JPH0227653U - - Google Patents
Info
- Publication number
- JPH0227653U JPH0227653U JP10683688U JP10683688U JPH0227653U JP H0227653 U JPH0227653 U JP H0227653U JP 10683688 U JP10683688 U JP 10683688U JP 10683688 U JP10683688 U JP 10683688U JP H0227653 U JPH0227653 U JP H0227653U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic cylinder
- cover
- disk
- current introduction
- introduction terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 4
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10683688U JPH0227653U (th) | 1988-08-11 | 1988-08-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10683688U JPH0227653U (th) | 1988-08-11 | 1988-08-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0227653U true JPH0227653U (th) | 1990-02-22 |
Family
ID=31340706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10683688U Pending JPH0227653U (th) | 1988-08-11 | 1988-08-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0227653U (th) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220037115A1 (en) * | 2020-07-31 | 2022-02-03 | Taiwan Semiconductor Manufacturing Company Limited | Insulator for an ion implantation source |
-
1988
- 1988-08-11 JP JP10683688U patent/JPH0227653U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220037115A1 (en) * | 2020-07-31 | 2022-02-03 | Taiwan Semiconductor Manufacturing Company Limited | Insulator for an ion implantation source |
US12020896B2 (en) * | 2020-07-31 | 2024-06-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Insulator for an ion implantation source |