JPH0225800A - Wavelength variable x-ray condenser - Google Patents

Abstract

PURPOSE:To condense X-rays of different wavelengths with one condensing ring by arraying and disposing plural X-ray spectral elements of different spectral wavelengths to the inside surface of an annular body having a curved surface. CONSTITUTION:Two kinds of the X-ray spectral elements 13, 14 of different wavelengths are provided so as to be alternately adjacently to each other at 60 deg. peripheral angle to the inside surface of the ring body 12 having the cylindrical shape bulged near the center. These X-ray spectral elements 13, 14 are formed of multilayered films consisting of the repetition of a pair of a suitable heavy element and a light element and the surface layer consisting of the light element. An X-ray shielding body 27 having projecting parts 19a-19c and shielding plates 20a-20b is freely rotatably disposed in the condenser ring 11. The X-ray condenser constituted in such a manner allows changing of the wavelengths of the X-rays which can be condensed by the simple operation of rotating the X-ray shielding body 27 to change the positions of the projecting parts 19a-19c.

Description

Detailed Description of the Invention [Objective of the Invention] (Industrial Field of Application) The present invention relates to a variable wavelength X-ray condenser used in fields such as morphology observation, structural analysis, and composition analysis using X-rays. It is something.

(Prior art) Conventionally, X-ray spectroscopic analysis of small areas has been carried out using an XaS optical ring equipped with a spectroscopic element (single crystal or multilayer film) on the Roland circumference, as shown in Figure 6. The equipment has been serviced. That is, in this X-ray analyzer, X-rays emitted from an X-ray light source 1 are reflected by a focusing ring 2 and focused onto a sample 4 fixed on an XY stage 3, and the X-rays from the sample 4 are focused. The component composition, crystallinity, etc. of the sample 4 are analyzed by detecting characteristic X-rays and diffraction X-rays from the region using the detector 5.

However, in order to focus X-rays with different spectral wavelengths onto a sample using the XG analyzer, it is necessary to prepare respective focusing rings that match the wavelengths.

Furthermore, when replacing the condensing ring, there is a problem in that complicated adjustment work is required to satisfy the X-ray condensing conditions each time the condensing ring is replaced.

(Problems to be Solved by the Invention) The present invention has been made to solve the above-mentioned conventional problems. It is intended to provide a line concentrator.

[Structure of the Invention] (Means for Solving the Problems) The present invention provides a light condensing device in which two or more types of X-ray spectroscopic elements having different spectral wavelengths are arranged side by side in the circumferential direction of the ring body on the inner surface of a ring body having a curved surface. This is a wavelength variable X-ray condenser characterized by being equipped with a ring.

Further, the present invention provides an
This is a variable wavelength X-ray condenser characterized by a rotatable radiation shield.

(Function) According to the present invention, by providing a condenser ring on the inner surface of the ring body having a curved surface, in which two or more types of X-ray spectroscopic elements having different spectral wavelengths are arranged side by side in the circumferential direction of the ring body. , when X-rays of a specific spectral wavelength are made to enter the ring from an X-ray light source, the X-rays installed in the ring body
X having a spectral wavelength corresponding to the X-ray in the line spectroscopic element
It is reflected by a line spectrometer and can be focused at a predetermined position. - On the other hand, when an X-ray with a different spectral wavelength from this X-ray is made to enter the ring from an X-ray light source, the
The X-ray beam is reflected by an X-ray spectrometer having a spectral wavelength corresponding to the X-ray incident on the line spectrometer, and can be focused at a predetermined position. Therefore, the variable wavelength X-ray condenser of the present invention can condense X-rays of different wavelengths with one condensing ring by a simple operation.

Further, in a variable wavelength X-ray concentrator having a structure in which an X-ray shielding body having a protrusion is rotatably disposed in the condensing ring in correspondence with a specific X-ray spectroscopic element to be shielded on the inner surface of the ring body, , has the following effects.

That is, the shield is rotated so that the protrusions thereof are opposed to an X-ray spectroscopic element installed in the ring body that produces a spectral wavelength corresponding to the target X-ray, and the protrusions are placed in front of the other When X-rays from the X-ray light source are made to enter the focusing ring after being shielded by facing the X-ray spectrometer, the X-rays are reflected by the X-ray spectrometer placed between the protrusions and reach the target. It is possible to focus only the X-rays that X of other spectral wavelengths
When condensing the rays, the shielding body is rotated so that the protrusions of the shielding body are opposed to an X-ray spectroscopic element having a spectral wavelength corresponding to the X-rays, which is installed inside the ring body, and Light can be focused by making the protrusion face another X-ray spectroscopic element and shielding it.

Therefore, such a variable wavelength x41 condenser can condense only a specific X-ray among X-rays of different wavelengths by a single condensing ring with a simple operation.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to FIGS. 1 to 5.

11 in the figure is a condensing ring. This condensing ring 11
The ring body 12 has a cylindrical shape with a bulge near the center.
and first and second X-ray spectroscopic elements 13 and 14 having different spectral wavelengths, which are alternately arranged adjacent to each other at a circumferential angle of 60° on the inner surface of the main body 12.

