JPH02222767A - Ultraviolet ray irradiation device - Google Patents
Ultraviolet ray irradiation deviceInfo
- Publication number
- JPH02222767A JPH02222767A JP4565289A JP4565289A JPH02222767A JP H02222767 A JPH02222767 A JP H02222767A JP 4565289 A JP4565289 A JP 4565289A JP 4565289 A JP4565289 A JP 4565289A JP H02222767 A JPH02222767 A JP H02222767A
- Authority
- JP
- Japan
- Prior art keywords
- water
- treated
- inner cylinder
- perforated
- perforated inner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 76
- 239000005416 organic matter Substances 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 3
- 229910021642 ultra pure water Inorganic materials 0.000 abstract description 9
- 239000012498 ultrapure water Substances 0.000 abstract description 9
- 238000004140 cleaning Methods 0.000 abstract description 7
- 230000001590 oxidative effect Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 3
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 238000005192 partition Methods 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 238000001125 extrusion Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 241000218691 Cupressaceae Species 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000005445 natural material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Water Treatments (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は紫外線照射装置に係り、特に、純水、超純水等
の清澄な水中の有機物を酸化させる紫外線照射装置に関
する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an ultraviolet irradiation device, and particularly to an ultraviolet irradiation device for oxidizing organic substances in clear water such as pure water or ultrapure water.
近時、半導体の集積度の向上に伴い、洗浄水に用いられ
る純水及び超純水の水質は年々向上されており、特に、
洗浄水中に溶存している有機物は微量であっても半導体
の歩留りを悪くするので、有機物の除去が望まれている
。In recent years, with the improvement in the degree of integration of semiconductors, the quality of pure water and ultrapure water used for cleaning water has been improving year by year.
Even a trace amount of organic matter dissolved in the washing water impairs the yield of semiconductors, so it is desired to remove the organic matter.
その有機物を除去させる方法の一つとして、被処理水に
紫外線を照射し、被処理水中に水酸ラジカル及びオゾン
を生成させてこれらの酸化力で被処理水のを搬物を分解
し、洗浄用超純水を採取する方法がある。One method for removing organic matter is to irradiate the water to be treated with ultraviolet rays, generate hydroxyl radicals and ozone in the water, and use these oxidizing powers to decompose and clean the water. There is a method to collect ultrapure water for use.
前記採取された洗浄用超純水は、主に半導体等の超精密
回路の洗浄水として用いられている。The collected ultrapure water for cleaning is mainly used as cleaning water for ultraprecision circuits such as semiconductors.
従来の紫外線照射装置には、押し出し流れ型及び完全混
合型がある（特開昭５６−１１８７８３号公報、特開昭
６１−１６１２９号公報）にの押し出し流れ型紫外線照
射装置は、第２図に示すように、円筒状の容器２０内に
複数本の紫外線ランプ２２．２２・・・が設けられ、被
処理水を円筒状の容器２０の一端に設けられた吸水口２
４により注入し、容器２０内で紫外線ランプ２２．２２
・・・によって酸化している。また、前記処理水は容器
２０の他端に設けられた排水口２６より採取されている
。Conventional ultraviolet irradiation devices include an extrusion flow type and a complete mixing type (Japanese Patent Application Laid-open No. 56-118783, Japanese Patent Application Laid-open No. 61-16129). The extrusion flow type ultraviolet irradiation device is shown in Fig. 2. As shown, a plurality of ultraviolet lamps 22, 22... are provided in a cylindrical container 20, and the water to be treated is passed through a water intake port 2 provided at one end of the cylindrical container 20.
4, and in the container 20 an ultraviolet lamp 22.22
It is oxidized by... Further, the treated water is collected from a drain port 26 provided at the other end of the container 20.
