JPH02281669A - Direct current excitation gas laser oscillation device - Google Patents
Direct current excitation gas laser oscillation deviceInfo
- Publication number
- JPH02281669A JPH02281669A JP10267989A JP10267989A JPH02281669A JP H02281669 A JPH02281669 A JP H02281669A JP 10267989 A JP10267989 A JP 10267989A JP 10267989 A JP10267989 A JP 10267989A JP H02281669 A JPH02281669 A JP H02281669A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- oscillation device
- laser
- laser oscillation
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 title claims abstract description 13
- 230000005284 excitation Effects 0.000 title claims 2
- 238000007599 discharging Methods 0.000 claims abstract 2
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 230000007423 decrease Effects 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は放電管の軸方向と光軸方向が一致したガスレー
ザ発振装置に関するものであり、特に最モ容易にレーザ
ビーム横モードを可変できるようにしたガスレーザ発振
装置に関するものである。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction are aligned, and in particular, the laser beam transverse mode can be varied most easily. This invention relates to a gas laser oscillation device.
従来の技術
従来のガスレーザ発振装置は、第２図に示すものであっ
た。この図に於て、１はガラスなどの誘電体よりなる放
電管であり、２．３は前記放電管１の内部に設けられた
金属電極である。４は前記電極２．３に接続された高電
圧電源であり、たとえば３０ＫＶの電圧を画電極２．３
間に印加している。５は前記電極２．３間にはさまれた
放電管１内の放電空間である。６は全反射鏡であり、こ
の全反射鏡６９部分反射鏡７は前記放電空間５の両端に
固定配置され、光共振器を形成している。2. Description of the Related Art A conventional gas laser oscillation device is shown in FIG. In this figure, 1 is a discharge tube made of a dielectric material such as glass, and 2 and 3 are metal electrodes provided inside the discharge tube 1. 4 is a high voltage power supply connected to the electrode 2.3, which applies a voltage of, for example, 30 KV to the picture electrode 2.3.
is applied in between. 5 is a discharge space within the discharge tube 1 sandwiched between the electrodes 2.3. Reference numeral 6 denotes a total reflection mirror, and the total reflection mirror 69 and the partial reflection mirror 7 are fixedly arranged at both ends of the discharge space 5 to form an optical resonator.
８は前記部分反射鏡７よ°多出力されるレーザビームで
ある。矢印９はレーザガスの流れる方向を示しておシ、
第２図に示すような軸流型レーザ装置の中を循環してい
る。１０は送気管であり、１１゜１２は前記放電空間５
にて放電及び°送風機により温度上昇したレーザガスの
温度を下げるための熱交換器、１３はレーザガスを循環
させるための送風機である。Reference numeral 8 denotes a laser beam which is output multiple times by the partial reflecting mirror 7. Arrow 9 indicates the direction in which the laser gas flows.
It circulates in an axial flow type laser device as shown in FIG. 10 is an air pipe, 11° 12 is the discharge space 5
13 is a heat exchanger for lowering the temperature of the laser gas whose temperature has been increased by the discharge and the blower; and 13 is a blower for circulating the laser gas.
なお、送風機１３により放電区間５にて約１００ｍ／ｓ
ｅｃ程度のガス流を得る必要がある。In addition, approximately 100 m/s in the discharge section 5 by the blower 13
It is necessary to obtain a gas flow of about EC.
以上が従来の軸流型レーザ装置の構成であり、次にその
動作について説明する。The above is the configuration of the conventional axial flow type laser device, and the operation thereof will be explained next.
まず一対の金属電極２．３に高電圧電源４から高電圧を
印加し、放電空間５にグロー状の放電を発生させる。放
電空間５を通過するレーザガスは、この放電エネルギー
を得て励起され、その励起されたレーザガスは全反射鏡
ｅおよび部分反射鏡７により形成された光共振器で共振
状態となシ、部分反射鏡７からレーザビーム８が出力さ
れる。このレーザビーム８がレーザ加工等の用途に用い
られる。First, a high voltage is applied from the high voltage power supply 4 to the pair of metal electrodes 2.3 to generate a glow-like discharge in the discharge space 5. The laser gas passing through the discharge space 5 is excited by obtaining this discharge energy, and the excited laser gas enters a resonant state in the optical resonator formed by the total reflection mirror e and the partial reflection mirror 7. A laser beam 8 is output from 7. This laser beam 8 is used for purposes such as laser processing.
特に、加工用途によっては、瞬時に横モードを切り替え
ることが必要になる。In particular, depending on the processing application, it is necessary to instantly switch the transverse mode.
発明が解決しようとする課題
上記の構成では、レーザビームの横モード上放電管１の
管内径及び全反射鏡６０部分反射鏡７の曲率によって支
配される。Problems to be Solved by the Invention In the above configuration, the transverse mode of the laser beam is controlled by the tube inner diameter of the discharge tube 1 and the curvature of the total reflection mirror 60 and the partial reflection mirror 7.
従って、従来は瞬時に横モードを可変することが不可能
であった。Therefore, conventionally it has been impossible to change the transverse mode instantaneously.
この発明は、かかる課題を解決するためになされたもの
で、電気的に瞬時に横モードを可変できるガスレーザ発
振装置を提供することを目的とする。The present invention was made to solve this problem, and an object of the present invention is to provide a gas laser oscillation device that can electrically change the transverse mode instantaneously.
