JPH02227607A - Method and tool for fitting scale of scaling instrument - Google Patents
Method and tool for fitting scale of scaling instrumentInfo
- Publication number
- JPH02227607A JPH02227607A JP4790289A JP4790289A JPH02227607A JP H02227607 A JPH02227607 A JP H02227607A JP 4790289 A JP4790289 A JP 4790289A JP 4790289 A JP4790289 A JP 4790289A JP H02227607 A JPH02227607 A JP H02227607A
- Authority
- JP
- Japan
- Prior art keywords
- scale
- fixture
- fitting
- fixing
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 4
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 239000007799 cork Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は例えばホログラムスケール装置等超高精度の測
尺装置に使用して好適な測尺装置のスケール取付方法及
び取付具に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a scale mounting method and fixture for a measuring device suitable for use in ultra-high precision measuring devices such as hologram scale devices.
本発明は例えばホログラムスケール装置等超高精度の測
尺装置に使用して好適な測尺装置のスケール取付方法及
び取付具に関し、スケールを部月に取付具を介して取付
けるに、この取付具として、この取付具自身をこの部材
に固定する第１の固定手段と、このスケールをこの部材
に固定する第２の固定手段とを有するものを使用し、こ
の第１の固定手段でこの取付具をこの部材に固定した後
に、この第２の固定手段によりこのスケールを部材に固
定するようにすることによりスケールを取付ける際にス
ケールの変形を共なう誤差発生を解消し、精度変化が無
く、測尺装置の精度再現性を良くする様にしたものであ
る。The present invention relates to a scale mounting method and fixture for a measuring device suitable for use in an ultra-high precision measuring device such as a hologram scale device. , a first fixing means for fixing the fixture itself to the member, and a second fixing means for fixing the scale to the member, and the first fixing means is used to fix the fixture to the member. By fixing the scale to the member using the second fixing means after fixing it to the member, errors caused by deformation of the scale when attaching the scale can be eliminated, there is no change in accuracy, and measurement is possible. This is designed to improve the accuracy and reproducibility of the measuring device.
従来例えばホログラムスケール装置のホログラムスケー
ルを工作機械等の部材に取付けるのに第１１図に示す如
く、例えば０．５５μ鋼のピッチの格子が付されたホロ
グラムスケール（１）の取付部（１ａ）をバネ材より成
る板状の取付具（２）と部材（３）とで挟持する如くし
ていた。この取付具（２）は板状のバネ材を略コ字状と
したもので、このコ字状の主部（２ａ）に並列に２個の
ネジ孔が設けられ、この２個のネジ孔を通しワッシャ（
５）を介して夫々取付ネジ（４）を部材（３）の所定位
置に締め付け、この取付具（２）を固定すると共にこの
取付具（２）の２つの脚部（２ｂ） （２ｃ）と部材（
３）とでこのホログラムスケール（１）の取付部（１ａ
）を弾性的に挟持固定する如（していた。−斯るホログ
ラムスケール装置に依れば１０ｎｍのオーダの超高精度
の測尺ができる。Conventionally, for example, in order to attach a hologram scale of a hologram scale device to a member of a machine tool, etc., as shown in FIG. It was held between a plate-shaped fixture (2) made of a spring material and a member (3). This fixture (2) is made of a plate-shaped spring material with a substantially U-shape, and two screw holes are provided in parallel in the main part (2a) of this U-shape. through the washer (
5) respectively to fix the mounting screws (4) in place on the member (3), fixing the fixture (2) and tightening the two legs (2b) (2c) of the fixture (2). Element(
3) and the mounting part (1a) of this hologram scale (1).
) is elastically clamped and fixed.-Using such a hologram scale device, ultra-high precision measurement on the order of 10 nm is possible.
Ａ及びＢに示す如く取付ネジ（４）を締め付けるときに
ワッシャ（５）を介して取付具（２）に矢印Ｆに示す如
き力が作用し、これがホログラムスケール（１）に最終
的に作用しこのホログラムスケール（１）が変形する。When tightening the mounting screw (4) as shown in A and B, a force as shown by arrow F acts on the fixture (2) via the washer (5), and this ultimately acts on the hologram scale (1). This hologram scale (1) is deformed.