また、図示してはいないが従来の完全混合型紫外線照射
装置では、容器内に紫外線ランプが設けられ、容器内の
被処理水を攪拌させながら容器内に設けられた紫外線ラ
ンプで酸化し、処理水を採取する完全混合型紫外線照射
装置等がある。Furthermore, although not shown in the figure, in a conventional complete mixing type ultraviolet irradiation device, an ultraviolet lamp is installed in a container, and the water to be treated in the container is oxidized by the ultraviolet lamp installed in the container while stirring. There are complete mixing type ultraviolet irradiation devices that collect water.
しかしながら、前記従来の押し出し流れ型紫外線照射装
置では、紫外線ランプから発射される紫外線の被処理水
を酸化させる為の紫外線到達距離は５〜１０１１１と短
い。従って、紫外線ランプの近傍を流れる被処理水の酸
化は容易にされるが、容器の内壁面を流れる被処理水は
酸化されない虞がある。また、容器の内壁面を流れる被
処理水を酸化させる為には、紫外線ランプに高出力が必
要となる。しかし、この場合、紫外線ランプ近傍で発生
した多量の水酸ラジカル及びオゾンは、紫外線ランプ近
傍の被処理水中のを搬物が既に酸化されている為、自己
分解して消失される欠点がある。However, in the conventional extrusion flow type ultraviolet irradiation device, the ultraviolet radiation emitted from the ultraviolet lamp has a short travel distance of 5 to 10111 nm for oxidizing the water to be treated. Therefore, although the water to be treated flowing in the vicinity of the ultraviolet lamp is easily oxidized, the water to be treated flowing on the inner wall surface of the container may not be oxidized. Further, in order to oxidize the water to be treated flowing on the inner wall surface of the container, a high output power of the ultraviolet lamp is required. However, in this case, there is a drawback that a large amount of hydroxyl radicals and ozone generated near the ultraviolet lamp self-decompose and disappear because the material in the water to be treated near the ultraviolet lamp has already been oxidized.
また、被処理水を完全に酸化させる為に、被処理水の滞
留時間を長くすると、容器内の被処理水の流れは完全層
流となり、容器の内壁面を流れる被処理水中の有機物は
酸化されない虞がある。In addition, in order to completely oxidize the water to be treated, if the residence time of the water to be treated is increased, the flow of the water to be treated in the container becomes a completely laminar flow, and the organic matter in the water to be treated flowing on the inner wall of the container is oxidized. There is a possibility that it will not be done.
この場合、紫外線ランプを高出力にしても、容器の内壁
面に流れる被処理水は酸化されない。In this case, even if the ultraviolet lamp has a high output, the water to be treated flowing on the inner wall surface of the container will not be oxidized.
また、従来の完全混合型紫外線照射装置では、有機物の
紫外線酸化の反応速度は、被処理水中のを風物濃度が高
ければ速く、有機物濃度が低ければ遅くなる。従って、
完全混合流れとなる攪拌槽では、槽内の被処理水が希釈
されて有機物濃度を低下させる為、酸化効率が低くなる
欠点があった。In addition, in the conventional complete mixing type ultraviolet irradiation device, the reaction rate of ultraviolet oxidation of organic substances is faster as the concentration of natural substances in the water to be treated is higher, and slower as the concentration of organic substances is lower. Therefore,
In a stirred tank with a completely mixed flow, the water to be treated in the tank is diluted and the concentration of organic matter is lowered, which has the disadvantage of lowering the oxidation efficiency.
本発明はこのような事情に鑑みてなされたちので、被処
理水の酸化効率を良くした紫外線照射装置を提供するこ
とを目的とする。The present invention was made in view of these circumstances, and an object of the present invention is to provide an ultraviolet irradiation device that improves the efficiency of oxidizing water to be treated.
