JPH02244413A - Thin-film magnetic head and production thereof - Google Patents
Thin-film magnetic head and production thereofInfo
- Publication number
- JPH02244413A JPH02244413A JP6366389A JP6366389A JPH02244413A JP H02244413 A JPH02244413 A JP H02244413A JP 6366389 A JP6366389 A JP 6366389A JP 6366389 A JP6366389 A JP 6366389A JP H02244413 A JPH02244413 A JP H02244413A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- thin film
- magnetic
- thin
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000010408 film Substances 0.000 claims abstract description 18
- 239000004020 conductor Substances 0.000 claims abstract description 16
- 230000007797 corrosion Effects 0.000 claims abstract description 16
- 238000005260 corrosion Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 16
- 229910010272 inorganic material Inorganic materials 0.000 claims description 14
- 239000011147 inorganic material Substances 0.000 claims description 14
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000007667 floating Methods 0.000 claims description 3
- 238000005339 levitation Methods 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 5
- 230000004907 flux Effects 0.000 abstract description 4
- 230000008859 change Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- -1 S L On Chemical class 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 210000001217 buttock Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、磁気記録再生装置に用いられる薄膜磁気ヘッ
ドの構造及びその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of a thin film magnetic head used in a magnetic recording/reproducing device and a method of manufacturing the same.
磁気ヘッドは、一般に、信号を電気−磁気変換し記録媒
体に信号を記録し、あるいは記録された信号を再生する
電磁変換部と、該電磁変換部を記録媒体に対し、安定か
つ安全に接近せしめるための浮上機構部を備えて達成さ
れる。電磁変換部はパーマロイ等の薄膜磁性体から成り
、その先端部に磁気ギャップ及びギャップ深さを有する
磁気コア、及びこれを巻き回す様にＣｒ−Ｃｕ下地の上
にＣｕめっき等の導電性材料で形成されたコイル。A magnetic head generally includes an electromagnetic transducer that performs electrical-magnetic conversion of a signal, records the signal on a recording medium, or reproduces the recorded signal, and an electromagnetic transducer that allows the electromagnetic transducer to approach the recording medium stably and safely. This is achieved by providing a levitation mechanism for this purpose. The electromagnetic transducer is made of a thin film magnetic material such as permalloy, and has a magnetic core having a magnetic gap and gap depth at its tip, and a conductive material such as Cu plating on a Cr-Cu base to wind the core. formed coil.
及びコイルと磁気コア間を電気的に絶縁する絶縁膜より
成る。この磁気コアの記録媒体に対し書込み読出しを行
なう磁気コア幅（以下トラック幅という）を規定する手
段としては、上記磁気コアの浮上面に露出する部分を、
イオンミリング等のエツチング技術で形成する方法が知
られており、特公昭５７−５８７２７及びアイ・ビー・
エム・テクニアル・ディスクロージャー・プリテン第２
６巻第１１号（１９８４年）第６１９５頁から第６１９
６頁（ＩＢＭ、Ｔａｃｈ、Ｄｉｓｃ、Ｂｕｌｌｅｔ、Ｖ
ｏｊ２２６．Ｎ０ＩＩ、ＰＰ６１９５〜６１９６）に示
されている。かかる方法はホトリングラフイー技法で磁
気コアのトラック幅を規定できる為、トラック幅の微小
かつ高精度に決定できる利点を有する。and an insulating film that electrically insulates between the coil and the magnetic core. As a means of defining the magnetic core width (hereinafter referred to as track width) for writing and reading data to and from the recording medium of the magnetic core, the portion of the magnetic core exposed to the air bearing surface is
A method of forming by etching technology such as ion milling is known, and is known as
M Technical Disclosure Plate No. 2
Vol. 6, No. 11 (1984), pp. 6195-619
6 pages (IBM, Tach, Disc, Bullet, V
oj226. N0II, PP6195-6196). This method has the advantage that the track width of the magnetic core can be determined minutely and with high precision because it can define the track width of the magnetic core using the photolithography technique.
薄膜磁気ヘッドのトラック幅をより小さくすることは、
磁気記録装置を小型化、大容量化する上で、必要な技術
であり、現在のトラック幅１０〜２０μｍを５μｍある
いはそれ以下にする為には、上記従来技術は非常に有効
な手段である。一方。Making the track width of a thin film magnetic head smaller is
This technology is necessary for downsizing and increasing the capacity of magnetic recording devices, and is a very effective means for reducing the current track width of 10 to 20 μm to 5 μm or less. on the other hand.
