JPH0226230U - - Google Patents

Info

Publication number
JPH0226230U
JPH0226230U JP10523488U JP10523488U JPH0226230U JP H0226230 U JPH0226230 U JP H0226230U JP 10523488 U JP10523488 U JP 10523488U JP 10523488 U JP10523488 U JP 10523488U JP H0226230 U JPH0226230 U JP H0226230U
Authority
JP
Japan
Prior art keywords
support rod
semiconductor substrate
supports
hot air
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10523488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10523488U priority Critical patent/JPH0226230U/ja
Publication of JPH0226230U publication Critical patent/JPH0226230U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP10523488U 1988-08-09 1988-08-09 Pending JPH0226230U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10523488U JPH0226230U (US20090163788A1-20090625-C00002.png) 1988-08-09 1988-08-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10523488U JPH0226230U (US20090163788A1-20090625-C00002.png) 1988-08-09 1988-08-09

Publications (1)

Publication Number Publication Date
JPH0226230U true JPH0226230U (US20090163788A1-20090625-C00002.png) 1990-02-21

Family

ID=31337664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10523488U Pending JPH0226230U (US20090163788A1-20090625-C00002.png) 1988-08-09 1988-08-09

Country Status (1)

Country Link
JP (1) JPH0226230U (US20090163788A1-20090625-C00002.png)

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