JPH02278537A - Production of optical information recording medium - Google Patents

Production of optical information recording medium

Info

Publication number
JPH02278537A
JPH02278537A JP9928589A JP9928589A JPH02278537A JP H02278537 A JPH02278537 A JP H02278537A JP 9928589 A JP9928589 A JP 9928589A JP 9928589 A JP9928589 A JP 9928589A JP H02278537 A JPH02278537 A JP H02278537A
Authority
JP
Japan
Prior art keywords
medium
lattice
recording
manufacturing
optical recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9928589A
Other languages
Japanese (ja)
Inventor
Takashi Murata
敬 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP9928589A priority Critical patent/JPH02278537A/en
Publication of JPH02278537A publication Critical patent/JPH02278537A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To obtain such a medium that enables control of tracking without pregrooves, can be read out easily and can be manufactured with conventional facilities by forming bits in a fine lattice pattern concentrically or spirally disposed instead of recording in pregrooves and mesh patterns. CONSTITUTION:A glass substrate 11 coated with photoresist 12 is mounted on a turn table 13, and then rotated and irradiated with laser beam L having a slit-shape cross section through a recording lens 19. At the same time, the beam is moved in the radius direction by use of a feed screw 15 to record the bit 21 of spiral or concentrical lattice pattern on the resist 12. Then an electric conductive film is formed thereon by vapor deposition etc., which is then used as an electrode for electroforming to mold a die for the medium. A plastic substrate 25 is then molded with this die by injection molding, on which a metal thin film 27 and protective film 28 of photopolymer are formed to obtain the medium. The bit 21 is flat enough for a laser spot and gives larger difference in reflectance, which can be easily read out.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は光記録情報媒体の製造方法に係り、特に追記型
ディスクに使用される光記録情報媒体の製造方法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing an optical recording information medium, and particularly to a method of manufacturing an optical recording information medium used in a write-once disc.

(従来技術) 従来、追記型光ディスクに使用される光記録方式には透
明な有機膜と金属膜を順次形成した透明基板に基板側か
らレーザー光を照射することにより、金属膜近傍の有機
膜に穴を明け、金属膜を変形させることにより反射率を
変化させたものがある。また、他の光記録方式としては
記録媒体表面の微細構造をレーザー光で照射することに
より変化させ反射率を変える方式、あるいはこれと類似
の方法としてプラスチック基板の表面に、記録スポット
より十分少ない凹凸の微細構造と金属膜を形成し、これ
にレーサー光を照射することにより微細構造を破壊し、
反射率を変化させて追記を可能とした、いわゆる蛾目(
moth Eye ME)ディスク方式等が知られてい
る。
(Prior art) Conventionally, the optical recording method used for write-once optical discs involves irradiating a transparent substrate with a transparent organic film and a metal film sequentially formed thereon with a laser beam from the substrate side. Some reflectance is changed by making holes and deforming the metal film. Other optical recording methods include changing the reflectance by changing the fine structure of the surface of the recording medium by irradiating it with a laser beam, or a similar method is to create a surface with unevenness that is sufficiently smaller than the recording spot on the surface of a plastic substrate. The microstructure and metal film are formed, and the microstructure is destroyed by irradiating it with laser light.
The so-called moth eyes (
The moth Eye ME) disk method is known.

第8図は従来例のMEディスクの製造方法を説明するた
めの斜視図であり、以下図面を用いて説明する。まずガ
ラス基板11上に、あらかじめトラック制御用プリグル
ープパターンを露光現像したフォトレジスト12に2光
束の平行レーサー光20を照射した後、ガラス基板11
を90°回転させて再度平行レーザー光を照射して縦縞
、横縞の後記するメツシュパターンをホログラフィ−法
で露光させる。又上記パターンは4光束の平行レーザー
光を所定の位置から一度に照射してメツシュ状パターン
を形成することも出来る。
FIG. 8 is a perspective view for explaining a conventional ME disk manufacturing method, which will be explained below with reference to the drawings. First, a photoresist 12 on which a pre-group pattern for track control has been exposed and developed in advance on a glass substrate 11 is irradiated with two beams of parallel laser light 20, and then the glass substrate 11 is exposed and developed.
is rotated by 90 degrees and irradiated with parallel laser light again to expose a mesh pattern of vertical stripes and horizontal stripes (to be described later) using the holographic method. Further, the above pattern can also be formed by irradiating four beams of parallel laser light from predetermined positions at once to form a mesh pattern.

