JPH02186586A - Formation of oxidation-resistant coating on sic heating body - Google Patents

Formation of oxidation-resistant coating on sic heating body

Info

Publication number
JPH02186586A
JPH02186586A JP483789A JP483789A JPH02186586A JP H02186586 A JPH02186586 A JP H02186586A JP 483789 A JP483789 A JP 483789A JP 483789 A JP483789 A JP 483789A JP H02186586 A JPH02186586 A JP H02186586A
Authority
JP
Japan
Prior art keywords
sic
source
silica
oxidation
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP483789A
Other languages
Japanese (ja)
Other versions
JP2727342B2 (en
Inventor
Tatsuo Nozawa
野沢 辰雄
Taku Haneda
羽田 卓
Atsuo Kitazawa
北沢 厚男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP483789A priority Critical patent/JP2727342B2/en
Publication of JPH02186586A publication Critical patent/JPH02186586A/en
Application granted granted Critical
Publication of JP2727342B2 publication Critical patent/JP2727342B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To prevent breakage by specifying SiC, a silica source material, a source of K, and a source of Al to let them included in the surface of SiC, and heating to form a film. CONSTITUTION:SiC of an average grain diameter of less than 1mum, a material to be a silica source, a material to be Al2O3, and an alkali metal are mixed and applied or impregnated in the surface of SiC, so 35-50% SiC, 15-35% silica- conversion of the material to be the silica source, 5-15% K source, and 1-10% Al source are included. The applied coating materials are then heated up to more than 1300 deg.C by self heat generation to form a film 2 strongly. Breakage is thus eliminated, and the life can be long.

Description

【発明の詳細な説明】 産業上の利用分野 この発明はSiC発熱体の耐酸化性コーティングの形成
方法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention This invention relates to a method of forming an oxidation-resistant coating on a SiC heating element.

従来の技術 SiC発熱体は簡便な熱源として各種工業において、酸
化物、ガラス等の溶解、加熱、焼成等の処理に幅広く使
用されている。
BACKGROUND OF THE INVENTION SiC heating elements are widely used as a simple heat source in various industries for melting, heating, firing, etc. of oxides, glass, etc.

発明が解決しようとする課題 SiC発熱体は非酸化物であるために、酸化に対して弱
い面があり、特に高温で発熱する発熱部では、酸化によ
り生成されるシリカとSiCの熱膨張差により、マイク
ロクラックが発生して折損に至り、ライフが短かかった
Problems to be Solved by the Invention Since SiC heating elements are non-oxides, they are vulnerable to oxidation, and in particular in heat generating parts that generate heat at high temperatures, due to the difference in thermal expansion between silica and SiC produced by oxidation. , microcracks occurred, resulting in breakage, resulting in a short life.

発明の目的 この発明は、折損を生じないSiC発熱体の耐酸化性コ
ーティングの形成方法を提供することを目的とする。
OBJECTS OF THE INVENTION It is an object of the present invention to provide a method for forming an oxidation-resistant coating on a SiC heating element that does not cause breakage.

発明の要旨 本発明は請求項に記載のSiC発熱体の耐酸化性コーテ
ィングの形成方法を要旨としている。
SUMMARY OF THE INVENTION The present invention is directed to a method of forming an oxidation-resistant coating on a SiC heating element as set forth in the claims.

