JPH0224550U - - Google Patents
Info
- Publication number
- JPH0224550U JPH0224550U JP10244488U JP10244488U JPH0224550U JP H0224550 U JPH0224550 U JP H0224550U JP 10244488 U JP10244488 U JP 10244488U JP 10244488 U JP10244488 U JP 10244488U JP H0224550 U JPH0224550 U JP H0224550U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- plate
- detachment
- attachment
- lines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 claims description 2
- 238000012856 packing Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10244488U JPH0224550U (en, 2012) | 1988-08-01 | 1988-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10244488U JPH0224550U (en, 2012) | 1988-08-01 | 1988-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0224550U true JPH0224550U (en, 2012) | 1990-02-19 |
Family
ID=31332359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10244488U Pending JPH0224550U (en, 2012) | 1988-08-01 | 1988-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0224550U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021027306A (ja) * | 2019-08-09 | 2021-02-22 | 株式会社ディスコ | プラズマエッチング装置 |
-
1988
- 1988-08-01 JP JP10244488U patent/JPH0224550U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021027306A (ja) * | 2019-08-09 | 2021-02-22 | 株式会社ディスコ | プラズマエッチング装置 |