As shown in FIG. 5, these X-ray spectroscopic elements 13 and 14 include a multilayer film 15 consisting of bare repeating of heavy elements and light elements;
It is formed by the surface layer 1G made of the bare light element. In the first spectroscopic element 13, the wavelength λ, -2
In order to set the number of people to 3.7 people, we used a combination of W as the heavy element and Sl as the light element, and the thickness of each bear (2d
The design was made so that X-rays with an incident angle e of 15'' could be focused.The reflection at this time was determined according to Bragg's equation nλ-2dsin e.In addition, the second In order to set the wavelength to λ2-44, the spectroscopic element 14 uses a combination of W as a heavy element and C as a light element, and the thickness (2d value) of each bare element is set to 170.0.
It was designed to collect X-rays with an incident angle θ of 15″.

An X-ray shield 17 is rotatably disposed within the condensing ring 11. This shielding body 17 has a cylindrical main body part 18 with a bulge near the center, and a circumferential angle of 120 m in the horizontal direction so that the end side surface of the main body part 18 is close to the inner surface of the condensing ring 11. Three protrusions 19a to 19c that project integrally, and these protrusions 19a to 19
It consists of three shielding plates 20a to 20c extending horizontally at a circumferential angle of 120' on the side surface of the main body part 18 between c. That is, the projection 1 of the X-ray shield 17
9a = 19c are arranged to face the three first spectroscopic elements 13 of the condenser ring 11 or the same number of second spectroscopic elements 14 by the rotation of the shield 17.

According to such a configuration, the X-ray shielding body 17 can be rotated to position its projections 19a to 19c to face, for example, the second spectroscopic element 14 of the condensing ring 11, as shown in FIG. After that, when an XvA light source (not shown) placed directly above the condensing ring 11 emits X-rays with a wavelength of 23.7A, the X-rays are transmitted between the protrusions 19a and 19b and between the protrusions 19b.
, 19c and between the projections 19c and 19a, the light is incident only on the first spectroscopic element 13 on the inner surface of the condensing ring 11 corresponding therebetween, and is reflected and condensed at a predetermined position. On the other hand, after rotating the X-ray shield 17 and positioning its protrusions 19a to 19c to face the first spectroscopic probe 13 of the condensing ring 11, the Not an X-ray source with a wavelength of 44
When the X-rays are emitted, the X-rays are transmitted between the protrusions 19a and 19b, between the protrusions 19b and 19c, and between the protrusions 19c and 19c.
19a and a corresponding condensing ring 11 between them.
The light enters only the second spectroscopic element 14 on the inner surface, is reflected, and is focused at a predetermined position. In these operations, three shielding plates 20a to 20c are extended horizontally at a circumferential angle of 120' on the side surface of the main body 18 between the protrusions 19a to 19e, thereby blocking the X-rays emitted from the X-ray light source. Among them, the X-rays incident only in the axial direction of the condensing ring 11 are reflected by the spectroscopic element (for example, 13) of the ring 11, so that the condensing performance is further improved.

Therefore, by incorporating the variable wavelength X-ray condenser of the present invention into the X-ray analyzer shown in FIG.
For example, the X-rays of a person) can be focused on a sample on an XY table,
This simplifies analysis operations as it eliminates the need to prepare condensing rings for different wavelengths or the complicated 1-second adjustment work required to meet the X-ray condensing conditions each time a condensing ring is replaced. It is possible to achieve speed-up, speed-up, etc.

In the above embodiment, the condensing ring had a structure in which each spectroscopic element was stacked on a cylindrical ring body with a bulging center, but the ring body was made into two parts, and a spectroscopic element was placed on the inner surface of each ring body. After stacking, these bodies may be assembled to form a condensing ring.

In the above embodiment, an example was explained in which the application was applied to an X-ray analyzer.
It can be similarly applied to line microscopes.

[Effects of the Invention] As detailed above, according to the present invention, X-rays of different wavelengths can be focused by a single focusing ring with a simple operation, and analysis operations can be simplified and speeded up. A wavelength tunable X-ray concentrator can be provided.

[Brief explanation of the drawing]

FIG. 1 is a partially cutaway perspective view of a wavelength variable X-ray concentrator showing an embodiment of the present invention, FIG. 2 is a top view of FIG. 1, and FIG.
FIG. 4 is a perspective view showing the X-ray shield of the condenser in FIG. 1, and FIG. 5 is a perspective view of the spectroscopic element in the condenser ring in FIG. The explanatory diagram, FIG. 6, is a schematic diagram showing an X-ray analysis device incorporating a conventional condensing ring. 11... Concentrating ring, 12... Ring body, 13.
14... Spectroscopic element, 15... Multi-jfili, 17-
X-ray shield, 19a to 19c... protrusion. Applicant's agent Patent attorney Takehiko Suzue Figure 2 Figure 3v! J Figure 4

Claims (2)

[Claims] (1) A variable wavelength X-ray device, characterized in that the inner surface of the ring body having a curved surface is equipped with a focusing ring in which two or more types of X-ray spectroscopic elements having different wavelengths are arranged side by side in the circumferential direction of the ring body. Concentrator. (2) According to claim 1, the condenser ring is rotatably provided with an X-ray shielding body having a protrusion corresponding to a specific X-ray spectroscopic element to be shielded on the inner surface of the ring. wavelength variable X-ray concentrator.