JPH0219955Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial application field This invention is an ultra-high voltage porcelain suitable for devices that need to connect and use multiple ultra-high voltage capacitors, especially devices where impedance (inductance component) is a problem. Concerning capacitors. A typical example of such a device is, for example, a pulse shaping circuit of an excimer laser generator. Excimer lasers are used for semiconductor annealing, optical etching, surface processing, photochemistry, uranium isotope enrichment, nuclear fusion, etc. Furthermore, it can also be used for testing high voltage and large current electrical elements.

Prior Art Figure 1 was proposed earlier by the applicant of the present application (Japanese Patent Application No. 1983-
213229) is an electric circuit connection diagram of a rare gas-halide excimer laser generator. In the figure,
R is an input resistance, C is a capacitor, _SG1 is a spark gap, PFL is a pulse shaping circuit, _SG2 is a rail gap, and A is a rare gas-halide excimer laser tube. The pulse shaping circuit PFL is a kind of magnetic capacitor, and the inner circumferential electrode 2 on the input terminal A side is connected to the spark gap _SG1 , the outer circumferential electrode 3 is connected to the capacitor C, and the inner circumferential electrode 2 on the output terminal B side is connected to the spark gap SG1. In the rail gap _SG2 , the outer peripheral electrodes 3 are connected to the electrodes of the rare gas-halide excimer laser tube A, respectively.

In the above rare gas-halide excimer laser generator, high pressure is supplied through the input resistor R,
After charging capacitor C, spark gap
Close SG ₁ and pulse charge the pulse shaping circuit PFL. When the pulse charging voltage of the pulse shaping circuit PFL reaches a certain value and the rail gap SG ₂ closes,
A voltage wave reciprocates in the pulse shaping circuit PFL, and a rectangular wave pulse is applied to the rare gas-halide excimer laser tube A to generate an excimer laser in the ultraviolet region.

FIG. 2 is a front cross-sectional view of the pulse shaping circuit, and FIG. 3 is a side view thereof. , each has a structure in which an inner circumferential electrode 2 and an outer circumferential electrode 3 are formed. The electrodes 2 and 3 are typically deposited using techniques applied in the manufacture of ceramic capacitors, for example as baked-on silver electrodes.

Problems with the Prior Art By the way, the impedance Z between the input terminal A and the output terminal B of the pulse shaping circuit, the pulse width τ and the capacitance C at the output terminal B are Z=60(1/√)ln(r2/ r1)Ω τ=2L√/v sec C=0.56εrL/ln(r2/r1)PF However, r1 is the inner diameter of the dielectric ceramic 1 r2 is the outer diameter of the dielectric ceramic 1 L is the length of the dielectric ceramic 1 εr is the relative dielectric constant of the dielectric ceramic 1, and v is the speed of light. As is clear from the above equation τ=2L√/v, the pulse width τ is proportional to the length L of the dielectric ceramic 1 constituting the pulse shaping circuit. Therefore, by adjusting the length L of the dielectric ceramic 1, the pulse width τ can also be adjusted. However, as shown in FIGS. 2 and 3, in a structure using a single piece of dielectric porcelain 1, there is a limit to the length that can be manufactured due to manufacturing technology, and the required length cannot be obtained. There are cases.

As a means to solve this problem, as shown in FIG. If the structure is arranged in the axial direction so as to be conductive, and the length of each dielectric ceramic 1 is reduced, the technical difficulties in manufacturing can be solved, and the number of dielectric ceramics 1 can be reduced in theory. By making an appropriate selection, the substantial length L of the pulse shaping circuit can be adjusted and the pulse width τ can be controlled.

