JPH0219961Y2 - - Google Patents

Info

Publication number
JPH0219961Y2
JPH0219961Y2 JP1982156029U JP15602982U JPH0219961Y2 JP H0219961 Y2 JPH0219961 Y2 JP H0219961Y2 JP 1982156029 U JP1982156029 U JP 1982156029U JP 15602982 U JP15602982 U JP 15602982U JP H0219961 Y2 JPH0219961 Y2 JP H0219961Y2
Authority
JP
Japan
Prior art keywords
shaft
vertical
base
lamp
infrared radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982156029U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5961530U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15602982U priority Critical patent/JPS5961530U/ja
Publication of JPS5961530U publication Critical patent/JPS5961530U/ja
Application granted granted Critical
Publication of JPH0219961Y2 publication Critical patent/JPH0219961Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
JP15602982U 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置 Granted JPS5961530U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15602982U JPS5961530U (ja) 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15602982U JPS5961530U (ja) 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置

Publications (2)

Publication Number Publication Date
JPS5961530U JPS5961530U (ja) 1984-04-23
JPH0219961Y2 true JPH0219961Y2 (enrdf_load_stackoverflow) 1990-05-31

Family

ID=30344415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15602982U Granted JPS5961530U (ja) 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置

Country Status (1)

Country Link
JP (1) JPS5961530U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7433936B2 (ja) * 2020-01-31 2024-02-20 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633566Y2 (enrdf_load_stackoverflow) * 1977-08-17 1981-08-08

Also Published As

Publication number Publication date
JPS5961530U (ja) 1984-04-23

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