JPH02200099A - Ultrasonic wave transmission/reception probe and its manufacture - Google Patents

Abstract

PURPOSE:To prevent the resolution of an ultrasonic wave from being lowered due to the break of the wall plane of a piezoelectric oscillator by adhering an oscillator enhancing film on a spatial inner plane among plural piezoelectric oscillators provided in parallel separately on an ultrasonic wave absorber. CONSTITUTION:A piezoelectric diaphragm 4 on which an electrode 2 and a lead wire 3 are mounted is adhered on the ultrasonic wave absorber 1, and furthermore, an acoustic matching layer 5 consisting of epoxy resin in which a filler, for example, aluminum powder is mixed by 70% and having thickness of 1/4-wave is arranged on the diaphragm. Next, the piezoelectric diaphragm 4 on the upper plane of which the acoustic matching layer 5 is formed is divided by forming a gap with a grinding stone, thereby, plural independent piezoelectric oscillators 6... can be formed. Furthermore, the inner plane comprising the spaces 7... of the piezoelectric oscillators 6... are coated with the oscillator enhancing films 8... consisting of the epoxy resin, etc. In such a way, the inner plane of the piezoelectric oscillator formed by the grinding stone is enhanced mechanically, and the break can be prevented from occurring even in a long term use, which maintains satisfactory resolution.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to an ultrasonic wave transmitting/receiving probe used for diagnosis of a living body and a method for manufacturing the same.

(Prior Art) A conventional general electronic scanning ultrasonic transceiver probe used for various types of diagnosis of living organisms has a structure as shown in FIG. In other words, the prisoner is a piezoelectric vibrating element,
(B) is the electrode attached to the upper and lower surfaces of this element, (C
) is the lead attached to the electrode, (to) is the vibrating element (5)
A thermosetting resin such as epoxy resin is generally used as an acoustic matching layer for matching the acoustic impedance of the object and the object to be radiated with ultrasonic waves, and an appropriate amount of filler is usually mixed with this. Furthermore, (Junior is a holder for the vibrating elements made of an ultrasonic absorbing material, and (F'') is an insulating layer inside each vibrating element, which separates the vibrating elements and reinforces the vibrating elements. In order to efficiently form the matching layer 0, it is filled with a resin for forming the matching layer, or a silicone or the like with a low rigidity is filled in the round shape to minimize the mechanical coupling between each vibrating element (a). Furthermore, an acoustic lens circuit is formed on top of this to converge sound waves.

However, in such an ultrasonic transceiver probe, all the vibrating elements (5) are connected on their upper surfaces by a series of acoustic matching layers (D), and each perturbation element is provided with an acoustic matching layer (D). Filled with silicone, etc., of the same quality as (to) or with a lower rigidity. Therefore, when a voltage is applied to the electrode (B) in the vibrating element and the vibrating element (5) is operated, the vibrating element (5) vibrates in the transverse direction at the same time as in the electrode (B) direction. Electrical and ultrasonic mechanical coupling occurs between the vibrating elements (8), and as a result, each vibrating element (5) becomes difficult to operate as specified, and the waveforms of the transmitted and received waves become extreme. There was a problem in that the resolution deteriorated and the ultrasonic wave transmitting/receiving probe could no longer function properly.

Therefore, in the past, as disclosed in Japanese Patent No. 1202295, by forming a space between the piezoelectric vibrating elements to which the sound qfi matching/l is attached, the conventional electrical and mechanical The coupling of targets is determined by each vibrating element (5
)... is caused, and each imaging element (8) performs an independent function, thereby improving the performance of the probe.

However, since the space inside the imaging element of the probe is stepped out of this space, the probe often collapses from the inner wall surface within the imaging element during long-term use. As a result, when operated as a probe, the waveforms of the transmitted and received waves deteriorate, making it impossible to operate accurately as specified, which is one of the causes of reduced resolution.

(Problems to be Solved by the Invention) The present invention has been made in consideration of the above circumstances, and provides a highly reliable ultrasonic transceiver probe that can maintain a predetermined resolution over a long period of time, and a method for manufacturing the same. The purpose is to provide.

[Structure of the invention]

(Means and effects for solving Problem 11) A vibrating element reinforcing film is coated on the inner surface of the space between a plurality of piezoelectric vibrating elements spaced apart on an ultrasonic absorber, and the wall surface of the piezoelectric vibrating elements is This is to prevent a decrease in ultrasonic resolution due to collapse.

(Example) Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

As shown in Figures 1 and 2, the ultrasonic absorber (1) has an electrode (2) and a lead #! ! The piezoelectric diaphragm (4) with the attached piezoelectric diaphragm (3) is pasted on top of this, and an acoustic matching layer (5) made of an epoxy resin having a thickness of 74 wavelengths and containing 70% of a filler such as alumina powder is applied. ).

Next, as shown in FIG. 3, the piezoelectric diaphragm (4) on which the acoustic matching layer (5) is formed is scored with a grindstone and divided into parts, which are shown by dotted lines in the figure. ), forming a plurality of mutually independent piezoelectric vibrating elements (6).