本発明は、前記目的を達成する為に、被処理水が紫外線
ランプから発射された紫外線によって照射され、被処理
水中の有機物を酸化させる紫外線照射装置に於いて、円
筒状の容器と、円筒状の容器の内側に設けられ、容器と
の間に通水路を形成する多孔付内筒と、多孔付内筒を軸
方向にｙｔ数の室に分割させる隔離壁と、前記多孔付内
筒の略中央部に設けられた多孔付吸排水管と、前記多孔
付内筒の軸方向に沿って吸排水管の周囲に設けられた複
数本の円筒状の紫外線ランプと、から成り、吸排水管か
ら多孔付内筒に゛流出した被処理水は通水路を通って再
び多孔付内筒の隣接する室に流入し、吸排水管から排出
されることを特徴とする。In order to achieve the above object, the present invention provides an ultraviolet irradiation device that irradiates water to be treated with ultraviolet rays emitted from an ultraviolet lamp to oxidize organic matter in the water to be treated. a perforated inner cylinder provided inside the container and forming a water passage between the perforated inner cylinder and the container; a separation wall that divides the perforated inner cylinder into yt number of chambers in the axial direction; It consists of a perforated suction/drainage pipe provided in the center, and a plurality of cylindrical ultraviolet lamps provided around the suction/drainage pipe along the axial direction of the porous inner cylinder. The water to be treated that has flowed into the cylinder passes through the water passage, flows into the adjacent chamber of the perforated inner cylinder again, and is discharged from the suction and drainage pipe.
本発明によれば、多孔付内筒の略中央に設けられた多孔
付吸排水管から流出した被処理水が、前８己吸排水管の
周囲に複数本設けられた紫外線ランプに衝突若しくは近
傍を通過して前記内筒に流出する。流出した被処理水は
容器と多孔付内筒の間に設けられた通水路を通って再び
多孔付内筒の隣接する室に流入する。流入した被処理水
は、再び複数の紫外線ランプに衝突若しくは近傍を通過
し、吸排水管に流入して排出される。この作用により、
被処理水を効率よく酸化して、洗浄用超純水が採取され
ることになる。According to the present invention, the water to be treated flowing out from the perforated suction/drainage pipe provided approximately in the center of the perforated inner cylinder collides with or passes near the ultraviolet lamps provided in plurality around the front 8 self-suction/drainage pipes. and flows out into the inner cylinder. The discharged water to be treated passes through a water passage provided between the container and the perforated inner cylinder and flows into the adjacent chamber of the perforated inner cylinder again. The inflowing water to be treated collides with or passes near the plurality of ultraviolet lamps again, flows into the suction/drainage pipe, and is discharged. Due to this effect,
The water to be treated is efficiently oxidized and ultrapure water for cleaning is collected.
以下添付図面に従って本発明に係る紫外線照射装置の好
ましい実施例を詳説する。Preferred embodiments of the ultraviolet irradiation device according to the present invention will be described in detail below with reference to the accompanying drawings.
第１図（Ａ）、＜Ｂ）には本発明に係る紫外線照射装置
の一実施例が示されている。FIGS. 1A and 1B show an embodiment of the ultraviolet irradiation device according to the present invention.
容器１０は円筒状に形成され、容器１０の内側には多孔
付内筒１８が設けられる。この多孔付内筒１８は多数の
孔１８Ａ、１８Ａ・・・が形成されている。更に、容器
１０の軸方向中心部には吸水用多孔管１２及び排水用多
孔管１４が設けられる。The container 10 is formed into a cylindrical shape, and a porous inner cylinder 18 is provided inside the container 10. This porous inner cylinder 18 has a large number of holes 18A, 18A, . . . formed therein. Further, a water absorption porous pipe 12 and a drainage porous pipe 14 are provided in the axial center of the container 10.
前言己吸水用多孔管１２及び排水用多孔管１４にはそれ
ぞれ多数の孔１２Ａ、１２Ａ・・・及び孔１４Ａ１１４
Ａ・・・が形成されている。また、容器１０の内部には
、軸方向に円筒状の紫外線ランプ１６．１６・・・が腹
数設けられる。更に、吸水用多孔管１２と排水用多孔管
１４とを分離する為に、隔離壁１９が前記多孔付内筒１
８内に設けられ、第１浄化槽１０Ａ及び第２浄化槽１０
Ｂを画成している。The aforementioned self-water absorption porous pipe 12 and drainage porous pipe 14 each have a large number of holes 12A, 12A... and holes 14A114.
