessarily necessary to provide it, and the surface of the heat generating resistor layer 51 may immediately come into contact with the liquid. It may be designed as an electrothermal converter with a structure that

The lower layer 50 has a heat flow control function, that is, when ejecting droplets, the heat generated in the heat generating resistor layer 51 is transferred to the substrate 43.
The proportion of conduction toward the heat-effecting portion 47 side is increased as much as possible than the conduction toward the side, and after the droplet is ejected, that is, after the electricity to the heat-generating resistor layer 51 is turned off, the heat-effecting portion 4
7 and the heat generating part 48 is quickly released to the substrate 43 side, and the liquid in the heat acting part 47 and the generated bubbles are rapidly cooled.

Useful materials for forming the heating resistance layer 51 include, for example, tantalum-3iO□ mixture, tantalum nitride, nichrome, silver-palladium alloy, silicon semiconductor,
Alternatively, borides of metals such as hafnium, lanthanum, zirconium, titanium, tantalum, tungsten, molybdenum, niobium, chromium, and vanadium may be mentioned.

Among these materials constituting the heating resistance layer 51, metal borides are particularly excellent, and among them, hafnium boride has the best properties.
This is followed by zirconium boride, lanthanum boride, tantalum boride, vanadium boride, and niobium boride.

The heat generating resistor layer 51 can be formed using the above-mentioned materials by techniques such as electron beam evaporation and sputtering. The thickness of the heating resistor layer 51 is determined in accordance with its area, material, shape and size of the heat acting part, and actual power consumption, etc. so that the amount of heat generated per unit time is as desired. However, in the normal case, 0.001
~5 μm, preferably 0.01 to 1 μm.

As the material constituting the electrodes 53 and 54, many commonly used electrode materials can be effectively used, and specifically, for example, AQ, Ag, and Au.

Examples include Pt, Cu, etc., and these are used to provide a predetermined size, shape, and thickness at a predetermined position by a method such as vapor deposition.

The characteristics required of the protective layer 53 are that it protects the heat generating resistor layer 51 from the recording liquid without interfering with the effective transfer of the heat generated by the heat generating resistor layer 51 to the recording liquid. Examples of useful materials for forming the protective layer 53 include silicon oxide, silicon nitride, magnesium oxide, aluminum oxide, tantalum oxide, and zirconium oxide, which can be prepared using techniques such as electron beam evaporation and sputtering. It can be formed by The thickness of the protective layer 53 is normally 0.01 to 10 μm, preferably 0.1 to 5 μm, and most preferably 0.1 to 3 μm.

A grooved plate 44 as shown in FIG. 6 can be used to form desired ink chambers and channels by directly etching the glass top plate.

When photosensitive glass is used for the top plate, when the photosensitive glass is exposed to light in the pattern of the desired ink chamber flow path, only the exposed areas become opalescent. This opalescent glass portion can be etched with dilute hydrofluoric acid. The top plate is not limited to the above-mentioned glass, but may also be made of ceramic, resin, or metal; however, in order to connect it to the heater board, the top plate must be laminated with an adhesive material, or the top plate itself must be laminated with an adhesive material. Preferably one with.

Further, as shown in FIG. 7, it can be manufactured as follows using a photosensitive dry film.

In the figure, 61 is a substrate, 62 is a heating resistor, 63 is a protective film,
64 is a photosensitive dry film, and 65 is a top plate.

66 is an adhesive layer, and 67 is a flow path.

A photosensitive dry film 64 is laminated on a heater board (substrate) 61, a mask patterned to obtain the desired flow path and ink chamber is placed on top of the mask, and exposure is performed from above (FIG. 7a).

b). The exposed portion of the photosensitive dry film 64 undergoes a photopolymerization reaction and is cured. Therefore, when development is performed after exposure, the unexposed portions are dissolved and removed, forming channel walls 64p (FIG. 7C).

Next, it is bonded to a glass top plate 65 via an adhesive layer 66.

