JPH02227794A - Syrup pump for automatic vending machine - Google Patents
Syrup pump for automatic vending machineInfo
- Publication number
- JPH02227794A JPH02227794A JP4893889A JP4893889A JPH02227794A JP H02227794 A JPH02227794 A JP H02227794A JP 4893889 A JP4893889 A JP 4893889A JP 4893889 A JP4893889 A JP 4893889A JP H02227794 A JPH02227794 A JP H02227794A
- Authority
- JP
- Japan
- Prior art keywords
- syrup
- diaphragm
- motor
- nut member
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006188 syrup Substances 0.000 title claims abstract description 45
- 235000020357 syrup Nutrition 0.000 title claims abstract description 45
- 238000001514 detection method Methods 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 9
- 230000032258 transport Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
- Beverage Vending Machines With Cups, And Gas Or Electricity Vending Machines (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は飲料水自動販売機においてシロップなどの送り
出しに使用されるシロップポンプに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a syrup pump used for dispensing syrup, etc. in a drinking water vending machine.
従来の技術
この種のシロップポンプは第2図に示すように構成され
ている。ポンプ本体1とカバー2との間にダイアフラム
3を挟んでそれぞれを一体に結合する。ポンプ本体1に
吸込口4と吐出口5を設け、それぞれに逆止弁6,7を
設ける。カバー2の外側に固定された支持枠8には駆動
軸9が回動自在に取り付けられており、駆動軸9が支持
枠8の裏面に取り付けられたモータ〔図示せず〕によっ
て駆動される。駆動軸9にはカム10が取り付けられて
おり、このカムIOに固定されたクランクピンUと、前
記ダイアフラム3に固定した伝達部材12に固定したピ
ン13とがリンク14で連結されている。2. Description of the Related Art A syrup pump of this type is constructed as shown in FIG. A diaphragm 3 is sandwiched between a pump body 1 and a cover 2, and the pump body 1 and cover 2 are integrally connected. A pump body 1 is provided with a suction port 4 and a discharge port 5, and check valves 6 and 7 are provided respectively. A drive shaft 9 is rotatably attached to a support frame 8 fixed to the outside of the cover 2, and the drive shaft 9 is driven by a motor (not shown) attached to the back surface of the support frame 8. A cam 10 is attached to the drive shaft 9, and a crank pin U fixed to the cam IO and a pin 13 fixed to a transmission member 12 fixed to the diaphragm 3 are connected by a link 14.
したがってモータで駆動軸9を回転駆動すると、カムl
Oが回転してリンク14を介して伝達部材12が矢印A
方向に往復運動し、ダイアフラム3が矢印B方向に後退
移動したときに吸込口4からシロップを吸い込み、吸い
込んだシロップをダイアフラム3が矢印C方向に前進移
動したときに吐出口5から吐き出す。Therefore, when the drive shaft 9 is rotationally driven by the motor, the cam l
O rotates and the transmission member 12 moves in the direction of arrow A via the link 14.
When the diaphragm 3 moves backward in the direction of arrow B, syrup is sucked in from a suction port 4, and when the diaphragm 3 moves forward in the direction of arrow C, it is discharged from a discharge port 5.
発明が解決しようとする課題
このような従来の構成では、−販売動作当たりのモータ
の回転時間が一定で、シロップ吐出量はカム10の形状
を変更することによって必要量に予め設定されている。Problems to be Solved by the Invention In such a conventional configuration, - the rotation time of the motor per vending operation is constant, and the amount of syrup discharged is preset to a required amount by changing the shape of the cam 10.
しかしこのようなシロップ吐出量の機械的な設定作業は
煩わしく、作業性も悪いものである。However, such mechanical setting of the syrup discharge amount is troublesome and has poor workability.
本発明は電気的にシロップ吐出量を調節できるシロップ
ポンプを提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a syrup pump that can electrically adjust the amount of syrup discharged.