However, in reality, it is technically difficult to connect the inner electrodes 2 and outer electrodes 3 of each dielectric ceramic 1 so that they are electrically conductive. To establish electrical continuity, a cylindrical metal terminal 4 must be fitted to the outside of the outer peripheral electrode 3, as shown in FIG. Due to the difference in the amount of expansion, the metal terminal 4 may peel off, or the dielectric porcelain 1 may be tightened from the entire circumference by the metal terminal 4, resulting in a fatal defect such as damage or cracking. This is because it will be put away. Also on the inner peripheral electrode 2 side, it is necessary to insert the lead terminal 5 which has passed through the through hole, which causes the same problem.

Furthermore, the entire capacitor assembly must be housed in an insulating housing filled with insulating oil, insulating gas, silicone rubber, etc., making the structure extremely complicated and large.

Purpose of the present invention The present invention solves the above-mentioned problems, and makes it possible to connect a plurality of devices in the required number without causing peeling of the electrode terminal or damage or cracking of the dielectric ceramic. Furthermore, it is our intention to provide an ultra-high voltage ceramic capacitor that can be used as is without being housed in an insulating housing, making it possible to simplify and downsize the device, and which is suitable for use in the pulse shaping circuit of an excimer generator. purpose.

Structure of the present invention In order to achieve the above object, the present invention forms an inner circumferential electrode and an outer circumferential electrode on the inner circumferential surface and outer circumferential surface of a dielectric ceramic having a through hole, and the inner circumferential electrode and the outer circumferential electrode A ceramic capacitor in which an electrode extraction terminal is connected to each of the dielectric ceramics and the dielectric ceramic is covered with an insulator, wherein the electrode extraction terminal on the inner electrode side includes an electrode connection terminal and an external connection terminal, The electrode connection terminal has a through hole in the center, and has notches and convex edges formed at intervals on the outer periphery having an outer diameter that matches the inner diameter of the through hole of the dielectric ceramic. The external connection terminal is disposed within the through hole of the dielectric ceramic such that a convex edge is inscribed in the inner peripheral electrode, and the external connection terminal is inserted into the through hole of the electrode connection terminal and both ends of which pass through the through hole of the dielectric porcelain and lead out to the outside;
Threaded portions are provided at both ends, and the insulator connects the through hole of the dielectric porcelain with both ends of the external connection terminal and terminal portions of the electrode extraction terminal on the outer peripheral electrode side protruding outward. It is characterized by filling the inside of the hole and covering the entire outer periphery.

Embodiment FIG. 6 is a front sectional view of a ceramic capacitor according to the present invention, and FIG. 7 is a sectional view taken along line A ₁ -A ₁ in FIG. 6. In the figure, reference numeral 6 denotes a dielectric ceramic having a cylindrical shape and having a through hole 61. The dielectric ceramic 6 is provided with an inner electrode 7 and an outer electrode 8 on substantially the entire inner circumferential surface of the through hole 61 and on substantially the entire outer circumferential surface thereof, respectively. These inner circumference electrode 7 and outer circumference electrode 8 are formed, for example, as baked silver electrodes in the same manner as in conventional ceramic capacitors.

Reference numeral 9 denotes an electrode connecting terminal installed inside the through hole 61 of the dielectric ceramic 6, and its outer peripheral edge is partially inscribed in the inner peripheral electrode 7. In this embodiment, two electrode connection terminals 9 are provided at openings at both ends of the dielectric ceramic 6 in the axial direction. This electrode connection terminal 9
is made of a resilient metal plate material such as phosphor bronze, and as shown in FIGS. 8 and 9, a cylindrical portion 91 is provided in the center to form a through hole 92, and the dielectric material is An appropriate number of notches 93 are formed on the outer peripheral edge of a circular shape that matches the inner diameter of the through hole 61 of the porcelain 6.
It has a structure in which convex edges 94 are formed at intervals. The convex edge 94 is bent in one direction so that the outer diameter in the open state is slightly larger than the inner diameter of the through hole 61 of the dielectric ceramic 6. When the electrode connection terminal 9 is installed inside the through hole 61 of the dielectric ceramic 6, the convex edge 94 is pressed against the inner electrode 7 due to its own spring properties, and is fixed to the inner electrode 7 by soldering. At the same time, a notch 9 is formed between the inner electrode 7 and the inner electrode 7.
3 creates a void.