A... is formed. Further, inside the container 10, a number of cylindrical ultraviolet lamps 16, 16, . . . are provided in the axial direction. Further, in order to separate the water absorption porous pipe 12 and the drainage porous pipe 14, a separating wall 19 is provided between the porous inner cylinder 1
8, the first septic tank 10A and the second septic tank 10
It defines B.
次に前記の如く構成された紫外線照射装置の作用につい
て説明する。Next, the operation of the ultraviolet irradiation device configured as described above will be explained.
先ず、被処理水を吸水用多孔管１２の注入口１３から注
入し、吸水用多孔管１２に形成された孔１２Ａ、１２Ａ
・・・から、第１浄化槽１０Ａに向けて放射状に排出す
る。排出された被処理水は、吸水用多孔管１２と平行に
設けられた円筒状の紫外線ランプ１６．１６・・・に衝
突若しくは近傍を通過することによって均等に酸化され
る。第１浄化槽１０Ａ中で酸化された被処理水は、多孔
付内筒１８に設けられた孔１８Ａ、１８Ａ・・・から流
出される。流出された被処理水は、容器ｌＯと多孔付内
筒１８との間に設けられた通水路１８Ｂを通って、多孔
付内筒１８に形成された孔１８Ａ、１８Ａ・・・から第
２浄化槽１０Ｂに流入する。流入した被処理水は、前記
円筒状状の紫外線ランプ１６．１６・・・に衡突若しく
は近傍を通過することによって均等に再度酸化される。First, the water to be treated is injected from the inlet 13 of the porous water absorption pipe 12, and the holes 12A, 12A formed in the porous water absorption pipe 12 are injected.
... is discharged radially toward the first septic tank 10A. The discharged water to be treated is uniformly oxidized by colliding with or passing near cylindrical ultraviolet lamps 16, 16, . The water to be treated that has been oxidized in the first septic tank 10A flows out from holes 18A, 18A, . . . provided in the porous inner cylinder 18. The discharged water to be treated passes through the water passage 18B provided between the container lO and the porous inner cylinder 18, and flows through the holes 18A, 18A, . . . formed in the porous inner cylinder 18 to the second septic tank. 10B. The inflowing water to be treated is uniformly oxidized again by colliding with or passing near the cylindrical ultraviolet lamps 16, 16, . . . .
酸化された超純水は、排水用多孔管１４Ａに設けられた
多数の孔１４Ａ、１４Ａ・・・から流入して、採出口１
５から排出し採取される。これにより、効率良く均等に
被処理水を酸化し、洗浄用超純水を採取することが可能
となる。The oxidized ultrapure water flows through the numerous holes 14A, 14A, etc. provided in the drainage porous pipe 14A, and enters the extraction port 1.
It is discharged and collected from 5. This makes it possible to efficiently and evenly oxidize the water to be treated and to collect ultrapure water for cleaning.
第３図は、本発明の紫外線照射装置と従来の紫外線照射
装置との、被処理水中のを搬物濃度（μｇ／Ｉｌ）にお
ける滞留時間（ｏ＋ｉｎ）の比較例を示す説明図である
。これによると、被処理水中の有機物濃度が５０（μｇ
／ｌ）の場合、本発明の装置を使用すると約４．５（ｍ
ｉｎ）の滞留時間であるが、従来の装置の押出し流れ型
を使用すると約５．５（ｍｉｎ）であり、また完全混合
型を使用すると７．５（ｆｆｌｉｎ）と滞留時間が長く
なる。従って、同質濃度の被処理水を酸化させた場合、
本発明の装置の方が短時間で酸化し洗浄用超純水として
採取することができる。即ち大幅な消費エネルギーの節
約が可能となる。FIG. 3 is an explanatory diagram showing a comparative example of the residence time (o+in) at the concentration of particles in the water to be treated (μg/Il) between the ultraviolet irradiation device of the present invention and the conventional ultraviolet irradiation device. According to this, the concentration of organic matter in the water to be treated is 50 (μg
/l), using the device of the present invention, approximately 4.5 (m
The residence time (in) is about 5.5 (min) when a conventional extrusion flow type device is used, and is 7.5 (fflin) when a complete mixing type is used, which is a long residence time. Therefore, when treated water with the same concentration is oxidized,
The apparatus of the present invention oxidizes in a shorter time and can collect ultrapure water for cleaning. In other words, it is possible to significantly save energy consumption.
