JPH0220338U - - Google Patents

Info

Publication number
JPH0220338U
JPH0220338U JP9767788U JP9767788U JPH0220338U JP H0220338 U JPH0220338 U JP H0220338U JP 9767788 U JP9767788 U JP 9767788U JP 9767788 U JP9767788 U JP 9767788U JP H0220338 U JPH0220338 U JP H0220338U
Authority
JP
Japan
Prior art keywords
base
wafer
fixed
pair
racks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9767788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9767788U priority Critical patent/JPH0220338U/ja
Publication of JPH0220338U publication Critical patent/JPH0220338U/ja
Pending legal-status Critical Current

Links

JP9767788U 1988-07-22 1988-07-22 Pending JPH0220338U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9767788U JPH0220338U (enrdf_load_stackoverflow) 1988-07-22 1988-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9767788U JPH0220338U (enrdf_load_stackoverflow) 1988-07-22 1988-07-22

Publications (1)

Publication Number Publication Date
JPH0220338U true JPH0220338U (enrdf_load_stackoverflow) 1990-02-09

Family

ID=31323306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9767788U Pending JPH0220338U (enrdf_load_stackoverflow) 1988-07-22 1988-07-22

Country Status (1)

Country Link
JP (1) JPH0220338U (enrdf_load_stackoverflow)

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