Furthermore, as shown in FIG. 4, a piezoelectric vibrating element (6)...
・Epoxy resin (
For example, a vibrating element reinforcement film (8) made of "Araldai" 103 J (product name Nippon Ciba Geigy Co., Ltd. #))
...to be coated. At this time, the coating area is preheated to about 70°C to lower the viscosity of the epoxy resin, excess epoxy resin is discharged, and the space (7)...
Make sure that the area is not filled up. Next, as shown in FIG. 5, using a rigid epoxy resin (9), the ends of one side of a plurality of piezoelectric vibrating elements (6) separated from each other are connected to each other. and the ends of the other side are connected and fixed over the entire surface. Next, as shown in FIGS. 6 and 7, for example, ``Scotchweld 1838 J'' (trade name: Sumitomo 3M Co., Ltd. Coated with an adhesive such as (manufactured by Co., Ltd.), and placed on top of this an acoustic matching layer (5) with piezoelectric vibrating elements (6)... facing the sheet (II). After the agent is cured, when the sheet a1 is peeled off, a thin resin film αυ is transferred and formed on the acoustic matching layer (5).

Next, an acoustic lens (a) is bonded onto the resin thin film (a) using a silicone adhesive to form an ultrasonic transmitting/receiving probe as shown in FIG.

In the nine ultrasonic transceiver probes formed in this way, the vibrating element reinforcing film (8) was formed on the inner surface of the piezoelectric vibrating elements (6) that forms the space (7). The inner surface of the vibrating element (6) is mechanically strengthened so that it will not collapse even after long-term use, and pieces of the piezoelectric vibrating element (6) will not remain in the space (7). do not have. Therefore, each piezoelectric vibrating element (6)
. . . together with the acoustic matching layer (5) formed thereon, each maintains a certain space from the adjacent one, and each piezoelectric vibrating element ( 6 ) . . . is electrically and mechanically Each piezoelectric vibrating element (6) without coupling.
... performs an independent function, and when operated as a probe, it is possible to maintain good resolution over a long period of time without deteriorating the waveforms of transmitted and received waves. By the way,
Figure 9 shows the 5000mm vibration element without the reinforcement membrane (8).
The received waveform after use for 5000 hours, Figure 10, is the same as that of the present invention. The one according to the invention shows very good results, and the effect of reinforcement by the vibrating element reinforcing film (8) on the inner wall surface of the piezoelectric vibrating element (6) is clearly visible.

Note that although the number of acoustic matching layers in the above embodiment is one layer,
For example, it may be a multilayer structure in which the lower layer is made of resin mixed with a filler and the upper layer is made of only resin. Furthermore, the material of the vibration element reinforcing film (8) is not limited to epoxy resin, and may be, for example, polyester resin. .

〔Effect of the invention〕

In the present invention, the inner wall surface forming the space between the piezoelectric vibrating elements is coated with a vibrating element reinforcing film, so even if used for a long period of time, part of the inner wall surface will collapse and fallen pieces will leave the space. It will not remain inside. Therefore, each piezoelectric vibrating element is not mechanically and electrically coupled.
As a result of being able to perform independent functions, a highly reliable ultrasonic transceiver probe with good longevity and resolution can be obtained.

[Brief explanation of the drawing]

1 to 7 are explanatory diagrams of a method for manufacturing an ultrasonic transceiver probe according to an embodiment of the present invention, FIG. 8 is a configuration diagram of an ultrasonic transceiver probe according to an embodiment of the present invention, and FIG. 9 10 are waveform diagrams obtained by the conventional ultrasonic wave transmitting/receiving probe shown in FIG. 8, respectively, and FIG. 11 is an explanatory diagram of the conventional technique. (1): Ultrasonic absorber, (5): Acoustic matching layer. (6): Piezoelectric vibration element, (7): Space. (8): Vibration element reinforcement film, 0υ: Resin thin film. 0′J: Acoustic lens. 'JIT3 Figure ＋ Figure δ Figure Kanada No. γ Figure 10

Claims (2)

[Claims] (1) A holder made of an ultrasonic absorbing material, a plurality of piezoelectric vibrating elements arranged in parallel and separated from each other on this holder with a space between them, and each of these piezoelectric vibrating elements an acoustic matching layer provided, a resin thin film integrally formed over the entire surface of the acoustic matching layer, an acoustic lens formed on the resin thin film, and end portions on one side of the plurality of piezoelectric vibrating elements. and a resin member whose ends on the other side are connected and fixed to each other, and a vibrating element reinforcing film adhered to the inner surface of the space formed between each of the piezoelectric vibrating elements to which the acoustic matching layer is attached. An ultrasonic transceiver probe characterized by: (2) A step of separately providing a plurality of piezoelectric vibrating elements each having an acoustic matching layer on a holder made of an ultrasonic absorbing material, and intervening between each piezoelectric vibrating element to which the acoustic matching layer is attached. A process of depositing a synthetic resin on the inner surface of the space formed to form a vibrating element reinforcing film, and bonding the ends of one side of the plurality of piezoelectric vibrating elements to each other and the ends of the other side with a resin member, respectively. manufacturing an ultrasonic wave transmitting/receiving probe, comprising the steps of: connecting and fixing the acoustic matching layer; integrally molding a resin thin film over the entire surface of the acoustic matching layer; and forming an acoustic lens on the resin thin film. Method.