JPH0220338U - - Google Patents
Info
- Publication number
- JPH0220338U JPH0220338U JP9767788U JP9767788U JPH0220338U JP H0220338 U JPH0220338 U JP H0220338U JP 9767788 U JP9767788 U JP 9767788U JP 9767788 U JP9767788 U JP 9767788U JP H0220338 U JPH0220338 U JP H0220338U
- Authority
- JP
- Japan
- Prior art keywords
- base
- wafer
- fixed
- pair
- racks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9767788U JPH0220338U (cs) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9767788U JPH0220338U (cs) | 1988-07-22 | 1988-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220338U true JPH0220338U (cs) | 1990-02-09 |
Family
ID=31323306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9767788U Pending JPH0220338U (cs) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220338U (cs) |
-
1988
- 1988-07-22 JP JP9767788U patent/JPH0220338U/ja active Pending