JPH02277684A - Thermal transfer recording material and preparation thereof - Google Patents
Thermal transfer recording material and preparation thereofInfo
- Publication number
- JPH02277684A JPH02277684A JP10103189A JP10103189A JPH02277684A JP H02277684 A JPH02277684 A JP H02277684A JP 10103189 A JP10103189 A JP 10103189A JP 10103189 A JP10103189 A JP 10103189A JP H02277684 A JPH02277684 A JP H02277684A
- Authority
- JP
- Japan
- Prior art keywords
- thermal transfer
- binder
- recording material
- transfer recording
- paraffinic compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 27
- 150000001875 compounds Chemical class 0.000 claims abstract description 33
- 239000011230 binding agent Substances 0.000 claims abstract description 21
- 238000010894 electron beam technology Methods 0.000 claims abstract description 17
- 239000000203 mixture Substances 0.000 claims abstract description 15
- 239000003086 colorant Substances 0.000 claims abstract description 10
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 239000012188 paraffin wax Substances 0.000 claims description 16
- 229920005989 resin Polymers 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000004132 cross linking Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 abstract 2
- 239000011247 coating layer Substances 0.000 abstract 1
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 6
- 238000001454 recorded image Methods 0.000 description 5
- 239000006229 carbon black Substances 0.000 description 4
- 239000005038 ethylene vinyl acetate Substances 0.000 description 4
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 4
- 229920002554 vinyl polymer Polymers 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- -1 hexamethylene cyclotrisiloxane Chemical compound 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- 239000001993 wax Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 238000010186 staining Methods 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 235000003560 Valerianella locusta Nutrition 0.000 description 1
- 240000004668 Valerianella locusta Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 229940057995 liquid paraffin Drugs 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
Landscapes
- Impression-Transfer Materials And Handling Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は感熱転写記録材に係わり、さらに詳しくはその
感熱転写インク層の改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a thermal transfer recording material, and more particularly to improvement of the thermal transfer ink layer thereof.
従来の感熱転写記録材の感勢転写インク層は、天然ワッ
クス、合成ワックスなどのワックス類と熱可塑性樹脂と
をバインダーとし、これにカーボンブラックなどの着色
剤を混合、分散したインクで形成されていた(例えば、
特開昭63−230392号公報)。The sensitive transfer ink layer of conventional thermal transfer recording materials is made of an ink containing a binder of waxes such as natural wax or synthetic wax and a thermoplastic resin, and a colorant such as carbon black mixed and dispersed therein. (for example,
(Japanese Patent Application Laid-Open No. 63-230392).
上記のように、バインダーの構成成分として熱可塑性樹
脂を用いるのは、被記録体上に形成された画像の耐久性
を増すためであるが、そのような熱可塑性樹脂の使用に
もかかわらず、これまでのものは、画像の耐久性が充分
とはいえず、消ゴムあるいは手でこすった場合に画像の
一部が欠けたり、被記録体表面に画像から尾を引いたよ
うな汚れが発生するという問題があった。As mentioned above, the purpose of using a thermoplastic resin as a component of the binder is to increase the durability of the image formed on the recording medium, but despite the use of such a thermoplastic resin, With conventional methods, the durability of the image is not sufficient, and when rubbed with an eraser or hand, part of the image may be chipped, or stains that look like traces from the image may appear on the surface of the recording medium. There was a problem.
本発明は、上述したように従来の感熱転写記録材により
被記録体上に形成された画像、つまり、記録画像が耐久
性に欠けていたという問題点を解決し、耐久性の優れた
記録画像を得ることができる感熱転写記録材を提供する
ことを目的とする。As described above, the present invention solves the problem that images formed on a recording medium using conventional thermal transfer recording materials, that is, recorded images lack durability, and provides recorded images with excellent durability. An object of the present invention is to provide a thermal transfer recording material that can obtain the following properties.
本発明は、感熱転写インク層のバインダーとして架橋構
造を有するパラフィン系化合物を含有させることにより
、耐久性の優れた記録画像を得ることができる感熱転写
記録材を提供したものである。The present invention provides a heat-sensitive transfer recording material capable of obtaining recorded images with excellent durability by containing a paraffin compound having a crosslinked structure as a binder in the heat-sensitive transfer ink layer.
上記のような架橋構造を有するパラフィン系化合物をバ
インダーとして含有させた感熱転写インク層を持つ感熱
転写記録材は、支持体上に、着色剤およびパラフィン系
化合物を含有したインク組成物を塗布した後、電子線照
射を行い、パラフィン系化合物を架橋させることによっ
て得られる。A thermal transfer recording material having a thermal transfer ink layer containing a paraffinic compound having a crosslinked structure as a binder as described above is produced by applying an ink composition containing a colorant and a paraffinic compound onto a support. It is obtained by crosslinking a paraffinic compound by irradiating it with an electron beam.
上記のパラフィン系化合物としては、例えば、パラフィ
ンワックス、流動パラフィンなどがあげられる。Examples of the above paraffinic compounds include paraffin wax and liquid paraffin.
また、上記パラフィン系化合物と共に、ポリエチレンオ
キシド、ポリアミド、ポリエステル、ヘキサメチレンシ
クロトリシロキサンなどのシリコーン系化合物、下記の
式(Ilで示されるポリビニル化合物などの電子線照射
により架橋可能な樹脂をインク組成物中に含有させ、電
子線照射により、パラフィン系化合物と共にこれらの樹
脂を架橋させてバインダーとしてもよい。In addition to the above paraffinic compounds, the ink composition also contains silicone compounds such as polyethylene oxide, polyamide, polyester, hexamethylene cyclotrisiloxane, and resins that can be crosslinked by electron beam irradiation, such as polyvinyl compounds represented by the following formula (Il). These resins may be incorporated into the binder and crosslinked together with a paraffinic compound by electron beam irradiation to form a binder.
(CH!−CH)n fII
〔式中、Rは−Ch Hs、−COOHl CON H
z、CL OH,0COCHi 、 CN。(CH!-CH)n fII [wherein, R is -Ch Hs, -COOHl CON H
z, CL OH, 0COCHi, CN.
る少なくとも1種である)
上記のポリビニル化合物は、式中のRがすべて同一のホ
モポリマーだけではなく、Rが異なるコポリマーであっ
てもよい。The above polyvinyl compound may be not only a homopolymer in which all R's in the formula are the same, but also a copolymer in which R's are different.
ここで、本発明の感熱転写記録材の感熱転写インク層と
従来の感熱転写記録材の感熱転写インク層との相違を説
明すると、次のとおりである。Here, the differences between the thermal transfer ink layer of the thermal transfer recording material of the present invention and the thermal transfer ink layer of a conventional thermal transfer recording material will be explained as follows.
本発明の感熱転写インク層は、前記したように、バイン
ダーとして架橋構造を有するパラフィン系化合物を含有
させたものである。そして、この感熱転写インク層は、
着色剤と共にパラフィン系化合物を含有したインク組成
物を支持体上に塗布した後、電子線照射を行って、パラ
フィン系化合物を架橋させることによって得られる。As described above, the thermal transfer ink layer of the present invention contains a paraffin compound having a crosslinked structure as a binder. This thermal transfer ink layer is
It is obtained by applying an ink composition containing a paraffinic compound together with a colorant onto a support, and then irradiating it with an electron beam to crosslink the paraffinic compound.
本発明者の研究によれば、従来の感熱転写インク層にお
いて、被記録体上に形成された画像が消ゴムあるいは手
でこすると欠けや汚れが生じたのは、バインダーとして
用いられているパラフィン系化合物が低分子量であり、
画像を被記録体上に安定してとめおくに足りる分子量に
達していないためである。そこで、本発明では、このパ
ラフィン系化合物を高分子量化することによって、画像
を被記録体上に安定してとめおくようにしたのである。According to the research of the present inventors, in conventional thermal transfer ink layers, when the image formed on the recording medium is rubbed with an eraser or by hand, chipping and staining occur due to the paraffin-based binder. the compound has a low molecular weight;
This is because the molecular weight does not reach a sufficient molecular weight to stably hold an image on the recording medium. Therefore, in the present invention, the paraffin compound is made to have a high molecular weight so that an image can be stably fixed on the recording medium.
上記の電子線照射の工程は、パラフィン系化合物の高分
子量化を行うための工程であり、この工程を経ることに
よって、パラフィン系化合物の主鎖間に架橋が生じて高
分子量化が進行する。The step of electron beam irradiation described above is a step for increasing the molecular weight of the paraffinic compound, and by passing through this step, crosslinking occurs between the main chains of the paraffinic compound, and the increasing molecular weight progresses.
そして、この架橋構造を有し高分子量化したパラフィン
化合物がバインダーとして存在すると、被記録体上に形
成された画像は、消ゴムや手でこすったときでも、安定
してその原形を保つことができるようになり、従来のも
のに比べて、画像の欠けや汚れが少なくなって、耐久性
が向上する。When this crosslinked structure and high molecular weight paraffin compound is present as a binder, the image formed on the recording medium can stably maintain its original shape even when rubbed with an eraser or by hand. This results in less chipping and staining of images and improved durability compared to conventional ones.
電子線照射は、酸素濃度を減少させた雰囲気中、望まし
くは酸素濃度が500ppe+以下の雰囲気中、例えば
、加速電圧150〜250kVで、照射線量が1.0〜
20Mrad程度となるように行われる。The electron beam irradiation is performed in an atmosphere with a reduced oxygen concentration, preferably in an atmosphere with an oxygen concentration of 500 ppe+ or less, for example, at an accelerating voltage of 150 to 250 kV and an irradiation dose of 1.0 to 250 kV.
This is done so that the amount is about 20 Mrad.
本発明の感熱転写記録材において、感熱転写インク層は
、カーボンブラックなどの着色剤とバインダーとを必須
成分とし、必要に応じ、さらに離型剤、分散剤などが含
有されていてもよい。感熱転写インク層においてカーボ
ンブラックなどの着色剤は、通常、全体中の2〜40重
量%である。そして、上記感熱転写インク層の形成にあ
たって使用されるインク組成物は、ソルベントコーティ
ング方式によってインク層を形成する場合には、着色剤
、バインダーなどのインク層構成成分を溶剤に溶解ない
し分散した塗材の状態に調製される。In the thermal transfer recording material of the present invention, the thermal transfer ink layer contains a colorant such as carbon black and a binder as essential components, and may further contain a release agent, a dispersant, etc., if necessary. The amount of colorant such as carbon black in the thermal transfer ink layer is usually 2 to 40% by weight based on the total weight. When the ink layer is formed by a solvent coating method, the ink composition used for forming the thermal transfer ink layer is a coating material in which ink layer constituent components such as colorants and binders are dissolved or dispersed in a solvent. It is prepared to the following condition.
つぎに実施例をあげて本発明をさらに詳細に説明する。 Next, the present invention will be explained in more detail with reference to Examples.
実施例1 下記の組成のインク組成物を調製した。Example 1 An ink composition having the following composition was prepared.
カーボンブラック 25重量部パラフ
ィンワックス 50重量部エチレン−酢
酸ビニル共重合体 25重量部〔日本ユニカー製H
U C−3170(商品名)〕トルエン/メチルエチル
ケトン(1/1) 200重量部インク組成物の調製は
、上記組成の各成分をボールミルに入れ72時間混合、
分散することによって行った。Carbon black 25 parts by weight Paraffin wax 50 parts by weight Ethylene-vinyl acetate copolymer 25 parts by weight [Nippon Unicar H
U C-3170 (trade name)] Toluene/methyl ethyl ketone (1/1) 200 parts by weight To prepare the ink composition, each component of the above composition was placed in a ball mill and mixed for 72 hours.
This was done by dispersing.
上記のインク組成物を厚さ5μmのポリエステルフィル
ム(ポリエチレンテレフタレートフィルム)上に乾燥厚
が2μmとなるように塗布し、乾燥して原反を得た。こ
の原反に対して電子線照射装置により加速電圧165k
V、酸素濃度500ppm以下で照射線量10Mrad
となるように電子線照射を行い、感熱転写記録材を得た
。このようにして得た感熱転写記録材を第1図に示す、
第1図において、(1)はポリエステルフィルムからな
る支持体であり、(2)は支持体(1)上に形成された
感熱転写インク層である。この感熱転写インク層(2)
は、支持体(1)上に塗布したインク組成物中から溶剤
のトルエン/メチルエチルケトン(1/l) (トル
エンとメチルエチルケトンの重量比l:1の混合物〕が
乾燥により蒸発し、電子線照射によって、パラフィン系
化合物とエチレン−酢酸ビニル共重合体がそれぞれ架橋
してバインダーを構成するものである。The above ink composition was applied onto a polyester film (polyethylene terephthalate film) having a thickness of 5 μm to a dry thickness of 2 μm, and dried to obtain a raw fabric. An acceleration voltage of 165k was applied to this original fabric using an electron beam irradiation device.
V, irradiation dose 10 Mrad at oxygen concentration 500 ppm or less
Electron beam irradiation was performed to obtain a heat-sensitive transfer recording material. The thermal transfer recording material thus obtained is shown in FIG.
In FIG. 1, (1) is a support made of a polyester film, and (2) is a thermal transfer ink layer formed on the support (1). This thermal transfer ink layer (2)
The solvent toluene/methyl ethyl ketone (1/l) (a mixture of toluene and methyl ethyl ketone in a weight ratio of 1:1) is evaporated from the ink composition coated on the support (1) by drying, and by electron beam irradiation. A paraffinic compound and an ethylene-vinyl acetate copolymer are crosslinked to form a binder.
実施例2
実施例1におけるエチレン−酢酸ビニル共重合体に代え
てポリエチレン〔三洋化成製151− P (商品名)
〕を用い、他は実施例1と同様にして感熱転写記録材を
得た。Example 2 The ethylene-vinyl acetate copolymer in Example 1 was replaced with polyethylene [151-P (trade name) manufactured by Sanyo Chemical Co., Ltd.
A thermal transfer recording material was obtained in the same manner as in Example 1 except that
実施例3
実施例1におけるエチレン−酢酸ビニル共重合体に代え
て塩化ビニル−酢酸ビニル−ビニルアルコール共重合体
CUCC社製VAGH(商品名)〕を用い、他は実施例
1と同様にして感熱転写記録材を得た。Example 3 In place of the ethylene-vinyl acetate copolymer in Example 1, a vinyl chloride-vinyl acetate-vinyl alcohol copolymer (VAGH (trade name) manufactured by CUCC) was used, and the other conditions were the same as in Example 1. A thermal transfer recording material was obtained.
比較例1
電子線照射を行わなかったほかは実施例1と同様にして
感熱転写記録材を得た。Comparative Example 1 A thermal transfer recording material was obtained in the same manner as in Example 1 except that electron beam irradiation was not performed.
比較例2
電子線照射を行わなかったほかは実施例2と同様にして
感熱転写記録材を得た。Comparative Example 2 A thermal transfer recording material was obtained in the same manner as in Example 2 except that electron beam irradiation was not performed.
比較例3
電子線照射を行わなかったほかは実施例3と同様にして
感熱転写記録材を得た。Comparative Example 3 A thermal transfer recording material was obtained in the same manner as in Example 3 except that electron beam irradiation was not performed.
上記のようにして製造した実施例1〜3および比較例1
〜3の感熱転写記録材を用い、サーマルプリンターとし
ては8ドツト/11−のサーマルヘッドを持つ高密度サ
ーマルプリンターを用い、被記録体としては粗面紙(P
P C用紙、ベック平滑度58秒)を用い、記録画像
としては市松模様を選び、粗面紙上に印字速度40字/
秒で市松模様を印字し、粗面紙上に記録された印字の濃
度(印字濃度)および印字の耐久性を調べた。その結果
を第1表に示す、印字濃度の測定方法および印字の耐久
性の評価方法は次のとおりである。Examples 1 to 3 and Comparative Example 1 manufactured as above
A high-density thermal printer with an 8-dot/11- thermal head was used as the thermal printer, and rough paper (P-3) was used as the recording medium.
PC paper, Beck smoothness 58 seconds) was used, a checkered pattern was selected as the recorded image, and the printing speed was 40 characters/print on rough paper.
A checkered pattern was printed in seconds, and the density of the print recorded on the rough paper (print density) and the durability of the print were examined. The results are shown in Table 1, and the methods for measuring print density and evaluating the durability of prints are as follows.
且生A皮坐盪定方抜
市松模様の印字表面の反射濃度をマクヘス社製反射濃度
計(RD−915)によって測定した。The reflection density of the printed surface of the square checkered pattern on the raw A leather was measured using a reflection densitometer (RD-915) manufactured by Maches.
の の量
印字上を鉛筆用消ゴムで力を込めてこすり(消ゴムを往
復させる)、汚れが発生するまでの回数(往復回数)を
測定した。The printed area was rubbed with force with a pencil eraser (the eraser was moved back and forth), and the number of times it took for stains to occur (number of back and forth movements) was measured.
第 1 表
第1表に示すように、電子線照射により、バインダー構
成成分としてのパラフィンワックスや樹脂を架橋させた
実施例1〜3の感熱転写記録材は、パラフィンワックス
や樹脂を架橋させていない比較例1〜3の感熱転写記録
材に比べて、印字の耐久性が優れていた。また、印字濃
度は実施例と比較例との間に差がなく、バインダー構成
成分の架橋による性能低下は認められなかった。Table 1 As shown in Table 1, the thermal transfer recording materials of Examples 1 to 3 in which the paraffin wax or resin as a binder component was crosslinked by electron beam irradiation did not have the paraffin wax or resin crosslinked. The printing durability was excellent compared to the thermal transfer recording materials of Comparative Examples 1 to 3. Furthermore, there was no difference in printing density between the Examples and Comparative Examples, and no deterioration in performance due to crosslinking of the binder constituents was observed.
(発明の効果〕
以上説明したように、本発明では、感熱転写インク層の
バインダーとして架橋構造を有するパラフィン系化合物
を含有させることにより、記録画像の耐久性を高めるこ
とができた。(Effects of the Invention) As explained above, in the present invention, by incorporating a paraffin compound having a crosslinked structure as a binder in the thermal transfer ink layer, the durability of the recorded image could be improved.
第1図は本発明に係る感熱転写記録材の一例を示す断面
図である。
(1)・・・支持体、 (2)・・・感熱転写インク層
1・・・支持体
2・・・感熱転写インク層FIG. 1 is a sectional view showing an example of a thermal transfer recording material according to the present invention. (1)...Support, (2)...Thermal transfer ink layer 1...Support 2...Thermal transfer ink layer
Claims (4)
写インク層を設けた感熱転写記録材において、上記感熱
転写インク層が架橋構造を有するパラフィン系化合物を
バインダーとして含有していることを特徴とする感熱転
写記録材。(1) A thermal transfer recording material in which a thermal transfer ink layer consisting of a colorant and a binder is provided on a support, characterized in that the thermal transfer ink layer contains a paraffin compound having a crosslinked structure as a binder. A thermal transfer recording material.
物と架橋構造を有する樹脂との混合物からなるものであ
る請求項1記載の感熱転写記録材。(2) The thermal transfer recording material according to claim 1, wherein the binder is made of a mixture of a paraffin compound having a crosslinked structure and a resin having a crosslinked structure.
含有したインク組成物を塗布した後、電子線照射を行い
、上記パラフィン系化合物を架橋させることを特徴とす
る感熱転写記録材の製造方法。(3) A method for producing a thermal transfer recording material, which comprises applying an ink composition containing a colorant and a paraffin compound onto a support, and then irradiating the support with an electron beam to crosslink the paraffin compound. .
び樹脂を含有し、電子線照射により、上記パラフィン系
化合物および樹脂を架橋させる請求項3記載の感熱転写
記録材の製造方法。(4) The method for producing a thermal transfer recording material according to claim 3, wherein the ink composition contains a colorant, a paraffin compound, and a resin, and the paraffin compound and resin are crosslinked by electron beam irradiation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10103189A JPH02277684A (en) | 1989-04-20 | 1989-04-20 | Thermal transfer recording material and preparation thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10103189A JPH02277684A (en) | 1989-04-20 | 1989-04-20 | Thermal transfer recording material and preparation thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02277684A true JPH02277684A (en) | 1990-11-14 |
Family
ID=14289806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10103189A Pending JPH02277684A (en) | 1989-04-20 | 1989-04-20 | Thermal transfer recording material and preparation thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02277684A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011162151A1 (en) * | 2010-06-23 | 2011-12-29 | 東京エレクトロン株式会社 | Sealing film formation method, sealing film formation device, and organic light-emitting element |
-
1989
- 1989-04-20 JP JP10103189A patent/JPH02277684A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011162151A1 (en) * | 2010-06-23 | 2011-12-29 | 東京エレクトロン株式会社 | Sealing film formation method, sealing film formation device, and organic light-emitting element |
JP5211265B2 (en) * | 2010-06-23 | 2013-06-12 | 東京エレクトロン株式会社 | Sealing film forming method and sealing film forming apparatus |
US8674397B2 (en) | 2010-06-23 | 2014-03-18 | Tokyo Electron Limited | Sealing film forming method, sealing film forming device, and light-emitting device |
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