この変形による誤差量は±０．３μｍ程度であり、−船
釣な測尺装置の精度では問題とならない量であるが、上
述のホログラムスケール装置の如＜ １０ｎｍのオーダ
の超高精度の測尺装置ではこの変形によって生じる誤差
も問題となり、精度の再現性不良となっていた。The amount of error due to this deformation is about ±0.3 μm, which is not a problem with the accuracy of measuring instruments used on boats, but with the above-mentioned hologram scale instrument, which has ultra-high precision measuring instruments on the order of < 10 nm. Errors caused by this deformation also caused problems with the device, resulting in poor reproducibility of precision.
本発明は斯る点に鑑みスケールを取付ける際のスケール
の変形をなくし測尺装置の精度変形が無く、測尺装置の
精度再現性を良くすることを目的とする。In view of this, it is an object of the present invention to eliminate deformation of the scale when attaching the scale, eliminate deformation of the accuracy of the measuring device, and improve the accuracy reproducibility of the measuring device.
然しなから従来の如くホログラムスケール（１）の取付
を行なったときは取付ネジ（４）により取付具（２）を
固定すると共にこの取付具（２）と部材（３）とでホロ
グラムスケール（１）を挟持固定しているので第１２図
〔課題を解決するための手段〕
本発明測尺装置のスケール取付方法は例えば第１図、第
２図及び第３図に示す如くスケール（１）を部材（３）
に取付具（２）を介して取付けるに、この取付具（２）
としてこの取付具（２）自身をこの部材（３）に固定す
る第１の固定手段（７ａ） （７ｂ）と、このスケール
（１）をこの部材（３）に固定する第２の固定手段（６
ａ） （６ｂ）とを有するものを使用し、この第１の固
定手段（７ａ） （７ｂ）でこの取付具（２）をこの部
材（３）に固定した後にこの第２の固定手段（６ａ）
（６ｂ）によりこめスケール（１）を部材（３）に固定
する様にしたものである。However, when mounting the hologram scale (1) as in the past, the mounting screw (4) is used to fix the fixture (2), and this fixture (2) and member (3) are used to attach the hologram scale (1). ) is clamped and fixed, so the scale (1) is clamped and fixed as shown in FIG. 12 (Means for Solving the Problem). Parts (3)
This fitting (2) is installed via the fitting (2) on the
As shown in FIG. 6
a) (6b), and after fixing this fixture (2) to this member (3) with this first fixing means (7a) (7b), this second fixing means (6a) )
(6b) fixes the scale (1) to the member (3).
また本発明測尺装置のスケール取付具は例えば第２図に
示す如く取付具（２）自身を部材（３）に固定する第１
の固定手段（７ａ） （７ｂ）と、スケール（１）をこ
の部材（３）に固定する第２の固定手段とを有するもの
である。Further, as shown in FIG.
(7a) (7b), and a second fixing means for fixing the scale (1) to this member (3).
本発明に依れば取付具（２）を部材（３）に取付けた後
に、この取付具（２）によりスケール（１）を固定する
ので、このスケール（１）を固定するのに取付具（２）
に変位力が作用しても、この変位力がスケール（１）に
作用せず、このスケール（１）の取付けの際にスケール
（１）の変形が生じない。According to the present invention, the scale (1) is fixed by the fixture (2) after the fixture (2) is attached to the member (3), so the scale (1) is fixed by the fixture (2). 2)
Even if a displacement force acts on the scale (1), this displacement force does not act on the scale (1), and no deformation of the scale (1) occurs when the scale (1) is attached.
以下第１図、第２図及び第３図を参照して本発明の一実
施例につき説明しよう。Hereinafter, one embodiment of the present invention will be described with reference to FIGS. 1, 2, and 3.
この第１図、第２図及び第３図に於いて、第１１図に対
応する部分には同一符号を付し、その詳細説明は省略す
る。In FIGS. 1, 2, and 3, parts corresponding to those in FIG. 11 are designated by the same reference numerals, and detailed explanation thereof will be omitted.
