JPH0224537U - - Google Patents

Info

Publication number
JPH0224537U
JPH0224537U JP10113988U JP10113988U JPH0224537U JP H0224537 U JPH0224537 U JP H0224537U JP 10113988 U JP10113988 U JP 10113988U JP 10113988 U JP10113988 U JP 10113988U JP H0224537 U JPH0224537 U JP H0224537U
Authority
JP
Japan
Prior art keywords
wafer
support
locking shoulder
periphery
protruded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10113988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10113988U priority Critical patent/JPH0224537U/ja
Publication of JPH0224537U publication Critical patent/JPH0224537U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP10113988U 1988-08-01 1988-08-01 Pending JPH0224537U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10113988U JPH0224537U (US06373033-20020416-M00071.png) 1988-08-01 1988-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10113988U JPH0224537U (US06373033-20020416-M00071.png) 1988-08-01 1988-08-01

Publications (1)

Publication Number Publication Date
JPH0224537U true JPH0224537U (US06373033-20020416-M00071.png) 1990-02-19

Family

ID=31329861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10113988U Pending JPH0224537U (US06373033-20020416-M00071.png) 1988-08-01 1988-08-01

Country Status (1)

Country Link
JP (1) JPH0224537U (US06373033-20020416-M00071.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58217184A (ja) * 1982-06-09 1983-12-17 三菱電機株式会社 ウエハ乾燥装置
JPS63178531A (ja) * 1987-01-20 1988-07-22 Fujitsu Ltd 水洗式中間ステ−ジ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58217184A (ja) * 1982-06-09 1983-12-17 三菱電機株式会社 ウエハ乾燥装置
JPS63178531A (ja) * 1987-01-20 1988-07-22 Fujitsu Ltd 水洗式中間ステ−ジ

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