JPH02167856A - Production of alumina substrate - Google Patents
Production of alumina substrateInfo
- Publication number
- JPH02167856A JPH02167856A JP63322791A JP32279188A JPH02167856A JP H02167856 A JPH02167856 A JP H02167856A JP 63322791 A JP63322791 A JP 63322791A JP 32279188 A JP32279188 A JP 32279188A JP H02167856 A JPH02167856 A JP H02167856A
- Authority
- JP
- Japan
- Prior art keywords
- al2o3
- alumina substrate
- particles
- sheet
- gamma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000002245 particle Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 7
- 239000011230 binding agent Substances 0.000 claims abstract description 5
- 239000003960 organic solvent Substances 0.000 claims abstract description 4
- 238000010304 firing Methods 0.000 claims description 4
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 abstract description 2
- 230000007704 transition Effects 0.000 abstract description 2
- 229910052594 sapphire Inorganic materials 0.000 abstract 4
- 229910003158 γ-Al2O3 Inorganic materials 0.000 abstract 4
- 238000001354 calcination Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 1
- 239000011369 resultant mixture Substances 0.000 abstract 1
- 239000002994 raw material Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003966 growth inhibitor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明はアルミナ基板の製造方法に関し、特に平滑性
を有するアルミナ基板の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for manufacturing an alumina substrate, and particularly to a method for manufacturing an alumina substrate having smoothness.
（従来技術）
従来、平滑性を有するアルもす基板の原料としては、高
純度かつ微細なα−Ａｌｔｏｓが用いられていた。(Prior Art) Highly purified and fine α-Altos has conventionally been used as a raw material for smooth aluminum substrates.
（発明が解決しようとする課題） ところが、工業的な量で利用できるα−ＡＩ。(Problem to be solved by the invention) However, α-AI is available in industrial quantities.
０、の粒径は０．１μｍ以上であるため、これにたとえ
ばＭｇＯ，Ｃｒ、Ｏ，などの粒成長抑制剤を加えたとし
ても、坑底して形成されたアルミナ基板の平滑度、すな
わち、その表面の中心線における平均粗さＲａは、せい
ぜい０．０５μｍであった。Since the particle size of 0.0 is 0.1 μm or more, even if a grain growth inhibitor such as MgO, Cr, O, etc. is added to it, the smoothness of the alumina substrate formed at the bottom of the hole, that is, The average roughness Ra at the center line of the surface was at most 0.05 μm.
それゆえに、この発明の主たる目的は、高度な平滑性を
有するアルミナ基板を製造することができる、アル逅す
基板の製造方法を提供することである。Therefore, the main object of the present invention is to provide a method for manufacturing an alumina substrate that can produce an alumina substrate having a high degree of smoothness.
（課題を解決するための手段）
この発明は、平均粒径が０．１〜０．５μｍのα−Ａｌ
２Ｏ３を準備する工程と、平均粒径が００１−０．ｘｐ
ｍのｒ−Ａ６ｚＯ＊を準備する工程と、α−Ａ１０３に
ｒ−Ａｎ、Ｏコを５〜５０ｗｔ％加えてバインダおよび
有ｍ質溶剤とともに混合しシート状に成形して生シート
を形成する工程と、生シートを焼成する工程とを含む、
アルミナ基板の製造方法である。(Means for Solving the Problems) This invention provides α-Al having an average particle size of 0.1 to 0.5 μm.
A step of preparing 2O3 and an average particle size of 001-0. xp
A step of preparing m-r-A6zO*, and a step of adding 5 to 50 wt% of r-An and O to α-A103, mixing it with a binder and a molar solvent, and forming it into a sheet to form a green sheet. and a step of firing the raw sheet.
This is a method for manufacturing an alumina substrate.
（作用）
α−Ａ１２０３の粒子間にγ−Ａ ｌ ｚ Ｏ３の粒子
が埋まる。(Function) Particles of γ-A l z O3 are buried between particles of α-A1203.
（発明の効果）
この発明によれば、α−Ａ ｌ ｔ Ｏｓの粒子間にγ
−Ａ１ｔＯ３の粒子が埋まるため、アルミナ基板の表面
が高度な平滑性を有するようになる。(Effect of the invention) According to this invention, γ between particles of α-Al t Os
- Since the particles of A1tO3 are buried, the surface of the alumina substrate becomes highly smooth.
この発明の上述の目的、その他の目的、特徴および利点
は、以下の実施例の詳細な説明から一層明らかとなろう
。The above objects, other objects, features and advantages of the present invention will become more apparent from the detailed description of the following embodiments.
（実施例）
まず、平均粒径が０．１〜０．５μｍの微細なα−Ａｌ
ｔｏｓを準備した。α−Ａ１２０３の原料としては、た
とえば大明化学工業株式会社のＴＭ−Ｄが用いられる。(Example) First, fine α-Al with an average particle size of 0.1 to 0.5 μm
I prepared tos. As a raw material for α-A1203, for example, TM-D manufactured by Daimei Chemical Industry Co., Ltd. is used.
さらに、平均粒径が０．０１〜０．１μｍの超微細なγ
−Ａｌｔｏｓを準備した。γ−Ａ＃、 ０、の原料とし
ては、たとえば住友化学工業株式会社のＡＫＰ−Ｇｏ
Ｏが用いられる。Furthermore, ultra-fine γ particles with an average particle size of 0.01 to 0.1 μm
- Prepared Altos. As a raw material for γ-A#, 0, for example, AKP-Go from Sumitomo Chemical Co., Ltd.
O is used.
