JPH0220195Y2 - - Google Patents
Info
- Publication number
- JPH0220195Y2 JPH0220195Y2 JP3752984U JP3752984U JPH0220195Y2 JP H0220195 Y2 JPH0220195 Y2 JP H0220195Y2 JP 3752984 U JP3752984 U JP 3752984U JP 3752984 U JP3752984 U JP 3752984U JP H0220195 Y2 JPH0220195 Y2 JP H0220195Y2
- Authority
- JP
- Japan
- Prior art keywords
- catalyst
- container
- pipe
- polyacetylene
- natsuta
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003054 catalyst Substances 0.000 claims description 66
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 32
- 229920001197 polyacetylene Polymers 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 230000000379 polymerizing effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 14
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- YBGKQGSCGDNZIB-UHFFFAOYSA-N arsenic pentafluoride Chemical compound F[As](F)(F)(F)F YBGKQGSCGDNZIB-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229920000547 conjugated polymer Polymers 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 230000005501 phase interface Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Description
【考案の詳細な説明】
本考案は、ポリアセチレン膜製造装置に関し、
更に詳しくは膜厚均一でかつ大きな面積のポリア
セチレン膜を製造するのに好適な装置に係るもの
である。[Detailed description of the invention] The present invention relates to a polyacetylene film manufacturing apparatus,
More specifically, the present invention relates to an apparatus suitable for producing a polyacetylene film having a uniform thickness and a large area.
ポリアセチレンは、炭素と水素原子各１ケを構
成単位とする最も単純な鎖状共役形高分子化合物
であり、半導体としての性質をもつているが、特
にチーグラナツタ触媒（Ti（OC4H3）4−Al
（C2H5）3系）を用いてのアセチレン重合によるポ
リアセチレン膜は、直径200Å程度のフイブリル
（繊維状微結晶）網目構造を有しており、これに
ハロゲンガスや五弗化砒素などの僅かなドーピン
グを施すことによつて、その導電率を大巾に変化
させることができる。 Polyacetylene is the simplest chain conjugated polymer compound with one carbon and one hydrogen atom as a constituent unit, and it has semiconductor properties, but it is especially suitable for the Ziegler-Natsuta catalyst (Ti(OC 4 H 3 ) 4 −Al
The polyacetylene film produced by acetylene polymerization using (C 2 H 5 ) 3 system) has a fibril (fibrous microcrystal) network structure with a diameter of about 200 Å, and this is injected with halogen gas, arsenic pentafluoride, etc. By applying a small amount of doping, its conductivity can be changed significantly.
また、このようなポリアセチレン膜は、化学的
に極めて安定していること、軽量であること、そ
して前記の如くフイブリル網目構造であるため非
常に大きな表面積をとることができるなどのこと
から、二次電池の有望な電極材料あるいは集積回
路への応用など既に注目を集めている。 In addition, such a polyacetylene film is chemically extremely stable, lightweight, and has a fibrillar network structure as mentioned above, so it can occupy a very large surface area, so it can be used as a secondary material. It is already attracting attention as a promising electrode material for batteries and for its application in integrated circuits.
上記ポリアセチレン膜を製造する方法として
は、前記チーグラナツタ触媒につき、そのAl／
Tiのモル比を３〜４に調整して、これをドライ
アイス、メタノールの冷媒にて−78℃に冷却し、
この触媒にアセチレンガスを吹付けることによ
り、触媒溶液表面での気相−液相境界近傍にて同
ガスを重合させることが、既に知られている。 As a method for producing the polyacetylene membrane, the Al/
The molar ratio of Ti was adjusted to 3 to 4, and this was cooled to -78°C with a refrigerant of dry ice and methanol.
It is already known that by spraying acetylene gas onto this catalyst, the gas is polymerized near the gas phase-liquid phase boundary on the surface of the catalyst solution.
ところで、従来、実際にポリアセチレン膜を製
造するには、第１図に示すように円筒形の容器ａ
内に前記チーグラナツタ触媒ｂを貯留し、この容
器ａを振り動かすことによつて上記触媒ｂを同容
器ａの内壁面a′に付着させ、容器ａ内に供給管ｃ
からアセチレンガスを導入することにより、上記
内壁面a′に付着した触媒ｂから、容器ａの底部に
貯留した同触媒ｂの気相一液相境界面b′にわたつ
て、同ガスの重合により得られるポリアセチレン
膜ｄを形成するようにしている。 By the way, conventionally, in order to actually manufacture a polyacetylene film, a cylindrical container a is used as shown in FIG.
