JPH02170922A - Manufacture of fe-ni alloy sheet for shadow mask - Google Patents
Manufacture of fe-ni alloy sheet for shadow maskInfo
- Publication number
- JPH02170922A JPH02170922A JP32364588A JP32364588A JPH02170922A JP H02170922 A JPH02170922 A JP H02170922A JP 32364588 A JP32364588 A JP 32364588A JP 32364588 A JP32364588 A JP 32364588A JP H02170922 A JPH02170922 A JP H02170922A
- Authority
- JP
- Japan
- Prior art keywords
- rolled
- alloy
- rolling
- shadow mask
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 229910000990 Ni alloy Inorganic materials 0.000 title description 5
- 238000010438 heat treatment Methods 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 26
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 20
- 239000000956 alloy Substances 0.000 claims abstract description 20
- 238000000137 annealing Methods 0.000 claims abstract description 20
- 238000005098 hot rolling Methods 0.000 claims abstract description 17
- 238000002791 soaking Methods 0.000 claims abstract description 16
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 15
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 15
- 238000005097 cold rolling Methods 0.000 claims abstract description 8
- 238000001953 recrystallisation Methods 0.000 claims abstract description 8
- 238000000227 grinding Methods 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 abstract description 21
- 238000005096 rolling process Methods 0.000 abstract description 9
- 239000000203 mixture Substances 0.000 abstract description 3
- 230000003750 conditioning effect Effects 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000005204 segregation Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000009749 continuous casting Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000011120 plywood Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910002555 FeNi Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 208000009205 Tinnitus Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B3/00—Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
- B21B3/02—Rolling special iron alloys, e.g. stainless steel
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Heat Treatment Of Steel (AREA)
- Heat Treatment Of Sheet Steel (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はカラーブラウン管内で使用されるシャドウマス
ク用Fe−Ni合金板、特にシャドウマスクの製造工程
においてエツチング時に発生するスジムラを抑制し、か
つ作業性および歩留を改善したシャドウマスク用re−
Ni合合板の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention is an Fe-Ni alloy plate for a shadow mask used in a color cathode ray tube, in particular, suppresses streak unevenness that occurs during etching in the shadow mask manufacturing process, and Shadow mask re- with improved workability and yield
The present invention relates to a method for manufacturing Ni plywood.
カラーブラウン管シャドウマスク用素材として−iに低
炭素鋼が使用されている。カラーブラウン管は真空管を
形成するガラスバルブのフェースプレート部(パネル)
に赤、緑、青の3原色を発する蛍光膜が塗布されており
、反対側のネック部には蛍光膜を刺激発光さゼるための
電子ビームを発射する電子銃を備えている。シャドウマ
スクは、蛍光面と電子銃の間の蛍光面に近い位置に設け
られており、電子銃から発する3原色に対応する3本の
電子ビームを、スロフトと呼ばれるイしに通過させて各
々対応する蛍光体のみに当たるような色選別機能を果た
しているものである。従ってシャドウマスク上のスロフ
トと蛍光体の位置関係が正確に合っている必要がある。Low carbon steel is used in -i as a material for color cathode ray tube shadow masks. A color cathode ray tube is the faceplate part (panel) of a glass bulb that forms a vacuum tube.
A fluorescent film that emits the three primary colors of red, green, and blue is coated on the top, and the neck on the opposite side is equipped with an electron gun that fires an electron beam to stimulate the fluorescent film to emit light. The shadow mask is installed near the phosphor screen between the phosphor screen and the electron gun, and allows the three electron beams corresponding to the three primary colors emitted from the electron gun to pass through an object called a sloft, each corresponding to a different one. It performs a color selection function that applies only to the phosphors that are used. Therefore, it is necessary that the sloft on the shadow mask and the phosphor have an accurate positional relationship.
しかし、カラーブラウン管を連続使用する場合、電子ビ
ームのエネルギーのうち約80%がシャドウマスク上で
熱エネルギーとして消費されるため、シャドウマスクの
温度は局部的に90℃程度まで上昇し熱膨張により電子
ビームと蛍光体の一敗が得られなくなり、画像が不鮮明
になる。However, when a color cathode ray tube is used continuously, about 80% of the energy of the electron beam is consumed as thermal energy on the shadow mask, so the temperature of the shadow mask locally rises to about 90 degrees Celsius, causing the electrons to expand due to thermal expansion. The beam and phosphor will no longer be able to match, and the image will become unclear.
このため、カラーブラウン管の構造を工夫してシャドウ
マスクの熱膨張を補償することが行われているが十分で
ない。For this reason, efforts have been made to compensate for the thermal expansion of the shadow mask by modifying the structure of the color cathode ray tube, but this is not sufficient.