第9図はガラス裁板にメツシュパターンとプリグループ
を形成した後の斜視図であり、図中24はメツシュ状パ
ターン、25はプリグループである。第10図は第9図
のI−I切断線に沿った一部拡大断面図である。このメ
ツシュ状パターン24とプリグループ25とが形成され
たフォトレジスト12から、電鋳法により図示しない金
型を作り、この金型を用いて片面に前記メツシュ状パタ
ーン24とプリグループ25が形成されたプラスチック
基板26を形成する。
FIG. 9 is a perspective view after forming a mesh pattern and a pre-group on a glass cutting board, in which 24 is a mesh-like pattern and 25 is a pre-group. FIG. 10 is a partially enlarged sectional view taken along the line II in FIG. 9. A mold (not shown) is made by electroforming from the photoresist 12 on which the mesh pattern 24 and pregroups 25 are formed, and the mesh pattern 24 and pregroups 25 are formed on one side using this mold. A plastic substrate 26 is then formed.

次に第11図の断面図に示す様に、成形されたプラスチ
ック基板26のメツシュ状パターン24及びプリグルー
プ25の面上に白金、ニッケル、クロム等の金属薄膜2
7を蒸着又はスパッタ法にて薄膜として設け、更にその
面上に保護膜28を積層することによりMEディスクを
形成する。
Next, as shown in the cross-sectional view of FIG. 11, a metal thin film 2 of platinum, nickel, chromium, etc.
7 is formed as a thin film by vapor deposition or sputtering, and a protective film 28 is further laminated on that surface to form an ME disk.

第12図は第11図に示すMEディスクの記録・再生を
説明するだめの断面図であり、同図を用いて作用を説明
する。記録レンズ22によって集光したレーサー光を用
いて書込みを行う場合、金属薄膜27が積層されたメツ
シュ状パターン24は光吸収層となり、プラスチック基
板26を透過して照射するレーザー光を吸収し、そのレ
ーザー熱により表面のメツシュパターン24が溶解し、
平坦となり情報記録ピット23を記録することが出来る
FIG. 12 is a cross-sectional view for explaining recording and reproduction of the ME disk shown in FIG. 11, and the operation will be explained using this figure. When writing is performed using the laser light focused by the recording lens 22, the mesh pattern 24 on which the metal thin film 27 is laminated becomes a light absorption layer, absorbing the laser light transmitted through the plastic substrate 26 and absorbing the laser light. The mesh pattern 24 on the surface is melted by the laser heat,
It becomes flat and information recording pits 23 can be recorded.

(発明が解決しようとする課題) 従来の光記録情報媒体の製造方法においては、プリグル
ープ記録とホログラフィ−法によるメツシュ状パターン
記録と二工程を要し、又ホログラフィ−法によるメツシ
ュ状パターンは大面積に微細な凹凸ピットを記録するの
が困難であり大型情報媒体の製造には適さないという問
題点があった。
(Problems to be Solved by the Invention) In the conventional manufacturing method of an optical recording information medium, two steps are required: pregroup recording and mesh-like pattern recording using the holography method, and the mesh-like pattern using the holography method requires a large number of steps. There is a problem in that it is difficult to record minute uneven pits in the area, and it is not suitable for manufacturing large-sized information media.