そして、別表に示すようにα−Ａ１２０３にγ−Ａｚ、
０３を２．５．１０．２０．３０．５０または６０ｗ
ｔ％を加え、それにポリビニル・ブチラール系バインダ
と有機溶剤とを加えて混合し、シート状に成形して生シ
ートを形成した。Then, as shown in the attached table, α-A1203 has γ-Az,
03 to 2.5.10.20.30.50 or 60w
t%, a polyvinyl butyral binder and an organic solvent were added thereto, mixed, and formed into a sheet to form a green sheet.
そして、生シートを別表に示す最適焼成温度の大気中で
焼成して、試料（アルミナ基板）を得た。Then, the raw sheet was fired in the atmosphere at the optimum firing temperature shown in the attached table to obtain a sample (alumina substrate).
各試料について、表面の中心線における平均粗さＲａを
測定し、その測定値を別表に示した。なお、表中＊印を
付した試料は、この発明の範囲外のものであり、残りの
試料はこの発明の範囲内のものである。For each sample, the average roughness Ra at the center line of the surface was measured, and the measured values are shown in the separate table. Note that the samples marked with * in the table are outside the scope of this invention, and the remaining samples are within the scope of this invention.
表の結果より明らかなように、ｒ−ＡｆｚＯ＋が５ｗｔ
％未満（試料番号１参照）では、高度な平滑性が得られ
ない。また、γ−Ａｊ！ｚｏ＊が５０ｗｔ％を超える（
試料番号７参照）と、シート状に成形しに＜クシかも焼
成物の収縮率が大きくその反りも大きくなる。As is clear from the results in the table, r-AfzO+ is 5wt
If it is less than % (see sample number 1), a high degree of smoothness cannot be obtained. Also, γ-Aj! zo* exceeds 50wt% (
(See Sample No. 7) When molded into a sheet, the shrinkage rate of the fired product is large and the warpage is also large.
それに対して、この発明の範囲内の方法によって製造さ
れたアルξす基板（試料番号２〜６参照）では、α−Ａ
ｌｔｏｓの粒子間にｒ−ＡｆｚＯ８の超微細粒子が埋ま
るため、表面の中心線における平均粗さＲａが０．０２
μｍ以下という高度な平滑性を有する。On the other hand, the α-A substrates manufactured by the method within the scope of the present invention (see sample numbers 2 to 6)
Because the ultrafine particles of r-AfzO8 are buried between the particles of ltos, the average roughness Ra at the center line of the surface is 0.02.
It has a high level of smoothness of less than μm.
なお、γ−ＡｌｚＣｈの粒子は通常約１３００℃でα−
Ａ１２０３に相転移しその際粒が成長するため、この発
明では、１２５０〜１３００℃で生シートを焼成するこ
とが好ましい。Note that γ-AlzCh particles usually change to α-
In this invention, it is preferable to sinter the green sheet at 1250 to 1300°C because the phase transition to A1203 occurs and the grains grow.
そして、その焼成温度を１２５０−１３００℃と低くす
れば、アル短す基板を製造するためのコストを低減でき
る。If the firing temperature is lowered to 1250-1300° C., the cost for manufacturing a substrate with aluminum shortening can be reduced.
表 ＊印はこの発明の範囲外 特許出願人 株式会社 村田製作所 代理人 弁理士 岡 １） 全 啓table *marked outside the scope of this invention Patent applicant: Murata Manufacturing Co., Ltd. Agent: Patent Attorney Oka 1) Zenkei
Claims (1)
を準備する工程、 平均粒径が０．０１〜０．１μｍのγ−Ａｌ＿２Ｏ＿３
を準備する工程、 前記α−Ａｌ＿２Ｏ＿３に前記γ−Ａｌ＿２Ｏ＿３を５
〜５０ｗｔ％加えてバインダおよび有機質溶剤とともに
混合しシート状に成形して生シートを形成する工程、お
よび 前記生シートを焼成する工程を含む、アルミナ基板の製
造方法。[Claims] α-Al_2O_3 with an average particle size of 0.1 to 0.5 μm
A step of preparing γ-Al_2O_3 with an average particle size of 0.01 to 0.1 μm
a step of preparing γ-Al_2O_3 to the α-Al_2O_3;
A method for manufacturing an alumina substrate, comprising the steps of: adding ~50 wt% and mixing with a binder and an organic solvent and forming into a sheet to form a green sheet; and firing the green sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63322791A JPH02167856A (en) | 1988-12-20 | 1988-12-20 | Production of alumina substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63322791A JPH02167856A (en) | 1988-12-20 | 1988-12-20 | Production of alumina substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02167856A true JPH02167856A (en) | 1990-06-28 |
Family
ID=18147671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63322791A Pending JPH02167856A (en) | 1988-12-20 | 1988-12-20 | Production of alumina substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02167856A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5672554A (en) * | 1993-07-27 | 1997-09-30 | Sumitomo Chemical Company, Limited | Alumina composition, alumina molded article, alumina ceramics, and process for producing ceramics |
| US6162413A (en) * | 1995-02-21 | 2000-12-19 | Sumitomo Chemical Company, Limited | Alpha-alumina and method for producing same |
-
1988
- 1988-12-20 JP JP63322791A patent/JPH02167856A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5672554A (en) * | 1993-07-27 | 1997-09-30 | Sumitomo Chemical Company, Limited | Alumina composition, alumina molded article, alumina ceramics, and process for producing ceramics |
| US6162413A (en) * | 1995-02-21 | 2000-12-19 | Sumitomo Chemical Company, Limited | Alpha-alumina and method for producing same |
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