JPH0227731U - - Google Patents

Info

Publication number
JPH0227731U
JPH0227731U JP10636388U JP10636388U JPH0227731U JP H0227731 U JPH0227731 U JP H0227731U JP 10636388 U JP10636388 U JP 10636388U JP 10636388 U JP10636388 U JP 10636388U JP H0227731 U JPH0227731 U JP H0227731U
Authority
JP
Japan
Prior art keywords
wafer holder
wafer
substantially hemispherical
inspection data
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10636388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10636388U priority Critical patent/JPH0227731U/ja
Publication of JPH0227731U publication Critical patent/JPH0227731U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Microscoopes, Condenser (AREA)
JP10636388U 1988-08-10 1988-08-10 Pending JPH0227731U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10636388U JPH0227731U (US08063081-20111122-C00044.png) 1988-08-10 1988-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10636388U JPH0227731U (US08063081-20111122-C00044.png) 1988-08-10 1988-08-10

Publications (1)

Publication Number Publication Date
JPH0227731U true JPH0227731U (US08063081-20111122-C00044.png) 1990-02-22

Family

ID=31339804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10636388U Pending JPH0227731U (US08063081-20111122-C00044.png) 1988-08-10 1988-08-10

Country Status (1)

Country Link
JP (1) JPH0227731U (US08063081-20111122-C00044.png)

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