上記従来技術でトラック幅を規定する際に磁気コアを堀
込む量も重要であり、堀込んだ部分の磁気コアが磁気的
に記録媒体へ影響を及ぼさない為には、信学技報ＭＲ８
８−３９（ＰＰ３３−３８）に、、３μｍ以上の堀込み
が必要であると論じられている。When defining the track width with the above conventional technology, the amount of digging of the magnetic core is also important, and in order to prevent the magnetic core of the dug part from magnetically affecting the recording medium,
8-39 (PP33-38), it is discussed that a depth of 3 μm or more is required.
（発明が解決しようとする課題〕
ところが、上記従来技術は、浮上面をエツチングで１μ
ｍ以上、すなわちギャップ深さ以上堀込むため、浮上面
に露出する磁気コアの先端部周囲に堀込み部が形成され
、該堀込み部がコイル下面の絶縁層に達する。コイル上
面の絶縁膜は、該コイルが一般には渦巻状コイルであり
、該コイル上面のＭＡＳ膜の平坦化を図る為、一般には
有機樹脂該コイル上面の絶縁膜と同じ有機樹脂を用いる
ことが多い、この為、コイル下面の有機樹脂が露出し、
該露出部からの透湿によりコイルが腐食するという問題
がある。(Problem to be solved by the invention) However, in the above-mentioned conventional technology, the air bearing surface is etched to 1 μm.
In order to dig more than m, that is, more than the gap depth, a dug part is formed around the tip of the magnetic core exposed on the air bearing surface, and the dug part reaches the insulating layer on the lower surface of the coil. The insulating film on the top surface of the coil is generally an organic resin.The coil is generally a spiral coil, and in order to flatten the MAS film on the top surface of the coil, the same organic resin as the insulating film on the top surface of the coil is often used. , Therefore, the organic resin on the bottom surface of the coil is exposed,
There is a problem that the coil corrodes due to moisture permeation from the exposed portion.
本発明の目的は、コイルの腐食を防止し、かつトラック
幅を高精度に規定できる薄膜磁気ヘッドを提供すること
にある。SUMMARY OF THE INVENTION An object of the present invention is to provide a thin film magnetic head that can prevent coil corrosion and define track width with high precision.
上記目的を達成する為に、本発明は薄膜ヘッドのコイル
を耐食性導体で形成する。他の手段として、コイル下面
の絶縁膜を無機物化する。さらに他の手段として、トラ
ック幅を規定する為の浮上面掘込み部を非磁性無機物で
埋めたものである。In order to achieve the above object, the present invention forms the coil of the thin film head from a corrosion-resistant conductor. Another method is to make the insulating film on the lower surface of the coil inorganic. Still another means is to fill the air bearing surface recessed portion for defining the track width with a non-magnetic inorganic material.
薄膜磁気ヘッドのコイルを耐食性導体で形成することに
より、透湿が起きてもコイルが腐食することはない、ま
た、コイル下面の絶縁膜を無機物で形成することにより
、該絶縁膜が露出しても、透湿は起こらず、コイルが腐
食することはない。By forming the coil of a thin-film magnetic head with a corrosion-resistant conductor, the coil will not corrode even if moisture permeates through it.Also, by forming the insulating film on the bottom surface of the coil with an inorganic material, the insulating film will not be exposed. However, moisture permeation will not occur and the coil will not corrode.
また、浮上面掘込み部を非磁性無機物で埋めることによ
り、コイル下面の絶縁膜の露出を防ぐことになるので、
透湿は起こらず、コイルが腐食することはない。In addition, by filling the air bearing surface groove with non-magnetic inorganic material, the insulating film on the bottom surface of the coil is prevented from being exposed.
No moisture permeation occurs and the coils do not corrode.
以下１本発明の詳細な説明する。 The present invention will be explained in detail below.
第１図は電磁変換部の平面図、第２図は、第１図のＡ−
Ａの断面図、第３図は、第１図のＢ−Ｈの断面図である
。第１図〜第３図において、磁気コア１，１′に巻かれ
ているコイル２に信号電流を流すことにより、磁気ギャ
ップ１１及びギャップ深さ１２を有する磁気コア１，１
′の先端部トラック幅３より磁束が発生し、記録媒体に
信号を記録する。一方、上記過程において記録された信
号は、記録媒体からの磁束の変化を磁気コア１゜１′の
先端部トラック＠３を介してコイル２で検知し、信号と
して再生される。上記磁気コア１゜１′の先端部トラッ
ク＠３はイオンミリング等のエツチング技術で浮上面４
に堀込み部５を設け、その先端幅を規定している。Figure 1 is a plan view of the electromagnetic converter, and Figure 2 is A-A in Figure 1.
