JPH0216228B2 - - Google Patents

Info

Publication number
JPH0216228B2
JPH0216228B2 JP7417282A JP7417282A JPH0216228B2 JP H0216228 B2 JPH0216228 B2 JP H0216228B2 JP 7417282 A JP7417282 A JP 7417282A JP 7417282 A JP7417282 A JP 7417282A JP H0216228 B2 JPH0216228 B2 JP H0216228B2
Authority
JP
Japan
Prior art keywords
roller
ink
thin film
printing method
pressure contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7417282A
Other languages
Japanese (ja)
Other versions
JPS58191188A (en
Inventor
Kozo Matsumura
Minoru Takaochi
Yukio Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissha Printing Co Ltd
Original Assignee
Nissha Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissha Printing Co Ltd filed Critical Nissha Printing Co Ltd
Priority to JP7417282A priority Critical patent/JPS58191188A/en
Publication of JPS58191188A publication Critical patent/JPS58191188A/en
Publication of JPH0216228B2 publication Critical patent/JPH0216228B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41MPRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M1/00Inking and printing with a printer's forme
    • B41M1/10Intaglio printing ; Gravure printing

Description

【発明の詳細な説明】 本発明は薄膜印刷方法に関するものであり、更
に詳しくは電子部品に用いられる高分子薄膜を均
一で正確な膜厚をもつて容易に所望のパターン形
状に印刷形成することを目的とするものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin film printing method, and more specifically to a method for easily printing a thin polymer film used in electronic components into a desired pattern shape with a uniform and accurate film thickness. The purpose is to

近年、半導体素子の絶縁被膜や液晶表示素子の
配向膜など種々の電子部品に高分子薄膜が必要と
され、用いられている。一般にこれらの薄膜には
厚さ100Å〜3000Åのものを形成して使用される
が、その膜厚の均一性、パターンの形状寸法精度
は厳しく要求されている。
In recent years, polymer thin films have been required and used in various electronic components such as insulating films for semiconductor devices and alignment films for liquid crystal display devices. Generally, these thin films are used with a thickness of 100 Å to 3000 Å, but uniformity of the film thickness and precision of the shape and size of the pattern are strictly required.

従来、前記薄膜を形成する方法としては印刷に
よる方法が考えられている(例えば特開昭55−
37314号公報参照)。この方法は平版オフセツト印
刷に用いるオフセツト校正機を用いて凸版を設け
たブランケツト胴によつてガラス板等の表面が平
滑な被印刷体の上に高分子溶液を印刷インキとし
て用い、高分子薄膜を印刷形成する方法である。
この方法によれば次のような欠点がある。即ち、
この目的に用いられる高分子溶液は粘度が
2000cp〜10cpの非常に低粘度な溶液であるから
オフセツト校正機を用いて印刷するに際しては十
分均一な膜厚が得られにくい。又、求める厚みの
薄膜を安定して印刷することが困難であつた。何
故なら、オフセツト校正機においてはインキを練
り、展色するのにロール練り方法が用いられる
が、一般のオフセツト印刷用インキに比べて非常
に低粘度で粘着性の少ない高分子溶液を用いるた
め均一に練られず又ロール間のギヤツプよりイン
キが流れ出すため展色を均一にすることができな
い。更にロールへインキを定量的に一定して供給
することが困難であり、よつて定量的に安定した
展色を行うことができないからである。
Conventionally, a printing method has been considered as a method for forming the thin film (for example, Japanese Patent Application Laid-Open No. 1983-1999)
(See Publication No. 37314). This method uses an offset proofing machine used in lithographic offset printing to print a polymer solution as a printing ink onto a substrate with a smooth surface such as a glass plate using a blanket cylinder equipped with a relief plate, and then prints a thin polymer film. This is a printing method.
This method has the following drawbacks. That is,
The polymer solution used for this purpose has a viscosity of
Since the solution has a very low viscosity of 2000 cp to 10 cp, it is difficult to obtain a sufficiently uniform film thickness when printing using an offset proofing machine. Furthermore, it has been difficult to stably print a thin film of desired thickness. This is because offset proofing machines use a roll kneading method to knead and spread the ink, but compared to general offset printing inks, a polymer solution with a much lower viscosity and less stickiness is used, so the ink can be printed evenly. In addition, the ink flows out from the gap between the rolls, making it impossible to spread the color uniformly. Furthermore, it is difficult to constantly and quantitatively supply ink to the rolls, and therefore it is not possible to perform quantitatively stable color development.

