JPH0220129U - - Google Patents
Info
- Publication number
- JPH0220129U JPH0220129U JP9893488U JP9893488U JPH0220129U JP H0220129 U JPH0220129 U JP H0220129U JP 9893488 U JP9893488 U JP 9893488U JP 9893488 U JP9893488 U JP 9893488U JP H0220129 U JPH0220129 U JP H0220129U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure sensor
- temperature fluid
- pressure
- force transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- 230000017525 heat dissipation Effects 0.000 claims 1
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098934U JPH0619068Y2 (ja) | 1988-07-26 | 1988-07-26 | 高温流体用の圧力センサ |
| US07/384,817 US4993266A (en) | 1988-07-26 | 1989-07-25 | Semiconductor pressure transducer |
| EP89113807A EP0352773B1 (en) | 1988-07-26 | 1989-07-26 | Piezoresistive si single crystal pressure transducer |
| DE89113807T DE68905967T2 (de) | 1988-07-26 | 1989-07-26 | Piezoresistiver Si Einkristall Druckwandler. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098934U JPH0619068Y2 (ja) | 1988-07-26 | 1988-07-26 | 高温流体用の圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0220129U true JPH0220129U (US06265458-20010724-C00056.png) | 1990-02-09 |
| JPH0619068Y2 JPH0619068Y2 (ja) | 1994-05-18 |
Family
ID=31325634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988098934U Expired - Lifetime JPH0619068Y2 (ja) | 1988-07-26 | 1988-07-26 | 高温流体用の圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619068Y2 (US06265458-20010724-C00056.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009122076A (ja) * | 2007-11-19 | 2009-06-04 | Nippon Soken Inc | 圧力センサの取付構造 |
| JP2011163915A (ja) * | 2010-02-09 | 2011-08-25 | Toyota Central R&D Labs Inc | 圧力センサ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3857287A (en) * | 1972-05-08 | 1974-12-31 | Kistler Instrumente Ag | Pressure transducers |
| JPS6327845U (US06265458-20010724-C00056.png) * | 1986-08-05 | 1988-02-24 |
-
1988
- 1988-07-26 JP JP1988098934U patent/JPH0619068Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3857287A (en) * | 1972-05-08 | 1974-12-31 | Kistler Instrumente Ag | Pressure transducers |
| JPS6327845U (US06265458-20010724-C00056.png) * | 1986-08-05 | 1988-02-24 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009122076A (ja) * | 2007-11-19 | 2009-06-04 | Nippon Soken Inc | 圧力センサの取付構造 |
| JP2011163915A (ja) * | 2010-02-09 | 2011-08-25 | Toyota Central R&D Labs Inc | 圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619068Y2 (ja) | 1994-05-18 |