そこで、近年シャドウマスク用素材として熱膨張係数が
低炭素鋼に比べて極めて小さい、30〜50%Niの低
熱膨張Fe−Ni合金板が使用されつつある。Therefore, in recent years, a low thermal expansion Fe--Ni alloy plate containing 30 to 50% Ni, which has an extremely small thermal expansion coefficient compared to low carbon steel, has been used as a material for shadow masks.
しかしながら、シャドウマスクの製造工程においてこの
ようなFe−Ni合金板をエツチングにより穿孔すると
、圧延方向に沿うスジ状の模様、すなわちスジムラと呼
ばれる不良が発生ずることがある。However, when such a Fe--Ni alloy plate is etched in the process of manufacturing a shadow mask, a defect called stripe-like pattern, that is, a stripe-like pattern along the rolling direction, may occur.
従って、カラーブラウン管内で使用されるシャドウマス
ク用Fe−Ni合金板、特にシャドウマスクの製造工程
においてエツチング時に発生するスジムラを抑制したシ
ャドウマスク用Pe−Ni合金板を製造する方法が強(
要望されている。Therefore, there is a strong need for a method of manufacturing a Fe-Ni alloy plate for shadow masks used in color cathode ray tubes, especially a Pe-Ni alloy plate for shadow masks that suppresses the uneven streaks that occur during etching in the manufacturing process of shadow masks.
It is requested.
スジムラの発生原因としては成分偏析が最も支配的であ
ると言われており、Fe−Ni合金板の成分偏析軽減方
法として、熱間圧延板にてソーキング熱処理を行いNi
の偏析を軽減してエツチング穿孔性を改善する方法が特
開昭60−56053号公報に開示されているが、歩留
や作業性の点で問題がある。It is said that component segregation is the most dominant cause of uneven streaks, and as a method to reduce component segregation in Fe-Ni alloy sheets, soaking heat treatment is performed on hot-rolled sheets to reduce Ni.
JP-A-60-56053 discloses a method for improving etching perforation by reducing the segregation of .However, there are problems in terms of yield and workability.
Fe−Ni合金は高温長時間の大気加熱をすると、表層
スケール直下に粒界酸化や内部酸化等のサブスケールが
著しく発生するため、熱間圧延板でソーキング熱処理を
行うことはサブスケールによる表面疵が多発し、歩留や
作業性を大幅に劣化させる。一方、サブスケールの抑制
の点から熱処理温度を低温化し、または時間を短くして
行うと、Niの拡散が不充分となり成分偏析起因のスジ
ムラが発生する
本発明は、カラーブラウン管内で使用されるシャドウマ
スク用Fe−Ni合金板、特にシャドウマスクの製造工
程においてエツチング時に発生するスジムラを抑制し、
かつサブスケールによる表面疵除去のための表面研削の
作業性および薄板製品の歩留を改善し、工業的規模でシ
ャドウマスク用FeNi合金板を安定装造する方法を捉
供することを目的としている。When Fe-Ni alloys are heated in the atmosphere at high temperatures and for long periods of time, subscales such as grain boundary oxidation and internal oxidation occur significantly just below the surface scale, so soaking heat treatment on hot-rolled sheets is not recommended to avoid surface defects caused by subscales. occurs frequently, significantly deteriorating yield and workability. On the other hand, if the heat treatment temperature is lowered or the heat treatment time is shortened from the viewpoint of subscale suppression, Ni diffusion will be insufficient and streaks will occur due to component segregation.The present invention is used in color cathode ray tubes. Fe-Ni alloy plates for shadow masks, especially suppressing uneven streaks that occur during etching in the shadow mask manufacturing process,
The present invention also aims to improve the workability of surface grinding for removing subscale surface defects and the yield of thin sheet products, and to provide a method for stably assembling FeNi alloy sheets for shadow masks on an industrial scale.
本発明は、この目的のために製造工程および条件を種々
検討した結果、達成したもので、その要旨とするところ
は下記のとおりである。The present invention was achieved as a result of various studies on manufacturing processes and conditions for this purpose, and the gist thereof is as follows.
(1)重量%にて、Ni : 30〜50%、 Si
: 0.01〜1.00%、 Mn : 0.1
0 〜2.00% 、八l: 0.05%以下。(1) In weight%, Ni: 30-50%, Si
: 0.01~1.00%, Mn: 0.1
0 to 2.00%, 8l: 0.05% or less.
o:o、o2%以下、残部Feおよび不可避的不純物か
らなるFe−Ni合金の連続鋳造スラブに、1200〜
1350℃で1時間以上のソーキング熱処理を行った後
、表面手入れを行い、ついで酸素濃度0.1νo1%以
下の雰囲気にて1100〜1200″Cに加熱し、熱間
圧延し、表面研削と冷間圧延を行い、再結晶焼鈍するこ
とを特徴とするシャドウマスク用Fe−Ni合金板の製
造方法。o: o, 1200 ~
After soaking heat treatment at 1350℃ for 1 hour or more, the surface is treated, then heated to 1100-1200''C in an atmosphere with an oxygen concentration of 0.1νo1% or less, hot rolled, surface ground and cold rolled. A method for producing a Fe-Ni alloy plate for a shadow mask, which comprises rolling and recrystallization annealing.
