JPH0228095U - - Google Patents

Info

Publication number
JPH0228095U
JPH0228095U JP10552288U JP10552288U JPH0228095U JP H0228095 U JPH0228095 U JP H0228095U JP 10552288 U JP10552288 U JP 10552288U JP 10552288 U JP10552288 U JP 10552288U JP H0228095 U JPH0228095 U JP H0228095U
Authority
JP
Japan
Prior art keywords
infrared heaters
heated
large number
air injection
injection ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10552288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH038955Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10552288U priority Critical patent/JPH038955Y2/ja
Publication of JPH0228095U publication Critical patent/JPH0228095U/ja
Application granted granted Critical
Publication of JPH038955Y2 publication Critical patent/JPH038955Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)
JP10552288U 1988-08-10 1988-08-10 Expired JPH038955Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10552288U JPH038955Y2 (enrdf_load_stackoverflow) 1988-08-10 1988-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10552288U JPH038955Y2 (enrdf_load_stackoverflow) 1988-08-10 1988-08-10

Publications (2)

Publication Number Publication Date
JPH0228095U true JPH0228095U (enrdf_load_stackoverflow) 1990-02-23
JPH038955Y2 JPH038955Y2 (enrdf_load_stackoverflow) 1991-03-06

Family

ID=31338213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10552288U Expired JPH038955Y2 (enrdf_load_stackoverflow) 1988-08-10 1988-08-10

Country Status (1)

Country Link
JP (1) JPH038955Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014054511A1 (ja) * 2012-10-03 2014-04-10 シャープ株式会社 基板焼成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014054511A1 (ja) * 2012-10-03 2014-04-10 シャープ株式会社 基板焼成装置

Also Published As

Publication number Publication date
JPH038955Y2 (enrdf_load_stackoverflow) 1991-03-06

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