3 is a sectional view taken along line B-H in FIG. 1. In FIGS. 1 to 3, magnetic cores 1 and 1 having a magnetic gap 11 and a gap depth 12 are
A magnetic flux is generated from the track width 3 at the tip of ', and a signal is recorded on the recording medium. On the other hand, the signal recorded in the above process is reproduced as a signal by detecting a change in magnetic flux from the recording medium by the coil 2 via the tip track @3 of the magnetic core 1.about.1'. The tip track @3 of the magnetic core 1゜1' is etched onto the air bearing surface 4 using etching techniques such as ion milling.
A digging portion 5 is provided in the hole, and the width of the tip thereof is defined.
また、磁気コア１，１′とコイル２とを絶縁する為、コ
イル下面絶縁膜６及びコイル上面絶縁膜７がある。Further, in order to insulate the magnetic cores 1, 1' and the coil 2, a coil lower surface insulating film 6 and a coil upper surface insulating film 7 are provided.
本発明の、第１の実施例は、第１図〜第３図に示すコイ
ル２に耐食性導体を採用した例である。A first embodiment of the present invention is an example in which a corrosion-resistant conductor is used for the coil 2 shown in FIGS. 1 to 3.
かかる導体材料として高い導電率も併せて要求されるこ
とがあり、この場合例えば、ＴＬ−Ａｕ下地の上にＡｕ
めっきしたもの１表面をアルマイト化処理したＡＡ、あ
るいはＷ、Ｎなどを採用できる。High conductivity may also be required for such a conductor material, and in this case, for example, Au on a TL-Au base.
It is possible to use AA, W, N, etc. whose surface has been anodized.
このことにより、堀込み部５により露出した。As a result, the excavated portion 5 was exposed.
コイル下面の絶縁膜６である有機樹脂からの透湿が起こ
ってもコイルは耐食性導体であるから、腐食することは
ない。Even if moisture permeates from the organic resin that is the insulating film 6 on the lower surface of the coil, the coil is a corrosion-resistant conductor and will not corrode.
第２の実施例は、第１図に示すコイル下面の絶縁膜６を
無機物で形成した例である。該無機物として緻密な組織
を有する下記の群の一つを選ぶことができる。The second embodiment is an example in which the insulating film 6 on the lower surface of the coil shown in FIG. 1 is formed of an inorganic material. As the inorganic substance, one of the following groups having a dense structure can be selected.
（イ） Ａ ４１ ｍｏｗなど、磁気ギャップ材料、保
護（ロ） Ｓ Ｌ Ｏｎ、 Ｓ Ｌ ａＮ４などシリコ
ンの化合物をスパッタリング等の真空工程、あるいは気
相成長法で堆積したもの。(a) A magnetic gap material such as A41 mow, protection (b) A silicon compound such as S L On, S LaN4, etc., deposited by a vacuum process such as sputtering or a vapor phase growth method.
（ハ）ＳＬＯｘを主成分とするガラス質材料。(c) Glassy material whose main component is SLOx.
この時、コイル２は必ずしも耐食性導体で形成されてい
る必要はない。At this time, the coil 2 does not necessarily need to be made of a corrosion-resistant conductor.
堀込み部５により、コイル下面の絶縁膜６が露出しても
、該露出部分は無機物で形成されているので、透湿は起
こらず、コイルが腐食することはない。Even if the insulating film 6 on the lower surface of the coil is exposed due to the digging portion 5, since the exposed portion is made of an inorganic material, moisture permeation does not occur and the coil will not corrode.
第３の実施例は、第１図に示す堀込み部５を第４図〜第
５図に示す様に、非磁性無機物８で埋め戻すことである
。該非磁性無機物としては、下記に示す群から一つを選
ぶことができる。In the third embodiment, the dug portion 5 shown in FIG. 1 is backfilled with a non-magnetic inorganic material 8 as shown in FIGS. 4 and 5. As the non-magnetic inorganic material, one can be selected from the group shown below.
（イ） Ａ ’ ！ｏＪ、 Ｚ ｒ Ｏｘ＋ Ｔ ｔ
Ｏ＋ Ｓ Ｌ○、などの酸化物、（ロ）ＡｉｌＮＴＬＮ
、Ｓ Ｌ３Ｎ４などの窒化物、（ハ）ＳＬＣ，Ｔｉｃな
どの炭化物。(a) A'! oJ, Z r Ox+ T t
Oxides such as O+ S L○, (b) AilNTLN
, nitrides such as S L3N4, and (iii) carbides such as SLC and Tic.
