JPH0217551U - - Google Patents
Info
- Publication number
- JPH0217551U JPH0217551U JP9382288U JP9382288U JPH0217551U JP H0217551 U JPH0217551 U JP H0217551U JP 9382288 U JP9382288 U JP 9382288U JP 9382288 U JP9382288 U JP 9382288U JP H0217551 U JPH0217551 U JP H0217551U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- target
- plane
- film forming
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9382288U JPH0217551U (enExample) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9382288U JPH0217551U (enExample) | 1988-07-15 | 1988-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217551U true JPH0217551U (enExample) | 1990-02-05 |
Family
ID=31318299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9382288U Pending JPH0217551U (enExample) | 1988-07-15 | 1988-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217551U (enExample) |
-
1988
- 1988-07-15 JP JP9382288U patent/JPH0217551U/ja active Pending