JPH02197098A - X-ray generator provided with water leak detection means - Google Patents

X-ray generator provided with water leak detection means

Info

Publication number
JPH02197098A
JPH02197098A JP1558889A JP1558889A JPH02197098A JP H02197098 A JPH02197098 A JP H02197098A JP 1558889 A JP1558889 A JP 1558889A JP 1558889 A JP1558889 A JP 1558889A JP H02197098 A JPH02197098 A JP H02197098A
Authority
JP
Japan
Prior art keywords
water
water leak
target
sensor
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1558889A
Other languages
Japanese (ja)
Inventor
Fumihito Saida
齊田 文仁
Kiyoshi Kawatsu
川津 清
Akisuke Takahashi
高橋 章祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON X-RAY KK
Original Assignee
NIPPON X-RAY KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON X-RAY KK filed Critical NIPPON X-RAY KK
Priority to JP1558889A priority Critical patent/JPH02197098A/en
Publication of JPH02197098A publication Critical patent/JPH02197098A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To permit to make sure detection of any water leak by fixing an overflow pipe to the side face of a receiving pan provided opposite a target, and setting a water detecting sensor within the receiving pan at the given height thereof. CONSTITUTION:A receiving pan 1, which is provided opposite a high-speed revolving target, receives and stores leaked cooling water. When stored water 5 reaches a given water level h1 due to the occurrence of a water leak, the water touches a sensor 3 which generates a water leak signal. A water leak detection circuit 9 generates a water leak detection signal according to the signal from the sensor 3, thereby causing an X-ray generation protector 11 to be operated for stopping the generation of electron beams. Then, a buzzer 13 is driven to inform a user of the water leak. When the level of the stored water 5 reaches a position of h2, the water is drained through an overflow pipe 7. Since, in this manner, the water leak is automatically detected for stopping the generation of electron beams to inform the user of the water leak, such misjudgment by human eyes that the conventional method had can be prevented.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はX線発生装置に係わり、特にターゲット冷却水
の漏れ検出をするようにしたX線発生装置に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray generator, and more particularly to an X-ray generator that detects leakage of target cooling water.

〔従来の技術〕[Conventional technology]

第3図は従来のX線発生装置を示す図で、内部を真空状
態に維持されたX線発生装置21内に設けられた電子ビ
ーム発生装置23により電子ビームを発生させ、これを
2000〜3000rpmで回転するターゲット27の
側面に照射する。ターゲット27は例えば銅製であり、
電子ビームの照射によりX線29を発生する。この場合
ターゲット27は電子ビームの照射で、異常な高温にな
るため、第4図に示すようにその内面を冷却水41で冷
却し、高温になって溶融してしまうのを防止している。
FIG. 3 is a diagram showing a conventional X-ray generator, in which an electron beam is generated by an electron beam generator 23 installed in an X-ray generator 21 whose interior is maintained in a vacuum state, and the electron beam is rotated at 2000 to 3000 rpm. The side surface of the target 27 which is rotating is irradiated with the light. The target 27 is made of copper, for example,
X-rays 29 are generated by irradiation with an electron beam. In this case, the target 27 becomes abnormally high in temperature due to the electron beam irradiation, so its inner surface is cooled with cooling water 41 as shown in FIG. 4 to prevent it from reaching a high temperature and melting.

こうして第5財に示すように、ターゲット27から発生
したX線を三方向に取り出し、X線回折装置等において
利用することになる。
In this way, as shown in item 5, the X-rays generated from the target 27 are extracted in three directions and used in an X-ray diffraction device or the like.