（ニ） Ａ ｕ 、 Ｗ 、 Ｍｏ、 Ｔ Ｌなとの高
耐食性金属。(d) Highly corrosion resistant metals such as Au, W, Mo, and TL.
上記において、（イ）もしくは（ロ）は、薄膜磁気ヘッ
ドの保護膜として広く使用されている八（８０，と硬度
熱膨張係数を一致させることができるので、浮上面の形
成上望ましい、（ニ）は、渦電流の効果によって、該磁
気ヘッドの隣接情報トラックに対する妨害を軽減できる
利点を持つ。In the above, (a) or (b) can match the hardness and thermal expansion coefficient with 8 (80), which is widely used as a protective film for thin-film magnetic heads, so (2) is desirable for forming the air bearing surface. ) has the advantage of reducing interference to adjacent information tracks of the magnetic head due to the effect of eddy currents.
次に、第３の実施例による薄膜磁気ヘッドの製造方法の
一例について説明する。第６図（α）に示す様に、浮上
面４の上に、所定のトラック幅を得る様にマスク層９が
形成され、イオンミリング等のエツチング技術で（ｂ）
の如くトラック１１１３が規定される。さらに、（ｃ）
に示す様に、浮上面４の上に、（ｂ）の工程で形成され
た堀込み部５が埋め尽くされるまで、非磁性無機物８を
、例えばスパッタリング方等の技術により積層させる。Next, an example of a method for manufacturing a thin film magnetic head according to the third embodiment will be described. As shown in FIG. 6(α), a mask layer 9 is formed on the air bearing surface 4 to obtain a predetermined track width, and is etched by an etching technique such as ion milling (b).
A track 1113 is defined as follows. Furthermore, (c)
As shown in FIG. 2, a non-magnetic inorganic material 8 is laminated on the air bearing surface 4 by a technique such as sputtering until the trench 5 formed in the step (b) is completely filled.
次に、浮上面４上の非磁性無機物８及びマスク層９を研
磨等の手法により、（ｄ）の如く取り除く。Next, the non-magnetic inorganic material 8 and mask layer 9 on the air bearing surface 4 are removed by polishing or the like as shown in FIG. 4(d).
上記方法によれば、堀込み部５を非磁性無機物８で埋め
戻すことにより、透湿を防止することができ、コイルの
腐食を防ぐことができる。第３の実施例においても、第
２の実施例と同様に第６図に示すコイル２は、必ずしも
耐食性材料である必要はない、また、コイル下面絶縁膜
６も、有機物であってもよい。According to the above method, by backfilling the dug portion 5 with the non-magnetic inorganic material 8, moisture permeation can be prevented and corrosion of the coil can be prevented. In the third embodiment, similarly to the second embodiment, the coil 2 shown in FIG. 6 does not necessarily need to be made of a corrosion-resistant material, and the coil lower surface insulating film 6 may also be made of an organic material.
また、第３の実施例では、浮上面４に露出した磁気コア
１，１′の先端部の周囲を、非磁性無機物で埋めている
ので、記録媒体等と接触した時の磁気コア１，１′の先
端部の破損を防ぐという効果もある。In addition, in the third embodiment, the periphery of the tips of the magnetic cores 1, 1' exposed on the air bearing surface 4 is filled with non-magnetic inorganic material, so that the magnetic cores 1, 1 when in contact with a recording medium etc. It also has the effect of preventing damage to the tip of the .
（発明の効果〕
本発明によれば、イオンミリング等のエツチング技術に
より、トラック幅を微／ｈがっ高Ｎ度に規定する手法に
おいても、コイルの腐食を防ぐことができるので、信頼
性の高い薄膜磁気ヘッドを得る効果がある。(Effects of the Invention) According to the present invention, it is possible to prevent corrosion of the coil even in the method of specifying the track width to a fine/h high N degree using etching technology such as ion milling, thereby improving reliability. This has the effect of obtaining a high quality thin film magnetic head.
