JPH0226246U - - Google Patents

Info

Publication number
JPH0226246U
JPH0226246U JP10425588U JP10425588U JPH0226246U JP H0226246 U JPH0226246 U JP H0226246U JP 10425588 U JP10425588 U JP 10425588U JP 10425588 U JP10425588 U JP 10425588U JP H0226246 U JPH0226246 U JP H0226246U
Authority
JP
Japan
Prior art keywords
wafer
wafer transfer
transfer device
transfer plate
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10425588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10425588U priority Critical patent/JPH0226246U/ja
Publication of JPH0226246U publication Critical patent/JPH0226246U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP10425588U 1988-08-05 1988-08-05 Pending JPH0226246U (US06174465-20010116-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10425588U JPH0226246U (US06174465-20010116-C00003.png) 1988-08-05 1988-08-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10425588U JPH0226246U (US06174465-20010116-C00003.png) 1988-08-05 1988-08-05

Publications (1)

Publication Number Publication Date
JPH0226246U true JPH0226246U (US06174465-20010116-C00003.png) 1990-02-21

Family

ID=31335812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10425588U Pending JPH0226246U (US06174465-20010116-C00003.png) 1988-08-05 1988-08-05

Country Status (1)

Country Link
JP (1) JPH0226246U (US06174465-20010116-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100316712B1 (ko) * 1999-06-22 2001-12-12 윤종용 화학기계적 연마장치에 웨이퍼를 로딩/언로딩하기 위한 로드컵의 페디스탈

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100316712B1 (ko) * 1999-06-22 2001-12-12 윤종용 화학기계적 연마장치에 웨이퍼를 로딩/언로딩하기 위한 로드컵의 페디스탈

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