課題を解決するための手段
本発明のシロップポンプは、ダイアフラムを往復移動さ
せてシロップを輸送するシロップポンプにおいて、ダイ
アフラムを往復移動させる駆動部を、モータで回転駆動
されるねじ軸と、このねじ軸に螺合するとともに前記ダ
イアフラムの往復移動の方向にスライド自在のナツト部
材と、ダイアフラムの前記往復移動の方向に延びるとと
もに一端が前記ダイアフラムに連結され、他端が前記ナ
ツト部材に連結された伝達部材と、前記ねじ軸の回転に
伴ってパルス信号を出力する回転検出手段と、ダイアフ
ラムを駆動する往路では回転検出手段から発生する前記
パルス信号が必要シロップ量に応じた規定パルス数に一
致するまで前記モータを正転駆動する制御部とで構成し
たことを特徴とする。Means for Solving the Problems The syrup pump of the present invention is a syrup pump that transports syrup by reciprocating a diaphragm, in which a drive section for reciprocating the diaphragm is driven by a screw shaft rotatably driven by a motor, and the screw shaft. a nut member that is screwed into the diaphragm and is slidable in the direction of the reciprocating movement of the diaphragm; and a transmission member that extends in the direction of the reciprocating movement of the diaphragm and has one end connected to the diaphragm and the other end connected to the nut member. and a rotation detection means for outputting a pulse signal in accordance with the rotation of the screw shaft, and a rotation detection means for driving the diaphragm until the pulse signal generated from the rotation detection means matches a prescribed number of pulses corresponding to the required amount of syrup. It is characterized by comprising a control section that drives the motor in forward rotation.
また請求項1に記載のシロップポンプにおいて、前記ナ
ツト部材が初期位置に復帰したことを検出する復帰検出
手段を設け、前記制御部を、ダイアフラムを駆動する復
路では復帰検出手段が前記ナツト部材を検出するまで前
記モータを逆転駆動するよう構成したことを特徴とする
。Further, in the syrup pump according to claim 1, return detection means is provided for detecting that the nut member has returned to the initial position, and the return detection means detects the nut member during the return path in which the control section drives the diaphragm. The present invention is characterized in that the motor is configured to be driven in the reverse direction until the motor is driven in the reverse direction.
作用
各請求項の構成によると、モータを正転駆動するとねじ
軸が回転して、ナツト部材がダイアフラムに近づく方向
に前進する。ナツト部材が前進すると伝達部材を介して
ダイアフラムの例えば中央部が押し出され、シロップが
次第に押し出される。According to the structure of each claim, when the motor is driven to rotate normally, the screw shaft rotates and the nut member moves forward in a direction approaching the diaphragm. When the nut member moves forward, the central portion of the diaphragm, for example, is pushed out via the transmission member, and the syrup is gradually pushed out.
モータを回転させると回転検出手段から回転に伴ってパ
ルス信号が次々に発生する。制御部は、パルス信号を計
数して規定値と比較し、計数値が規定値に達するとモー
タを逆転駆動し、ダイアフラムの中央部が後退を始める
。この後退によってシロップがシロップポンプに吸い込
まれる。When the motor is rotated, pulse signals are generated one after another from the rotation detecting means as the motor rotates. The control unit counts the pulse signals and compares them with a specified value, and when the counted value reaches the specified value, drives the motor in reverse, and the center portion of the diaphragm begins to retreat. This retraction draws syrup into the syrup pump.
請求項2の構成によると、復帰検出手段がナツト部材の
復帰を検出したときに前記の逆転駆動が打ち切られる。According to the second aspect of the present invention, the reverse rotation drive is terminated when the return detection means detects the return of the nut member.
実施例
以下、本発明のシロップポンプを一実施例に基づいて説
明する。なお、第2図に示す従来例と同様の作用を成す
ものには同一の符号を付けて説明する。EXAMPLE Hereinafter, the syrup pump of the present invention will be explained based on one example. Components having the same functions as those of the conventional example shown in FIG. 2 will be described with the same reference numerals.