(2)重量%にて、Ni : 30〜50%、 Si
: 0.01〜1.00%、 Mn : 0.10〜2
.00%、N:0.05%、At: 0.05%以下O
: 0.02%以下、残部Feおよび不可避的不純物か
らなるFe−Ni合金の連続鋳造スラブに、1200〜
1350″Cで1時間以上のソーキング熱処理を行った
後、表面手入れを行い、ついで酸素濃度0、I vo1
%以下の雰囲気にて1100〜1200℃に加熱し、熱
間圧延し、表面研削と冷間圧延を行い、再結晶焼鈍し、
ダルスキンバス圧延を行い、ついで非酸化性雰囲気にて
550〜750℃で1〜300秒の歪取り焼鈍を行うこ
とを特徴とするシャドウマスク用Fe−Ni合合板板製
造方法。(2) In weight%, Ni: 30-50%, Si
: 0.01~1.00%, Mn: 0.10~2
.. 00%, N: 0.05%, At: 0.05% or less O
: Continuous casting slab of Fe-Ni alloy consisting of 0.02% or less, balance Fe and inevitable impurities, 1200~
After performing soaking heat treatment at 1350″C for more than 1 hour, surface care was performed, and then oxygen concentration 0, I vo1
% or less, heated to 1100-1200°C, hot rolled, surface ground and cold rolled, recrystallized annealed,
A method for producing a Fe--Ni plywood board for a shadow mask, which comprises performing dull skin bath rolling and then performing strain relief annealing at 550 to 750°C for 1 to 300 seconds in a non-oxidizing atmosphere.
本発明の限定理由を以下に詳細に説明する。 The reasons for the limitations of the present invention will be explained in detail below.
Niは、その含有量が30%より少ないと熱膨張係数が
極めて高くなり、カラーブラウン管の鮮映性が劣化する
。一方、50%を超えて含有しても熱膨張係数は高くな
る。従って、Niの成分範囲を30〜50%とした。If the content of Ni is less than 30%, the thermal expansion coefficient becomes extremely high and the image clarity of the color cathode ray tube deteriorates. On the other hand, even if the content exceeds 50%, the coefficient of thermal expansion increases. Therefore, the Ni component range was set to 30 to 50%.
Siは、脱酸目的で添加するが、0.01%未満である
と脱酸の効果が少ないが、1.00%を超えて含有する
と、シリケート系の粗大介在物の形成が著しく、これが
エツチング穿孔性を阻害し穿孔不良の原因となる。従っ
て、Siの成分範囲は0.01〜1.00%とした。Si is added for the purpose of deoxidizing, but if it is less than 0.01%, the deoxidizing effect will be small, but if it is more than 1.00%, the formation of coarse silicate inclusions will be significant, and this will cause etching. It inhibits perforation and causes poor perforation. Therefore, the Si component range was set to 0.01 to 1.00%.
Mnは、脱酸および熱間加工性向上の目的で添加するが
、0.10%より少ないと効果がなく、2.00%を超
えて含有すると合金の強度が増加し、プレス成形性が劣
化する。従って、Mnの成分範囲は0.10〜2.00
%とした。Mn is added for the purpose of deoxidizing and improving hot workability, but if it is less than 0.10% it has no effect, and if it is contained more than 2.00%, the strength of the alloy increases and press formability deteriorates. do. Therefore, the component range of Mn is 0.10 to 2.00.
%.
八!は、その含有量が0.05%を超えると、アルミナ
系のクラスター状介在物の形成が著しく、これがエツチ
ング穿孔性を阻害し穿孔不良の原因となる。従って、八
!の成分範囲は0905%以下とした。Eight! When the content exceeds 0.05%, the formation of alumina-based cluster inclusions is significant, which impedes etching performance and causes poor drilling. Therefore, eight! The component range was set to 0905% or less.
0は、その含有量が0.02%を超えると、酸化物系の
介在物の形成が著しく、これがエツチング穿孔性を阻害
し穿孔不良の原因となる。従って、0の成分範囲は0.
02%以下とした。When the content of 0 exceeds 0.02%, oxide-based inclusions are formed significantly, which inhibits etching performance and causes poor drilling. Therefore, the component range of 0 is 0.