課題を解決するための手段 本発明は、SiCの表面に平均粒径1μm以下のS i
 C,シリカ源となる物質、AJO3となる物質、アル
カリ金属を混合して塗布あるいは含浸させ、SiCを3
5〜50%、シリカ源となる物質をシリカ換算で15〜
35%、K源を5〜15%、Al源を1〜10%含有さ
せ、この塗布したコーティング材料を不活性雰囲気中で
1000℃以上の温度で焼結させる、あるいは自己発熱
により1300℃以上に発熱させて被膜を強固に形成さ
せることを特徴とする。本発明の要旨はSiC+シリカ
にカリウム源を添加して融点を下げることにより一旦均
−な膜を形成させ、さらに添加したA/源と反応させる
ことによりガラス層からカリウム・アルミニウム・シリ
ケートを形成させ、膜の強度を向」ニさせ且つ、熱膨張
をSiCに近づけることを特徴としている。
Means for Solving the Problems The present invention provides SiC with an average particle diameter of 1 μm or less on the surface of SiC.
C, a substance that becomes a silica source, a substance that becomes AJO3, and an alkali metal are mixed and coated or impregnated to form SiC 3.
5-50%, silica source material 15-50% in terms of silica
The applied coating material is sintered at a temperature of 1000°C or higher in an inert atmosphere, or heated to 1300°C or higher by self-heating. It is characterized by generating heat to form a strong coating. The gist of the present invention is to form a uniform film by adding a potassium source to SiC + silica to lower the melting point, and then to form potassium aluminum silicate from the glass layer by reacting with the added A/source. It is characterized by improving the strength of the film and bringing the thermal expansion closer to that of SiC.

SiCの粒度を1−μm以下に限定するのは、焼結時に
酸化を進行させ易くすることにより、シリカとSiCと
の結合を強固にするためである。
The reason why the particle size of SiC is limited to 1-μm or less is to facilitate the progress of oxidation during sintering, thereby strengthening the bond between silica and SiC.

アルカリ源を混合させるのは、シリカの融点が1800
℃以」二であり、13006C程度の温度ではコーティ
ングが施されないからである。SiCが35%より少な
いとシリカが過剰になりヒートサイクルでコーテイング
膜にクラックが入ることにより好ましくない。
The reason for mixing the alkali source is that the melting point of silica is 1800.
This is because the coating is not applied at a temperature of about 13006C. If the SiC content is less than 35%, the silica content will be excessive and the coating film will crack during heat cycles, which is undesirable.

SiCが50%より多いと膜中のガラス分が少なくなり
良好な膜が得られないことにより好ましくない。
If the SiC content exceeds 50%, the glass content in the film decreases, making it impossible to obtain a good film, which is not preferable.

シリカ源がシリカ換算て」−5%より少ないと膜の強度
が低下することにより好ましくない。またシリカ源が3
5%より多いと膜の熱膨張が本体よりも20%以」二低
くなることにより好ましくない。Al源が1%より少な
いと膜の融点が1000 ’C以下に低下し、通常使用
で発泡することにより好ましくない。Al源が10%よ
り多いと膜の融点が1750℃以上になり、均一な膜を
形成することが困難になることにより好ましくない。K
源が5%より少ないと膜の融点に対して効果が小さくな
り、加熱してもコーテイング膜が均一に分散しないこと
により好ましくない。K源が15%より多いと過剰のK
がSiCを腐食しSiCの組織を破壊せしめることによ
り好ましくない。
If the silica source is less than -5% in terms of silica, the strength of the membrane decreases, which is undesirable. Also, the silica source is 3
If it is more than 5%, the thermal expansion of the membrane becomes 20% or more lower than that of the main body, which is not preferable. If the Al source is less than 1%, the melting point of the film will drop below 1000'C, which is undesirable as it will foam during normal use. If the Al source is more than 10%, the melting point of the film will be 1750° C. or higher, making it difficult to form a uniform film, which is not preferable. K
If the amount of source is less than 5%, the effect on the melting point of the film will be small, and the coating film will not be uniformly dispersed even when heated, which is undesirable. Excess K if the K source is more than 15%
is undesirable because it corrodes SiC and destroys the structure of SiC.

間接加熱あるいは自己発熱温度が130000より低い
温度であると、シリカおよびKからなるガラス成分がA
lと反応し難いことから好ましくない。
If the indirect heating or self-heating temperature is lower than 130,000, the glass component consisting of silica and K
It is not preferable because it is difficult to react with l.