本発明者はかかる従来法におけるインキの展色
部の問題に起因する膜厚の均一化及び定量化、安
定化の問題点を解消せんとし、種々研究考察を重
ねた結果、本発明を完成するに至つたものであ
る。即ち本発明は深さが3μm〜50μm、開口部の
平均径が10μm〜500μm、開口部面積が5%〜80
%、1cm2当りの小孔1の合計凹部容積が0.05mm3
〜5mm3、小孔1間の平均最短距離が10μm〜
2000μmであるような小孔1群を所望のパターン
状に設けた凹版2に、樹脂又は樹脂前駆体に溶剤
を混合してなる粘度が2000cp〜10cpのインキ3
を充填した後、ローラー4と前記凹版2表面とを
圧接せしめ、前記インキ3を前記ローラー4表面
に転移せしめ、その後前記ローラー4と予めパタ
ーンを設けたドライオフセツト版5表面とを圧接
せしめ、前記インキ3を前記ドライオフセツト版
5のパターン部分に転移せしめ、その後ブランケ
ツトローラー6と該ドライオフセツト版5表面と
を圧接せしめ、前記インキ3を該ブランケツトロ
ーラー6表面に転移せしめ、その後ブランケツト
ローラ6と被印刷体7表面とを圧接せしめ、被印
刷体7表面に薄膜8を形成することを特徴とする
薄膜印刷方法である。
The present inventor attempted to solve the problems of uniformity, quantification, and stabilization of the film thickness caused by the problem of the ink spreading area in the conventional method, and as a result of various research and considerations, the present invention was completed. This is what led to this. That is, the present invention has a depth of 3 μm to 50 μm, an average opening diameter of 10 μm to 500 μm, and an opening area of 5% to 80 μm.
%, the total recess volume of small hole 1 per 1 cm 2 is 0.05 mm 3
~ 5mm3 , average shortest distance between small holes 10μm~
Ink 3 with a viscosity of 2000 cp to 10 cp, which is made by mixing a resin or a resin precursor with a solvent, is applied to an intaglio plate 2 in which a group of small holes of 2000 μm are formed in a desired pattern.
After filling the roller 4 with the surface of the intaglio plate 2, the ink 3 is transferred to the surface of the roller 4, and then the roller 4 is brought into pressure contact with the surface of the dry offset plate 5 on which a pattern has been provided in advance, The ink 3 is transferred to the pattern portion of the dry offset plate 5, and then the blanket roller 6 and the surface of the dry offset plate 5 are brought into pressure contact, the ink 3 is transferred to the surface of the blanket roller 6, and then This thin film printing method is characterized in that a blanket roller 6 and the surface of a printing medium 7 are brought into pressure contact to form a thin film 8 on the surface of the printing medium 7.

以下本発明を図面に基づいて更に詳しく説明す
る。
The present invention will be explained in more detail below based on the drawings.