Reference numeral 11 denotes an external connection terminal which is attached by means such as soldering to a through hole 92 provided approximately at the center of the electrode connection terminal 9, and has a large diameter portion 111 at the middle portion and the above-mentioned portion on the stepped surface. While the electrode connection terminal 9 is locked, the small diameter portions 112 and 113 at both ends pass through the through hole 61 of the dielectric ceramic 6 and are led out from both ends in the axial direction. Threaded portions 114 and 115 are formed at both ends of this external connection terminal 11, respectively. These electrode connection terminals 9 and external connection terminals 11 constitute electrode extraction terminals for the inner peripheral electrodes 7.

Reference numeral 12 denotes an extraction terminal on the outer circumferential electrode side that is attached to one or more parts of the outer circumferential surface of the outer circumferential electrode 8 and is made of a metal plate material such as phosphor bronze, and is adapted to the circumferential surface of the outer circumferential electrode 8. It has a shape having an arc-shaped attachment portion 121 and a terminal portion 122 bent at right angles from the attachment portion 121, and the attachment portion 121 is fixed onto the outer peripheral electrode 8 by soldering.

13 is an external connection terminal 1 constituting an inner electrode terminal
It is an insulator that covers the whole with the terminal portion 122 of the electrode extraction terminal 12 on both ends of the electrode 1 and the outer peripheral electrode 8 side protruding outward, and is made of, for example, a high voltage insulating resin such as epoxy resin. There is.

As mentioned above, the magnetic capacitor according to the present invention is
Since the electrode extraction terminal 12 is attached in one place or in multiple places on the outer peripheral surface of the outer peripheral electrode 8, unlike the case where a cylindrical electrode extraction terminal is used, the electrode extraction terminal 12 and the dielectric body porcelain 6
Even if there is a difference in the amount of thermal contraction and expansion between
will not peel off from the outer peripheral electrode 8, or the dielectric ceramic 6 will not be damaged or cracked.
For this reason, the entire body is covered with an insulator 13, insulating oil,
It is now possible to use the capacitor as it is without storing it in an insulating housing filled with insulating gas or silicone rubber, making it possible to miniaturize and simplify excimer laser generators that use the ceramic capacitor, for example. Can be done.

In addition, in this embodiment, as the structure of the electrode extraction terminal on the inner peripheral electrode 7 side, the through hole 61 of the dielectric ceramic 6
An electrode connecting terminal 9 having a notch 93 and a convex edge 94 is inscribed therein, and the convex edge 9 of the electrode connecting terminal 9
4 is brought into pressure contact with the inner peripheral electrode 7 by its own spring property,
Moreover, since it has a solder-fixed structure, the difference in thermal expansion and contraction between the inner electrode terminal side and the dielectric ceramic 6 is absorbed, preventing peeling of the electrode connecting terminal 9 constituting the inner electrode terminal and dielectric Damage and cracking of the body porcelain 6 is effectively prevented. Furthermore, due to the presence of the notch 93, the insulator 13 is also filled into the through hole 61 of the dielectric ceramic 6 through the notch 93, thereby ensuring a high dielectric strength voltage.

Furthermore, since the external connection terminal 12 is inserted through the center of the electrode connection terminal 9 and protrudes from both sides in the axial direction, the required number can be adjusted by providing screws, etc. at the ends. can be connected in parallel or in series. Therefore, when configuring a pulse shaping circuit in an excimer laser generator, for example, the number of coupled capacitors can be selected and the total length L can be freely set to obtain the required pulse width.

Effects of the present invention As described above, according to the present invention, the following effects can be obtained.