This glass top plate 65 is drilled in a portion corresponding to an ink chamber (not shown), and a supply port for supplying ink to the ink chamber is formed (FIG. 7d).

Further, when forming the walls of the ink chamber and the flow path, instead of laminating the photosensitive dry film on the nozzle substrate side as described above, it can also be formed by laminating it on the glass top plate side.

The present inventors conducted the following experiment based on the above manufacturing method, as shown in FIG. That is, FIG. 8 is a configuration diagram of the heat acting section of the recording head according to the present invention, and in the figure, 101
1 is a Si substrate, 102 is a lower layer, 103 is a heating resistance layer, 1
04 is an electrode, 105 is a first protective layer, 106 is a second protective layer, 107 is a resin layer, and 108 is a heat acting surface.

Sj,02 is 5 as the lower layer 102 on the Si substrate 101.
After sputtering with a thickness of μm, photolithography technology,
Using etching technology, sputtering technology, etc., as the heating resistor N103, Ta・SjO
In FIG. 9, the shapes are a=19 μm and b=40 μm.

Next, as the first protective layer 105, 5000% SiC2
sputtering to a thickness of about 100 yen, and then a second protective layer 1
As 06, 513N4 was sputtered to a thickness of 5000 mm, and resin M was patterned only on the area where AQ was laminated to form a heater board.

A photosensitive dry film is laminated on the heater board, and c=17 μm in the desired ink chamber and in FIG.
A channel wall having a diameter of d=3 μm is formed by the manufacturing method shown in FIG. Next, it is bonded to the glass top plate via an adhesive layer. A discharge port is formed by cutting this substrate with a slicer.

When the ejection state of flying ink droplets was measured using the ejection element manufactured in this manner, stable ejection was obtained without mutual interference even when adjacent nozzles were driven simultaneously.

As is clear from the above description, the present invention has the following effects.

(1) Since the escape of pressure waves toward the liquid chamber is reduced, discharge efficiency is improved and energy can be reduced.

(2) Since adjacent nozzles are less susceptible to mutual interference, air bubbles can be prevented from being sucked in, and stable ink can be ejected, high image quality can be obtained.

(3) Since the structure is simple, it can be manufactured in exactly the same process as the conventional flow path forming process, and high density nozzles (for example, higher than 16 nozzles/mm) and mass production are possible.

[Brief explanation of drawings]

FIGS. 1(a) and 1(b) are block diagrams of the head section of a liquid jet recording apparatus according to the present invention, and FIG. 2 is a principle diagram for explaining ink ejection from the recording head and the generation and disappearance of bubbles. , FIG. 3 is a perspective view of the recording head, FIG. 4 is an exploded configuration diagram of the recording head, where (a) shows the lid substrate, (b) shows the heating element substrate, and FIG. 5 shows the recording head. Back view of the lid substrate, No. 6
The figures are partial views of the recording head, (a) is a front partial view as seen from the orifice side of the head, (b) is a partial view taken along line X-X of (a), and Figure 7 shows the fabrication of the recording head. FIG. 8 is a diagram for explaining the process, and FIG. 8 is a diagram showing the configuration of the heat acting section of the head. FIG. 9 is a diagram showing the shape and dimensions of the head section of the liquid jet recording apparatus according to the present invention. 10...Heating resistor, 11.12...Flow path, 13.
... Orifice, 14... Channel wall. Patent applicant Rico Co., Ltd.

Claims (1)

[Claims] 1. A flow path that accommodates the recording liquid to be introduced and is provided with a thermal energy acting section that generates bubbles in the recording liquid by heat and generates an acting force as the volume of the bubbles increases; an orifice that communicates with the flow path to eject the recording liquid as a droplet using the acting force; a liquid chamber that communicates with the flow path and introduces the recording liquid into the flow path; What is claimed is: 1. A liquid jet recording device comprising an introduction means for introducing liquid, wherein a center line of a flow path from the orifice to the liquid chamber is curved at least in part.