JPH0221652U - - Google Patents
Info
- Publication number
- JPH0221652U JPH0221652U JP10072288U JP10072288U JPH0221652U JP H0221652 U JPH0221652 U JP H0221652U JP 10072288 U JP10072288 U JP 10072288U JP 10072288 U JP10072288 U JP 10072288U JP H0221652 U JPH0221652 U JP H0221652U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- suction hole
- bed
- elastic member
- disposed above
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10072288U JPH0221652U (enExample) | 1988-07-29 | 1988-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10072288U JPH0221652U (enExample) | 1988-07-29 | 1988-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221652U true JPH0221652U (enExample) | 1990-02-14 |
Family
ID=31329055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10072288U Pending JPH0221652U (enExample) | 1988-07-29 | 1988-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221652U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190066584A (ko) * | 2017-12-05 | 2019-06-13 | 가부시키가이샤 아도텟쿠 엔지니아린구 | 마스크 유닛 및 노광 장치 |
-
1988
- 1988-07-29 JP JP10072288U patent/JPH0221652U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190066584A (ko) * | 2017-12-05 | 2019-06-13 | 가부시키가이샤 아도텟쿠 엔지니아린구 | 마스크 유닛 및 노광 장치 |
| JP2019101306A (ja) * | 2017-12-05 | 2019-06-24 | 株式会社アドテックエンジニアリング | マスクユニット及び露光装置 |
| TWI782139B (zh) * | 2017-12-05 | 2022-11-01 | 日商亞多特克工程股份有限公司 | 光罩單元及曝光裝置 |