第１図例に於いても例えば０．５５μｍピッチの格子が
付されたホログラムスケール（１）を工作機械等の部材
（３）に取付けるに取付具（２）を用いる。In the example shown in FIG. 1 as well, a fixture (2) is used to attach a hologram scale (1) having a grid of, for example, a pitch of 0.55 μm to a member (3) of a machine tool or the like.
本例に於いてはこの取付具（２）を第２図Ａ及びＢに示
す如く板状のバネ材を略Ｅ字状としたもので、このＥ字
状の主部（２ａ）に並列に２個のネジ孔（６ａ）（６ｂ
）を形成すると共に３個の脚部（２ｂ） （２ｃ） （
２ｄ）の遊端部に円弧状のスケール押え部を形成し、更
にこの主部（２ａ）の脚部（２ｂ） （２ｃ） （２ｄ
）とは反対側の両側に延長部（２ｅ）及び（２ｆ）を設
け、この延長部（２ｅ）及び（２ｆ）にネジ孔（７ａ）
及び（７ｂ）を夫々設けると共にこの延長部（２ｅ）及
び（２ｆ）をＥ字状部に対し５＠〜８°程度傾斜する如
く折り曲げる。In this example, this fixture (2) is made of a plate-shaped spring material in a substantially E-shape as shown in Fig. 2A and B, and is placed in parallel with the main part (2a) of this E-shape. Two screw holes (6a) (6b
) and three legs (2b) (2c) (
An arc-shaped scale holding part is formed at the free end of the main part (2d), and the legs (2b) (2c) (2d) of the main part (2a) are
) are provided on both sides opposite to the extension parts (2e) and (2f), and screw holes (7a) are provided in the extension parts (2e) and (2f).
and (7b) are provided, respectively, and the extension portions (2e) and (2f) are bent at an angle of about 5@ to 8 degrees with respect to the E-shaped portion.
斯る本例による取付具（２）を使用してホログラムスケ
ール（１）を工作機械等の部材（３）に取付けるときは
先ず第３図Ａ、Ｂに示す如くこの取付具（２）を部材（
３）の所定位置にこの取付具（２）の主部（２ａ）の延
長部（２ｅ）及び（２ｆ）に夫々設けられたネジ孔（７
ａ）及び（７ｂ）により取付ネジ（９）により締め付け
てこの取付具（２）を固定する。この場合取付具（２）
に変位力は作用するが、この３つの脚部＜２ｂ） （２
ｃ） （２ｄ）の押え部は延長部（２ｅ） （２ｆ）に
対して例えば５″〜８°傾斜しているので、この３つの
脚部（２ｂ） （２ｃ） （２ｄ）はホログラムスケー
ル（１）に接触せず、この変位力がホログラムスケール
（１）に作用しない。When attaching the hologram scale (1) to a member (3) of a machine tool or the like using the fixture (2) according to this example, first attach the fixture (2) to the member as shown in FIGS. 3A and B. (
3) into the screw holes (7) provided in the extension parts (2e) and (2f) of the main part (2a) of this fixture (2), respectively.
Fix this fixture (2) by tightening the mounting screw (9) according to a) and (7b). In this case, the fixture (2)
The displacement force acts on these three legs <2b) (2
c) Since the holding part (2d) is inclined at an angle of, for example, 5'' to 8° with respect to the extension parts (2e) (2f), these three legs (2b) (2c) (2d) are attached to the hologram scale ( 1), and this displacement force does not act on the hologram scale (1).