第1図は本発明のシロップポンプを示す。カバー2の後
部にはモータ15で回転駆動されるねじ軸16が設けら
れている。ねじ軸1Bにはダイアフラム3の往復移動の
方向〔矢印り方向〕にスライド自在のナツト部材17が
螺合している。18a、 18bはナツト部材I7の回
り止めのガイドである。伝達部材12は、一端がダイア
フラム3に連結され、他端に穿設された孔12aにはナ
ツト部材17の突起17aが係合して、伝達部材I2が
ナツト部材17とダイアフラム3とを連結している。1
9はナツト部材17が仮想線で示す初期位置に到達した
ことを検出する復帰検出手段としてのマイクロスイッチ
、20a。FIG. 1 shows a syrup pump according to the invention. A screw shaft 16 that is rotationally driven by a motor 15 is provided at the rear of the cover 2 . A nut member 17 that is slidable in the direction of reciprocating movement of the diaphragm 3 (in the direction of the arrow) is screwed onto the screw shaft 1B. Reference numerals 18a and 18b are guides for preventing rotation of the nut member I7. The transmission member 12 is connected to the diaphragm 3 at one end, and the protrusion 17a of the nut member 17 engages with a hole 12a formed at the other end, so that the transmission member I2 connects the nut member 17 and the diaphragm 3. ing. 1
Reference numeral 9 denotes a microswitch 20a as return detection means for detecting that the nut member 17 has reached the initial position shown by the imaginary line.
20bは回転検出手段としてのスリット板とフォトイン
タラプタで、モータ15とともにケーシング21に納め
られており、モータ15の回転に伴ってスリット板20
aが回転すると、フォトインタラプタ20bがスリット
板20aのスリットの通過を読み取ってパルス信号を出
力する。22はマイクロスイッチ19の出力信号とフォ
トインタラプタ20bの出力信6一
号に基づいてモータ15への通電時間とそのときの通電
方向を決定する制御部である。Reference numeral 20b denotes a slit plate and a photointerrupter as rotation detection means, which are housed together with the motor 15 in the casing 21. As the motor 15 rotates, the slit plate 20
When a rotates, the photointerrupter 20b reads the passage through the slit of the slit plate 20a and outputs a pulse signal. Reference numeral 22 denotes a control unit that determines the time period for which the motor 15 is energized and the direction in which it is energized based on the output signal of the microswitch 19 and the output signal 61 of the photointerrupter 20b.
次に制御部22の構成を動作順序にしたがって説明する
。制御部22がシロップ払い出し指示23を検出すると
、モータ15を正転駆動するとともにフォトインタラプ
タ20bからのパルス信号数を計数してシロップ必要量
に応じて設定された規定値と比較する。ここで時々の計
数値をNs、シロップ必要量に応じて設定された規定値
をN8とすると、Ns≧ NR
を検出して正転駆動を終了する。そして次にマイクロス
イッチ19がナツト部材17の復帰を検出するまでモー
タ15を逆転駆動する。Next, the configuration of the control section 22 will be explained in accordance with the order of operation. When the control unit 22 detects the syrup dispensing instruction 23, it drives the motor 15 in normal rotation, counts the number of pulse signals from the photointerrupter 20b, and compares it with a specified value set according to the required amount of syrup. Here, if the occasional count value is Ns, and the specified value set according to the required amount of syrup is N8, then Ns≧NR is detected and the normal rotation drive is ended. Then, the motor 15 is driven in the reverse direction until the microswitch 19 detects that the nut member 17 has returned.
このようにして、シロップ払い出し指示23を検出する
たびに必要量のシロップが吐出口5がら吐き出される。In this way, the required amount of syrup is discharged from the discharge port 5 every time the syrup dispensing instruction 23 is detected.
ここでは−回の吐出が終了するたびに初期位置に復帰す
るため、毎回の吐出量が正確である。Here, each time the ejection is completed, the ejector returns to the initial position, so the amount of ejection each time is accurate.