ところで、第4図に示すように、ターゲットの内面を冷
却水41で冷却しているため、どうしてもそこから水漏
れが生じてしまう。そこで従来、第3図に示すようにタ
ーゲット27に対向して受け皿31を配置している。こ
の受け皿は、第6図に示すように底面に接続したパイプ
33を装置外に引き出し、漏水を外部に導き出すように
している。従つてパイプ33から放水される水を見て漏
水が生していることを検出することになり、ユーザーは
パイプ33を通して放水が行われたのを見て水漏れが発
生したことを判断し、そのための修理を行っている。
By the way, as shown in FIG. 4, since the inner surface of the target is cooled with cooling water 41, water inevitably leaks from there. Therefore, conventionally, a receiving tray 31 is placed opposite the target 27 as shown in FIG. As shown in FIG. 6, the pipe 33 connected to the bottom of this tray is drawn out of the apparatus, so that leakage water is led to the outside. Therefore, the user detects that a water leak has occurred by looking at the water being discharged from the pipe 33, and the user determines that a water leak has occurred by observing the water being discharged through the pipe 33. Repairs are being made for this purpose.

(発明が解決すべきa!題〕 このように、従来のX線発生装置では、水漏れの判断を
パイプからの放水を見て人間が判断しているので、どう
しても見落としが生じたり、対応が遅れたりして装置内
部への水の進入、ターゲット自身の破損等につながって
しまう欠点があった。
(A!Problem to be solved by the invention) As described above, in conventional X-ray generators, water leaks are determined by humans by looking at the water discharged from the pipe, which inevitably leads to oversights and countermeasures. There was a drawback that the delay could lead to water entering the inside of the device and damage to the target itself.

本発明は上記問題点を解決するためのもので、水漏れを
自動的に検出し、水漏れが検出されるとX線発生装置に
プロテクトをかけてターゲットの破[員を防止し、また
、人間の目による判断ミスを無くし、水漏れを定量的に
判断できることが可能な水皿れ検出手段を備えたX線発
生装置を提供することを目的とする。
The present invention is intended to solve the above problems, and it automatically detects water leakage, protects the X-ray generator when water leakage is detected, and prevents damage to the target. It is an object of the present invention to provide an X-ray generator equipped with a water dish detection means capable of quantitatively determining water leakage while eliminating judgment errors caused by human eyes.

〔課題を解決するための手段] そのために本発明の水漏れ検出手段を備えたX線発生装
置は、内面が冷却水で冷却されると共に、回転駆動され
るターゲットに電子ビームを照射してX線を発生させる
X線発生装置において、ターゲットに対向してオーバー
フロー用パイプを側面に接続した受け皿を配置し、該受
け皿内の底面より所定高さ位置に水検出用のセンサを配
置したことを特徴とする。
[Means for Solving the Problems] To this end, the X-ray generator equipped with the water leak detection means of the present invention has an inner surface cooled with cooling water, and generates X-rays by irradiating an electron beam onto a rotationally driven target. An X-ray generator that generates rays is characterized in that a tray with an overflow pipe connected to the side is arranged facing the target, and a sensor for detecting water is arranged at a predetermined height position from the bottom of the tray. shall be.

〔作用〕[Effect]

本発明は、高速回転するターゲラ1−に対向して設けら
れた受け皿の所定高さ位置に水検出用のセンサを配置し
、水漏れが生して所定水位に達すると、センサにより自
動的に検出し、その検出信号を利用してターゲット照射
用の電子ビームを止め、警告を発し、あるいは水が漏れ
たことをマイクロコンピュータに入力し、マイクロコン
ピュータにより水漏れによる各種データの破壊等を予め
防止することが可能となる。
In the present invention, a sensor for detecting water is arranged at a predetermined height position of a saucer provided opposite to a high-speed rotating targeter 1-, and when water leaks and reaches a predetermined water level, the sensor automatically detects water. The detection signal is used to stop the electron beam for irradiating the target, issue a warning, or input the information that water has leaked into the microcomputer, which prevents the destruction of various data due to water leakage. It becomes possible to do so.

C実施例〕 以下、実施例を図面を参照して説明する。C Example] Examples will be described below with reference to the drawings.