(a) The electrode connection terminal on the inner electrode side has convex edges formed at intervals on the outer circumferential edge having an outer diameter that matches the inner diameter of the through hole of the dielectric ceramic, and the convex edges are connected to the inner electrode. Since it is arranged in the through hole of the dielectric ceramic so as to be inscribed in the electrode, the elastic action of the convex edge acts effectively to absorb the difference in thermal expansion and contraction between the electrode connection terminal and the dielectric ceramic. Thus, it is possible to provide a ceramic capacitor that can prevent peeling of electrode connection terminals and damage and cracking of dielectric ceramics.

(b) Since the insulator fills the inside of the through hole of the dielectric ceramic and covers the entire outer periphery, the insulator does not need to be housed in an insulating housing filled with insulating oil, insulating gas, silicone rubber, etc., and can be used as is. For example, it is possible to provide a ceramic capacitor suitable for downsizing and simplifying an excimer laser generator.

(c) The electrode connection terminal has a through hole in the center and notches are formed at intervals on the outer periphery having an outer diameter that matches the inner diameter of the through hole of the dielectric ceramic. The through hole of the dielectric ceramic is sufficiently filled with the insulator. For this reason,
A ceramic capacitor with high dielectric strength can be provided.

(d) The external connection terminal is inserted into the through hole of the electrode connection terminal, and its both ends are led out through the through hole of the dielectric ceramic, and both ends are provided with threaded parts. , the required number can be connected in parallel or in series by screw connection. For this reason, it is suitable for use in devices that require connecting multiple ultra-high voltage capacitors, such as pulse shaping circuits in excimer laser generators, and in particular devices where impedance (inductance component) is a problem. We can provide porcelain capacitors.

[Brief explanation of the drawing]

Fig. 1 is an electric circuit connection diagram of an excimer laser generator, Fig. 2 is a front sectional view of the pulse shaping circuit, Fig. 3 is a side view thereof, and Fig. 4 is a cross section of another conventional example of the pulse shaping circuit. 5 is a diagram explaining the drawbacks of the pulse shaping circuit shown in FIG. 4, FIG. 6 is a front sectional view of the ceramic capacitor according to the present invention, _{and FIG} . A cross-sectional view, FIG. 8 is a front view of an inner peripheral electrode connection terminal used in a ceramic capacitor according to the present invention, and FIG. 9 is a side view thereof. 6... Dielectric ceramic, 7... Inner circumference electrode, 8... Outer circumference electrode, 9... Electrode connection terminal, 11... External connection terminal, 12... Electrode extraction terminal, 13... Insulator,
61...Through hole.

Claims (1)

[Claims for Utility Model Registration] An inner circumferential electrode and an outer circumferential electrode are formed on the inner circumferential surface and outer circumferential surface of a dielectric ceramic having a through hole, and an electrode extraction terminal is provided on each of the inner circumferential electrode and the outer circumferential electrode. a ceramic capacitor in which the dielectric ceramic is covered with an insulator, the electrode lead-out terminal on the inner circumferential electrode side includes an electrode connection terminal and an external connection terminal, and the electrode connection terminal is connected to the center electrode. A notch and a convex edge are formed at intervals on an outer circumferential edge having a through hole in the portion and an outer diameter matching the inner diameter of the through hole of the dielectric ceramic, and the convex edge is connected to the inner circumferential electrode. The external connection terminal is disposed in the through hole of the dielectric ceramic so as to be inscribed in the through hole of the electrode connection terminal, and the external connection terminal is inscribed in the through hole of the electrode connection terminal, and both ends of the external connection terminal are inscribed in the through hole of the dielectric ceramic. Penetrating through the through hole and leading to the outside,
Threaded portions are provided at both ends, and the insulator connects the through hole of the dielectric porcelain with both ends of the external connection terminal and terminal portions of the electrode extraction terminal on the outer peripheral electrode side protruding outward. A ceramic capacitor characterized by filling the inside of the hole and covering the entire outer periphery.