The Ziegler-Natsuta catalyst b is stored in the container a, and by shaking the container a, the catalyst b is attached to the inner wall surface a' of the container a, and the supply pipe c is inserted into the container a.
By introducing acetylene gas from above, the gas is polymerized from the catalyst b attached to the inner wall surface a' to the gas-liquid phase interface b' of the catalyst b stored at the bottom of the container a. The resulting polyacetylene film d is formed.
しかし、上記従来例の場合、底部の触媒ｂにお
ける上記面b′に生成されるポリアセチレン膜ｄ
は、前記フイブリル網目構造内に多量の同上触媒
ｂが含浸されてしまうため、品質が劣化してしま
い、このため内壁面a′に生成されたポリアセチレ
ン膜ｄだけが、前記二次電池の電極または他分野
の材料として利用できるに過ぎず、この結果製造
効率が悪いと共に、内壁面a′のポリアセチレン膜
ｄにあつても、同面a′に付着する触媒ｂが底面方
向に流下し易いため、底面部側が厚くなり膜厚が
一定せず、また上記面b′の上部迄十分に触媒を付
着させるのが困難となる欠陥があつた。 However, in the case of the above conventional example, the polyacetylene film d formed on the surface b' of the bottom catalyst b
Since a large amount of the catalyst b is impregnated into the fibril network structure, the quality deteriorates, and therefore only the polyacetylene film d formed on the inner wall surface a′ is used as the electrode or It can only be used as a material in other fields, and as a result, the manufacturing efficiency is low.Even if the polyacetylene film d is on the inner wall surface a', the catalyst b attached to the inner wall surface a' tends to flow down toward the bottom surface. There were defects in that the bottom surface side was thicker and the film thickness was not constant, and that it was difficult to sufficiently adhere the catalyst to the upper part of the surface b'.
本考案は、かかる従来の実情に鑑みてなされた
もので、容器の側壁内面に触媒を塗布できるよう
に触媒導入管を配設すると共に、所定適量の触媒
が塗布されるように容器の底部をテーパ状に形成
し、かつ容器と触媒導入管とを相対的に回転運動
をさせる構成とすることにより、容器の側壁内面
から底部内面にかけて連続した触媒流下による塗
布を可能となし、これにより均一なポリアセチレ
ン膜を製造して、上記問題点を解消できるポリア
セチレン膜製造装置を提供するのが、その目的で
ある。 The present invention has been developed in view of the above-mentioned conventional circumstances, and includes a catalyst introduction pipe that is arranged so that catalyst can be applied to the inner surface of the side wall of the container, and a bottom part of the container that is installed so that a predetermined appropriate amount of catalyst can be applied. By forming the container into a tapered shape and by rotating the container and the catalyst inlet pipe relative to each other, it is possible to apply the catalyst by continuous flow from the inner surface of the side wall to the inner surface of the bottom of the container, thereby making it possible to coat the catalyst uniformly. The purpose is to provide a polyacetylene film manufacturing apparatus capable of manufacturing a polyacetylene film and solving the above-mentioned problems.
以下、図面に基づいて本考案の一実施例につい
て詳述する。 Hereinafter, one embodiment of the present invention will be described in detail based on the drawings.
本考案の一実施例を示す第２図、第３図におい
て、１は有蓋円筒形の容器であり、該容器１の天
井壁１ｃには、その中央に開口部２が設けられ、
この容器１は、当該開口部２の周縁上端面にあつ
て、カツプ形であるキヤツプ４の下端外周との間
にあつて嵌着したＯリング３に、摺動自在なるよ
う当接しており、この際当該キヤツプ４は固定用
腕杆５により固定され、容器１はその回転支承軸
１ａを軸心として回転自在なるよう支持されてい
る。 In FIGS. 2 and 3 showing an embodiment of the present invention, 1 is a cylindrical container with a lid, and an opening 2 is provided in the center of the ceiling wall 1c of the container 1.