まず薄膜を形成するための低粘度の樹脂又は樹
脂前駆体と溶剤とからなるインキを凹版2に充填
する。使用するインキは低粘度のものであり、そ
の粘性は2000cp〜10cpのものを用いる。使用で
きる樹脂又は樹脂前駆体としては、ポリアミツク
酸、フエノール、ノボラツク、ポリエステル、エ
ポキシ、ウレタン、シリコン、メラミンの樹脂又
は樹脂前駆体、ポリ塩化ビニル、ポリ酢酸ビニ
ル、ポリメチルメタクレート、ポリスチレン、ポ
リビニルアルコール、ポリビニルブチラール、ポ
リイミド、ポリスルフオン等の熱可塑性樹脂や天
然ゴム、スチレン−ブタジエンゴム、ポリイソブ
チレン、ニトリルゴム等がある。
First, the intaglio plate 2 is filled with ink made of a low-viscosity resin or resin precursor and a solvent to form a thin film. The ink used is of low viscosity, with a viscosity of 2000 cp to 10 cp. Usable resins or resin precursors include polyamic acid, phenol, novolak, polyester, epoxy, urethane, silicone, melamine resin or resin precursor, polyvinyl chloride, polyvinyl acetate, polymethyl methacrylate, polystyrene, polyvinyl alcohol. , thermoplastic resins such as polyvinyl butyral, polyimide, polysulfone, natural rubber, styrene-butadiene rubber, polyisobutylene, and nitrile rubber.

使用する凹版2はその表面に多数の小孔1を所
望のパターン形状に有するものである(第1図参
照)。この小孔1群は印刷業界においてセルと呼
ばれるもので、その一個の形状は逆ピラミツド型
等、配列の種類は格子型、斜線型等があるので適
宜選択する。
The intaglio plate 2 used has a large number of small holes 1 in a desired pattern on its surface (see FIG. 1). This group of small holes is called a cell in the printing industry, and the shape of each of the holes may be an inverted pyramid shape, etc., and the arrangement type may be a lattice shape, a diagonal shape, etc., and the shape is appropriately selected.

小孔1の深さは3μm〜50μm、開口部の平均径
が10μm〜500μm、開口部面積が5%〜80%、1
cm2当りの合計凹部容積が0.05mm3〜5mm3、小孔1
間の平均最短距離が10μm〜2000μmである。こ
のような特定は均一な厚さの薄膜を形成するため
になされるものである。即ち前記各範囲より大き
い値の小孔であれば凹版に充填されるインキ量が
多過ぎるため、ローラーが被印刷体表面に圧接す
る際にローラーの周囲にインキがはみ出し、その
結果、被印刷体表面に形成される薄膜の厚さが一
定にならない。又、小孔が前記範囲より小さいも
のであれば、充填され、転移されるインキ量が少
な過ぎるため、被印刷体表面には各小孔より転移
されたインキが各々独立して転移される傾向があ
り、連続した均一な厚さの薄膜を形成できない。
従つて前記各範囲の小孔が形成された凹版を用い
ると均一な厚さの薄膜を形成できる。
The depth of small hole 1 is 3 μm to 50 μm, the average diameter of the opening is 10 μm to 500 μm, and the opening area is 5% to 80%.
Total recess volume per cm 2 is 0.05mm 3 ~ 5mm 3 , small hole 1
The average shortest distance between them is 10 μm to 2000 μm. This specification is made in order to form a thin film of uniform thickness. In other words, if the small holes have a value larger than each of the above ranges, the amount of ink filled in the intaglio plate is too large, and when the roller presses against the surface of the printing material, the ink protrudes around the roller, and as a result, the printing material The thickness of the thin film formed on the surface is not constant. In addition, if the small holes are smaller than the above range, the amount of ink filled and transferred is too small, and the ink transferred from each small hole tends to be transferred independently to the surface of the printing material. Therefore, it is not possible to form a continuous thin film of uniform thickness.
Therefore, by using an intaglio plate in which small holes are formed in each of the above ranges, a thin film of uniform thickness can be formed.

