JPH0228095U - - Google Patents

Info

Publication number
JPH0228095U
JPH0228095U JP10552288U JP10552288U JPH0228095U JP H0228095 U JPH0228095 U JP H0228095U JP 10552288 U JP10552288 U JP 10552288U JP 10552288 U JP10552288 U JP 10552288U JP H0228095 U JPH0228095 U JP H0228095U
Authority
JP
Japan
Prior art keywords
infrared heaters
heated
large number
air injection
injection ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10552288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH038955Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10552288U priority Critical patent/JPH038955Y2/ja
Publication of JPH0228095U publication Critical patent/JPH0228095U/ja
Application granted granted Critical
Publication of JPH038955Y2 publication Critical patent/JPH038955Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)
JP10552288U 1988-08-10 1988-08-10 Expired JPH038955Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10552288U JPH038955Y2 (enExample) 1988-08-10 1988-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10552288U JPH038955Y2 (enExample) 1988-08-10 1988-08-10

Publications (2)

Publication Number Publication Date
JPH0228095U true JPH0228095U (enExample) 1990-02-23
JPH038955Y2 JPH038955Y2 (enExample) 1991-03-06

Family

ID=31338213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10552288U Expired JPH038955Y2 (enExample) 1988-08-10 1988-08-10

Country Status (1)

Country Link
JP (1) JPH038955Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014054511A1 (ja) * 2012-10-03 2014-04-10 シャープ株式会社 基板焼成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014054511A1 (ja) * 2012-10-03 2014-04-10 シャープ株式会社 基板焼成装置

Also Published As

Publication number Publication date
JPH038955Y2 (enExample) 1991-03-06

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