0.02% or less.
スラブのソーキング熱処理温度は、1200℃より低温
ではNi等の成分偏析を軽減する効果が小さくてエツチ
ング時にスジムラの発生を抑制できず、1350℃を超
えるとサブスケールの発生が著しくなり、雰囲気中の酸
素濃度を低減してもサブスケールの発生はほとんど改善
されない。従って、ソーキング熱処理温度の範囲は12
00〜1350℃とした。When the soaking heat treatment temperature of the slab is lower than 1200℃, the effect of reducing the segregation of components such as Ni is small, and the generation of uneven streaks cannot be suppressed during etching. Even if the oxygen concentration is reduced, the occurrence of subscales will hardly be improved. Therefore, the soaking heat treatment temperature range is 12
The temperature was 00 to 1350°C.
ソーキング熱処理時間は、1時間より短時間で行うとN
i等の成分偏析を軽減する効果が小さくエツチング時に
スジムラの発生を抑制できない。従って、ソーキング熱
処理時間は1時間以上とした。If the soaking heat treatment time is shorter than 1 hour, the N
The effect of reducing the segregation of components such as i is small, and the occurrence of uneven streaks cannot be suppressed during etching. Therefore, the soaking heat treatment time was set to 1 hour or more.
更に、好ましい範囲は5時間以上である。Furthermore, a preferable range is 5 hours or more.
ソーキング熱処理の雰囲気は、粒界酸化や内部酸化等の
サブスケールによる表面疵除去の手入れ負荷を軽減する
ために、酸素濃度が低い方が良く、0.10%以下が好
ましい。酸素濃度をコントロールできる加熱炉としては
、直接通電式加熱炉や電熱式加熱炉がある。また、サブ
スケール発生の原因である酸素を遮蔽するため、スラブ
表面に薄板等によるカバーや酸化防止剤等の塗布を行っ
ても良いが、雰囲気制御に比べ作業性およびサブスケー
ル抑制効果が劣る。The atmosphere for the soaking heat treatment should have a low oxygen concentration, preferably 0.10% or less, in order to reduce the maintenance load for removing surface flaws due to subscales such as grain boundary oxidation and internal oxidation. Heating furnaces that can control oxygen concentration include direct current heating furnaces and electric heating furnaces. Furthermore, in order to block oxygen, which is the cause of subscale generation, the slab surface may be covered with a thin plate or coated with an antioxidant, but this method is inferior in workability and subscale suppression effect compared to atmosphere control.
スラブには、連続鋳造時に生じた表面欠陥が存在するの
で、通常、グラインダー研削等による表面手入れを行う
が、本発明においては、ソーキング熱処理後にこれを行
う。ソーキング材、す処理によってスラブにサブスケー
ルが発生しても、前記本発明条件でソーキングしたもの
は、その発生が軽度なのでこの表面手入れによる軽負荷
で除去することができる。Since the slab has surface defects caused during continuous casting, the surface is usually treated by grinding with a grinder or the like, but in the present invention, this is done after soaking heat treatment. Even if subscale is generated on the slab due to the soaking agent treatment, the generation is slight in the slab soaked under the conditions of the present invention, so that it can be removed with a light load by surface care.
熱間圧延前の加熱雰囲気中の酸素濃度は、0.1Ovo
1.%を超えるとスラブソーキング熱処理材(以下、ソ
ーキング材と呼ぶ)の表面に粒界酸化や内部酸化等のサ
ブスケールが著しく発生し、熱間圧延後にサブスケール
による表面疵や粒界酸化を起点とする耳割れが多発し、
後工程の表面研削の負荷を増大させ、また熱延板の歩留
を著しく低下させる。従って、熱間圧延前の加熱雰囲気
中の酸素濃度は0.10 vol、%以下とした。The oxygen concentration in the heating atmosphere before hot rolling is 0.1 Ovo
1. %, subscales such as grain boundary oxidation and internal oxidation will significantly occur on the surface of the slab soak heat-treated material (hereinafter referred to as soaking material), and surface flaws and grain boundary oxidation due to the subscales will occur after hot rolling. Frequent ear cracking occurs,
This increases the load of surface grinding in the subsequent process and significantly reduces the yield of hot rolled sheets. Therefore, the oxygen concentration in the heating atmosphere before hot rolling was set to 0.10 vol.% or less.