This container 1 is in slidable contact with an O-ring 3 fitted between the upper end surface of the periphery of the opening 2 and the outer periphery of the lower end of a cup-shaped cap 4. At this time, the cap 4 is fixed by a fixing arm 5, and the container 1 is supported so as to be rotatable about its rotational support shaft 1a.
上記キヤツプ４には、図示しない供給源に接続
されたアセチレンガスの導入配管６と、容器１内
の当該ガスを流出するための排出配管７とが容器
１内に開口貫設されており、両配管６，７には容
器１内を一定圧のアセチレンガス雰囲気に保つよ
うガス調整弁８，９が設けられている。 In the cap 4, an acetylene gas introduction pipe 6 connected to a supply source (not shown) and a discharge pipe 7 for discharging the gas in the container 1 are opened and penetrated into the container 1. Gas regulating valves 8 and 9 are provided in the pipes 6 and 7 to maintain an acetylene gas atmosphere at a constant pressure within the container 1.
さらに、上記キヤツプ４には、図示しない供給
源に接続されたチーグラナツタ触媒の触媒導入配
管１０が貫設され、かつ同管１０の容器１内へ延
出させた部分は略Ｌ字状に曲成させて、容器１の
側壁内面１ｂにチーグラナツタ触媒が導入塗布さ
れるように、当該配管１０の先端開口部１０ａは
容器１の側壁内面１ｂに近接した位置にあり、上
記触媒導入配管１０には、容器１内に導入される
触媒の量を制御する触媒調整弁１１が設けられて
いる。 Further, a catalyst introduction pipe 10 for a Ziegler-Natsuta catalyst connected to a supply source (not shown) is installed through the cap 4, and a portion of the pipe 10 extending into the container 1 is bent into a substantially L-shape. In order to introduce and apply the Ziegler-Natsuta catalyst to the inner surface 1b of the side wall of the container 1, the tip opening 10a of the pipe 10 is located close to the inner surface 1b of the side wall of the container 1, and the catalyst introduction pipe 10 includes: A catalyst regulating valve 11 is provided which controls the amount of catalyst introduced into the vessel 1.
さらに、上記容器１は、円筒形に形成されると
共に、その底部１ｄが下方へ向け先細りとなるよ
うテーパ状に形成され、かつ該底部１ｄの中央に
当該触媒を排出する排出口１ｆが、前記回転支承
軸１ａに貫設され、さらに該排出口１ｆを具備し
た当該支承軸１ａはメカニカルシール部１３を介
して触媒排出配管１４に連通させてあり、同配管
には当該触媒の流出量を制御する触媒排出弁１５
が介設されている。 Furthermore, the container 1 is formed in a cylindrical shape, and the bottom part 1d is formed in a tapered shape so as to taper downward, and the discharge port 1f for discharging the catalyst is located in the center of the bottom part 1d. The support shaft 1a, which is provided through the rotary support shaft 1a and is further equipped with the discharge port 1f, is communicated with a catalyst discharge pipe 14 via a mechanical seal 13, and the pipe has a pipe for controlling the outflow amount of the catalyst. Catalyst discharge valve 15
is interposed.
一方、２０は回転伝動機構であり、図示しない
駆動源によつて回転する駆動歯車２１が、中間歯
車２２を介して、容器１の外周に設けられた従動
歯車２３と噛合することで、容器１を回転可能に
している。 On the other hand, 20 is a rotation transmission mechanism, in which a drive gear 21 rotated by a drive source (not shown) meshes with a driven gear 23 provided on the outer periphery of the container 1 via an intermediate gear 22. is rotatable.
次に、上記装置により、ポリアセチレン膜を製
造するには、まず、回転伝動機構２０により不活
性ガスが封入された容器１を回転させると共に、
触媒調整弁１１を適度に開成して、触媒導入配管
１０の先端開口部１０ａから滴下されるチーグラ
ナツタ触媒を容器１の側壁内面１ｂと底部内面１
ｅの全面にわたつて塗布するのであり、その際、
同調整弁１１により、導入触媒量が所定適量とな
るように制御し、一方触媒排出弁１５は触媒塗布
量が過剰とならないよう所要程度に開成制御する
のである。 Next, in order to manufacture a polyacetylene film using the above-mentioned apparatus, first, the container 1 filled with an inert gas is rotated by the rotational transmission mechanism 20, and
By opening the catalyst adjustment valve 11 appropriately, the Ziegler-Natsuta catalyst dripped from the tip opening 10a of the catalyst introduction pipe 10 is distributed between the side wall inner surface 1b and the bottom inner surface 1 of the container 1.
