JPH022652U - - Google Patents

Info

Publication number
JPH022652U
JPH022652U JP8040188U JP8040188U JPH022652U JP H022652 U JPH022652 U JP H022652U JP 8040188 U JP8040188 U JP 8040188U JP 8040188 U JP8040188 U JP 8040188U JP H022652 U JPH022652 U JP H022652U
Authority
JP
Japan
Prior art keywords
carrier
wafer
carrier body
recess
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8040188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8040188U priority Critical patent/JPH022652U/ja
Publication of JPH022652U publication Critical patent/JPH022652U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP8040188U 1988-06-17 1988-06-17 Pending JPH022652U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8040188U JPH022652U (US07709020-20100504-C00041.png) 1988-06-17 1988-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8040188U JPH022652U (US07709020-20100504-C00041.png) 1988-06-17 1988-06-17

Publications (1)

Publication Number Publication Date
JPH022652U true JPH022652U (US07709020-20100504-C00041.png) 1990-01-09

Family

ID=31305227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8040188U Pending JPH022652U (US07709020-20100504-C00041.png) 1988-06-17 1988-06-17

Country Status (1)

Country Link
JP (1) JPH022652U (US07709020-20100504-C00041.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4868656A (US07709020-20100504-C00041.png) * 1972-12-16 1973-09-19
JPS6375639A (ja) * 1986-09-19 1988-04-06 Hitachi Ltd 粒子捕集装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4868656A (US07709020-20100504-C00041.png) * 1972-12-16 1973-09-19
JPS6375639A (ja) * 1986-09-19 1988-04-06 Hitachi Ltd 粒子捕集装置

Similar Documents

Publication Publication Date Title
JPH022652U (US07709020-20100504-C00041.png)
JPS6166943U (US07709020-20100504-C00041.png)
JPS63139314U (US07709020-20100504-C00041.png)
JPS6337863Y2 (US07709020-20100504-C00041.png)
JPH02122640U (US07709020-20100504-C00041.png)
JPS62159657U (US07709020-20100504-C00041.png)
JPS6229287U (US07709020-20100504-C00041.png)
JPH0286121U (US07709020-20100504-C00041.png)
JPH01139434U (US07709020-20100504-C00041.png)
JPS6368911U (US07709020-20100504-C00041.png)
JPH0451139U (US07709020-20100504-C00041.png)
JPH01130541U (US07709020-20100504-C00041.png)
JPS61200360U (US07709020-20100504-C00041.png)
JPS63173103U (US07709020-20100504-C00041.png)
JPH0481686U (US07709020-20100504-C00041.png)
JPS63107933U (US07709020-20100504-C00041.png)
JPS6286756U (US07709020-20100504-C00041.png)
JPH0182809U (US07709020-20100504-C00041.png)
JPS6389951U (US07709020-20100504-C00041.png)
JPH0449102U (US07709020-20100504-C00041.png)
JPH0432993U (US07709020-20100504-C00041.png)
JPH01133380U (US07709020-20100504-C00041.png)
JPS63165722U (US07709020-20100504-C00041.png)
JPS6380848U (US07709020-20100504-C00041.png)
JPS6228780U (US07709020-20100504-C00041.png)