熱間圧延前の加熱温度は、1100℃より低温では熱間
圧延が完了するまでに圧延材の温度が著しく低下するた
め熱間加工性劣化による割れ発生や変形抵抗増大による
圧延不能の自体が生じる。また、1200℃を超えて行
うと加熱雰囲気中の酸素濃度を低減しても粒界酸化が発
生し、熱間圧延後に耳割れが生じる。従って、熱間圧延
前の加熱温度のKn囲は1100−1200℃とした。If the heating temperature before hot rolling is lower than 1100°C, the temperature of the rolled material will drop significantly by the time hot rolling is completed, resulting in cracking due to deterioration of hot workability and the inability to roll due to increased deformation resistance. . Furthermore, if rolling is carried out at a temperature exceeding 1200° C., grain boundary oxidation occurs even if the oxygen concentration in the heating atmosphere is reduced, and edge cracking occurs after hot rolling. Therefore, the Kn range of the heating temperature before hot rolling was set to 1100-1200°C.
熱間圧延された帯板または板(以下、熱圧延という)の
焼鈍は、熱間圧延が900℃以上の温度で終了する場合
、熱間圧延での加工による再結晶が促進され、熱延板の
組織が再結晶組織となるため、省略しても良い。When annealing a hot-rolled strip or plate (hereinafter referred to as hot-rolled plate), if the hot rolling is completed at a temperature of 900°C or higher, recrystallization due to processing in hot rolling is promoted, and the hot-rolled plate is Since the structure is a recrystallized structure, it may be omitted.
熱延板の表面には、熱間圧延工程で発生するロール疵や
擦り疵等の表面疵があるので、表面研削を行ってこれを
除去した後、冷間圧延を行う。表面研削としてはヘルド
研削、砥石ロールによる研削、ブラシロールによる研削
等を行うことができる。ベルト研削の場合は、熱延板を
脱スケールし、軽度の冷間圧延を行って表面を平坦にし
た後に行うのが好ましいが、砥石ロールによる研削およ
びブラシロールによる研削の場合は、熱間圧延まま、あ
るいは熱延板焼鈍後のスケール付着状態で行えば充分で
ある。熱間圧延を前記本発明条件で行ったものは、サブ
スケールの発生が抑制され、発生があっても軽度なので
、通常の疵除去のための研削により除去することができ
る。Since the surface of the hot-rolled sheet has surface flaws such as roll flaws and abrasion flaws that occur during the hot rolling process, the surface is ground to remove these flaws, and then cold rolling is performed. As surface grinding, heald grinding, grinding with a grindstone roll, grinding with a brush roll, etc. can be performed. In the case of belt grinding, it is preferable to descale the hot-rolled plate and perform mild cold rolling to flatten the surface, but in the case of grinding with a grindstone roll and grinding with a brush roll, hot rolling It is sufficient to carry out the process with the scale adhered to the hot rolled sheet or after annealing the hot rolled sheet. In the case where the hot rolling was carried out under the conditions of the present invention, the occurrence of subscale is suppressed, and even if it occurs, it is mild, so that it can be removed by normal grinding for removing flaws.
冷間圧延は、製品板厚まで中間焼鈍なしに行っても良く
、また、圧延機の能力あるいは材料の加工硬化程度に応
じて、途中の板厚で中間焼鈍を行っても良い。製品板の
表面仕上げは、シャドウマスク製造におけるレジスト膜
形成時の密着性の点からダル仕上げするのが好ましく、
冷間圧延の最終バスをダルロールで行うのが好ましい。Cold rolling may be performed without intermediate annealing up to the product thickness, or intermediate annealing may be performed at an intermediate thickness depending on the capacity of the rolling mill or the degree of work hardening of the material. It is preferable that the surface finish of the product plate is dull from the viewpoint of adhesion during resist film formation in shadow mask production.
Preferably, the final bath of cold rolling is carried out on dull rolls.
冷間圧延後の非酸化性雰囲気で再結晶焼鈍を行う、この
処理で再結晶整粒m織とすることにより、シャドウマス
ク製造に際して、均一なエツチング穿孔を行うことがで
きる。Recrystallization annealing is performed in a non-oxidizing atmosphere after cold rolling, and by forming a recrystallized grained m weave through this treatment, uniform etching perforations can be performed when producing a shadow mask.
本発明の請求項(1)記載の方法は、以上述べた再結晶
焼鈍までを行う。The method according to claim (1) of the present invention includes the steps up to recrystallization annealing described above.
本発明の請求項(2)記載の方法は、さらにダルスキン
パス圧延と歪取り焼鈍を行う。冷間圧延が高圧下になっ
た場合、最終パスをダルロールで圧延しても、板が加工
硬化していてダル仕上げが得られないことがある。その
ときは、再結晶焼鈍した後、ダルロールを使用したスキ
ンバス圧延することによりダル仕上げとする。この場合
、ダル表面近傍に残留応力が発生し、エツチング時に残
留応力が解放されて反りが発生するため歪取り焼鈍を行
う必要がある。In the method according to claim (2) of the present invention, dull skin pass rolling and strain relief annealing are further performed. When cold rolling is performed under high pressure, even if the final pass is rolled with dull rolls, the plate may be work hardened and a dull finish may not be obtained. In that case, after recrystallization annealing, skin bath rolling using dull rolls is performed to obtain a dull finish. In this case, residual stress is generated near the dull surface, and the residual stress is released during etching to cause warping, so it is necessary to perform strain relief annealing.