It is applied over the entire surface of e, and at that time,
The adjustment valve 11 controls the amount of introduced catalyst to be a predetermined appropriate amount, while the catalyst discharge valve 15 is controlled to open to a required degree so that the amount of catalyst applied does not become excessive.
つづいて、触媒調整弁１１を閉の状態にした
後、不活性ガスを排気しガス調整弁８を開状態と
して、アセチレンガスを容器１内に導入すれば、
上記側壁内面１ｂと底部内面１ｅに塗布されたチ
ーグラナツタ触媒にて、アセチレンガスが重合さ
れて、ポリアセチレン膜１２が生成されるのであ
り、この際、容器１は回転したままであつても、
また静止させてしまつてもよい。 Next, after closing the catalyst adjustment valve 11, exhaust the inert gas, open the gas adjustment valve 8, and introduce acetylene gas into the container 1.
Acetylene gas is polymerized by the Ziegler-Natsuta catalyst applied to the inner surface of the side wall 1b and the inner surface of the bottom portion 1e, and a polyacetylene film 12 is produced.At this time, even if the container 1 remains rotating,
It may also be left stationary.
第４図、第５図は、本考案の異なる実施例を示
し、前記実施例が容器１を回転可能としたもので
あるのに対して、本実施例は触媒導入配管１０を
回転可能としている。 FIGS. 4 and 5 show different embodiments of the present invention, and while in the previous embodiment the container 1 is rotatable, in this embodiment the catalyst introduction pipe 10 is rotatable. .
即ち、２０は回転伝動機構であり、図示しない
駆動源によつて回転する駆動歯車が、中間歯車２
２を介して、触媒導入配管１０の外周に設けられ
た従動歯車２３と噛合している。 That is, 20 is a rotation transmission mechanism, in which a drive gear rotated by a drive source (not shown) is connected to an intermediate gear 2.
2, it meshes with a driven gear 23 provided on the outer periphery of the catalyst introduction pipe 10.
また、キヤツプ４には触媒導入配管１０が単に
貫通されているのではなく、キヤツプ４の上面開
口部に嵌着したＯリング２３を介してシールされ
た状態にて貫通されている。 Further, the catalyst introduction pipe 10 does not simply pass through the cap 4, but passes through the cap 4 in a sealed state through an O-ring 23 fitted to the upper opening of the cap 4.
さらに、触媒導入管１０の回転部１０′と非回
転部１０″との接合部には、メカニカルシール部
１３を介設して、シール状態で回転部１０′の回
転が可能なるよう配慮されており、もちろん触媒
排出配管１４にはメカニカルシール部はない。 Further, a mechanical seal part 13 is provided at the joint between the rotating part 10' and the non-rotating part 10'' of the catalyst introduction pipe 10, so that the rotating part 10' can rotate in a sealed state. Of course, the catalyst discharge pipe 14 does not have a mechanical seal.
尚、本考案の触媒導入配管１０は、上記実施例
の他、先端開口部１０ａを上下方向に位置調整可
能とし、これにより、容器側壁内面１ｂと容器底
部内面１ｅへの触媒塗布面積を加減して、生成す
るポリアセチレン膜１２の面積を自由に選択する
ことができる。 In addition to the above-mentioned embodiment, the catalyst introduction pipe 10 of the present invention has a tip opening 10a that can be adjusted in position in the vertical direction, thereby adjusting the area of catalyst application to the inner surface 1b of the container side wall and the inner surface 1e of the bottom of the container. Therefore, the area of the polyacetylene film 12 to be produced can be freely selected.
また、触媒導入配管１０を複数設けることによ
り、触媒塗布に要する時間を短縮することもでき
る。 Further, by providing a plurality of catalyst introduction pipes 10, the time required for applying the catalyst can also be shortened.