尚、前記実施例では通水性のある内筒として多孔管を用
いたが、第１浄化槽は第２浄化槽は少なくとも一方の槽
に通水抵抗の比較的大きなフィルタ材や膜材を用い、被
処理水を加圧状態で流入させてもよい。同様に多孔で形
成された吸水用管、排水用管を用いたが、セラミック管
等の通水性材料で構成された管材を用いてもよい。In the above embodiment, a perforated pipe was used as the water-permeable inner cylinder, but in the first septic tank and the second septic tank, at least one of the tanks uses a filter material or membrane material with a relatively large resistance to water flow, and Water may be introduced under pressure. Similarly, although porous water absorption pipes and drainage pipes were used, pipe materials made of water-permeable materials such as ceramic pipes may also be used.
上記構成によれば、液体の流出入が均等に行われ、容器
中における液体の放射状の流れを容易に作り出すことが
できる。また、前記実施例では浄化槽を二分割したが、
被処理水の水質に応じて多投分割にしてもよい。According to the above configuration, the liquid flows in and out evenly, and it is possible to easily create a radial flow of the liquid in the container. In addition, in the above embodiment, the septic tank was divided into two, but
Multiple doses may be divided depending on the quality of the water to be treated.
以上説明したように本発明に係る紫外線照射装置によれ
ば、被処理水を均等に紫外線ランプに衝突若しくは近傍
を通過させるようにしたので効率良く被処理水を均等に
酸化させて、洗浄用超純水を採取することができる。ま
た消費エネルギーを大幅に節約するとかできる。As explained above, according to the ultraviolet irradiation device according to the present invention, the water to be treated is made to evenly collide with or pass near the ultraviolet lamp, so that the water to be treated can be efficiently and uniformly oxidized. Pure water can be collected. It can also significantly reduce energy consumption.
第１図＜Ａ）、（Ｂ）は本発明に係る紫外線照射装置の
一実施例を示す平面図及び一部所面を含む断面図、第２
図は従来例に係る紫外線照射装置の一実施例を示す側面
図、第３図は本発明の装置と従来の装置との、被処理水
中の有機物濃度における滞留時間の比較を示した説明図
である。
１０・・・容器、 ＩＯＡ・・・第１浄化槽、 ＩＯＢ
・・第二浄化槽、 １２・・・吸水用多孔管、 １
４・・・排水用多孔管、 １６・・・紫外線ランプ、
１８・・・多孔付内筒管、 １９・・・隔離壁。
出願人 日立プラント建設株式会社
１０−・・容器
１０Ａ・・−第１浄化檜
１０Ｂ−・第２浄化槽
１２・・・吸水用多孔管
１４・・−排水用多孔管
１６・紫外線ラン１
１８・・多孔付内筒管
１９−・−隔離壁
処理水の有機物濃度（Ａ９／Ｒ）FIGS. 1A and 1B are a plan view and a sectional view including some parts of an embodiment of the ultraviolet irradiation device according to the present invention, and FIGS.