歪取り焼鈍温度は、550℃より低温ではその効果が小
さく、750℃を超えるとスキンバス圧延により局部的
な歪が導入されている場合、歪のある部分が再結晶し歪
のない部分は粒成長するため、製品板の組織が混粒とな
りエツチング穿孔性を阻害する。従って、歪取り焼鈍温
度の範囲は550〜750℃とした。The strain relief annealing temperature has a small effect if it is lower than 550℃, and if it exceeds 750℃, if local strain is introduced by skin bath rolling, the strained area will recrystallize and the unstrained area will become grainy. As the particles grow, the structure of the product board becomes mixed grains, which inhibits etching perforation. Therefore, the strain relief annealing temperature range was set at 550 to 750°C.
歪取り焼鈍時間は、1秒より短時間ではその効果が小さ
く、300秒を超えると効果は飽和し生産性やコストの
点から何らメリットかない。従って、歪取り焼鈍時間は
1〜300秒とした。When the strain relief annealing time is shorter than 1 second, the effect is small, and when it exceeds 300 seconds, the effect is saturated and there is no advantage in terms of productivity or cost. Therefore, the strain relief annealing time was set to 1 to 300 seconds.
歪取り焼鈍の雰囲気は表層スケールやサブスケール発生
の防止のため非酸化性雰囲気で行う。The strain relief annealing is performed in a non-oxidizing atmosphere to prevent surface scale and subscale formation.
かくして、上記のような本発明法でFe−Ni合金板を
製造すれば、熱延板でのサブスケールによる表面疵と粒
界酸化による耳割れの発生が低減・防止されるため、表
面研削の作業性が大いに向上し熱延板での歩留落ちが大
幅に低減され、介在物およびN+等の成分偏析が著しく
軽減されて、エツチング穿孔時におけるスジムラの発生
が抑制されるため、エツチング不良による歩留落ちが大
幅に低減される。Thus, if Fe-Ni alloy sheets are manufactured by the method of the present invention as described above, the occurrence of surface flaws due to subscale and edge cracks due to grain boundary oxidation in hot-rolled sheets will be reduced and prevented, and surface grinding will be easier. Workability is greatly improved, yield drop in hot-rolled sheets is greatly reduced, inclusions and component segregation such as N+ are significantly reduced, and the occurrence of uneven streaks during etching is suppressed, reducing the occurrence of uneven etching due to poor etching. Yield loss is significantly reduced.
Pe−Ni合金を電気炉で溶製しAOD炉で精錬した後
、連続鋳造法により鋳込んだ。鋳片の化学成分を第1表
に示す。これら鋳片を第1図に示す製造工程により板厚
0.20mmの薄板製品に製造した。第1図の(a)お
よび(b)は本発明工程、(C)は比較工程である。本
発明工程のソーキング熱処理および熱間圧延前の加熱は
、NZガスによる雰囲気中の酸素濃度をコントロールし
た直接通電式加熱炉で行もだ。A Pe-Ni alloy was melted in an electric furnace, refined in an AOD furnace, and then cast by a continuous casting method. The chemical composition of the slab is shown in Table 1. These slabs were manufactured into thin plate products with a thickness of 0.20 mm by the manufacturing process shown in FIG. In FIG. 1, (a) and (b) show the process of the present invention, and (C) shows the comparative process. The soaking heat treatment in the process of the present invention and the heating before hot rolling are performed in a direct current heating furnace in which the oxygen concentration in the atmosphere is controlled using NZ gas.
これらの工程における熱延板表面研削の作業時間と、薄
板製品の歩留とエツチング時のスジムラ評価を調査した
。We investigated the work time for surface grinding of hot rolled sheets in these processes, the yield of thin sheet products, and evaluation of uneven streaks during etching.
本発明工程と比較工程における表面研削の作業時間、薄
板製品の歩留とスジムラ評価を第2表に示す。同表より
、本発明工程は比較工程に比べて表面研削の作業製が大
いに向上し、歩rf!落ちが大幅に低減され、更にスジ
ムラの発生が著しく抑制されていることがわかる。Table 2 shows the surface grinding work time, the yield of thin plate products, and the evaluation of streak irregularities in the process of the present invention and the comparative process. From the same table, the process of the present invention greatly improves surface grinding work compared to the comparative process, and the RF! It can be seen that the amount of smearing is significantly reduced, and the occurrence of uneven streaks is also significantly suppressed.