本考案は、上記実施例に具現されるように、容
器１内でアセチレンガスをチーグラナツタ触媒に
接触させることにより重合して、ポリアセチレン
膜を製造する装置において、上記容器１の上部に
設けたキヤツプ４には、上記チーグラナツタ触媒
が導入される触媒導入配管１０を貫設して、その
先端開口部１０ａを容器側壁内面１ｂに近接して
位置させ、かつ容器の底部を先細りのテーパ状に
形成すると共に、その先端に排出口１ｆを設け、
さらに当該触媒導入管１０と上記容器１とに相対
的回転運動をさせることで、前記先端開口部１０
ａから流出される当該触媒が、容器１の側壁内面
１ｂから底部内面１ｃにわたつて塗布自在とした
回転伝動機構２０を具備させてなるので、適量の
チーグラナツタ触媒を流し入れることでポリアセ
チレン膜１２を均一な膜厚でかつ比較的大きな面
積に生成可能となり、また上記相対的回転により
迅速に当該触媒を全面にわたつて拡布でき、さら
に過剰触媒が流下するので部分的に当該触媒が過
多となることなく、このため極めて品質のよい製
品を得ることができる。 The present invention, as embodied in the above embodiment, is an apparatus for producing a polyacetylene film by polymerizing acetylene gas by bringing it into contact with a Ziegler-Natsuta catalyst in a container 1. In this method, a catalyst introduction pipe 10 through which the Ziegler-Natsuta catalyst is introduced is installed so that its tip opening 10a is located close to the inner surface 1b of the side wall of the container, and the bottom of the container is formed into a tapered shape. , a discharge port 1f is provided at its tip,
Furthermore, by making relative rotational movement between the catalyst introduction pipe 10 and the container 1, the tip opening 10
Since it is equipped with a rotation transmission mechanism 20 that allows the catalyst flowing out from the container 1 to be freely applied from the inner surface 1b of the side wall to the inner surface 1c of the bottom part of the container 1, the polyacetylene film 12 can be uniformly coated by pouring in an appropriate amount of the Ziegler-Natsuta catalyst. The catalyst can be formed with a relatively large film thickness and over a relatively large area, and the relative rotation allows the catalyst to be quickly spread over the entire surface, and since excess catalyst flows down, there is no possibility that there will be an excess of catalyst in some areas. Therefore, products of extremely high quality can be obtained.
第１図は従来のポリアセチレン膜製造装置を示
す縦断正面図、第２図、第３図は本考案の一実施
例を示した夫々縦断正面図と平面図、第４図、第
５図は本考案の他の実施例を示した夫々縦断正面
図と平面図である。
１……容器、１ｂ……側壁内面、１ｄ……底
部、１ｅ……底部内面、１ｆ……触媒の排出口、
４……キヤツプ、１０……触媒導入配管、１０′
……回転部、１２……ポリアセチレン膜、１３…
…触媒排出弁、２０……回転伝動機構。
FIG. 1 is a longitudinal sectional front view showing a conventional polyacetylene film manufacturing apparatus, FIGS. 2 and 3 are longitudinal sectional front views and plan views showing an embodiment of the present invention, and FIGS. FIG. 7 is a longitudinal sectional front view and a plan view showing other embodiments of the invention, respectively. 1... Container, 1b... Inner side wall, 1d... Bottom, 1e... Inner bottom, 1f... Catalyst outlet,
4...Cap, 10...Catalyst introduction pipe, 10'
...Rotating part, 12...Polyacetylene film, 13...
...Catalyst discharge valve, 20...Rotary transmission mechanism.