第1図は本発明の水漏れ検出手段を備えたX線発生装置
の構成を示す図で、1は受け皿、3はセンサ、5は溜水
、7はオーバーフロー用パイプ、9は水漏れ検出回路、
11はX線発止プロテクト回路、13はブザー、15は
インクフェース、17はマイクロコンピュータである。
FIG. 1 is a diagram showing the configuration of an X-ray generator equipped with a water leak detection means of the present invention, in which 1 is a saucer, 3 is a sensor, 5 is water storage, 7 is an overflow pipe, and 9 is a water leak detection circuit. ,
11 is an X-ray protection circuit, 13 is a buzzer, 15 is an ink face, and 17 is a microcomputer.

受け皿1は第3図の場合と同様、高速回転するターゲッ
トに対向して設けられ、冷却水の漏水が発生した場合に
これを受けて溜めるようになっている。そして、漏水が
発生し、溜水5が所定水位、例えばhlに達すると、セ
ンサ3に触れて水漏れ信号が発生する。センサ3は、例
えば基板上に所定のパターンが描かれ、漏水によるパタ
ーン間のノヨートを検出するようなものを用いることが
できる。
As in the case of FIG. 3, the receiving tray 1 is provided facing the target rotating at high speed, and is designed to receive and store cooling water when leakage occurs. When a water leak occurs and the stored water 5 reaches a predetermined water level, for example hl, it touches the sensor 3 and a water leak signal is generated. As the sensor 3, for example, a sensor having a predetermined pattern drawn on a substrate and detecting leakage between the patterns due to water leakage can be used.

こうしてセンサ3からの信号により水漏れ検出回路9か
ら水漏れ信号が発生し、X線発住プロテクト11を作動
させ、電子ビームの発生を停止させてターゲットの破損
を防止する。また、ブザー13を駆動させて水漏れを使
用者に知らせ、さらにインタフェース15を介してマイ
クロコンピュータ17に水が漏れたことのデータを送り
、マイクロコンピュータからホストコンピュータに対し
てその信号を送って異常発生を知らせ、ホストコンビエ
ータ側ではそれまでのデータの保護等を図ることができ
る。さらに溜水5の水位がり、の水位に達すると、オー
バーフロー用パイプ7を通して外部に放水されることに
なる。
In this way, a water leak signal is generated from the water leak detection circuit 9 in response to the signal from the sensor 3, and the X-ray emission protector 11 is activated to stop the generation of the electron beam and prevent damage to the target. Additionally, the buzzer 13 is driven to notify the user of the water leak, and data on the water leak is sent to the microcomputer 17 via the interface 15, and the microcomputer sends the signal to the host computer to detect an abnormality. By notifying the occurrence, the host combinator side can protect the data up to that point. When the water level of the stored water 5 further rises to reach the water level, the water is discharged to the outside through the overflow pipe 7.

第2図は本発明の他の実施例を示す図で、オーバーフロ
ー用パイプ7からの放水をセンサ3で検出するようにし
たもので、この放水を検出し、センサ3により第1図の
場合と同様に各種装置を駆動するようにすればよい。
FIG. 2 is a diagram showing another embodiment of the present invention, in which water discharged from an overflow pipe 7 is detected by a sensor 3; Various devices may be driven in the same manner.