次に第４図Ａ、Ｂに示す如（取付具（２）の主部（２ａ
）に設けたネジ孔（６ａ） （６ｂ）を通し取付ネジ（
８）を部材（３）に対し締め付け、この取付具（２）の
３つの脚部（２ｂ） （２ｃ） （２ｄ）の押え部と部
材（３）の所定位置とでこのホログラムスケール（１）
の取付部（１ａ）を弾性的に挟持してこの部材（３）に
ホログラムスケール（１）を固定する。この場合取付具
（２）は取付ネジ（９）により予め部材（３）に固定さ
れているため、取付ネジ（８）の締め付は時に生じる力
Ｆによる取付具（２）の変位を押さえることができ、こ
のときの取付ネジ（８）の締め付けによる力はこのホロ
グラムスケール（１）に作用しなくなり、このホログラ
ムスケール（１）の取付時にこのホログラムスケール（
１）の取付具（２）による変形はほとんど生じない。因
みに本例によればこのホログラムスケール（１）の取付
時に生ずる誤差は従来の一程度であった。第１図に於い
て（１０）は半導体レーザ等より構成された検出用ヘッ
ド装置である。Next, as shown in Fig. 4A and B (the main part (2a) of the fixture (2)
) through the screw holes (6a) (6b) provided in the mounting screws (
8) to the member (3), and the three legs (2b), (2c), and (2d) of this fixture (2) and the predetermined position of the member (3) are used to secure the hologram scale (1).
The hologram scale (1) is fixed to this member (3) by elastically holding the mounting portion (1a) of the member (3). In this case, since the fixture (2) is fixed to the member (3) in advance by the mounting screw (9), the tightening of the mounting screw (8) is to prevent the displacement of the fixture (2) due to the force F that sometimes occurs. The force caused by tightening the mounting screw (8) at this time no longer acts on this hologram scale (1), and when this hologram scale (1) is installed, this hologram scale (
Almost no deformation occurs due to the fixture (2) in 1). Incidentally, according to this example, the error that occurs when installing the hologram scale (1) is about the same as that of the conventional method. In FIG. 1, (10) is a detection head device composed of a semiconductor laser or the like.
従って本例に依ればホログラムスケール（１）を取付け
る際のスケール（１）の変形をなくすことができ測尺装
置の精度変化が無（、この測尺装置の精度再現性を良く
することができる利益がある。Therefore, according to this example, it is possible to eliminate the deformation of the scale (1) when installing the hologram scale (1), and there is no change in the accuracy of the measuring device (and it is possible to improve the accuracy reproducibility of this measuring device). There are benefits that can be made.
第５図、第６図・・・・第１Ｏ図は夫々取付具（２）の
他の実施例を示し、夫々Ａは平面図、Ｂは側面図、Ｃは
背面図を示す。之等第５図、第６図・・・・第１Ｏ図例
は夫々板状のバネ材より形成したものであり、第２図に
対応する部分に同一符号を付し、その詳細説明は省略す
る。Figures 5, 6, . . . 1O each show other embodiments of the fixture (2), where A is a plan view, B is a side view, and C is a rear view. The examples in Figure 5, Figure 6, etc. in Figure 1O are each formed from a plate-shaped spring material, and the same reference numerals are given to the parts corresponding to those in Figure 2, and detailed explanation thereof is omitted. do.
断る第５図、第６図・・・・第１０図の取付具（２）に
於いても第２図の取付具（２）と同様の作用効果が得ら
れることは容易に理解できよう。また上述例に於いては
取付具（２）として板状バネ材を使用したが、この代り
に押え部にコルク、ゴム等の弾性体を設けた鉄板等が使
用できることは勿論である。It is easy to understand that the fixture (2) shown in FIGS. 5, 6, . . . 10 can provide the same effect as the fixture (2) shown in FIG. Further, in the above-described example, a plate spring material was used as the fixture (2), but it is of course possible to use an iron plate or the like provided with an elastic body such as cork or rubber for the holding part instead.
尚上述例に於いてはホログラムスケール装置のホログラ
ムスケール（１）を取付ける例につき述べたが、本発明
はその他の測尺装置のスケールを取付ける場合にも使用
できることは勿論である。In the above example, the hologram scale (1) of a hologram scale device is attached, but it goes without saying that the present invention can also be used when attaching a scale of other measuring devices.
また、本発明は上述実施例に限らず本発明の要旨を逸脱
することなくその他種々の構成が取り得ることは勿論で
ある。Furthermore, it goes without saying that the present invention is not limited to the above-described embodiments, and can take various other configurations without departing from the gist of the present invention.
