JPH0217553U - - Google Patents
Info
- Publication number
- JPH0217553U JPH0217553U JP9549688U JP9549688U JPH0217553U JP H0217553 U JPH0217553 U JP H0217553U JP 9549688 U JP9549688 U JP 9549688U JP 9549688 U JP9549688 U JP 9549688U JP H0217553 U JPH0217553 U JP H0217553U
- Authority
- JP
- Japan
- Prior art keywords
- revolving
- revolving member
- axis
- jig
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988095496U JPH0734928Y2 (ja) | 1988-07-19 | 1988-07-19 | 処理物保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988095496U JPH0734928Y2 (ja) | 1988-07-19 | 1988-07-19 | 処理物保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0217553U true JPH0217553U (US20020051482A1-20020502-M00057.png) | 1990-02-05 |
| JPH0734928Y2 JPH0734928Y2 (ja) | 1995-08-09 |
Family
ID=31320164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988095496U Expired - Lifetime JPH0734928Y2 (ja) | 1988-07-19 | 1988-07-19 | 処理物保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734928Y2 (US20020051482A1-20020502-M00057.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005290425A (ja) * | 2004-03-31 | 2005-10-20 | Tdk Corp | スパッタ蒸着装置における基板の回転機構 |
| CN112964277A (zh) * | 2021-03-05 | 2021-06-15 | 中国电子科技集团公司第四十八研究所 | 一种石英谐振子修平设备的多工位工件台 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10109517B1 (en) | 2018-01-10 | 2018-10-23 | Lam Research Corporation | Rotational indexer with additional rotational axes |
| TW201946214A (zh) | 2018-04-28 | 2019-12-01 | 美商應用材料股份有限公司 | 用於旋轉料架處理腔室的原位晶圓旋轉 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
-
1988
- 1988-07-19 JP JP1988095496U patent/JPH0734928Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005290425A (ja) * | 2004-03-31 | 2005-10-20 | Tdk Corp | スパッタ蒸着装置における基板の回転機構 |
| CN112964277A (zh) * | 2021-03-05 | 2021-06-15 | 中国电子科技集团公司第四十八研究所 | 一种石英谐振子修平设备的多工位工件台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734928Y2 (ja) | 1995-08-09 |
