JPH0217557U - - Google Patents
Info
- Publication number
- JPH0217557U JPH0217557U JP9700088U JP9700088U JPH0217557U JP H0217557 U JPH0217557 U JP H0217557U JP 9700088 U JP9700088 U JP 9700088U JP 9700088 U JP9700088 U JP 9700088U JP H0217557 U JPH0217557 U JP H0217557U
- Authority
- JP
- Japan
- Prior art keywords
- washing tank
- water flow
- cascade
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9700088U JPH0217557U (pt) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9700088U JPH0217557U (pt) | 1988-07-22 | 1988-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217557U true JPH0217557U (pt) | 1990-02-05 |
Family
ID=31322180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9700088U Pending JPH0217557U (pt) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217557U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002093764A (ja) * | 2000-09-11 | 2002-03-29 | Nisso Engineering Co Ltd | ウエハ洗浄装置 |
-
1988
- 1988-07-22 JP JP9700088U patent/JPH0217557U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002093764A (ja) * | 2000-09-11 | 2002-03-29 | Nisso Engineering Co Ltd | ウエハ洗浄装置 |
| JP4565718B2 (ja) * | 2000-09-11 | 2010-10-20 | アプリシアテクノロジー株式会社 | ウエハ洗浄装置 |