JPH0224546U - - Google Patents

Info

Publication number
JPH0224546U
JPH0224546U JP1988101652U JP10165288U JPH0224546U JP H0224546 U JPH0224546 U JP H0224546U JP 1988101652 U JP1988101652 U JP 1988101652U JP 10165288 U JP10165288 U JP 10165288U JP H0224546 U JPH0224546 U JP H0224546U
Authority
JP
Japan
Prior art keywords
heater plate
vacuum
holes
vacuum pump
vacuum holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988101652U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988101652U priority Critical patent/JPH0224546U/ja
Publication of JPH0224546U publication Critical patent/JPH0224546U/ja
Pending legal-status Critical Current

Links

Classifications

    • H10W72/07178
    • H10W90/756

Landscapes

  • Wire Bonding (AREA)
JP1988101652U 1988-07-29 1988-07-29 Pending JPH0224546U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988101652U JPH0224546U (enExample) 1988-07-29 1988-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988101652U JPH0224546U (enExample) 1988-07-29 1988-07-29

Publications (1)

Publication Number Publication Date
JPH0224546U true JPH0224546U (enExample) 1990-02-19

Family

ID=31330839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988101652U Pending JPH0224546U (enExample) 1988-07-29 1988-07-29

Country Status (1)

Country Link
JP (1) JPH0224546U (enExample)

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