第１図は本発明による実施例の電磁変換部の平面図、第
２図は第１図のＡ−Ａ線断面図、第３図は第１図のＢ−
Ｂ＠断面図、第４図は他の実施例の電磁変換部の平面図
、第５図は第４図のＡ−Ａ線断面図、第６図はさらに他
の実施例による薄膜磁気ヘッドの製造方法を示す工程図
。
、１′・・・磁気コア、２・・・コイル。
・・・トランク幅、４・・・浮上面、訃・・堀込み部。
・・・コイル下面絶縁膜。
・・・堀込み部を埋めた非磁性無機物。
病
■
−Ａ
δ−ＢFIG. 1 is a plan view of an electromagnetic transducer according to an embodiment of the present invention, FIG. 2 is a sectional view taken along line A-A in FIG. 1, and FIG. 3 is a B--
B@ sectional view, FIG. 4 is a plan view of an electromagnetic transducer according to another embodiment, FIG. 5 is a sectional view taken along the line A-A in FIG. 4, and FIG. A process diagram showing a manufacturing method. , 1'...magnetic core, 2... coil. ...Trunk width, 4.Floating surface, buttock..Drilling section. ...Insulating film on the lower surface of the coil. ...Non-magnetic inorganic material that filled the trench. Disease■ -A δ-B
Claims (1)
、該コイルの少なくとも上面と磁気コアとを電気的に絶
縁する有機樹脂薄膜とを有する薄膜磁気ヘッドにおいて
、上記薄膜導体コイルを耐食性導体で形成したことを特
徴とする薄膜磁気ヘッド。 ２、浮上機構部と、薄膜磁気コアと、薄膜導体コイルと
、該コイルの少なくとも上面と磁気コアとを電気的に絶
縁する有機樹脂薄膜を有する薄膜磁気ヘッドにおいて、
上記コイルの下面と下記の磁気コアとを電気的に絶縁す
る薄膜層を無機物で形成したことを特徴とする薄膜磁気
ヘッド。 ３、浮上機構部と、薄膜磁気コアと、薄膜導体コイルと
、該コイルの少なくとも上面と磁気コアとを電気的に絶
縁する有機樹脂を有し、上記浮上機構部の浮上面から薄
膜磁気コアの一部を除去して書込み読出し幅を決定する
薄膜磁気ヘッドにおいて、上記除去後、上記浮上面に形
成される堀込み部を非磁性無機物で埋め戻したことを特
徴とする薄膜磁気ヘッド。 ４、特許請求の範囲３に記載の薄膜磁気ヘッドの製法で
あって、浮上機構部の浮上面から薄膜磁気コアの一部を
除去する際に、上記浮上面の除去する以外の面を保護す
る保護膜の上から、非磁性無機物を堆積させることを特
徴とする薄膜磁気ヘッドの製造方法。[Scope of Claims] 1. A thin film magnetic head having a floating mechanism section, a thin film magnetic core, a thin film conductor coil, and an organic resin thin film electrically insulating at least the upper surface of the coil and the magnetic core, A thin-film magnetic head characterized in that a thin-film conductor coil is formed of a corrosion-resistant conductor. 2. A thin film magnetic head having a floating mechanism section, a thin film magnetic core, a thin film conductor coil, and an organic resin thin film electrically insulating at least the upper surface of the coil and the magnetic core,
A thin film magnetic head characterized in that a thin film layer electrically insulating the lower surface of the coil and a magnetic core described below is formed of an inorganic material. 3. It has a levitation mechanism section, a thin film magnetic core, a thin film conductor coil, and an organic resin that electrically insulates at least the upper surface of the coil and the magnetic core, and the thin film magnetic core is separated from the air bearing surface of the levitation mechanism section. 1. A thin film magnetic head in which a write/read width is determined by removing a portion of the thin film magnetic head, characterized in that, after the removal, a trench formed in the air bearing surface is backfilled with a nonmagnetic inorganic material. 4. A method for manufacturing a thin film magnetic head according to claim 3, in which when a part of the thin film magnetic core is removed from the air bearing surface of the air bearing mechanism, the other surface of the air bearing surface that is not removed is protected. A method for manufacturing a thin-film magnetic head, comprising depositing a non-magnetic inorganic substance on a protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6366389A JPH02244413A (en) | 1989-03-17 | 1989-03-17 | Thin-film magnetic head and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6366389A JPH02244413A (en) | 1989-03-17 | 1989-03-17 | Thin-film magnetic head and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02244413A true JPH02244413A (en) | 1990-09-28 |
Family
ID=13235809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6366389A Pending JPH02244413A (en) | 1989-03-17 | 1989-03-17 | Thin-film magnetic head and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02244413A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6057991A (en) * | 1996-11-26 | 2000-05-02 | Nec Corporation | Thin film magnetic head with an improved surface to reduce the occurrence of head crash |
-
1989
- 1989-03-17 JP JP6366389A patent/JPH02244413A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6057991A (en) * | 1996-11-26 | 2000-05-02 | Nec Corporation | Thin film magnetic head with an improved surface to reduce the occurrence of head crash |
| US6141859A (en) * | 1996-11-26 | 2000-11-07 | Nec Corporation | Method for making a merged head device |
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