本発明によりコーティングを施したSiC発熱体は第1
図に示した。発熱部1は再結晶SiCからなり、耐酸化
性コーティング2が施されている。端子部3はコーティ
ングされてない。
The SiC heating element coated according to the present invention is first
Shown in the figure. The heat generating part 1 is made of recrystallized SiC and is coated with an oxidation-resistant coating 2. The terminal portion 3 is not coated.

本発明の方法により得られた具体的な実施例を表−1に
示す。
Table 1 shows specific examples obtained by the method of the present invention.

本発明により形成された耐酸化性コーティングを有する
SiC発熱体と従来のSiC発熱体についてライフテス
トした結果を表−2に示す。このライフテストは、大気
中で1200℃で500時間連続的に通電させた場合の
抵抗増加率を測定している。抵抗増加率が太きいとライ
フが短いことは既に知られている。表−2では本発明の
方法によりコーティングを形成した実施例は従来例のも
のより4倍以上ライフがのびたことが確認された。
Table 2 shows the results of a life test on a SiC heating element having an oxidation-resistant coating formed according to the present invention and a conventional SiC heating element. This life test measures the resistance increase rate when electricity is continuously applied for 500 hours at 1200° C. in the atmosphere. It is already known that the higher the resistance increase rate, the shorter the life. In Table 2, it was confirmed that the life of the examples in which coatings were formed by the method of the present invention was four times longer than that of the conventional examples.

発明の詳細 な説明したように、本発明によればコ ティングしない従来SiC発熱体に比べてライフを4倍
以上に長くすることができる。
As described in detail, according to the present invention, the life can be extended by more than four times as compared to the conventional SiC heating element without coating.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は耐酸化性コーティングの施されたSiC発熱体
の実施例を示す図である。 1・・・発熱部 2・・・コーティング 代  理  人   弁理士   1) 辺   徹表
FIG. 1 shows an example of a SiC heating element provided with an oxidation-resistant coating. 1...Heating part 2...Coating agent Patent attorney 1) Toruyoshi side

Claims (1)

【特許請求の範囲】 SiCの表面に平均粒径1μm以下のSi C、シリカ源となる物質、Al_2O_3となる物質、
アルカリ金属を混合して塗布あるいは含浸させ、SiC
を35〜50%、シリカ源となる物質をシリカ換算で1
5〜35%、K源を5〜15%、Al源を1〜10%含
有させ、間接加熱あるいは自己発熱により1300℃以
上に加熱させて被膜を強固に形成させることを特徴とす
るSiC発熱体の耐酸化性コーティングの形成方法。
[Claims] SiC with an average particle size of 1 μm or less on the surface of SiC, a substance that becomes a silica source, a substance that becomes Al_2O_3,
SiC is coated or impregnated with an alkali metal mixture.
35 to 50%, and the silica source substance is converted to 1 silica.
5 to 35%, a K source of 5 to 15%, and an Al source of 1 to 10%, and is heated to 1300°C or higher by indirect heating or self-heating to form a strong film. Method of forming oxidation-resistant coatings.
JP483789A 1989-01-13 1989-01-13 Method for forming oxidation-resistant coating on SiC heating element Expired - Fee Related JP2727342B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP483789A JP2727342B2 (en) 1989-01-13 1989-01-13 Method for forming oxidation-resistant coating on SiC heating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP483789A JP2727342B2 (en) 1989-01-13 1989-01-13 Method for forming oxidation-resistant coating on SiC heating element

Publications (2)

Publication Number Publication Date
JPH02186586A true JPH02186586A (en) 1990-07-20
JP2727342B2 JP2727342B2 (en) 1998-03-11

Family

ID=11594805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP483789A Expired - Fee Related JP2727342B2 (en) 1989-01-13 1989-01-13 Method for forming oxidation-resistant coating on SiC heating element

Country Status (1)

Country Link
JP (1) JP2727342B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0481957U (en) * 1990-11-26 1992-07-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0481957U (en) * 1990-11-26 1992-07-16

Also Published As

Publication number Publication date
JP2727342B2 (en) 1998-03-11

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