第2表中のスジムラランクは、薄板製品を43%FeC
Zz溶液でエツチングした後のスジムラを肉眼観察して
判定したものであり、Aはスジムラのないもの、Eは激
しいスジムラが発生したもの、B−DはAとEとの間の
ランク付けしたもので、BランクおよびCランクは実用
上問題のない程度のスジムラである。The stripe irregularity rank in Table 2 is 43% FeC for thin plate products.
Judgments were made by visually observing the uneven streaks after etching with the ZZ solution. A: No streaks, E: Severe streaks: B-D: Ranked between A and E. The B rank and C rank have uneven streaks to the extent that there is no problem in practical use.
以上のことから明らかな如く、本発明法によりシャドウ
マスク用Fe−Ni合金板を製造すれば、合金板製造時
の作業性および歩留が大幅に改浮され、シャドウマスク
製造に際しては、エツチング穿孔時においてスジムラに
よるエツチング不良を解消し、エツチング時の歩留落ち
も大幅に低減される。As is clear from the above, if Fe-Ni alloy plates for shadow masks are manufactured by the method of the present invention, the workability and yield during the manufacture of alloy plates will be greatly improved, and etching perforations will be required when manufacturing shadow masks. In some cases, etching defects caused by uneven streaks are eliminated, and yield loss during etching is also significantly reduced.
第1図は実施例を示すものであり、(a)は請求項(1
)による本発明工程、(b)は請求項(2)による本発
明工程、(C)は比較工程を示す図である。FIG. 1 shows an embodiment, and (a) shows claim (1).
), (b) is a diagram showing the present invention process according to claim (2), and (C) is a diagram showing a comparative process.
Claims (2)
1〜1.00%、Mn:0.10〜2.00%、N:0
.05%以下、O:0.02%以下、残部Feおよび不
可避的不純物からなるFe−Ni合金の連続鋳造スラブ
に、1200〜1350℃で1時間以上のソーキング熱
処理を行った後、表面手入れを行い、ついで酸素濃度0
.1vol%以下の雰囲気にて1100〜1200℃に
加熱し、熱間圧延し、表面研削と冷間圧延を行い、再結
晶焼鈍することを特徴とするシャドウマスク用Fe−N
i合金板の製造方法。(1) In weight%, Ni: 30-50%, Si: 0.0
1-1.00%, Mn: 0.10-2.00%, N: 0
.. A continuously cast slab of Fe-Ni alloy consisting of 0.05% or less, O: 0.02% or less, and the balance Fe and unavoidable impurities was subjected to soaking heat treatment at 1200 to 1350°C for 1 hour or more, and then surface-treated. , then the oxygen concentration is 0
.. Fe-N for a shadow mask characterized by heating to 1100 to 1200°C in an atmosphere of 1 vol% or less, hot rolling, surface grinding and cold rolling, and recrystallization annealing.
i Method for manufacturing alloy plate.
1〜1.00%、Mn:0.10〜2.00%、Al:
0.05%以下、O:0.02%以下、残部Feおよび
不可避的不純物からなるFe−Ni合金の連続鋳造スラ
ブに、1200〜1350℃で1時間以上のソーキング
熱処理を行った後、表面手入れを行い、ついで酸素濃度
0.1vol%以下の雰囲気にて1100〜1200℃
に加熱し、熱間圧延し、表面研削と冷間圧延を行い、再
結晶焼鈍し、ダルスキンパス圧延を行い、ついで非酸化
性雰囲気にて550〜750℃で1〜300秒の歪取り
焼鈍を行うことを特徴とするシャドウマスク用Fe−N
i合金板の製造方法。(2) In weight%, Ni: 30-50%, Si: 0.0
1-1.00%, Mn: 0.10-2.00%, Al:
A continuously cast slab of Fe-Ni alloy consisting of 0.05% or less, O: 0.02% or less, and the balance Fe and unavoidable impurities is subjected to soaking heat treatment at 1200 to 1350°C for 1 hour or more, and then surface care is performed. and then heated at 1100 to 1200°C in an atmosphere with an oxygen concentration of 0.1 vol% or less.