(課題を解決するための手段) 本発明は上記課題を解決するためになされたものであり
レーサー光を照射して書込みを行う光記録情報媒体の製
造方法において、ガラス盤上に塗布したフォトレジスI
・にレーザー光を照射して微細な格子状ピットを同心円
又はスパイラル状に記録する工程と、前記格子状ピット
が記録されたフォトレジストから電鋳法にて金型を作製
し、プラスチックにより、前記格子状ピットを片面に有
する複製プラスチック基板を作成する工程と、その複製
プラスチック基板に前記格子状ピットを有する面上に金
属薄膜を形成し、その金属薄膜上に保護膜を形成する工
程とから成ることを特徴とする光記録情報媒体の製造方
法を提供しようとするものである。
(Means for Solving the Problems) The present invention has been made to solve the above problems, and is a method of manufacturing an optical recording information medium in which writing is performed by irradiating a laser beam. I
・Process of recording fine lattice-like pits in concentric circles or spirals by irradiating the laser beam, and producing a mold by electroforming from the photoresist on which the lattice-like pits are recorded, and molding the above-mentioned with plastic. The process consists of the steps of creating a replicated plastic substrate having lattice-shaped pits on one side, forming a metal thin film on the surface of the replicated plastic substrate having the lattice-shaped pits, and forming a protective film on the metal thin film. It is an object of the present invention to provide a method for manufacturing an optical recording information medium characterized by the following.

(実施例) 第1図は本発明になる光記録情報媒体の製造方法を説明
するための断面図であり、同図において、11はフォト
レジスト12を塗布したガラス基板、13はターンテー
ブル、14はターンテーブルを回転させるためのモータ
ー 15はターンテーブルを半径方向に移動させるため
のフィードスクリュー Lはレーザー光であり、拡大レ
ンズ15を透過したのち、幅1.8mmのスリット17
により、スリット光とされ、ミラー18を介して記録レ
ンズ19によりターンテーブル上にレーザースポットを
照射される構造になっている。
(Example) FIG. 1 is a cross-sectional view for explaining the method of manufacturing an optical recording information medium according to the present invention. In the figure, 11 is a glass substrate coated with a photoresist 12, 13 is a turntable, and 14 is a motor for rotating the turntable; 15 is a feed screw for moving the turntable in the radial direction; L is a laser beam; after passing through a magnifying lens 15, it passes through a slit 17 with a width of 1.8 mm
The structure is such that a laser spot is irradiated onto the turntable by a recording lens 19 via a mirror 18.

次に製造方法について説明する。まずターンテーブル上
3上にフォトレジストを塗布したガラス基板11を載置
し、モーター14によりターンテーブル13を回転させ
る。次に記録レンズ19を透過したスリット状レーサー
光りを断続的にガラス基板11に照射すると共に、フィ
ードスクリュを作動させることにより、回転するターン
テーブル13を半径方向に移動させ、フォトレジスト]
2上に格子状ピット21をスパイラル又は同心固状に記
録していく。第2図は第1図に示す装置により形成され
た格子状ピットの平面図、第3図は第2図のI−I切断
線に沿った一部断面図であ昇L す、フォトレジスト12上に記録・峡像されたトラック
間ピッチが1,6μmの格子状ピット21を示す。
Next, the manufacturing method will be explained. First, a glass substrate 11 coated with photoresist is placed on the turntable 3, and the turntable 13 is rotated by the motor 14. Next, the glass substrate 11 is intermittently irradiated with the slit-shaped laser light transmitted through the recording lens 19, and the rotating turntable 13 is moved in the radial direction by operating the feed screw, and the photoresist]
2, lattice-like pits 21 are recorded in a spiral or concentric solid pattern. 2 is a plan view of a lattice-like pit formed by the apparatus shown in FIG. 1, and FIG. 3 is a partial cross-sectional view taken along the line II in FIG. 2. A lattice-shaped pit 21 with an inter-track pitch of 1.6 μm is shown recorded and imaged on the top.