小孔1の深さ、開口部の平均径、開口部面積、
小孔1の合計凹部容積、小孔1間の平均最短距離
を適宜設けた凹版2を選択使用することによつ
て、形成する薄膜の厚さを調節することができ
る。尚、インキを凹版2に充填するに際しては、
ドクター等を用いるとより正確な分量のインキを
供することができる。
Depth of small hole 1, average diameter of opening, opening area,
The thickness of the thin film to be formed can be adjusted by selecting and using an intaglio plate 2 in which the total concave volume of the small holes 1 and the average shortest distance between the small holes 1 are set appropriately. In addition, when filling ink into the intaglio 2,
A more accurate amount of ink can be applied using a doctor or the like.

尚、凹版2には小孔1群の代りに適宜な長さの
溝群を設けたものを用いてもよい。この場合、溝
の深さは3μm〜50μm、開口部の平均巾が1.0μm
〜500μm、開口部面積が5%〜80%、1cm2当り
の合計凹部容積が0.05mm3〜5mm3、溝間の平均距
離が1.0μm〜1000μmである。
Incidentally, the intaglio plate 2 may be provided with a group of grooves of appropriate length instead of one group of small holes. In this case, the depth of the groove is 3 μm to 50 μm, and the average width of the opening is 1.0 μm.
~500 μm, the opening area is 5% to 80%, the total recess volume per cm 2 is 0.05 mm 3 to 5 mm 3 , and the average distance between grooves is 1.0 μm to 1000 μm.

次にローラー4を前記凹版2表面に圧接せしめ
る(第2図参照)。ローラー4の側面は平滑な表
面を呈するゴム又は樹脂が設けられている。この
ローラー4は例えばブチルゴム等のゴム又はナイ
ロン系樹脂よりなる。表面粗さはJIS規格Rz50μ
m以上が好ましい。
Next, the roller 4 is brought into pressure contact with the surface of the intaglio 2 (see FIG. 2). The side surface of the roller 4 is provided with rubber or resin that presents a smooth surface. This roller 4 is made of rubber such as butyl rubber or nylon resin. Surface roughness is JIS standard Rz50μ
m or more is preferable.

この圧接によつてローラー4表面にインキ3が
転移する。その後ローラー4を予めパターンを設
けたドライオフセツト版5に圧接せしめる。この
圧接によつて前記インキ3はドライオフセツト版
5のパターン部分のみに転移する(第3図参照)。
次にブランケツトローラー6と前記ドライオフセ
ツト版5表面とを圧接せしめ、パターン部分のイ
ンキ3をブランケツトローラー6表面に転移せし
める(第4図参照)。その後該ブランケツトロー
ラー6をガラス板等の被印刷体7表面に薄膜8が
形成される(第5図参照)。
The ink 3 is transferred to the surface of the roller 4 by this pressure contact. Thereafter, the roller 4 is brought into pressure contact with the dry offset plate 5 on which a pattern has been provided in advance. Due to this pressure contact, the ink 3 is transferred only to the pattern portion of the dry offset plate 5 (see FIG. 3).
Next, the blanket roller 6 and the surface of the dry offset plate 5 are brought into pressure contact, and the ink 3 on the pattern portion is transferred to the surface of the blanket roller 6 (see FIG. 4). Thereafter, the blanket roller 6 is applied to form a thin film 8 on the surface of a printing medium 7 such as a glass plate (see FIG. 5).

本発明は以上のような薄膜印刷方法であるか
ら、凹版へのインキの充填が、低粘度のインキで
あつても、正確に安定して行うことができるた
め、均一な厚さの薄膜を容易に形成でき、正確な
膜厚を安定して得ることができる。また所望のパ
ターン形状の寸法精度も正確に得ることができる
ものである。従つて種々の電子部品の高分子薄膜
を形成するのに広く利用されることが期待され
る。
Since the present invention is a thin film printing method as described above, it is possible to accurately and stably fill an intaglio plate with ink even if it is a low viscosity ink, so it is easy to form a thin film with a uniform thickness. It is possible to form a film with an accurate film thickness in a stable manner. Further, the dimensional accuracy of the desired pattern shape can also be accurately obtained. Therefore, it is expected that it will be widely used for forming polymer thin films for various electronic components.