図、第２図Ａ及びＢは本発明に依る取付具の例を示す平
面図及び側面図、第３図及び第４図は夫々本発明の説明
に供する線図、第５図、第６図・・・・第１０図は夫々
取付具の他の例を示す線図、第１１図は従来のスケール
取付例を示す斜視図、第１２図は第１１図の説明に供す
る線図である。2A and 2B are a plan view and a side view showing an example of a fixture according to the present invention, FIGS. 3 and 4 are diagrams for explaining the present invention, and FIGS. 5 and 6, respectively. . . . Fig. 10 is a diagram showing other examples of the fixture, Fig. 11 is a perspective view showing an example of conventional scale mounting, and Fig. 12 is a diagram for explaining Fig. 11.
（１）はスケール、（２）は取付具、（２ａ）は主部、
（２ｂ）（２ｃ） （２ｄ）は夫々脚部、（２ｅ） （
２ｆ）は延長部、（３）は部材、（６ａ） （６ｂ）
（７ａ）及び（７ｂ）は夫々ネジ孔、（８）及び（９）
は夫々取付ネジである。(1) is the scale, (2) is the fixture, (2a) is the main part,
(2b) (2c) (2d) are the legs, (2e) (
2f) is an extension, (3) is a member, (6a) (6b)
(7a) and (7b) are screw holes, (8) and (9) respectively.
are the respective mounting screws.
本発明に依ればスケールを取付ける際のスケールの変形
をなくすことができ測尺装置の精度変化が無く、この測
尺装置の精度再現性を良くすることができる。According to the present invention, it is possible to eliminate deformation of the scale when attaching the scale, there is no change in the accuracy of the measuring device, and the accuracy reproducibility of the measuring device can be improved.
Claims (1)
付具としてこの取付具自身を上記スケールを上記部材に
固定する第２の固定手段とを有するものを使用し、上記
第１の固定手段で上記取付具を上記部材に固定した後に
、上記第２の固定手段により上記スケールを上記部材に
固定する様にしたことを特徴とする測尺装置のスケール
取付方法。 ２、取付具自身を部材に固定する第１の固定手段と、 スケールを上記部材に固定する第２の固定手段とを有す
ることを特徴とする測尺装置のスケール取付具。[Scope of Claims] 1. When attaching the scale to a member via a fixture, use is made of a fixture having second fixing means for fixing the scale to the member; A method for attaching a scale to a measuring device, characterized in that after the fixture is fixed to the member by the first fixing means, the scale is fixed to the member by the second fixing means. 2. A scale mount for a length measuring device, comprising: a first fixing means for fixing the mount itself to the member; and a second fixing means for fixing the scale to the member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1047902A JP2700911B2 (en) | 1989-02-28 | 1989-02-28 | Scale mounting method and fixture for measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1047902A JP2700911B2 (en) | 1989-02-28 | 1989-02-28 | Scale mounting method and fixture for measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02227607A true JPH02227607A (en) | 1990-09-10 |
| JP2700911B2 JP2700911B2 (en) | 1998-01-21 |
Family
ID=12788325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1047902A Expired - Fee Related JP2700911B2 (en) | 1989-02-28 | 1989-02-28 | Scale mounting method and fixture for measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2700911B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1462758A2 (en) * | 2003-03-28 | 2004-09-29 | Mitutoyo Corporation | Method and device for attaching an elastic fixture to a length measuring device. |
| JP2008545978A (en) * | 2005-06-11 | 2008-12-18 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Scale holder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63111410A (en) * | 1986-10-18 | 1988-05-16 | カ−ル・ツアイス−スチフツング | Holder for size display means and shape display means |
-
1989
- 1989-02-28 JP JP1047902A patent/JP2700911B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63111410A (en) * | 1986-10-18 | 1988-05-16 | カ−ル・ツアイス−スチフツング | Holder for size display means and shape display means |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1462758A2 (en) * | 2003-03-28 | 2004-09-29 | Mitutoyo Corporation | Method and device for attaching an elastic fixture to a length measuring device. |
| EP1462758A3 (en) * | 2003-03-28 | 2006-07-26 | Mitutoyo Corporation | Method and device for attaching an elastic fixture to a length measuring device. |
| JP2008545978A (en) * | 2005-06-11 | 2008-12-18 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Scale holder |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2700911B2 (en) | 1998-01-21 |
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