〔発明の効果〕〔Effect of the invention〕

以上のように本発明によれば、水漏れが生ずると自動的
に検出され、X線発生装置にプロテクトがかけられて、
電子ビームの発生を防止してターゲットを保護すること
ができ、また、ブザー等で水漏れを使用者に知らせるこ
とができるので、従来のように人間の目による判断ミス
を防止することができ、さらに受け皿内にセンサを配置
するものにあっては水検出センサの位置、またオーバー
フロー用バイブの放出口に水検出センサを配置するもの
にあっては受け皿のバ・イブ接続位置により水漏れを定
量的に判断することが可能となる。
As described above, according to the present invention, when a water leak occurs, it is automatically detected, the X-ray generator is protected,
It is possible to protect the target by preventing the generation of electron beams, and it is also possible to notify the user of water leaks with a buzzer, etc., so it is possible to prevent judgment errors made by the human eye as in the past. Furthermore, water leakage is determined by the position of the water detection sensor in the case where the sensor is placed inside the tray, and by the connection position of the vibrator in the tray in the case where the water detection sensor is placed at the outlet of the overflow vibrator. It becomes possible to make an accurate judgment.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の水漏れ検出手段を備えたX線発生装置
の構成を示す図、第2図は本発明の他の実施例を示す図
、第3図は従来のX線発生装置を示す図、第4図はター
ゲットの冷却を説明するための図、第5図はX線発生装
置からのX線取り出しの様子を示す図、第6図は従来の
受け皿を示す図である。 1・・・受け皿、3・・・センサ、5・・・溜水、7・
・・オーバーフロー用パイプ、9・・・水漏れ検出回路
、11・・・X線発生プロテクト回路、13・・・ブザ
ー、15・・・インタフェース、17・・・マイクロコ
ンピュータ。 出  願  人  日本エックス線株式会社代理人 弁
理士  蛭 川 昌 信(外5名)第2 3〜C=コ
FIG. 1 is a diagram showing the configuration of an X-ray generator equipped with a water leak detection means of the present invention, FIG. 2 is a diagram showing another embodiment of the present invention, and FIG. 3 is a diagram showing a conventional X-ray generator. FIG. 4 is a diagram for explaining cooling of the target, FIG. 5 is a diagram showing how X-rays are taken out from the X-ray generator, and FIG. 6 is a diagram showing a conventional receiving tray. 1... saucer, 3... sensor, 5... stored water, 7.
... Overflow pipe, 9... Water leak detection circuit, 11... X-ray generation protection circuit, 13... Buzzer, 15... Interface, 17... Microcomputer. Applicant: Japan

Claims (1)

【特許請求の範囲】[Claims] (1)内面が冷却水で冷却されると共に、回転駆動され
るターゲットに電子ビームを照射してX線を発生させる
X線発生装置において、ターゲットに対向してオーバー
フロー用パイプを側面の所定高さ位置に接続した受け皿
を配置し、該受け皿内の底面よりある高さ位置、或いは
オーバーフロー用パイプの放出口に水検出用のセンサを
配置したことを特徴とする水漏れ検出手段を備えたX線
発生装置。
(1) In an X-ray generator that generates X-rays by irradiating an electron beam onto a rotatably driven target whose inner surface is cooled by cooling water, the overflow pipe is placed at a predetermined height on the side facing the target. An X-ray device equipped with water leakage detection means, characterized in that a water leak detection means is arranged, and a water detection sensor is arranged at a certain height from the bottom of the tray, or at a discharge port of an overflow pipe. Generator.
JP1558889A 1989-01-25 1989-01-25 X-ray generator provided with water leak detection means Pending JPH02197098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1558889A JPH02197098A (en) 1989-01-25 1989-01-25 X-ray generator provided with water leak detection means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1558889A JPH02197098A (en) 1989-01-25 1989-01-25 X-ray generator provided with water leak detection means

Publications (1)

Publication Number Publication Date
JPH02197098A true JPH02197098A (en) 1990-08-03

Family

ID=11892887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1558889A Pending JPH02197098A (en) 1989-01-25 1989-01-25 X-ray generator provided with water leak detection means

Country Status (1)

Country Link
JP (1) JPH02197098A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1632979A3 (en) * 2004-07-15 2006-04-12 Rigaku Corporation Rotating anode X-Ray tube and X-Ray generator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1632979A3 (en) * 2004-07-15 2006-04-12 Rigaku Corporation Rotating anode X-Ray tube and X-Ray generator
US7197117B2 (en) 2004-07-15 2007-03-27 Rigaku Corporation Rotating anode X-ray tube and X-ray generator

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