以下本発明の実施例を説明する。 Examples of the present invention will be described below.

実施例 東レ(株)製セミコフアインSP−710(商品名)を
N−メチル−2−ピロリドンで希釈し、樹脂分7
%、粘度約50cpsとしたものをインキとして用い、
深度20μ、開口部平均径100μm、開口部面積が約
30%、1cm2当り凹部面積約0.35mm3なる小孔部を
全面に有するグラビア版を凹版として用いて、そ
の小孔部にインキを充填し、表面を鋼製のドクタ
ー刃で余分のインキをかき取つた後、表面平滑な
るブチルゴム製のローラーを圧接し、インキを定
量転移し、このローラーを東レ(株)製ドライオフセ
ツト版を製版パターン化したものに圧接し、すで
にパターン化した上にのみ定量転移し、さらにそ
の後前記ブチルゴムローラーとは別の表面平滑な
るブチルゴム製ローラーを圧接し、ドライオフセ
ツト版より定量転移し、このローラーを被印刷物
である液晶表示用のガラス板表面に圧接しドライ
オフセツトパターン通りの高分子塗膜を印刷し、
加熱乾燥の後イミド化の為熱処理を行つた。出来
上がつたポリイミド膜の膜厚は900〜1000Åの範
囲で十分に均一であり、液晶パネルとして組立て
た後、特性テスト及び強制寿命テストを行つた結
果、液晶配向膜としては極めて優秀なものであつ
た。
Example Semicofine SP-710 (trade name) manufactured by Toray Industries, Inc. was diluted with N-methyl-2-pyrrolidone, and the resin content was 7.
%, viscosity of approximately 50 cps is used as ink,
Depth 20μ, average opening diameter 100μm, opening area approximately
A gravure plate with small holes on the entire surface with a concave area of about 0.35 mm3 per cm2 was used as an intaglio plate, the small holes were filled with ink, and the surface was cleaned with a steel doctor blade to remove excess ink. After scraping, a butyl rubber roller with a smooth surface is pressed to transfer the ink quantitatively, and this roller is pressed to a dry offset plate made by Toray Industries, Ltd. that has been patterned, and then the roller is pressed onto a dry offset plate made by Toray Industries, Inc., which has been patterned. Then, a butyl rubber roller with a smooth surface different from the butyl rubber roller was pressed, and a dry offset plate was used to transfer a fixed amount, and this roller was pressed against the surface of a glass plate for a liquid crystal display, which was to be printed. Print a polymer coating film according to the dry offset pattern,
After heating and drying, heat treatment was performed for imidization. The thickness of the completed polyimide film was sufficiently uniform in the range of 900 to 1000 Å, and after it was assembled into a liquid crystal panel, a characteristic test and a forced life test were conducted, and the results showed that it was extremely excellent as a liquid crystal alignment film. It was hot.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図、第3図、第4図及び第5図は
本発明にかかる薄膜印刷方法における各工程を示
す模式図を各々示す。 図中、1……小孔、2……凹版、3……イン
キ、4……ローラー、5……ドライオフセツト
版、6……ブランケツトローラー、7……被印刷
体、8……薄膜。
FIG. 1, FIG. 2, FIG. 3, FIG. 4, and FIG. 5 each show a schematic diagram showing each step in the thin film printing method according to the present invention. In the figure, 1...Small holes, 2...Intaglio, 3...Ink, 4...Roller, 5...Dry offset plate, 6...Blanket roller, 7...Printing material, 8...Thin film .