次に上記格子状ピッチ2]が記録されたフォトレジスト
12上に、図示しない導電膜を蒸着又はスパッタ法によ
り成膜する。次にこの導電膜を電極として電鋳法により
金型を作成し、この金型を用いて光記録情報媒体の基体
となるプラスチック基板26を射出成型により製造する
。第4図は本発明の製造方法により製造された光記録情
報媒体の断面図であり、以下この媒体の製造方法につい
て述べる。まず射出成型により片面に格子状ピット21
が転写されたプラスチック基板26上に白金、ニッケル
、クロム等の金属薄膜27を、例へば500人の厚さに
蒸着する。次にこの金属薄膜27上にフォトポリマーか
らなる保護膜を成膜することにより光記録情報媒体を得
る。
Next, a conductive film (not shown) is formed by vapor deposition or sputtering on the photoresist 12 on which the lattice pitch 2 is recorded. Next, a mold is created by electroforming using this conductive film as an electrode, and this mold is used to manufacture the plastic substrate 26 that will become the base of the optical recording information medium by injection molding. FIG. 4 is a sectional view of an optical recording information medium manufactured by the manufacturing method of the present invention, and the method for manufacturing this medium will be described below. First, by injection molding, there are lattice-shaped pits 21 on one side.
A thin metal film 27 of platinum, nickel, chromium, or the like is deposited on the plastic substrate 26 onto which is transferred, to a thickness of, for example, 500 mm. Next, a protective film made of photopolymer is formed on this metal thin film 27 to obtain an optical recording information medium.

以下、本発明の製造方法によって得られた光記録情報媒
体の使用法を第5図及び第6図を用いて説明する。記録
に際し記録・再生レンズ22より記録し、レーザースポ
ットをプラスチック基板26側から金属膜27に照射す
ると、熱により格子状ピット21−が熱変形して平坦部
23か形成される。この平坦部23は格子状ピット21
に比較して反射率が大となるから、情報信号を反射率の
差として記録することが出来る。第7図(a)の如く平
坦部23の反射率は高いため入射レーザーの数10%が
反射されるが、格子状ピット21に入射した光は第7図
(b)の様に格子状ピット21によって、回折され反射
率が低下するため、その反射率の差か情報信号として再
生することが出来る。
Hereinafter, how to use the optical recording information medium obtained by the manufacturing method of the present invention will be explained using FIGS. 5 and 6. When recording is performed using the recording/reproducing lens 22 and a laser spot is irradiated onto the metal film 27 from the plastic substrate 26 side, the lattice-shaped pits 21- are thermally deformed by the heat and a flat portion 23 is formed. This flat part 23 is a lattice-shaped pit 21
Since the reflectance is larger than that of , it is possible to record an information signal as a difference in reflectance. As shown in FIG. 7(a), the reflectance of the flat portion 23 is high, so several 10% of the incident laser beam is reflected, but the light incident on the lattice-shaped pits 21 is 21, and the reflectance decreases, so the difference in reflectance can be reproduced as an information signal.

