JPH0217844U - - Google Patents

Info

Publication number
JPH0217844U
JPH0217844U JP9537788U JP9537788U JPH0217844U JP H0217844 U JPH0217844 U JP H0217844U JP 9537788 U JP9537788 U JP 9537788U JP 9537788 U JP9537788 U JP 9537788U JP H0217844 U JPH0217844 U JP H0217844U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
storage box
substrate storage
side plates
conductive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9537788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9537788U priority Critical patent/JPH0217844U/ja
Publication of JPH0217844U publication Critical patent/JPH0217844U/ja
Pending legal-status Critical Current

Links

JP9537788U 1988-07-18 1988-07-18 Pending JPH0217844U (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9537788U JPH0217844U (fi) 1988-07-18 1988-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9537788U JPH0217844U (fi) 1988-07-18 1988-07-18

Publications (1)

Publication Number Publication Date
JPH0217844U true JPH0217844U (fi) 1990-02-06

Family

ID=31320035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9537788U Pending JPH0217844U (fi) 1988-07-18 1988-07-18

Country Status (1)

Country Link
JP (1) JPH0217844U (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454806U (fi) * 1990-09-18 1992-05-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454806U (fi) * 1990-09-18 1992-05-11

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