Claims (1)

【特許請求の範囲】 1 深さが3μm〜50μm、開口部の平均径が1μm
〜500μm、開口部面積が1%〜80%、1cm2当り
の小孔の合計凹部容積が0.05mm3〜5mm3、小孔間
の平均最短距離が10μm〜2000μmであるような
小孔群を全面に又は必要部分に設けた凹板に、粘
度が2000cp〜10cpの、樹脂又は樹脂前駆体と溶
剤とからなるインキを充填した後、ローラーと前
記凹版表面とを圧接せしめ、前記インキを前記ロ
ーラー表面に転移せしめ、その後前記ローラーと
予めパターンを設けたドライオフセツト版表面と
を圧接せしめ、前記インキを前記ドライオフセツ
ト版のパターン部分に転移せしめ、その後ブラン
ケツトローラーと該ドライオフセツト版表面とを
圧接せしめ、前記インキを該ブランケツトローラ
ー表面に転移せしめ、その後該ブランケツトロー
ラーと被印刷体表面とを圧接せしめ、被印刷体表
面に薄膜を形成することを特徴とする薄膜印刷方
法。 2 ローラーがブチルゴムよりなることを特徴と
する特許請求の範囲第1項記載の薄膜印刷方法。 3 ローラーがナイロン系樹脂よりなることを特
徴とする特許請求の範囲第1項記載の薄膜印刷方
法。 4 深さが3μm〜50μm、開口部の平均巾が1μm
〜500μm、開口部面積が5%〜80%、1cm2当り
の溝の合計凹部容積が0.05mm3〜5mm3、溝間の平
均距離が1.0μm〜1000μmであるような溝群を設
けた凹版を用いることを特徴とする特許請求の範
囲第1項記載の薄膜印刷方法。
[Claims] 1. The depth is 3 μm to 50 μm, and the average diameter of the opening is 1 μm.
~500 μm, the opening area is 1% to 80%, the total concave volume of the small holes per 1 cm2 is 0.05 mm3 to 5 mm3 , and the average shortest distance between the small holes is 10 μm to 2000 μm. After filling the ink made of a resin or a resin precursor and a solvent with a viscosity of 2000 cp to 10 cp into the concave plate provided on the entire surface or in necessary parts, a roller is brought into pressure contact with the intaglio surface, and the ink is applied to the roller. The ink is transferred to the surface of the dry offset plate, and then the roller is brought into pressure contact with the surface of the dry offset plate on which a pattern has been provided in advance, and the ink is transferred to the patterned portion of the dry offset plate. 1. A thin film printing method comprising the steps of: bringing the blanket roller into pressure contact with the blanket roller to transfer the ink onto the surface of the blanket roller; and then bringing the blanket roller and the surface of the printing material into pressure contact to form a thin film on the surface of the printing material. 2. The thin film printing method according to claim 1, wherein the roller is made of butyl rubber. 3. The thin film printing method according to claim 1, wherein the roller is made of nylon resin. 4 Depth is 3 μm to 50 μm, average width of opening is 1 μm
-500 μm, opening area of 5% to 80%, total recessed volume of grooves per 1 cm2 of 0.05 mm3 to 5 mm3 , average distance between grooves of 1.0 μm to 1000 μm. 2. A thin film printing method according to claim 1, characterized in that a thin film printing method is used.
JP7417282A 1982-04-30 1982-04-30 Thin film printing method Granted JPS58191188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7417282A JPS58191188A (en) 1982-04-30 1982-04-30 Thin film printing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7417282A JPS58191188A (en) 1982-04-30 1982-04-30 Thin film printing method

Publications (2)

Publication Number Publication Date
JPS58191188A JPS58191188A (en) 1983-11-08
JPH0216228B2 true JPH0216228B2 (en) 1990-04-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP7417282A Granted JPS58191188A (en) 1982-04-30 1982-04-30 Thin film printing method

Country Status (1)

Country Link
JP (1) JPS58191188A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5996488A (en) 1994-11-25 1999-12-07 Canon Kabushiki Kaisha Preparation of an electron source by offset printing electrodes having thickness less than 200 nm
KR100662784B1 (en) * 2004-04-30 2007-01-02 엘지.필립스 엘시디 주식회사 Nethod for forming black matrix of liquid crystal display device

Also Published As

Publication number Publication date
JPS58191188A (en) 1983-11-08

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