(効果) 上述の様に本発明の製造方法によって得られた光記録情
報媒体は使用に際し、情報記録された情報記録ピットと
記録されない格子状ピットの反射率の差が大きく、信号
として読み取りが容易で、且つ光ディスクに必要なプリ
グループなくして格子状ピットがトラック制御用信号と
しても兼ねることが出来る。又ホログラフィ−技術を用
いていないため従来の光記録情報媒体の製造設備をその
まま使用して追記型の光記録情報媒体の製造が可能とな
る。
(Effects) As described above, when the optical recording information medium obtained by the manufacturing method of the present invention is used, there is a large difference in reflectance between the information recording pits where information is recorded and the lattice-shaped pits where information is not recorded, and it is easy to read as a signal. Moreover, the lattice-shaped pits can also serve as track control signals without the need for pre-groups required for optical discs. Furthermore, since holography technology is not used, it is possible to manufacture write-once optical recording information media using conventional manufacturing equipment for optical recording information media.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明になる光記録情報媒体の製造方法を説明
するための断面図、第2図は第1図に示す装置により形
成された格子状ピット平面図、第3図は第2図I−I切
断線に沿った一部断面図、第4図は本発明の製造方法に
より製造された光記録情報媒体の一部断面図、第5図〜
第7図は第4図に示す光記録媒体の記録・再生の原理を
説明するための説明図、第8図は従来のMEディスクの
製造方法を説明するための斜視図、第9図はガラス基板
上にメツシュパターンとプリグループを形成した後の斜
視図、第10図は第9図I−I切断線に沿った一部拡大
図、第11図は従来の光記録情報媒体の一部断面図、第
12図は第10図に示す従来のMEディスクの記録・再
生の原理の説明図。 11・・・ガラス基板、12・・・フォトレジスト、1
9・・・記録レンズ、21・・・格子状ピット、22・
・記録・再生レンズ、23・・・情報記録ピット、25
・・・プリグループ、26・・・プラスチック基板、2
7・・・金属薄膜、28・・・保護膜。
FIG. 1 is a cross-sectional view for explaining the method of manufacturing an optical recording information medium according to the present invention, FIG. 2 is a plan view of lattice-shaped pits formed by the apparatus shown in FIG. 1, and FIG. FIG. 4 is a partial cross-sectional view taken along the I-I cutting line, and FIG. 4 is a partial cross-sectional view of an optical recording information medium manufactured by the manufacturing method of the present invention, and FIGS.
FIG. 7 is an explanatory diagram for explaining the principle of recording and reproducing the optical recording medium shown in FIG. 4, FIG. 8 is a perspective view for explaining the conventional ME disk manufacturing method, and FIG. 9 is a glass A perspective view after forming a mesh pattern and a pre-group on a substrate, FIG. 10 is a partially enlarged view taken along the cutting line I-I in FIG. 9, and FIG. 11 is a part of a conventional optical recording information medium. 12 is an explanatory diagram of the principle of recording and reproduction of the conventional ME disk shown in FIG. 10; FIG. 11...Glass substrate, 12...Photoresist, 1
9... Recording lens, 21... Grid pit, 22.
・Recording/reproducing lens, 23... Information recording pit, 25
...Pri group, 26...Plastic substrate, 2
7... Metal thin film, 28... Protective film.

Claims (1)

【特許請求の範囲】[Claims]  レーザー光を照射して書込みを行う光記録情報媒体の
製造方法において、ガラス盤上に塗布したフォトレジス
トにレーザー光を照射して微細な格子状ピットを同心円
又はスパイラル状に記録する工程と、前記格子状ピット
が記録されたフォトレジストから電鋳法にて金型を作製
し、プラスチックにより、前記格子状ピットを片面に有
する複製プラスチック基板を作成する工程と、その複製
プラスチック基板に前記格子状ピットを有する面上に金
属薄膜を形成し、その金属薄膜上に保護膜を形成する工
程とから成ることを特徴とする光記録情報媒体の製造方
法。
A method for manufacturing an optical recording information medium in which writing is performed by irradiating a laser beam, which includes the steps of irradiating a photoresist coated on a glass disk with a laser beam to record fine lattice-like pits in concentric circles or in a spiral shape; A step of producing a mold by electroforming from a photoresist on which lattice-shaped pits are recorded, and creating a replica plastic substrate having the lattice-shaped pits on one side using plastic; 1. A method of manufacturing an optical recording information medium, comprising the steps of: forming a metal thin film on a surface having a surface having the same properties as the metal thin film; and forming a protective film on the metal thin film.
JP9928589A 1989-04-19 1989-04-19 Production of optical information recording medium Pending JPH02278537A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9928589A JPH02278537A (en) 1989-04-19 1989-04-19 Production of optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9928589A JPH02278537A (en) 1989-04-19 1989-04-19 Production of optical information recording medium

Publications (1)

Publication Number Publication Date
JPH02278537A true JPH02278537A (en) 1990-11-14

Family

ID=14243380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9928589A Pending JPH02278537A (en) 1989-04-19 1989-04-19 Production of optical information recording medium

Country Status (1)

Country Link
JP (1) JPH02278537A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102602075A (en) * 2012-02-29 2012-07-25 苏州金海薄膜科技发展有限公司 Laser screen protective film and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102602075A (en) * 2012-02-29 2012-07-25 苏州金海薄膜科技发展有限公司 Laser screen protective film and preparation method thereof

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