heated to , hot rolled, surface ground and cold rolled, recrystallized annealed, Dullskin pass rolled, and then strain relief annealed at 550 to 750°C for 1 to 300 seconds in a non-oxidizing atmosphere. Fe-N for shadow masks characterized by
i Method for manufacturing alloy plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32364588A JPH0711034B2 (en) | 1988-12-23 | 1988-12-23 | Method for producing Fe-Ni alloy plate for shadow mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32364588A JPH0711034B2 (en) | 1988-12-23 | 1988-12-23 | Method for producing Fe-Ni alloy plate for shadow mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02170922A true JPH02170922A (en) | 1990-07-02 |
JPH0711034B2 JPH0711034B2 (en) | 1995-02-08 |
Family
ID=18157035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32364588A Expired - Fee Related JPH0711034B2 (en) | 1988-12-23 | 1988-12-23 | Method for producing Fe-Ni alloy plate for shadow mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0711034B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04168248A (en) * | 1990-10-31 | 1992-06-16 | Nkk Corp | Fe-ni alloy having excellent adhesion and seizure preventiveness at annealing and gas diffusibility and production thereof |
JPH0649598A (en) * | 1992-01-31 | 1994-02-22 | Nkk Corp | Fe-ni alloy sheet and fe-ni-co alloy sheet for shadow mask excellent in blackening treatability |
JPH06264140A (en) * | 1993-03-11 | 1994-09-20 | Nippon Yakin Kogyo Co Ltd | Production of shadow mask |
KR100328077B1 (en) * | 1997-12-20 | 2002-05-10 | 이구택 | Cold rolled steel sheet for shadow mask and a method of manufacturing thereof |
EP1205269A1 (en) * | 1999-05-27 | 2002-05-15 | Toyo Kohan Co., Ltd. | Casting slab for shadow mask, method for heat treatment therof and material for shadow mask |
FR2877678A1 (en) * | 2004-11-05 | 2006-05-12 | Imphy Alloys Sa | FER-NICKEL ALLOY BAND FOR THE MANUFACTURE OF GRIDS INTEGRATED CIRCUIT SUPPORT |
US7226515B2 (en) | 2000-09-29 | 2007-06-05 | Hippon Yakin Kogyo Co., Ltd. | Fe—Ni based permalloy and method of producing the same and cast slab |
-
1988
- 1988-12-23 JP JP32364588A patent/JPH0711034B2/en not_active Expired - Fee Related
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04168248A (en) * | 1990-10-31 | 1992-06-16 | Nkk Corp | Fe-ni alloy having excellent adhesion and seizure preventiveness at annealing and gas diffusibility and production thereof |
US5234512A (en) * | 1990-10-31 | 1993-08-10 | Nkk Corporation | Fe-ni alloy sheet for shadow mask, excellent in etching pierceability, preventing sticking during annealing, and inhibiting production of gases |
JPH0649598A (en) * | 1992-01-31 | 1994-02-22 | Nkk Corp | Fe-ni alloy sheet and fe-ni-co alloy sheet for shadow mask excellent in blackening treatability |
JPH06264140A (en) * | 1993-03-11 | 1994-09-20 | Nippon Yakin Kogyo Co Ltd | Production of shadow mask |
KR100328077B1 (en) * | 1997-12-20 | 2002-05-10 | 이구택 | Cold rolled steel sheet for shadow mask and a method of manufacturing thereof |
EP1205269A4 (en) * | 1999-05-27 | 2004-12-22 | Toyo Kohan Co Ltd | Casting slab for shadow mask, method for heat treatment therof and material for shadow mask |
EP1205269A1 (en) * | 1999-05-27 | 2002-05-15 | Toyo Kohan Co., Ltd. | Casting slab for shadow mask, method for heat treatment therof and material for shadow mask |
US7226515B2 (en) | 2000-09-29 | 2007-06-05 | Hippon Yakin Kogyo Co., Ltd. | Fe—Ni based permalloy and method of producing the same and cast slab |
US7419634B2 (en) | 2000-09-29 | 2008-09-02 | Nippon Yakin Kogyo Co., Ltd. | Fe-Ni based permalloy and method of producing the same and cast slab |
US7435307B2 (en) | 2000-09-29 | 2008-10-14 | Nippon Yakin Kogyo Co., Ltd | Fe-Ni based permalloy and method of producing the same and cast slab |
FR2877678A1 (en) * | 2004-11-05 | 2006-05-12 | Imphy Alloys Sa | FER-NICKEL ALLOY BAND FOR THE MANUFACTURE OF GRIDS INTEGRATED CIRCUIT SUPPORT |
WO2006051188A2 (en) * | 2004-11-05 | 2006-05-18 | Imphy Alloys | Iron-nickel alloy strip for the manufacture of support grids for integrated circuits |
WO2006051188A3 (en) * | 2004-11-05 | 2007-06-07 | Imphy Alloys | Iron-nickel alloy strip for the manufacture of support grids for integrated circuits |
US8328961B2 (en) | 2004-11-05 | 2012-12-11 | Imphy Alloys | Iron-nickel alloy strip for the manufacture of support grids for the integrated circuits |
Also Published As
Publication number | Publication date |
---|---|
JPH0711034B2 (en) | 1995-02-08 |
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