JPH0221733U - - Google Patents
Info
- Publication number
- JPH0221733U JPH0221733U JP10052588U JP10052588U JPH0221733U JP H0221733 U JPH0221733 U JP H0221733U JP 10052588 U JP10052588 U JP 10052588U JP 10052588 U JP10052588 U JP 10052588U JP H0221733 U JPH0221733 U JP H0221733U
- Authority
- JP
- Japan
- Prior art keywords
- base
- liquid
- top surface
- film
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 1
Landscapes
- Sliding-Contact Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10052588U JPH0221733U (is) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10052588U JPH0221733U (is) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221733U true JPH0221733U (is) | 1990-02-14 |
Family
ID=31328680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10052588U Pending JPH0221733U (is) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221733U (is) |
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1988
- 1988-07-27 JP JP10052588U patent/JPH0221733U/ja active Pending