上記の実施例では復帰検出手段としてのマイクロスイッ
チ19がナツト部材17を検出したときに制御部22が
モータ15の逆転駆動を終了したが、これは正転終了の
位置から規定値N□のパルス信号を制御部22が検出し
たときにモータ15の逆転駆動を終了しても良い。但し
、正転と逆転の駆動を規定値N7のパルス信号の管理だ
けに依存していると、ナツト部材17が初期位置に正確
に復帰しない場合も考えられ、この場合にはその誤差量
が累積されて、長期の使用中には正転駆動できる区間が
規定値NRのパルス信号の計数区間に満たない状態にな
るおそれがあるが、復帰検出手段としてのマイクロスイ
ッチ19がナツト部材17を検出したときに制御部22
がモータ15の逆転駆動を終了するように構成した場合
には、長期間の使用によっても正確に規定量のシロップ
を送り出せる。In the above embodiment, when the microswitch 19 serving as a return detection means detects the nut member 17, the control unit 22 ends the reverse drive of the motor 15, but this is done by applying a pulse of the specified value N□ from the normal rotation end position. The reverse rotation driving of the motor 15 may be terminated when the control unit 22 detects the signal. However, if forward and reverse rotation driving is dependent only on the management of the pulse signal of the specified value N7, the nut member 17 may not return to the initial position accurately, and in this case, the amount of error will accumulate. During long-term use, there is a possibility that the period in which forward rotation can be driven will be less than the counting period of the pulse signal of the specified value NR. Sometimes the control unit 22
When configured so that the reverse drive of the motor 15 is terminated, the specified amount of syrup can be accurately delivered even after long-term use.
上記の実施例では回転検出手段をスリット板20aとフ
ォトインタラプタ20bとで構成した場合を例に挙げて
説明したが、これはモータ15の出力軸に取り付けられ
た歯車と、この歯車の外周部に接近して位置するように
固定側から支持された磁気センサと、固定側に取り付け
られたバイアス磁界発生用の永久磁石とで、歯車の回転
に伴って磁気センサと鎖交する前記永久磁石の磁束が変
化することによってモータ15の回転を検出するパルス
ジェネレータであっても同様である。In the above embodiment, the rotation detection means was explained using the slit plate 20a and the photointerrupter 20b as an example, but this is explained by using a gear attached to the output shaft of the motor 15 and a gear attached to the outer periphery of the gear. A magnetic sensor supported from a fixed side so as to be located close to each other, and a permanent magnet for generating a bias magnetic field attached to the fixed side, and the magnetic flux of the permanent magnet interlinks with the magnetic sensor as the gear rotates. The same applies to a pulse generator that detects the rotation of the motor 15 based on a change in .
発明の効果
以上のように各請求項に記載の構成によれば、ダイアフ
ラムを往復移動させてシロップを輸送スるシロップポン
プにおいて、ダイアフラムを往復移動させる駆動部を、
モータで回転駆動されるねじ軸と、このねじ軸に螺合す
るとともに前記ダイアフラムの往復移動の方向にスライ
ド自在のナツト部材と、ダイアフラムの前記往復移動の
方向に延びるとともに一端が前記ダイアフラムに連結さ
れ、他端が前記ナツト部材に連結された伝達部材と、前
記ねじ軸の回転に伴ってパルス信号を出力する回転検出
手段と、ダイアフラムを駆動する往路では回転検出手段
から発生する前記パルス信号が必要シロップ量に応じた
規定パルス数に一致するまで前記モータを正転駆動する
制御部とで構成したため、制御部における規定パルス数
を設定変更するだけでシロップ吐出量を可変できる。Effects of the Invention As described above, according to the configurations described in each claim, in a syrup pump that transports syrup by reciprocating a diaphragm, the drive unit that reciprocates the diaphragm is
a screw shaft rotationally driven by a motor; a nut member screwed onto the screw shaft and slidable in the direction of the reciprocating movement of the diaphragm; and a nut member extending in the direction of the reciprocating movement of the diaphragm and having one end connected to the diaphragm. , a transmission member whose other end is connected to the nut member, a rotation detection means that outputs a pulse signal in accordance with the rotation of the screw shaft, and the pulse signal generated from the rotation detection means is necessary for the forward path to drive the diaphragm. Since the control unit drives the motor in normal rotation until the number of pulses reaches a predetermined number corresponding to the syrup amount, the amount of syrup discharged can be varied by simply changing the setting of the predetermined number of pulses in the control unit.
さらに請求項2に記載の構成によると、制御部は復帰検
出手段がナツト部材を検出するまで逆転駆動するように
構成したため、ナツト部材を正確に真の初期位置まで戻
すことができ、長期間にわたって必要量のシロップを払
い出すことができる。Furthermore, according to the second aspect of the invention, the control section is configured to drive in reverse until the return detection means detects the nut member, so that the nut member can be accurately returned to the true initial position, and the nut member can be returned to the true initial position for a long period of time. You can dispense the required amount of syrup.
第1図は本発明のシロップポンプの一実施例の構成図、
第2図は従来のシロップポンプの構成図である。
3・・・ダイアフラム、4・・・吸込口、5・・・吐出
口、12・・・伝達部材、15・・・モータ、16・・
・ねじ軸、17・・・ナツト部材、19・・・マイクロ
スイッチ〔復帰検出手段〕N 20a、20b・・・ス
リット板、フォトインタラプタ〔回転検出手段〕、22
・・・制御部。FIG. 1 is a configuration diagram of an embodiment of the syrup pump of the present invention;
FIG. 2 is a block diagram of a conventional syrup pump. 3...Diaphragm, 4...Suction port, 5...Discharge port, 12...Transmission member, 15...Motor, 16...
- Screw shaft, 17... Nut member, 19... Micro switch [return detection means] N 20a, 20b... Slit plate, photo interrupter [rotation detection means], 22
...control section.
Claims (1)
シロップポンプにおいて、ダイアフラムを往復移動させ
る駆動部を、モータで回転駆動されるねじ軸と、このね
じ軸に螺合するとともに前記ダイアフラムの往復移動の
方向にスライド自在のナット部材と、ダイアフラムの前
記往復移動の方向に延びるとともに一端が前記ダイアフ
ラムに連結され、他端が前記ナット部材に連結された伝
達部材と、前記ねじ軸の回転に伴ってパルス信号を出力
する回転検出手段と、ダイアフラムを駆動する往路では
回転検出手段から発生する前記パルス信号が必要シロッ
プ量に応じた規定パルス数に一致するまで前記モータを
正転駆動する制御部とで構成したシロップポンプ。 2、前記ナット部材が初期位置に復帰したことを検出す
る復帰検出手段を設け、前記制御部を、ダイアフラムを
駆動する復路では復帰検出手段が前記ナット部材を検出
するまで前記モータを逆転駆動するよう構成した請求項
1記載のシロップポンプ。[Claims] 1. In a syrup pump that transports syrup by reciprocating a diaphragm, a drive unit for reciprocating the diaphragm is screwed into a screw shaft rotationally driven by a motor, and the screw shaft is screwed to the screw shaft. a nut member slidable in the direction of the reciprocating movement of the diaphragm; a transmission member extending in the direction of the reciprocating movement of the diaphragm and having one end connected to the diaphragm and the other end connected to the nut member; A rotation detecting means outputs a pulse signal in accordance with the rotation, and the motor is driven in normal rotation until the pulse signal generated from the rotation detecting means coincides with a predetermined number of pulses corresponding to the required amount of syrup on the outward path to drive the diaphragm. A syrup pump consisting of a control section. 2. Return detection means for detecting that the nut member has returned to the initial position is provided, and the control unit is configured to drive the motor in reverse on the return path for driving the diaphragm until the return detection means detects the nut member. The syrup pump according to claim 1, wherein the syrup pump comprises:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4893889A JPH02227794A (en) | 1989-02-28 | 1989-02-28 | Syrup pump for automatic vending machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4893889A JPH02227794A (en) | 1989-02-28 | 1989-02-28 | Syrup pump for automatic vending machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02227794A true JPH02227794A (en) | 1990-09-10 |
Family
ID=12817210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4893889A Pending JPH02227794A (en) | 1989-02-28 | 1989-02-28 | Syrup pump for automatic vending machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02227794A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0493380U (en) * | 1990-12-25 | 1992-08-13 | ||
US5536046A (en) * | 1992-12-09 | 1996-07-16 | Wallace Computer Services, Inc. | Heat sensitive system and use thereof |
JP2011247269A (en) * | 2004-11-23 | 2011-12-08 | Entegris Inc | System and method for variable home position dispense system |
US8870548B2 (en) | 2005-12-02 | 2014-10-28 | Entegris, Inc. | System and method for pressure compensation in a pump |
US9309872B2 (en) | 2005-12-02 | 2016-04-12 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
US9399989B2 (en) | 2005-11-21 | 2016-07-26 | Entegris, Inc. | System and method for a pump with onboard electronics |
US9631611B2 (en) | 2006-11-30 | 2017-04-25 | Entegris, Inc. | System and method for operation of a pump |
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JPS5240081B2 (en) * | 1974-08-26 | 1977-10-08 | ||
JPS5451599A (en) * | 1977-09-29 | 1979-04-23 | Sanyo Jido Hanbaiki Kk | Slot machine for beverage |
JPS57201982A (en) * | 1981-05-25 | 1982-12-10 | Douwe Egberts Tabaksfab | Method of and apparatus for measuring drink concentrate |
JPS5981034A (en) * | 1971-11-15 | 1984-05-10 | Shiyouun Kosakusho:Kk | Location setting device |
JPS61117044A (en) * | 1984-11-14 | 1986-06-04 | Toshiba Corp | Driving apparatus |
-
1989
- 1989-02-28 JP JP4893889A patent/JPH02227794A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5981034A (en) * | 1971-11-15 | 1984-05-10 | Shiyouun Kosakusho:Kk | Location setting device |
JPS5016186A (en) * | 1973-06-14 | 1975-02-20 | ||
JPS5240081B2 (en) * | 1974-08-26 | 1977-10-08 | ||
JPS5451599A (en) * | 1977-09-29 | 1979-04-23 | Sanyo Jido Hanbaiki Kk | Slot machine for beverage |
JPS57201982A (en) * | 1981-05-25 | 1982-12-10 | Douwe Egberts Tabaksfab | Method of and apparatus for measuring drink concentrate |
JPS61117044A (en) * | 1984-11-14 | 1986-06-04 | Toshiba Corp | Driving apparatus |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0493380U (en) * | 1990-12-25 | 1992-08-13 | ||
US5536046A (en) * | 1992-12-09 | 1996-07-16 | Wallace Computer Services, Inc. | Heat sensitive system and use thereof |
JP2011247269A (en) * | 2004-11-23 | 2011-12-08 | Entegris Inc | System and method for variable home position dispense system |
US8814536B2 (en) | 2004-11-23 | 2014-08-26 | Entegris, Inc. | System and method for a variable home position dispense system |
US9617988B2 (en) | 2004-11-23 | 2017-04-11 | Entegris, Inc. | System and method for variable dispense position |
US9399989B2 (en) | 2005-11-21 | 2016-07-26 | Entegris, Inc. | System and method for a pump with onboard electronics |
US8870548B2 (en) | 2005-12-02 | 2014-10-28 | Entegris, Inc. | System and method for pressure compensation in a pump |
US9309872B2 (en) | 2005-12-02 | 2016-04-12 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
US9816502B2 (en) | 2005-12-02 | 2017-11-14 | Entegris, Inc. | System and method for pressure compensation in a pump |
US9631611B2 (en) | 2006-11-30 | 2017-04-25 | Entegris, Inc. | System and method for operation of a pump |
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