JPH0226249U - - Google Patents
Info
- Publication number
- JPH0226249U JPH0226249U JP10523388U JP10523388U JPH0226249U JP H0226249 U JPH0226249 U JP H0226249U JP 10523388 U JP10523388 U JP 10523388U JP 10523388 U JP10523388 U JP 10523388U JP H0226249 U JPH0226249 U JP H0226249U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier body
- fits
- holds
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10523388U JPH0226249U (it) | 1988-08-09 | 1988-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10523388U JPH0226249U (it) | 1988-08-09 | 1988-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226249U true JPH0226249U (it) | 1990-02-21 |
Family
ID=31337662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10523388U Pending JPH0226249U (it) | 1988-08-09 | 1988-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226249U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018214068B4 (de) | 2017-11-10 | 2022-10-20 | Mitsubishi Electric Corporation | Waferbehälter |
-
1988
- 1988-08-09 JP JP10523388U patent/JPH0226249U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018214068B4 (de) | 2017-11-10 | 2022-10-20 | Mitsubishi Electric Corporation | Waferbehälter |