課題を解決するだめの手段
本発明は、上記課題を解決するために放電管内の放電領
域を電気”的に増減し横モードを瞬時に変化可能なガス
レーザ発振装置としたものである。Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a gas laser oscillation device that can electrically increase or decrease the discharge area within the discharge tube and instantly change the transverse mode.
作 用
この発明における横モードを瞬時に切り替えることによ
り、異なる加工作業間の時間損失が大幅に削減できる。Operation By instantaneously switching the transverse mode in this invention, time loss between different machining operations can be significantly reduced.
実施例
第１図は、本発明の実施例であり、第２図と同一の構成
物に対し同一番号を付しである。２本の放電管１．１の
片方の放電をスイッチ１５．１５’の一方をＯＦＦして
電気的に切る（例えば放電電流を切る）と、その放電管
１．１内のガスの吸収により全体の利得が低下して、で
てくるレーザビームの横モードが変化される。Embodiment FIG. 1 shows an embodiment of the present invention, and the same components as in FIG. 2 are given the same numbers. When the discharge of one of the two discharge tubes 1.1 is electrically cut off by turning off one of the switches 15.15' (for example, cutting off the discharge current), the entire discharge tube 1.1 is absorbed by the gas inside the discharge tube 1.1. The gain of the laser beam is reduced and the transverse mode of the emerging laser beam is changed.
発明の効果
以上のように、この発明によれば放電管内の放電領域を
電気的に制御することにより瞬時に横モード切υ替え可
能なガスレーザ発振装置を提供でき、加工時間を大幅に
短縮可能となυランニングコストの安い経済的なレーザ
加工に優れた効果を発揮する。Effects of the Invention As described above, according to the present invention, it is possible to provide a gas laser oscillation device that can instantly switch the transverse mode by electrically controlling the discharge area within the discharge tube, and it is possible to significantly shorten the machining time. Demonstrates excellent effectiveness in economical laser processing with low running costs.
第１図は本発明の一実施例を示す直流励起ガスレーザ発
振装置の回路図およびレーザビームの横モード形状を示
す図、第２図は従来の直流励起ガスレーザ発振装置の回
路図である。
１・・・・・・放電管、２，３・・・・・・電極、４・
・・・・・高電圧電源、５・・・・・・放電空間、８・
・・・・・レーザビーム、１５．１５’・・団・スイッ
チ。
代理人の氏名 弁理士 粟 野 重 孝 ほか１名（故
ｔ【間２μＮ）
（原質【聞）本θＮ）FIG. 1 is a circuit diagram of a DC-excited gas laser oscillation device according to an embodiment of the present invention and a diagram showing the transverse mode shape of a laser beam, and FIG. 2 is a circuit diagram of a conventional DC-excited gas laser oscillation device. 1... Discharge tube, 2, 3... Electrode, 4...
...High voltage power supply, 5...Discharge space, 8.
...Laser beam, 15.15'...group switch. Name of agent: Patent attorney Shigetaka Awano and 1 other person (late t [duration 2 μN) (original material [listen] θN)
Claims (2)
スを流し、前記放電管内の両端に設けられた金属電極間
に直流高電圧を印加し、前記放電管内に直流放電を発生
させ、この直流放電をレーザ励起源として前記放電管の
軸方向にレーザビームを発生する直流励起ガスレーザ発
振装置において、前記放電管内の直流放電領域を増減さ
せることによりレーザビームの横モードを変化可能とし
たことを特徴とする直流励起ガスレーザ発振装置。(1) A laser gas is caused to flow in the optical axis direction inside a discharge tube made of an insulator, and a DC high voltage is applied between metal electrodes provided at both ends of the discharge tube to generate a DC discharge inside the discharge tube. A DC-excited gas laser oscillation device that generates a laser beam in the axial direction of the discharge tube using discharge as a laser excitation source, characterized in that the transverse mode of the laser beam can be changed by increasing or decreasing the DC discharge area within the discharge tube. DC pumped gas laser oscillation device.
ドに応じて放電する放電管数を電気信号により制御可能
とした特許請求の範囲第１項記載の直流励起ガスレーザ
発振装置。(2) The DC-excited gas laser oscillation device according to claim 1, wherein a plurality of the discharge tubes are provided in the axial direction, and the number of discharge tubes discharging according to various transverse modes can be controlled by electric signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10267989A JPH02281669A (en) | 1989-04-21 | 1989-04-21 | Direct current excitation gas laser oscillation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10267989A JPH02281669A (en) | 1989-04-21 | 1989-04-21 | Direct current excitation gas laser oscillation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02281669A true JPH02281669A (en) | 1990-11-19 |
Family
ID=14333922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10267989A Pending JPH02281669A (en) | 1989-04-21 | 1989-04-21 | Direct current excitation gas laser oscillation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02281669A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7173954B2 (en) | 2002-12-10 | 2007-02-06 | Fanuc Ltd | Gas laser oscillation device |
-
1989
- 1989-04-21 JP JP10267989A patent/JPH02281669A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7173954B2 (en) | 2002-12-10 | 2007-02-06 | Fanuc Ltd | Gas laser oscillation device |
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