Claims (1)
媒に接触させることにより重合してポリアセチ
レン膜を製造する装置において、上記容器の上
部に設けたキヤツプには、上記チーグラナツタ
触媒が導入される触媒導入管を貫設して、その
先端開口部を容器の側壁内面に近接して位置さ
せ、かつ容器の底部を先細りのテーパ状に形成
すると共に、その先端に排出口を設け、さらに
上記触媒導入管と上記容器とに相対的回転運動
をさせることで、前記先端開口部から流出され
る当該触媒が容器の側壁内面から底部内面にわ
たつて塗布自在とした回転伝動機構を備えたポ
リアセチレン膜製造装置。 (2) 容器の底部に、過剰触媒を排出する触媒排出
口と、該排出口から排出される触媒の量を制御
する触媒排出弁とを備えてなる実用新案登録請
求の範囲第１項記載のポリアセチレン膜製造装
置。[Claims for Utility Model Registration] (1) In an apparatus for producing a polyacetylene film by polymerizing acetylene gas by bringing it into contact with a Ziegler-Natsuta catalyst in a container, a cap provided at the top of the container contains the Ziegler-Natsuta catalyst. A catalyst introducing pipe to be introduced is installed through the pipe, and its tip opening is located close to the inner surface of the side wall of the container, and the bottom of the container is formed into a tapered shape, and a discharge port is provided at the tip, Furthermore, a rotational transmission mechanism is provided that allows the catalyst flowing out from the tip opening to be freely applied from the inner surface of the side wall to the inner surface of the bottom part of the container by causing the catalyst introduction pipe and the container to rotate relative to each other. Polyacetylene membrane manufacturing equipment. (2) A utility model according to claim 1, which comprises a catalyst discharge port for discharging excess catalyst at the bottom of the container, and a catalyst discharge valve for controlling the amount of catalyst discharged from the discharge port. Polyacetylene membrane manufacturing equipment.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3752984U JPS60152648U (en) | 1984-03-16 | 1984-03-16 | Polyacetylene film manufacturing equipment |
| EP84306166A EP0156060B1 (en) | 1984-03-15 | 1984-09-10 | Apparatus for producing polyacetylene film |
| DE8484306166T DE3475202D1 (en) | 1984-03-15 | 1984-09-10 | Apparatus for producing polyacetylene film |
| US06/649,506 US4663123A (en) | 1984-03-15 | 1984-09-11 | Apparatus for producing polyacetylene film |
| US06/925,218 US4745163A (en) | 1984-03-15 | 1986-10-31 | Catalytic film polymerization of acetylene |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3752984U JPS60152648U (en) | 1984-03-16 | 1984-03-16 | Polyacetylene film manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60152648U JPS60152648U (en) | 1985-10-11 |
| JPH0220195Y2 true JPH0220195Y2 (en) | 1990-06-01 |
Family
ID=30543693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3752984U Granted JPS60152648U (en) | 1984-03-15 | 1984-03-16 | Polyacetylene film manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60152648U (en) |
-
1984
- 1984-03-16 JP JP3752984U patent/JPS60152648U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60152648U (en) | 1985-10-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6248398B1 (en) | Coater having a controllable pressurized process chamber for semiconductor processing | |
| US20090155475A1 (en) | Device and method for coating base material | |
| JPS6211632A (en) | Method and device for forming hermetic sealing body of sealing body | |
| CN106711335A (en) | Perovskite precursor and preparation method thereof | |
| TWI275660B (en) | Method and device for depositing thin layers on a substrate in a height-adjustable process chamber | |
| JPH0220195Y2 (en) | ||
| US4745163A (en) | Catalytic film polymerization of acetylene | |
| JPH0220194Y2 (en) | ||
| US4675137A (en) | Method for producing polyacetylene film | |
| KR20160098431A (en) | System and methods for spin-on coating of self-assembled monolayers of periodic organosilicates on substrate | |
| EP0137707B1 (en) | Apparatus for producing polyacetylene film | |
| CN213493657U (en) | Be applied to sealing end cover and reation kettle of aerogel production | |
| JPH049164B2 (en) | ||
| CN1184014C (en) | Gumming device for coating machine | |
| JPS6214092B2 (en) | ||
| JPH09501540A (en) | Method for manufacturing a gas diffusion electrode | |
| KR101673047B1 (en) | Modified spin coating apparatus and spin coating method using the same | |
| JPH118177A (en) | Resist feeder and resist application method | |
| JPS6470168A (en) | Liquid chemical applicator | |
| CN2532918Y (en) | Gluing device for coating machine | |
| JPS6339065Y2 (en) | ||
| CN219366992U (en) | Tail gas pipe lifting fine-tuning device | |
| CN219187507U (en) | Glue spreading roller for producing composite film | |
| CN209368149U (en) | A kind of composite heat transfer coating device | |
| JPH0520469Y2 (en) |