JPH0227747U - - Google Patents

Info

Publication number

JPH0227747U

JPH0227747U JP10562288U JP10562288U JPH0227747U JP H0227747 U JPH0227747 U JP H0227747U JP 10562288 U JP10562288 U JP 10562288U JP 10562288 U JP10562288 U JP 10562288U JP H0227747 U JPH0227747 U JP H0227747U

Authority

JP

Japan

Prior art keywords

source

drain

plane

thickness direction

channel region

Prior art date

1988-08-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000009792 diffusion process Methods 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1