The figure is a side view showing an example of a conventional ultraviolet irradiation device, and FIG. 3 is an explanatory diagram showing a comparison of residence time in terms of organic matter concentration in water to be treated between the device of the present invention and the conventional device. be. 10... Container, IOA... First septic tank, IOB
...Second septic tank, 12...Porous pipe for water absorption, 1
4... Porous pipe for drainage, 16... Ultraviolet lamp,
18... Inner tube with holes, 19... Separation wall. Applicant Hitachi Plant Construction Co., Ltd. 10--Container 10A--First purification cypress 10B--Second septic tank 12--Porous pipe for water absorption 14--Perforated pipe for drainage 16--Ultraviolet lan 1 18-- Porous inner cylindrical pipe 19-・-Organic substance concentration of separating wall treated water (A9/R)
Claims (1)
よって照射され、被処理水中の有機物を酸化させる紫外
線照射装置に於いて、 円筒状の容器と、 円筒状の容器の内側に設けられ、容器との間に通水路を
形成する多孔付内筒と、 多孔付内筒を軸方向に複数の室に分割させる隔離壁と、 前記多孔付内筒の略中央部に設けられた多孔付吸排水管
と、 前記多孔付内筒の軸方向に沿って吸排水管の周囲に設け
られた複数本の円筒状の紫外線ランプと、から成り、吸
排水管から多孔付内筒に流出した被処理水は通水路を通
って再び多孔付内筒の隣接する室に流入し、吸排水管か
ら排出されることを特徴とする紫外線照射装置。(1) In an ultraviolet irradiation device in which the water to be treated is irradiated with ultraviolet rays emitted from an ultraviolet lamp to oxidize organic matter in the water to be treated, a cylindrical container and a container provided inside the cylindrical container are used. a perforated inner cylinder that forms a water passage between the perforated inner cylinder; a separation wall that divides the perforated inner cylinder into a plurality of chambers in the axial direction; and a perforated intake and drainage pipe provided approximately at the center of the perforated inner cylinder. and a plurality of cylindrical ultraviolet lamps installed around the suction and drainage pipe along the axial direction of the perforated inner cylinder, and the water to be treated flowing out from the suction and drainage pipe into the perforated inner cylinder is passed through the water passage. An ultraviolet irradiation device characterized in that the ultraviolet rays pass through the porous inner cylinder, flow into an adjacent chamber again, and are discharged from an intake and drainage pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4565289A JP2600887B2 (en) | 1989-02-27 | 1989-02-27 | UV irradiation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4565289A JP2600887B2 (en) | 1989-02-27 | 1989-02-27 | UV irradiation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02222767A true JPH02222767A (en) | 1990-09-05 |
| JP2600887B2 JP2600887B2 (en) | 1997-04-16 |
Family
ID=12725310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4565289A Expired - Fee Related JP2600887B2 (en) | 1989-02-27 | 1989-02-27 | UV irradiation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2600887B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04266093A (en) * | 1991-02-20 | 1992-09-22 | Nippon Steel Corp | Electromagnetic shielding material |
| JPH0549094U (en) * | 1991-03-28 | 1993-06-29 | 株式会社日本フォトサイエンス | UV irradiation device |
| FR2737483A1 (en) * | 1995-08-02 | 1997-02-07 | Soc D Mecanique De L Hers | UV irradiation device for water treatment |
| JP2012210571A (en) * | 2011-03-31 | 2012-11-01 | Iwasaki Electric Co Ltd | Method for treating fluid of ultraviolet treatment apparatus, and ultraviolet treatment apparatus |
-
1989
- 1989-02-27 JP JP4565289A patent/JP2600887B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04266093A (en) * | 1991-02-20 | 1992-09-22 | Nippon Steel Corp | Electromagnetic shielding material |
| JPH0549094U (en) * | 1991-03-28 | 1993-06-29 | 株式会社日本フォトサイエンス | UV irradiation device |
| FR2737483A1 (en) * | 1995-08-02 | 1997-02-07 | Soc D Mecanique De L Hers | UV irradiation device for water treatment |
| JP2012210571A (en) * | 2011-03-31 | 2012-11-01 | Iwasaki Electric Co Ltd | Method for treating fluid of ultraviolet treatment apparatus, and ultraviolet treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2600887B2 (en) | 1997-04-16 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |