JPH0222476A - Production of zirconia film - Google Patents
Production of zirconia filmInfo
- Publication number
- JPH0222476A JPH0222476A JP17285588A JP17285588A JPH0222476A JP H0222476 A JPH0222476 A JP H0222476A JP 17285588 A JP17285588 A JP 17285588A JP 17285588 A JP17285588 A JP 17285588A JP H0222476 A JPH0222476 A JP H0222476A
- Authority
- JP
- Japan
- Prior art keywords
- hydrolysis
- zirconium
- sol
- added
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 230000007062 hydrolysis Effects 0.000 claims abstract description 20
- 238000006460 hydrolysis reaction Methods 0.000 claims abstract description 20
- OAJHWYJGCSAOTQ-UHFFFAOYSA-N [Zr].CCCCCCCCO.CCCCCCCCO.CCCCCCCCO.CCCCCCCCO Chemical compound [Zr].CCCCCCCCO.CCCCCCCCO.CCCCCCCCO.CCCCCCCCO OAJHWYJGCSAOTQ-UHFFFAOYSA-N 0.000 claims abstract description 13
- BSDOQSMQCZQLDV-UHFFFAOYSA-N butan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] BSDOQSMQCZQLDV-UHFFFAOYSA-N 0.000 claims abstract description 13
- 230000018044 dehydration Effects 0.000 claims abstract description 11
- 238000006297 dehydration reaction Methods 0.000 claims abstract description 11
- 238000009833 condensation Methods 0.000 claims abstract description 10
- 230000005494 condensation Effects 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- -1 acetyl compound Chemical class 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 5
- 239000010935 stainless steel Substances 0.000 abstract description 5
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 238000005260 corrosion Methods 0.000 abstract description 2
- 230000007797 corrosion Effects 0.000 abstract description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 abstract 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 abstract 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 abstract 2
- 238000001035 drying Methods 0.000 abstract 1
- 229940035429 isobutyl alcohol Drugs 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001556 precipitation Methods 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- GSOHKPVFCOWKPU-UHFFFAOYSA-N 3-methylpentane-2,4-dione Chemical compound CC(=O)C(C)C(C)=O GSOHKPVFCOWKPU-UHFFFAOYSA-N 0.000 description 1
- YQEVIZPKEOELNL-UHFFFAOYSA-N CCCCO[Zr] Chemical compound CCCCO[Zr] YQEVIZPKEOELNL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- IKGXNCHYONXJSM-UHFFFAOYSA-N methanolate;zirconium(4+) Chemical compound [Zr+4].[O-]C.[O-]C.[O-]C.[O-]C IKGXNCHYONXJSM-UHFFFAOYSA-N 0.000 description 1
- 238000007344 nucleophilic reaction Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- IKNCGYCHMGNBCP-UHFFFAOYSA-N propan-1-olate Chemical compound CCC[O-] IKNCGYCHMGNBCP-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Chemically Coating (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、テトラブトキシジルコニウムまたはオクチル
酸ジルコニウムを使用するジルコニア膜の製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for producing a zirconia membrane using tetrabutoxyzirconium or zirconium octylate.
(従来技術)
ノルコニ7(酸化ジルコニウム)は、耐食性、it熱性
、耐摩耗性、絶縁性などに優れているので、従来上りこ
れらの特性の劣る材料−にジルコニア膜を形成して特性
を向上させる方法が行なわれている。(Prior technology) Norconi 7 (zirconium oxide) has excellent corrosion resistance, heat resistance, abrasion resistance, insulation, etc., so it is possible to improve the properties by forming a zirconia film on a conventional material that has poor properties. method is being carried out.
このジルコニア膜の湿式形成法として、テトラブトキシ
ジルコニウムなどのアルコキシノルコニウム有機溶媒溶
液を基板に塗布して加水分解、脱水縮合する方法(特公
昭59−48865号公報)やオクチル酸ノルコニウム
有磯溶媒溶液を塗布して熱分解する方法(4!開昭61
−41770号公報)などが開発されている。As a wet method for forming this zirconia film, there is a method in which an organic solvent solution of alkoxynorconium such as tetrabutoxyzirconium is applied to a substrate, and hydrolysis and dehydration condensation are carried out (Japanese Patent Publication No. 59-48865), and a method in which an organic solvent solution of norconium octylate is applied. Method of coating and thermal decomposition (4!
-41770) etc. have been developed.
(発明が解決しようとする問題点)
しかしながら、前者の方法は、アルコキシジルコニウム
の加水分解、脱水縮合反応速度が着しく速く、しかも、
空気中の水分により反応が進行するため、濃度を約0.
05モル/e以上にして、1回の塗布で厚膜にしようと
すると、空気中の水分により加水分解されて白濁し、透
明なジルコニア膜が得られない。(Problems to be Solved by the Invention) However, in the former method, the hydrolysis and dehydration condensation reaction rates of alkoxyzirconium are relatively fast;
Since the reaction progresses due to moisture in the air, the concentration should be kept at about 0.
If an attempt is made to form a thick film with a single application by increasing the concentration to 0.05 mol/e or more, the zirconia film will be hydrolyzed by moisture in the air and become cloudy, making it impossible to obtain a transparent zirconia film.
低濃度で1回当たりの塗布量を多くする方法としては、
水添加により加水分解してゾル化することにより粘度や
濃度を高くする方法が考えられるが、加水分解すると、
加水分解速度が速いため、白濁、沈澱化し、透明なジル
コニア膜が得られない。As a method to increase the amount applied per application at low concentration,
One possible method is to increase the viscosity and concentration by hydrolyzing and solizing by adding water, but when hydrolyzed,
Because the hydrolysis rate is fast, it becomes cloudy and precipitates, making it impossible to obtain a transparent zirconia film.
このため、透明な厚膜を形成するには、濃度が0.05
モル/C以下の溶液を用いて、1回塗布当た1)200
.tングストローム以下のフルコニア膜ヲ形成する方法
を繰り返していた。Therefore, in order to form a transparent thick film, the concentration is 0.05.
1) 200 per application using a solution with mol/C or less
.. The method of forming a fulconia film with a thickness of less than 100 nm was repeated.
これに対して、後者の方法の場合、オクチル酸ジルコニ
ウムの空気中での加水分解速度は、アルコキシノルコニ
ウムに比べて遅く、濃度を高く(約259/e以上)し
て塗布しても白濁しない。On the other hand, in the case of the latter method, the hydrolysis rate of zirconium octylate in air is slower than that of alkoxynorconium, and it does not become cloudy even when applied at a high concentration (approximately 259/e or higher). .
しかし、溶液を空気中に2〜3日間放置すると、ゲル化
が生じる。このため、調製した溶液をその都度全部使用
してしまえば問題はないが、残液が生じた場合、短期間
に使用しないと再使用できなくなる。また、オクチル酸
ノルコニウムは、加熱により加水分解、脱水縮合する際
、体積が収縮するため、ジルコニア膜にクラックが生じ
、外観が劣る。However, if the solution is left in the air for 2-3 days, gelation will occur. Therefore, there is no problem if the prepared solution is used in its entirety each time, but if a residual solution occurs, it cannot be reused unless it is used within a short period of time. Further, when norconium octylate undergoes hydrolysis and dehydration condensation by heating, the volume shrinks, which causes cracks in the zirconia film, resulting in poor appearance.
本発明は、以上のような問題を解決したジルコニア膜の
製造方法を提供するものである。The present invention provides a method for manufacturing a zirconia film that solves the above problems.
(問題、くを解決するための手段)
本発明は、テトラブトキシジルコニウムまたはオクチル
酸ジルコニウムの有機溶媒溶液に一般式CH*C0−(
CH2)n−C0CH5(nは1〜6)で示されるアセ
チル化合物をテトラブトキシジルコニウムまたはオクチ
ル酸ノルフニウム1モル当たり0.5モル以上添加後水
を2〜7モル添加して加水分解、脱水縮合させたゾル化
液を基板に塗布し、その後200℃以上に加熱すること
によりジルコニア膜を製造するようにした。(Means for Solving the Problems) The present invention provides an organic solvent solution of tetrabutoxyzirconium or zirconium octylate with the general formula CH*C0-(
After adding 0.5 mol or more of an acetyl compound represented by CH2)n-C0CH5 (n is 1 to 6) per 1 mol of tetrabutoxyzirconium or norphnium octylate, 2 to 7 mol of water is added to perform hydrolysis and dehydration condensation. A zirconia film was produced by applying the sol solution to a substrate and then heating it to 200° C. or higher.
本発明で、一般式CH3CO−(CH2)n−C0CH
5(nは1〜6)で示されるアセチル化合物を添加する
のは、テトラブトキシジルコニウムまたはオクチル酸ジ
ルコニウムの加水分解速度を低下させ、溶液の白濁、沈
澱化やデル化を防止するためである。すなわち、上記ア
セチル化合物のカルボニル基がテトラブトキシジルコニ
ウム*たはオクチル酸ジルコニウムのノルコニウム原子
に配位結合するので、LO分子がノルコニウムに求核反
応しに<<、また、立体障害により1120分子が接近
しにくくなるため、加水分解速度が抑制され、白濁、沈
澱化やデル化が防止される。In the present invention, the general formula CH3CO-(CH2)n-C0CH
The reason why the acetyl compound represented by 5 (n is 1 to 6) is added is to reduce the hydrolysis rate of tetrabutoxyzirconium or zirconium octylate, and to prevent the solution from becoming cloudy, precipitated, or delified. In other words, the carbonyl group of the acetyl compound coordinates with the norconium atom of tetrabutoxyzirconium* or zirconium octylate, so the LO molecule undergoes a nucleophilic reaction with norconium, and the 1120 molecules approach due to steric hindrance. Therefore, the hydrolysis rate is suppressed, and cloudiness, precipitation, and delification are prevented.
この加水分解抑制イヤ用は、一般弐CH,C0−(CL
)n−〇、OCHコで示されるアセチル化合物のうち、
nが7以上のものにも認められるが、nが7以上になる
と、常温で固体になるため、溶解しにくくなり、溶液の
調製が困難になる。This hydrolysis suppressed ear product is general 2CH, C0-(CL
) n-〇, among the acetyl compounds represented by OCH co,
This is also observed when n is 7 or more, but when n is 7 or more, it becomes solid at room temperature and becomes difficult to dissolve, making it difficult to prepare a solution.
このアセチル化合物による白濁、沈澱化防止は、アルコ
キシノルコニウムのうち、テトラ−n−ブトキシジルコ
ニウムやテトライソブトキシジルコニウムのようIこ、
テトラブトキンノルコニウムの場合にだけ効果がある。This acetyl compound prevents clouding and precipitation, and among alkoxynorconiums, such as tetra-n-butoxyzirconium and tetraisobutoxyzirconium,
It is effective only in the case of tetrabutquin norconium.
ジルコニウムのテトラメトキシド、テトラエトキシド、
テトラ−n−プロポキシドまたはテトラインプロポキシ
ドなどは、アルコキシ基で加水分解されてしまい、白濁
、沈澱化する。Zirconium tetramethoxide, tetraethoxide,
Tetra-n-propoxide or tetrane propoxide is hydrolyzed by an alkoxy group, resulting in white turbidity and precipitation.
アセチル化合物は、テトラブトキシジルコニウムまたは
オクチル酸ジルコニウム1モル当たり0.5モル以上添
加すれば、加水分解速度を遅くすることができる。If the acetyl compound is added in an amount of 0.5 mole or more per mole of tetrabutoxyzirconium or zirconium octylate, the rate of hydrolysis can be slowed down.
アセチル化合物添加後の加水分解林、ノルコニウム化合
物1モルに対して、水を2モル〜7モル添加することに
より行うが、これは、2モル未満では加水分解が不十分
で、7モルを越えると、残存する水によりピンホールな
どが発生し、外観が損なわれるためである。Hydrolysis after adding an acetyl compound is carried out by adding 2 to 7 moles of water to 1 mole of the norconium compound; however, if it is less than 2 moles, hydrolysis will be insufficient, and if it exceeds 7 moles, water will be added. This is because the remaining water causes pinholes and the like, which impairs the appearance.
テトラブトキシジルコニウムやオクチル酸ジルコニウム
は、200℃以上に加熱すれば、ジルコニア膜になるが
、これらに7セチルアセトネートジルコニウムを添加し
ても、7セチル化合物も200℃以上に加熱すれば、ジ
ルコニア膜になるので、加熱温度は200℃以上でよい
。Tetrabutoxyzirconium and zirconium octylate will form a zirconia film if heated above 200°C, but even if zirconium 7cetylacetonate is added to them, a 7cetyl compound will form a zirconia film if heated above 200°C. Therefore, the heating temperature may be 200°C or higher.
本発明により他の金属(例えば、Ti5CoSNo、^
1、Cuなど)を含有させたジルコニア膜を製造する場
合、含有させる金属原料として、その金属のテトラブト
キシドやオクチル酸金属塩を泪いれば、それらの加水分
解を遅くすることがでさる。According to the invention, other metals (e.g. Ti5CoSNo,^
When producing a zirconia film containing a metal (e.g., Cu), it is possible to slow down the hydrolysis of the metal by adding tetrabutoxide or metal octylate as the metal raw material.
(実施例)
実施例1
テトラ−n−ブトキシジルコニウムの2009/eブタ
7−ル溶液に7セチルアセトンをテトラ−n−ブトキシ
ノルコニウム1モルに対して、1モルに相当する量添加
して攪拌した後、テトラ−n−ブトキシノルコニウム1
モル当たり4モルに相当する量の水を加えて、加水分解
、脱水縮合させた。(Example) Example 1 To a 2009/e butylene solution of tetra-n-butoxynorconium, 7cetylacetone was added in an amount equivalent to 1 mole per mole of tetra-n-butoxynorconium and stirred. After that, tetra-n-butoxynorconium 1
Water in an amount equivalent to 4 moles per mole was added to carry out hydrolysis and dehydration condensation.
次に、この溶液に7七トンで超音波脱脂したステンレス
鋼板(SUS304)を浸漬して、0.1論/謔inの
一定速度で引き上げる方法でステンレス鋼板に溶液を塗
布し、塗布後450℃の電気炉中に7分間入れ、ジルコ
ニア膜とした。Next, a stainless steel plate (SUS304) that had been ultrasonically degreased at 77 tons was immersed in this solution, and the solution was applied to the stainless steel plate by pulling it up at a constant speed of 0.1 in/in. The film was placed in an electric furnace for 7 minutes to form a zirconia film.
得られたジルコニア膜の膜厚はO9Zμ箇で、白濁やク
ラックはなく、透明であった。The thickness of the obtained zirconia film was O9Zμ, and it was transparent without cloudiness or cracks.
一方、テトラ−ローブトキシジルコニウムに7セチルア
セトンを添加せずに前記同様の方法で溶液を5119I
したが、溶液は、加水分解の際瞬時に白濁、沈澱してし
まった。On the other hand, a solution of 5119I was prepared in the same manner as described above without adding 7cetylacetone to tetralobtoxyzirconium
However, the solution instantly became cloudy and precipitated during hydrolysis.
実施例2
オクチル酸ジルコニウムの1509/eイソプロピルア
ルコール溶液にジアセチルエタンをオクチル酸ノルコニ
ウム1モルに対して、6モルに相当する量添加した後、
水をオクチル酸ノルコニウム1モル当たり5モルに相当
する量添加して、加水分解、脱水縮合した。この溶液を
大気中(相対湿度60%、温度25℃)に1週間放置し
たが、変化は認められなかった。Example 2 After adding diacetyl ethane to a 1509/e isopropyl alcohol solution of zirconium octylate in an amount equivalent to 6 moles per mole of norconium octylate,
Water was added in an amount equivalent to 5 moles per mole of norconium octylate to carry out hydrolysis and dehydration condensation. This solution was left in the air (relative humidity 60%, temperature 25° C.) for one week, but no change was observed.
次に、この放置溶液をステンレス鋼板にスプレー法で塗
布して、400℃で10分間加熱し、膜厚0,15μ論
のジルコニア膜とした。Next, this standing solution was applied to a stainless steel plate by a spray method and heated at 400° C. for 10 minutes to form a zirconia film with a film thickness of 0.15 μm.
(効果)
以上のようにブトキシジルコニウムにアセチル化合物を
添加して、加水分解、脱水縮合すると、白濁、沈澱が生
じず、透明な厚膜のジルコニア膜を製造することができ
る。また、オクチル酸ジルコニウムにアセチル化合物を
添加すると、溶液の貯蔵性が向上し、ジルコニア膜に脱
水縮合によるクラックが発生しない。(Effects) As described above, when an acetyl compound is added to butoxyzirconium and subjected to hydrolysis and dehydration condensation, a transparent thick zirconia film can be produced without producing cloudiness or precipitation. Furthermore, when an acetyl compound is added to zirconium octylate, the storage stability of the solution is improved, and cracks due to dehydration condensation do not occur in the zirconia film.
Claims (1)
ウムの有機溶媒溶液に一般式 CH_3CO−(CH_2)_n−COCH_3(nは
1〜6)で示されるアセチル化合物をテトラブトキシジ
ルコニウムまたはオクチル酸ジルコニウム1モル当たり
0.5モル以上添加後水を2〜7モル添加して加水分解
、脱水縮合させたゾル化液を基板に塗布し、その後20
0℃以上に加熱することを特徴とするジルコニア膜の製
造方法。[Scope of Claims] An acetyl compound represented by the general formula CH_3CO-(CH_2)_n-COCH_3 (n is 1 to 6) is added to a solution of tetrabutoxyzirconium or zirconium octylate in an organic solvent by 1 mol of tetrabutoxyzirconium or zirconium octylate. After adding 0.5 mol or more, 2 to 7 mol of water was added to perform hydrolysis and dehydration condensation, and the sol solution was applied to the substrate, and then 20
A method for producing a zirconia film, which comprises heating to 0°C or higher.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17285588A JPH0222476A (en) | 1988-07-12 | 1988-07-12 | Production of zirconia film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17285588A JPH0222476A (en) | 1988-07-12 | 1988-07-12 | Production of zirconia film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0222476A true JPH0222476A (en) | 1990-01-25 |
Family
ID=15949546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17285588A Pending JPH0222476A (en) | 1988-07-12 | 1988-07-12 | Production of zirconia film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0222476A (en) |
-
1988
- 1988-07-12 JP JP17285588A patent/JPH0222476A/en active Pending
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